JP2004508946A5 - - Google Patents

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Publication number
JP2004508946A5
JP2004508946A5 JP2002511978A JP2002511978A JP2004508946A5 JP 2004508946 A5 JP2004508946 A5 JP 2004508946A5 JP 2002511978 A JP2002511978 A JP 2002511978A JP 2002511978 A JP2002511978 A JP 2002511978A JP 2004508946 A5 JP2004508946 A5 JP 2004508946A5
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JP
Japan
Prior art keywords
arcuate edge
sidewall
wafer
round
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002511978A
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English (en)
Japanese (ja)
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JP2004508946A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2001/022037 external-priority patent/WO2002006061A1/en
Publication of JP2004508946A publication Critical patent/JP2004508946A/ja
Publication of JP2004508946A5 publication Critical patent/JP2004508946A5/ja
Pending legal-status Critical Current

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JP2002511978A 2000-07-13 2001-07-13 デバイスの起伏形状パターニング方法 Pending JP2004508946A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US21826300P 2000-07-13 2000-07-13
PCT/US2001/022037 WO2002006061A1 (en) 2000-07-13 2001-07-13 Method for topographical patterning of a device

Publications (2)

Publication Number Publication Date
JP2004508946A JP2004508946A (ja) 2004-03-25
JP2004508946A5 true JP2004508946A5 (enExample) 2006-12-07

Family

ID=22814411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002511978A Pending JP2004508946A (ja) 2000-07-13 2001-07-13 デバイスの起伏形状パターニング方法

Country Status (6)

Country Link
US (1) US7129179B2 (enExample)
JP (1) JP2004508946A (enExample)
KR (1) KR100532796B1 (enExample)
AU (1) AU2002222920A1 (enExample)
GB (1) GB2381383A (enExample)
WO (1) WO2002006061A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6786420B1 (en) 1997-07-15 2004-09-07 Silverbrook Research Pty. Ltd. Data distribution mechanism in the form of ink dots on cards
US6618117B2 (en) 1997-07-12 2003-09-09 Silverbrook Research Pty Ltd Image sensing apparatus including a microcontroller
AUPO802797A0 (en) 1997-07-15 1997-08-07 Silverbrook Research Pty Ltd Image processing method and apparatus (ART54)
US6948794B2 (en) 1997-07-15 2005-09-27 Silverbrook Reserach Pty Ltd Printhead re-capping assembly for a print and demand digital camera system
US6690419B1 (en) 1997-07-15 2004-02-10 Silverbrook Research Pty Ltd Utilising eye detection methods for image processing in a digital image camera
US7110024B1 (en) 1997-07-15 2006-09-19 Silverbrook Research Pty Ltd Digital camera system having motion deblurring means
AUPO850597A0 (en) 1997-08-11 1997-09-04 Silverbrook Research Pty Ltd Image processing method and apparatus (art01a)
US6985207B2 (en) * 1997-07-15 2006-01-10 Silverbrook Research Pty Ltd Photographic prints having magnetically recordable media
US6624848B1 (en) 1997-07-15 2003-09-23 Silverbrook Research Pty Ltd Cascading image modification using multiple digital cameras incorporating image processing
US6879341B1 (en) 1997-07-15 2005-04-12 Silverbrook Research Pty Ltd Digital camera system containing a VLIW vector processor
AUPP702098A0 (en) 1998-11-09 1998-12-03 Silverbrook Research Pty Ltd Image creation method and apparatus (ART73)
AUPQ056099A0 (en) 1999-05-25 1999-06-17 Silverbrook Research Pty Ltd A method and apparatus (pprint01)
US7119511B2 (en) * 2003-04-11 2006-10-10 International Business Machines Corporation Servo system for a two-dimensional micro-electromechanical system (MEMS)-based scanner and method therefor

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US4035062A (en) 1975-12-30 1977-07-12 Nasa Method and apparatus for producing an image from a transparent object
US4670366A (en) 1983-06-24 1987-06-02 Canyon Materials Research & Engineering High energy beam sensitive glasses
US5078771A (en) 1989-02-07 1992-01-07 Canyon Materials, Inc. Method of making high energy beam sensitive glasses
US4567104A (en) 1983-06-24 1986-01-28 Canyon Materials Research & Engineering High energy beam colored glasses exhibiting insensitivity to actinic radiation
US4894303A (en) 1983-06-24 1990-01-16 Canyon Materials Research & Engineering High energy beam-sensitive glasses
US5285517A (en) 1983-06-24 1994-02-08 Canyon Materials, Inc. High energy beam sensitive glasses
US4719498A (en) * 1984-05-18 1988-01-12 Fujitsu Limited Optoelectronic integrated circuit
DE3429665A1 (de) * 1984-08-11 1986-02-20 Bayer Ag, 5090 Leverkusen Waschbestaendige, antimikrobiell wirksame fasern und faeden und ihre herstellung
US4581814A (en) * 1984-12-13 1986-04-15 At&T Bell Laboratories Process for fabricating dielectrically isolated devices utilizing heating of the polycrystalline support layer to prevent substrate deformation
US5145757A (en) 1989-06-23 1992-09-08 Schott Glass Technologies, Inc. Method of forming stable images in electron beam writable glass compositions
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US5213916A (en) 1990-10-30 1993-05-25 International Business Machines Corporation Method of making a gray level mask
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US5285438A (en) 1991-10-31 1994-02-08 Regents Of The University Of California Motionless parallel readout head for an optical disk recorded with arrayed one-dimensional holograms
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US5521781A (en) * 1992-10-30 1996-05-28 Shin-Etsu Chemical Co., Ltd. Substrate for magnetic recording medium
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