JP2004506883A5 - - Google Patents

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Publication number
JP2004506883A5
JP2004506883A5 JP2002519873A JP2002519873A JP2004506883A5 JP 2004506883 A5 JP2004506883 A5 JP 2004506883A5 JP 2002519873 A JP2002519873 A JP 2002519873A JP 2002519873 A JP2002519873 A JP 2002519873A JP 2004506883 A5 JP2004506883 A5 JP 2004506883A5
Authority
JP
Japan
Prior art keywords
electrodes
central part
electrical potential
metallizations
excitation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2002519873A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004506883A (ja
Filing date
Publication date
Priority claimed from DE10040537A external-priority patent/DE10040537B4/de
Application filed filed Critical
Publication of JP2004506883A publication Critical patent/JP2004506883A/ja
Publication of JP2004506883A5 publication Critical patent/JP2004506883A5/ja
Withdrawn legal-status Critical Current

Links

JP2002519873A 2000-08-18 2001-08-06 マイクロメカニカル回転速度センサおよびその製造方法 Withdrawn JP2004506883A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10040537A DE10040537B4 (de) 2000-08-18 2000-08-18 Mikromechanischer Drehratensensor und Verfahren zu seiner Herstellung
PCT/EP2001/009066 WO2002014787A1 (de) 2000-08-18 2001-08-06 Mikromechanischer drehratensensor und verfahren zu seiner herstellung

Publications (2)

Publication Number Publication Date
JP2004506883A JP2004506883A (ja) 2004-03-04
JP2004506883A5 true JP2004506883A5 (enExample) 2005-03-17

Family

ID=7652955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002519873A Withdrawn JP2004506883A (ja) 2000-08-18 2001-08-06 マイクロメカニカル回転速度センサおよびその製造方法

Country Status (5)

Country Link
US (1) US6898972B2 (enExample)
EP (1) EP1309835A1 (enExample)
JP (1) JP2004506883A (enExample)
DE (1) DE10040537B4 (enExample)
WO (1) WO2002014787A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4155775B2 (ja) * 2002-03-07 2008-09-24 アルプス電気株式会社 静電容量式センサ
JP2003329444A (ja) * 2002-03-07 2003-11-19 Alps Electric Co Ltd 静電容量式センサ
DE10231730B4 (de) * 2002-07-13 2012-08-30 Robert Bosch Gmbh Mikrostrukturbauelement
KR100503472B1 (ko) * 2003-03-06 2005-07-25 삼성전자주식회사 회전형 자이로스코프
JP4123044B2 (ja) * 2003-05-13 2008-07-23 ソニー株式会社 マイクロマシンおよびその製造方法
DE10347215A1 (de) * 2003-10-10 2005-05-12 Bosch Gmbh Robert Mikromechanischer Sensor
WO2006107531A2 (en) * 2005-03-16 2006-10-12 Cluster Resources, Inc. Simple integration of an on-demand compute environment
US7387040B2 (en) * 2005-08-19 2008-06-17 Honeywell International Inc. Methods and systems for mounting sensors for use in a harsh vibration environment
JP5165294B2 (ja) * 2007-07-06 2013-03-21 三菱電機株式会社 静電容量式加速度センサ
DE102013212365A1 (de) 2013-06-27 2014-12-31 Robert Bosch Gmbh Kapazitiver Drehratensensor und Verfahren zum Herstellen eines kapazitiven Drehratensensor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4598585A (en) * 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
US5195371A (en) 1988-01-13 1993-03-23 The Charles Stark Draper Laboratory, Inc. Semiconductor chip transducer
US5016072A (en) * 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
US5203208A (en) 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5329815A (en) * 1991-12-19 1994-07-19 Motorola, Inc. Vibration monolithic gyroscope
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
DE19523895A1 (de) * 1995-06-30 1997-01-02 Bosch Gmbh Robert Beschleunigungssensor
DE19641284C1 (de) * 1996-10-07 1998-05-20 Inst Mikro Und Informationstec Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen
US6032531A (en) * 1997-08-04 2000-03-07 Kearfott Guidance & Navigation Corporation Micromachined acceleration and coriolis sensor
DE19745083A1 (de) * 1997-10-11 1999-04-15 Bodenseewerk Geraetetech Drehratensensor

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