JP2004518964A5 - - Google Patents
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- JP2004518964A5 JP2004518964A5 JP2002564435A JP2002564435A JP2004518964A5 JP 2004518964 A5 JP2004518964 A5 JP 2004518964A5 JP 2002564435 A JP2002564435 A JP 2002564435A JP 2002564435 A JP2002564435 A JP 2002564435A JP 2004518964 A5 JP2004518964 A5 JP 2004518964A5
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- JP
- Japan
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2001-0006695A KR100418624B1 (ko) | 2001-02-12 | 2001-02-12 | 자이로스코프 및 그 제조 방법 |
| PCT/KR2002/000135 WO2002064497A1 (en) | 2001-02-12 | 2002-01-30 | Gyroscope and fabrication method thereof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004518964A JP2004518964A (ja) | 2004-06-24 |
| JP2004518964A5 true JP2004518964A5 (enExample) | 2005-01-27 |
| JP3713019B2 JP3713019B2 (ja) | 2005-11-02 |
Family
ID=19705617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002564435A Expired - Fee Related JP3713019B2 (ja) | 2001-02-12 | 2002-01-30 | ジャイロスコープ及びその製造方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6845668B2 (enExample) |
| EP (1) | EP1360144B1 (enExample) |
| JP (1) | JP3713019B2 (enExample) |
| KR (1) | KR100418624B1 (enExample) |
| CN (1) | CN1242913C (enExample) |
| AT (1) | ATE414674T1 (enExample) |
| DE (1) | DE60229919D1 (enExample) |
| WO (1) | WO2002064497A1 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7037805B2 (en) | 2003-05-07 | 2006-05-02 | Honeywell International Inc. | Methods and apparatus for attaching a die to a substrate |
| US6927098B2 (en) * | 2003-05-07 | 2005-08-09 | Honeywell International Inc. | Methods and apparatus for attaching MEMS devices to housing |
| SG112898A1 (en) * | 2003-12-11 | 2005-07-28 | Singapore Tech Dynamics Pte | Sensing apparatus, system and method |
| JP2005326620A (ja) * | 2004-05-14 | 2005-11-24 | Fujitsu Ltd | マイクロミラー素子 |
| CN100338470C (zh) * | 2005-03-25 | 2007-09-19 | 中北大学 | 单片双惯性参数加速度计陀螺仪 |
| US7491567B2 (en) | 2005-11-22 | 2009-02-17 | Honeywell International Inc. | MEMS device packaging methods |
| JP5070778B2 (ja) * | 2006-09-20 | 2012-11-14 | 株式会社デンソー | 力学量センサ |
| US8061201B2 (en) * | 2007-07-13 | 2011-11-22 | Georgia Tech Research Corporation | Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope |
| US9493344B2 (en) | 2010-11-23 | 2016-11-15 | Honeywell International Inc. | MEMS vertical comb structure with linear drive/pickoff |
| US8748206B2 (en) | 2010-11-23 | 2014-06-10 | Honeywell International Inc. | Systems and methods for a four-layer chip-scale MEMS device |
| US8776601B2 (en) | 2010-11-23 | 2014-07-15 | Honeywell International Inc. | MEMS sensor using multi-layer movable combs |
| US9171964B2 (en) | 2010-11-23 | 2015-10-27 | Honeywell International Inc. | Systems and methods for a three-layer chip-scale MEMS device |
| CN102507981B (zh) * | 2011-11-02 | 2013-06-05 | 重庆理工大学 | 一种带耦合梁结构的单敏感质量元硅微二维加速度传感器 |
| CN102633227B (zh) * | 2012-03-16 | 2014-07-23 | 中北大学 | 一种mems惯性传感器结构压膜阻尼可调装置 |
| US9581447B2 (en) * | 2014-07-08 | 2017-02-28 | Honeywell International Inc. | MEMS gyro motor loop filter |
