JP2004361384A - ガラス基板内欠陥の深さ方向位置検出方法 - Google Patents
ガラス基板内欠陥の深さ方向位置検出方法 Download PDFInfo
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- JP2004361384A JP2004361384A JP2003432528A JP2003432528A JP2004361384A JP 2004361384 A JP2004361384 A JP 2004361384A JP 2003432528 A JP2003432528 A JP 2003432528A JP 2003432528 A JP2003432528 A JP 2003432528A JP 2004361384 A JP2004361384 A JP 2004361384A
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- 239000011521 glass Substances 0.000 title claims abstract description 133
- 239000000758 substrate Substances 0.000 title claims abstract description 128
- 230000007547 defect Effects 0.000 title claims abstract description 120
- 238000000034 method Methods 0.000 title claims description 50
- 239000012535 impurity Substances 0.000 description 13
- 238000007689 inspection Methods 0.000 description 10
- 238000001514 detection method Methods 0.000 description 8
- 238000009826 distribution Methods 0.000 description 7
- 238000002474 experimental method Methods 0.000 description 7
- 238000004088 simulation Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000005286 illumination Methods 0.000 description 5
- 238000004422 calculation algorithm Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000011179 visual inspection Methods 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 238000005401 electroluminescence Methods 0.000 description 2
- 238000002372 labelling Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000003708 edge detection Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
【解決手段】 ガラス基板表面の欠陥の存在する位置にカメラの焦点を一致させ、焦点面を表面から裏面側に移動させつつ欠陥を撮影した映像を用いて、欠陥と背景との境界における明度勾配をガラス表面からの移動距離に対する勾配指標GI値として算出し、勾配指標GIの最大値に対応する移動距離を欠陥の深さ方向位置として決定する。
【選択図】 図1
Description
式(1)において、∇Gはポイント(x,y)での勾配ベクトルであって、そのポイントでの明度の最大変化率方向を示し、輪郭線検出において最も重要な値は該ベクトルの大きさであり、これを単に勾配といって、下記式によって示すことができる。
上記式(2)において、∇Gは∇G方向へ単位長さにあたりG(x,y)の最大増加率と同じである。実際アルゴリズムの具現の際、省計算時間及び省ハードのために、勾配の計算式として下記式を多用する。
上記式(3)は、勾配を絶対値で示す近似式である。
図4a及び図5aは、それぞれ、ガラス基板1の内に存在する欠陥1aの中で気泡及び不純物を示し、該両図の映像をソベル・フィルターを適用して各画素の∇G値を256諧調グレーレベルに変換して再構成すると、図4b及び図5bのように示される。
上記式(4)において、∇Gはz(x、y)位置の画素と8方向の隣り画素との明度勾配を式(3)によって求めることができ、∇Gmax、∇Gminは1映像内の勾配値の最大、最小値である。
ガラス基板1の生産の際に最も多く発生する欠陥1aの代表的な例として、気泡(blister)、不純物(inclusion)などがある。気泡は、ガラス基板1の製造過程中の溶融過程で空気が混ざり合って現れる形態であり、不純物は、非晶質状態のガラスでない、結晶性物質がガラス基板1の内に存在することをいう。この実験は、コンピュータを用いて実際欠陥1aと類似する形態で、図6及び図7のように生成されたシミュレーション・モデルを用いた。
本発明によるガラス基板内欠陥の深さ方向位置検出方法の実際適用及び作用を調べるために、図2の装置を用いてガラス基板1に対する欠陥1aの検出する実験を行った。
1a ガラス基板の内部欠陥
1b ガラス基板の表面
10 ガラス基板内欠陥の深さ方向位置検出装置
11 カメラ
12 支持台
13 直線運動装置
14 照明
15 コンピュータ
Claims (3)
- カメラを用いてガラス基板内欠陥の深さ方向の位置を検出する方法であって、
前記欠陥の位置する前記ガラス基板の一方の面に対して、前記カメラの焦点面を一致させる第1のステップと、
前記カメラの焦点面を前記ガラス基板の一方の面の方から他方の面の方へ一定距離分移動させる第2のステップと、
前記焦点面を一定距離移動させた前記カメラで前記欠陥を撮影する第3のステップと、
前記カメラで撮影された映像を用いて、欠陥と背景との境界における明度勾配を計算し、前記ガラス基板の表面から前記カメラの焦点面が移動した距離に対応する勾配指標GIの値を算出する第4のステップと、
前記ガラス基板の表面から前記カメラの焦点面が移動した距離と前記ガラス基板の厚さとを比較する第5のステップと、
前記第5のステップにて、前記ガラス基板の表面から前記カメラの焦点面の移動距離が前記ガラス基板の厚さを超えると、前記勾配指標GIの値の中から最大値に対応する前記ガラス基板の表面から前記カメラの焦点面の移動距離を、欠陥の深さ方向位置として決定する第6のステップとを含むことを特徴とするガラス基板内欠陥の深さ方向位置の検出方法。 - 前記第5のステップにおいて、前記ガラス基板の表面から前記カメラの焦点面の移動距離が前記ガラス基板の厚さ以下である場合、前記第2、第3、第4及び第5のステップを繰り返して行うことを特徴とする請求項1に記載のガラス基板内欠陥の深さ方向位置検出方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2003-035066 | 2003-05-31 | ||
