WO2002073175A1 - Zero shift compensation oxygen sensor - Google Patents

Zero shift compensation oxygen sensor Download PDF

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Publication number
WO2002073175A1
WO2002073175A1 PCT/US2002/005700 US0205700W WO02073175A1 WO 2002073175 A1 WO2002073175 A1 WO 2002073175A1 US 0205700 W US0205700 W US 0205700W WO 02073175 A1 WO02073175 A1 WO 02073175A1
Authority
WO
WIPO (PCT)
Prior art keywords
elements
thermal
sensing
wind
bridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2002/005700
Other languages
English (en)
French (fr)
Inventor
Emilio Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panametrics LLC
Original Assignee
Panametrics LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panametrics LLC filed Critical Panametrics LLC
Priority to JP2002572389A priority Critical patent/JP2004529332A/ja
Priority to EP02707885A priority patent/EP1370852A1/en
Publication of WO2002073175A1 publication Critical patent/WO2002073175A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/74Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables of fluids

Definitions

  • This invention relates to sensors and systems for measuring the concentration of oxygen present in a mixture of gases, wherein the sensor relies upon detection of thermal effects due to a wind formed in a magnetic field within the measuring device as a result of the paramagnetism of oxygen present in the mixture.
  • a variety of such devices have been described for measuring oxygen concentration, and these magnetic wind oxygen sensing systems rely on the fact that when placed in a magnetic field, the paramagnetic oxygen will exert a pressure in a certain direction, while the remaining components of the mixture, which is substantially formed of diamagnetic gases, are unaffected by the local field.
  • a mixture of oxygen with diamagnetic gases behaves, from the magnetic point of view, as a single component with a magnetic property (magnetic susceptibility) equal to the weighted average of the susceptibilities of each of the components.
  • a magnetic wind oxygen sensing device that provides a local magnetic field defined, for example, by magnetic pole pieces, and has a plurality of thermal elements arranged in a bridge at the local magnetic field to measure oxygen concentration present in a surrounding gas mixture.
  • the device creates a magnetic wind and detects thermal effects induced in the elements as a result of the wind.
  • the wind is generated by heating elements positioned at a region of high field intensity. The heat locally reduces paramagnetism of oxygen present in the gas, causing a pressure drop compared to unheated gas of identical composition, so that cooler gas in the magnetic field displaces the warmed gas and flows over the heater elements.
  • Each wind generator is located between two sensing elements, and these are positioned so that, while both receive heat from the wind generator, one sensor is somewhat cooled (by flowing gas from the lower temperature region of the measuring cell as a whole, sometimes simply referred to as "ambient” herein) and the other is somewhat heated, respectively, by the wind thereby generated.
  • the two sensing elements are at the same temperature (which is also the temperature of the gas immediately surrounding them), due to the heat received from the wind generator located centrally between them.
  • the zero point remains fixed, even when conductive properties of the surrounding (but stationary) gas change.
  • Figure 3 A illustrates one suitable sensing circuit for the practice of the invention
  • Figure 3B illustrates another suitable sensing circuit for the practice of the invention
  • pairs sensing elements are arranged to be passively heated or cooled, while always residing near the surrounding temperature of a local measurement region, which may, for example, be maintained at a temperature only slightly above ambient.
  • the invention positions sensing elements upstream and downstream, respectively, of each of a pair of heater elements in a magnetic wind, and forms a sensing bridge of the sensing elements.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
PCT/US2002/005700 2001-03-13 2002-02-25 Zero shift compensation oxygen sensor Ceased WO2002073175A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2002572389A JP2004529332A (ja) 2001-03-13 2002-02-25 ゼロシフト補償酸素センサ
EP02707885A EP1370852A1 (en) 2001-03-13 2002-02-25 Zero shift compensation oxygen sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/805,302 US6389880B1 (en) 2001-03-13 2001-03-13 Zero shift compensation oxygen sensor
US09/805,302 2001-03-13

Publications (1)

Publication Number Publication Date
WO2002073175A1 true WO2002073175A1 (en) 2002-09-19

Family

ID=25191197

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/005700 Ceased WO2002073175A1 (en) 2001-03-13 2002-02-25 Zero shift compensation oxygen sensor

Country Status (4)

Country Link
US (1) US6389880B1 (enExample)
EP (1) EP1370852A1 (enExample)
JP (1) JP2004529332A (enExample)
WO (1) WO2002073175A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2367367B (en) * 2000-05-23 2004-08-11 Yokogawa Electric Corp Magnetic oxygen analyzer

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014101971A1 (de) 2014-02-17 2015-08-20 Aixtron Se Magnetisches Verfahren zur Bestimmung einer Dampfkonzentration sowie Vorrichtung zur Durchführung des Verfahrens
DE102015105404A1 (de) 2015-04-09 2016-10-27 Aixtron Se Vorrichtung und Verfahren zum Bestimmen der Konzentration oder des Partialdrucks eines Dampfes mit magnetischen Eigenschaften
US11143614B2 (en) * 2017-08-02 2021-10-12 Ngk Spark Plug Co., Ltd. Gas sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3616679A (en) * 1969-11-06 1971-11-02 Mine Safety Appliances Co Paramagnetic oxygen detector
US4563894A (en) * 1984-08-21 1986-01-14 Hewlett-Packard Company Paramagnetic oxygen sensor
US5356819A (en) * 1991-03-07 1994-10-18 Manfred Ritschel Method of determining chemical and/or physical properties of a gaseous atmosphere

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5012669A (en) * 1988-10-03 1991-05-07 Panametrics, Inc. Oxygen sensing method and apparatus
US4893495A (en) * 1988-10-03 1990-01-16 Panametrics, Inc. Oxygen sensing method and apparatus
US5269170A (en) * 1992-11-25 1993-12-14 Panametrics, Inc. Measuring system and process using zero shift compensation circuit
US6112576A (en) * 1998-10-05 2000-09-05 Panametrics, Inc. Gas analyzer with background gas compensation

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3616679A (en) * 1969-11-06 1971-11-02 Mine Safety Appliances Co Paramagnetic oxygen detector
US4563894A (en) * 1984-08-21 1986-01-14 Hewlett-Packard Company Paramagnetic oxygen sensor
US5356819A (en) * 1991-03-07 1994-10-18 Manfred Ritschel Method of determining chemical and/or physical properties of a gaseous atmosphere

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2367367B (en) * 2000-05-23 2004-08-11 Yokogawa Electric Corp Magnetic oxygen analyzer

Also Published As

Publication number Publication date
US6389880B1 (en) 2002-05-21
JP2004529332A (ja) 2004-09-24
EP1370852A1 (en) 2003-12-17

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