| US9903718B2 (en) * | 2015-05-28 | 2018-02-27 | Invensense, Inc. | MEMS device mechanical amplitude control |
| US10514259B2 (en) | 2016-08-31 | 2019-12-24 | Analog Devices, Inc. | Quad proof mass MEMS gyroscope with outer couplers and related methods |
| US10697774B2 (en) | 2016-12-19 | 2020-06-30 | Analog Devices, Inc. | Balanced runners synchronizing motion of masses in micromachined devices |
| US10415968B2 (en) | 2016-12-19 | 2019-09-17 | Analog Devices, Inc. | Synchronized mass gyroscope |
| US10627235B2 (en) | 2016-12-19 | 2020-04-21 | Analog Devices, Inc. | Flexural couplers for microelectromechanical systems (MEMS) devices |
| FR3065800B1 (fr) * | 2017-04-27 | 2019-08-02 | Safran | Resonateur configure pour etre integre a un capteur angulaire inertiel |
| US10948294B2 (en) | 2018-04-05 | 2021-03-16 | Analog Devices, Inc. | MEMS gyroscopes with in-line springs and related systems and methods |
| US11193771B1 (en) | 2020-06-05 | 2021-12-07 | Analog Devices, Inc. | 3-axis gyroscope with rotational vibration rejection |
| US11692825B2 (en) | 2020-06-08 | 2023-07-04 | Analog Devices, Inc. | Drive and sense stress relief apparatus |
| EP4162281A4 (en) | 2020-06-08 | 2025-04-23 | Analog Devices, Inc. | MEMS STRESS REDUCTION GYROSCOPE |
| CN111609844A (zh) * | 2020-06-18 | 2020-09-01 | 中汽研汽车检验中心（天津）有限公司 | 一种陀螺仪安装固定装置及应用结构 |
| US11698257B2 (en) | 2020-08-24 | 2023-07-11 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
| CN113135548B (zh) * | 2021-04-20 | 2024-06-11 | 广州蜂鸟传感科技有限公司 | 一种压电微机械执行器 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19530007C2 (de) * | 1995-08-16 | 1998-11-26 | Bosch Gmbh Robert | Drehratensensor |
| US5945599A (en) * | 1996-12-13 | 1999-08-31 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Resonance type angular velocity sensor |
| US5914521A (en) * | 1997-07-30 | 1999-06-22 | Motorola, Inc. | Sensor devices having a movable structure |
| US6122961A (en) * | 1997-09-02 | 2000-09-26 | Analog Devices, Inc. | Micromachined gyros |
| KR100231715B1 (ko) | 1997-11-25 | 1999-11-15 | 정선종 | 평면 진동형 마이크로 자이로스코프 |
| KR100316774B1 (ko) * | 1999-01-15 | 2001-12-12 | 이형도 | 마이크로 관성 센서의 제작 방법 |
| US6481285B1 (en) | 1999-04-21 | 2002-11-19 | Andrei M. Shkel | Micro-machined angle-measuring gyroscope |
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2001
- 2001-02-12 KR KR10-2001-0006695A patent/KR100418624B1/ko not_active Expired - Lifetime
-
2002
- 2002-01-30 EP EP02711501A patent/EP1360144B1/en not_active Expired - Lifetime
- 2002-01-30 WO PCT/KR2002/000135 patent/WO2002064497A1/en not_active Ceased
- 2002-01-30 CN CNB028002954A patent/CN1242913C/zh not_active Expired - Fee Related
- 2002-01-30 US US10/257,532 patent/US6845668B2/en not_active Expired - Fee Related
- 2002-01-30 JP JP2002564435A patent/JP3713019B2/ja not_active Expired - Fee Related
- 2002-01-30 DE DE60229919T patent/DE60229919D1/de not_active Expired - Fee Related
- 2002-01-30 AT AT02711501T patent/ATE414674T1/de not_active IP Right Cessation