JP2004529332A - ゼロシフト補償酸素センサ - Google Patents
ゼロシフト補償酸素センサ Download PDFInfo
- Publication number
- JP2004529332A JP2004529332A JP2002572389A JP2002572389A JP2004529332A JP 2004529332 A JP2004529332 A JP 2004529332A JP 2002572389 A JP2002572389 A JP 2002572389A JP 2002572389 A JP2002572389 A JP 2002572389A JP 2004529332 A JP2004529332 A JP 2004529332A
- Authority
- JP
- Japan
- Prior art keywords
- oxygen
- wind
- sensing
- bridge
- thermal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 63
- 239000001301 oxygen Substances 0.000 title claims abstract description 63
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 63
- 239000007789 gas Substances 0.000 claims abstract description 62
- 230000005291 magnetic effect Effects 0.000 claims abstract description 56
- 230000000694 effects Effects 0.000 claims abstract description 22
- 239000000203 mixture Substances 0.000 claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims description 32
- 238000001514 detection method Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 13
- 230000005408 paramagnetism Effects 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 230000007774 longterm Effects 0.000 claims description 5
- 238000011144 upstream manufacturing Methods 0.000 abstract description 6
- 238000005259 measurement Methods 0.000 description 13
- 230000008859 change Effects 0.000 description 9
- 230000004044 response Effects 0.000 description 9
- 230000005298 paramagnetic effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 238000012937 correction Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000005292 diamagnetic effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- 238000002849 thermal shift Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
- G01N27/74—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables of fluids
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/805,302 US6389880B1 (en) | 2001-03-13 | 2001-03-13 | Zero shift compensation oxygen sensor |
| PCT/US2002/005700 WO2002073175A1 (en) | 2001-03-13 | 2002-02-25 | Zero shift compensation oxygen sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004529332A true JP2004529332A (ja) | 2004-09-24 |
| JP2004529332A5 JP2004529332A5 (enExample) | 2005-12-22 |
Family
ID=25191197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002572389A Withdrawn JP2004529332A (ja) | 2001-03-13 | 2002-02-25 | ゼロシフト補償酸素センサ |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6389880B1 (enExample) |
| EP (1) | EP1370852A1 (enExample) |
| JP (1) | JP2004529332A (enExample) |
| WO (1) | WO2002073175A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3951164B2 (ja) * | 2000-05-23 | 2007-08-01 | 横河電機株式会社 | 磁気式酸素計 |
| DE102014101971A1 (de) | 2014-02-17 | 2015-08-20 | Aixtron Se | Magnetisches Verfahren zur Bestimmung einer Dampfkonzentration sowie Vorrichtung zur Durchführung des Verfahrens |
| DE102015105404A1 (de) | 2015-04-09 | 2016-10-27 | Aixtron Se | Vorrichtung und Verfahren zum Bestimmen der Konzentration oder des Partialdrucks eines Dampfes mit magnetischen Eigenschaften |
| US11143614B2 (en) * | 2017-08-02 | 2021-10-12 | Ngk Spark Plug Co., Ltd. | Gas sensor |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3616679A (en) * | 1969-11-06 | 1971-11-02 | Mine Safety Appliances Co | Paramagnetic oxygen detector |
| US4563894A (en) * | 1984-08-21 | 1986-01-14 | Hewlett-Packard Company | Paramagnetic oxygen sensor |
| US5012669A (en) * | 1988-10-03 | 1991-05-07 | Panametrics, Inc. | Oxygen sensing method and apparatus |
| US4893495A (en) * | 1988-10-03 | 1990-01-16 | Panametrics, Inc. | Oxygen sensing method and apparatus |
| DE4107295A1 (de) * | 1991-03-07 | 1992-09-10 | Manfred Dr Rer Nat Ritschel | Verfahren zur bestimmung von chemischen und/oder physikalischen eigenschaften einer gasatmosphaere |
| US5269170A (en) * | 1992-11-25 | 1993-12-14 | Panametrics, Inc. | Measuring system and process using zero shift compensation circuit |
| US6112576A (en) * | 1998-10-05 | 2000-09-05 | Panametrics, Inc. | Gas analyzer with background gas compensation |
-
2001
- 2001-03-13 US US09/805,302 patent/US6389880B1/en not_active Expired - Fee Related
-
2002
- 2002-02-25 WO PCT/US2002/005700 patent/WO2002073175A1/en not_active Ceased
- 2002-02-25 JP JP2002572389A patent/JP2004529332A/ja not_active Withdrawn
- 2002-02-25 EP EP02707885A patent/EP1370852A1/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| US6389880B1 (en) | 2002-05-21 |
| WO2002073175A1 (en) | 2002-09-19 |
| EP1370852A1 (en) | 2003-12-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050224 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050224 |
|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20050621 |