WO2002073175A1 - Zero shift compensation oxygen sensor - Google Patents
Zero shift compensation oxygen sensor Download PDFInfo
- Publication number
- WO2002073175A1 WO2002073175A1 PCT/US2002/005700 US0205700W WO02073175A1 WO 2002073175 A1 WO2002073175 A1 WO 2002073175A1 US 0205700 W US0205700 W US 0205700W WO 02073175 A1 WO02073175 A1 WO 02073175A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- elements
- thermal
- sensing
- wind
- bridge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
- G01N27/74—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables of fluids
Definitions
- This invention relates to sensors and systems for measuring the concentration of oxygen present in a mixture of gases, wherein the sensor relies upon detection of thermal effects due to a wind formed in a magnetic field within the measuring device as a result of the paramagnetism of oxygen present in the mixture.
- a variety of such devices have been described for measuring oxygen concentration, and these magnetic wind oxygen sensing systems rely on the fact that when placed in a magnetic field, the paramagnetic oxygen will exert a pressure in a certain direction, while the remaining components of the mixture, which is substantially formed of diamagnetic gases, are unaffected by the local field.
- a mixture of oxygen with diamagnetic gases behaves, from the magnetic point of view, as a single component with a magnetic property (magnetic susceptibility) equal to the weighted average of the susceptibilities of each of the components.
- a magnetic wind oxygen sensing device that provides a local magnetic field defined, for example, by magnetic pole pieces, and has a plurality of thermal elements arranged in a bridge at the local magnetic field to measure oxygen concentration present in a surrounding gas mixture.
- the device creates a magnetic wind and detects thermal effects induced in the elements as a result of the wind.
- the wind is generated by heating elements positioned at a region of high field intensity. The heat locally reduces paramagnetism of oxygen present in the gas, causing a pressure drop compared to unheated gas of identical composition, so that cooler gas in the magnetic field displaces the warmed gas and flows over the heater elements.
- Each wind generator is located between two sensing elements, and these are positioned so that, while both receive heat from the wind generator, one sensor is somewhat cooled (by flowing gas from the lower temperature region of the measuring cell as a whole, sometimes simply referred to as "ambient” herein) and the other is somewhat heated, respectively, by the wind thereby generated.
- the two sensing elements are at the same temperature (which is also the temperature of the gas immediately surrounding them), due to the heat received from the wind generator located centrally between them.
- the zero point remains fixed, even when conductive properties of the surrounding (but stationary) gas change.
- Figure 3 A illustrates one suitable sensing circuit for the practice of the invention
- Figure 3B illustrates another suitable sensing circuit for the practice of the invention
- pairs sensing elements are arranged to be passively heated or cooled, while always residing near the surrounding temperature of a local measurement region, which may, for example, be maintained at a temperature only slightly above ambient.
- the invention positions sensing elements upstream and downstream, respectively, of each of a pair of heater elements in a magnetic wind, and forms a sensing bridge of the sensing elements.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002572389A JP2004529332A (ja) | 2001-03-13 | 2002-02-25 | ゼロシフト補償酸素センサ |
| EP02707885A EP1370852A1 (en) | 2001-03-13 | 2002-02-25 | Zero shift compensation oxygen sensor |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/805,302 US6389880B1 (en) | 2001-03-13 | 2001-03-13 | Zero shift compensation oxygen sensor |
| US09/805,302 | 2001-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2002073175A1 true WO2002073175A1 (en) | 2002-09-19 |
Family
ID=25191197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US2002/005700 Ceased WO2002073175A1 (en) | 2001-03-13 | 2002-02-25 | Zero shift compensation oxygen sensor |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6389880B1 (enExample) |
| EP (1) | EP1370852A1 (enExample) |
| JP (1) | JP2004529332A (enExample) |
| WO (1) | WO2002073175A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2367367B (en) * | 2000-05-23 | 2004-08-11 | Yokogawa Electric Corp | Magnetic oxygen analyzer |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014101971A1 (de) | 2014-02-17 | 2015-08-20 | Aixtron Se | Magnetisches Verfahren zur Bestimmung einer Dampfkonzentration sowie Vorrichtung zur Durchführung des Verfahrens |