KR10-2003-0035066A KR100535569B1 (ko) | 2003-05-31 | 2003-05-31 | 유리 기판에 존재하는 결함의 깊이방향 위치 검출방법 |
Publications (3)
Publication Number | Publication Date |
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JP2004361384A true JP2004361384A (ja) | 2004-12-24 |
JP4571401B2 JP4571401B2 (ja) | 2010-10-27 |
JP4571401B6 JP4571401B6 (ja) | 2011-01-26 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2352012A1 (en) * | 2008-11-20 | 2011-08-03 | Asahi Glass Company Limited | Transparent body inspecting device |
WO2011117952A1 (ja) * | 2010-03-24 | 2011-09-29 | 株式会社島津製作所 | 測定システム |
WO2015159419A1 (ja) * | 2014-04-18 | 2015-10-22 | AvanStrate株式会社 | フラットパネルディスプレイ用ガラス基板及びその製造方法、ならびに液晶ディスプレイ |
TWI553380B (zh) * | 2014-04-18 | 2016-10-11 | Avanstrate Inc | A glass substrate for a flat panel display and a method for manufacturing the same, and a liquid crystal display |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11183152A (ja) * | 1997-12-24 | 1999-07-09 | Canon Inc | 透明体の内部検査方法および内部検査装置 |
JP2000284182A (ja) * | 1999-03-11 | 2000-10-13 | Corning Inc | 自動合焦システムのための合焦用フィラメント |
JP2001519890A (ja) * | 1995-10-06 | 2001-10-23 | フォトン・ダイナミクス・インコーポレーテッド | 透明な構造における三次元の欠陥位置を検出するための技術 |
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001519890A (ja) * | 1995-10-06 | 2001-10-23 | フォトン・ダイナミクス・インコーポレーテッド | 透明な構造における三次元の欠陥位置を検出するための技術 |
JPH11183152A (ja) * | 1997-12-24 | 1999-07-09 | Canon Inc | 透明体の内部検査方法および内部検査装置 |
JP2000284182A (ja) * | 1999-03-11 | 2000-10-13 | Corning Inc | 自動合焦システムのための合焦用フィラメント |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2352012A1 (en) * | 2008-11-20 | 2011-08-03 | Asahi Glass Company Limited | Transparent body inspecting device |
EP2352012A4 (en) * | 2008-11-20 | 2014-05-21 | Asahi Glass Co Ltd | DEVICE FOR CONTROLLING TRANSPARENT BODIES |
WO2011117952A1 (ja) * | 2010-03-24 | 2011-09-29 | 株式会社島津製作所 | 測定システム |
US9498154B2 (en) | 2010-03-24 | 2016-11-22 | Shimadzu Corporation | Measuring system capable of separating liquid and determining boundary of separated liquid |
WO2015159419A1 (ja) * | 2014-04-18 | 2015-10-22 | AvanStrate株式会社 | フラットパネルディスプレイ用ガラス基板及びその製造方法、ならびに液晶ディスプレイ |
KR20150137046A (ko) * | 2014-04-18 | 2015-12-08 | 아반스트레이트 가부시키가이샤 | 플랫 패널 디스플레이용 유리 기판 및 그 제조 방법, 및 액정 디스플레이 |
KR101657429B1 (ko) | 2014-04-18 | 2016-09-13 | 아반스트레이트 가부시키가이샤 | 플랫 패널 디스플레이용 유리 기판 및 그 제조 방법, 및 액정 디스플레이 |
TWI553380B (zh) * | 2014-04-18 | 2016-10-11 | Avanstrate Inc | A glass substrate for a flat panel display and a method for manufacturing the same, and a liquid crystal display |
Also Published As
Publication number | Publication date |
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TW200426497A (en) | 2004-12-01 |
CN1573319A (zh) | 2005-02-02 |
KR20040103143A (ko) | 2004-12-08 |
JP4571401B2 (ja) | 2010-10-27 |
KR100535569B1 (ko) | 2005-12-08 |
TWI311687B (en) | 2009-07-01 |
CN100483117C (zh) | 2009-04-29 |
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