| DE102015105404A1 (de) | 2015-04-09 | 2016-10-27 | Aixtron Se | Vorrichtung und Verfahren zum Bestimmen der Konzentration oder des Partialdrucks eines Dampfes mit magnetischen Eigenschaften |
| US11143614B2 (en) * | 2017-08-02 | 2021-10-12 | Ngk Spark Plug Co., Ltd. | Gas sensor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3616679A (en) * | 1969-11-06 | 1971-11-02 | Mine Safety Appliances Co | Paramagnetic oxygen detector |
| US4563894A (en) * | 1984-08-21 | 1986-01-14 | Hewlett-Packard Company | Paramagnetic oxygen sensor |
| US5356819A (en) * | 1991-03-07 | 1994-10-18 | Manfred Ritschel | Method of determining chemical and/or physical properties of a gaseous atmosphere |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5012669A (en) * | 1988-10-03 | 1991-05-07 | Panametrics, Inc. | Oxygen sensing method and apparatus |
| US4893495A (en) * | 1988-10-03 | 1990-01-16 | Panametrics, Inc. | Oxygen sensing method and apparatus |
| US5269170A (en) * | 1992-11-25 | 1993-12-14 | Panametrics, Inc. | Measuring system and process using zero shift compensation circuit |
| US6112576A (en) * | 1998-10-05 | 2000-09-05 | Panametrics, Inc. | Gas analyzer with background gas compensation |
-
2001
- 2001-03-13 US US09/805,302 patent/US6389880B1/en not_active Expired - Fee Related
-
2002
- 2002-02-25 WO PCT/US2002/005700 patent/WO2002073175A1/en not_active Ceased
- 2002-02-25 JP JP2002572389A patent/JP2004529332A/ja not_active Withdrawn
- 2002-02-25 EP EP02707885A patent/EP1370852A1/en not_active Withdrawn
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3616679A (en) * | 1969-11-06 | 1971-11-02 | Mine Safety Appliances Co | Paramagnetic oxygen detector |
| US4563894A (en) * | 1984-08-21 | 1986-01-14 | Hewlett-Packard Company | Paramagnetic oxygen sensor |
| US5356819A (en) * | 1991-03-07 | 1994-10-18 | Manfred Ritschel | Method of determining chemical and/or physical properties of a gaseous atmosphere |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2367367B (en) * | 2000-05-23 | 2004-08-11 | Yokogawa Electric Corp | Magnetic oxygen analyzer |
Also Published As
| Publication number | Publication date |
|---|---|
| US6389880B1 (en) | 2002-05-21 |
| JP2004529332A (ja) | 2004-09-24 |
| EP1370852A1 (en) | 2003-12-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH08509066A (ja) | 電流差型熱質量流量トランスデューサ | |
| Xu et al. | Design, fabrication, and characterization of a high-heating-efficiency 3-D microheater for catalytic gas sensors | |
| US6405578B2 (en) | Magnetic oxygen analyzer | |
| US4845984A (en) | Temperature compensation for a thermal mass flow meter | |
| US5012669A (en) | Oxygen sensing method and apparatus | |
| Wang et al. | Temperature effects of a ceramic MEMS thermal wind sensor based on a temperature-balanced mode | |
| US6389880B1 (en) | Zero shift compensation oxygen sensor | |
| EP3943929B1 (en) | Device for measuring the partial pressure of a paramagnetic or diamagnetic gas | |
| Wang et al. | A 2D wind sensor using the $\Delta $ P thermal feedback control | |
| JPH0625684B2 (ja) | 流体の流量検出センサー | |
| KR102688774B1 (ko) | 위치 센서 및 위치 감지 방법 | |
| JP2545740B2 (ja) | 温度センサ | |
| US11788874B1 (en) | Self-powered, matched wheatstone bridge flow sensor | |
| GB2177212A (en) | Flow sensor | |
| EP0407491B1 (en) | Method and apparatus for measuring the concentration of a paramagnetic gas | |
| CN113091940B (zh) | 一种加热测温一体化的风速风向传感器 | |
| Lee et al. | A new approach to enhance the sensitivity of a hot-wire anemometer and static response analysis of a variable-temperature anemometer | |
| JP5206115B2 (ja) | 雰囲気測定装置 | |
| JP3700779B2 (ja) | 磁気式酸素計 | |
| RU215318U1 (ru) | Тепловой датчик расхода газов калориметрического типа | |
| JP3332280B2 (ja) | ヒートワイヤ型加速度検出器 | |
| JP2002039998A (ja) | 磁気式酸素計 | |
| JPH11118567A (ja) | フローセンサ | |
| SU815505A1 (ru) | Устройство дл измерени расходаэлЕКТРОпРОВОдНыХ жидКОСТЕй | |
| KR100262225B1 (ko) | 유속측정회로 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AK | Designated states |
Kind code of ref document: A1 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ OM PH PL PT RO RU SD SE SG SI SK SL TJ TM TN TR TT TZ UA UG UZ VN YU ZA ZM ZW |
|
| AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
| DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
| WWE | Wipo information: entry into national phase |
Ref document number: 2002572389 Country of ref document: JP |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 2002707885 Country of ref document: EP |
|
| WWP | Wipo information: published in national office |
Ref document number: 2002707885 Country of ref document: EP |
|
| REG | Reference to national code |
Ref country code: DE Ref legal event code: 8642 |
|
| WWW | Wipo information: withdrawn in national office |
Ref document number: 2002707885 Country of ref document: EP |