JP2004349645A - Liquid-immersed differential liquid-drainage static-pressure floating pad, master-disk exposure apparatus, and method of exposure using liquid-immersed differential liquid-drainage - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To increase numerical aperture of a lens by using a liquid-immersed objective lens and to prevent the liquid from scattering to surroundings. <P>SOLUTION: The liquid-immersed differential liquid-drainage static-pressure floating pad 3 comprises: a feeding part 16 capable of feeding a liquid to a periphery of a liquid-immersed part 7 of the liquid-immersed objective lens 9 via a compressed gas from a positive pressure part 17; a liquid-drainage part 14 capable of draining the liquid by sucking the liquid through a plurality of annular sucking grooves 5, 6 by the suction with a compressed gas from a negative pressure part 18; and a control part 19 with which the liquid-immersed objective lens 9 is movable in a direction perpendicular to a master disk 10 by an actuator 21 such that a radiating laser beam is confirmed to be focused on the master disk 10 by a detecting mechanism 20 for the reflective laser beam from the master disk. By the constitution as such, the refractive index in the working distance between the objective lens and the irradiated object is raised to be higher than 1 since the liquid-immersed lens is constituted without liquid leakage by using the differential liquid-drainage static-pressure floating pad, and therefore, high-density exposure is carried out since a smaller spot than in atmospheric air is realized. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to, for example, an immersion differential drainage static pressure floating pad having an immersion objective lens, a master exposure apparatus, and an exposure method using immersion differential drainage.
[0002]
[Prior art]
A lens used in a conventional master exposure apparatus has a refractive index of about 1 between the surface of the master and the differential distance between the lens tip and the atmosphere. Therefore, the numerical aperture (NA) of the lens cannot exceed 1.
[0003]
In order to solve this problem, there is an exposure apparatus using a near field in which the work distance between the surface of the master and the tip of the lens is shortened.
[0004]
Patent Document 1 discloses that when a laser beam is condensed and irradiated on a master on which a photoresist film is applied and a desired pattern is exposed, water is conveyed between the condenser lens and the master during exposure by a nozzle. A conventional master exposure apparatus has been disclosed in which the numerical aperture is filled to increase the NA of the condenser lens so as to function as an immersion lens.
[0005]
Further, the static pressure floating pad described as a component in Patent Documents 2, 3, and 4 has a plurality of annular grooves, and performs differential exhaust static pressure floating that performs differential exhaust while maintaining a degree of vacuum in a non-contact manner. A pad is disclosed.
[0006]
[Patent Document 1]
JP 10-255319 A [Patent Document 2]
Japanese Patent Application Laid-Open No. 2000-076707 [Patent Document 3]
JP 2000-076708 A [Patent Document 4]
JP 2001-242300 A
[Problems to be solved by the invention]
However, in the conventional master exposure apparatus described above, since the aperture ratio of the lens cannot be made to exceed 1, there is a disadvantage that the spot size cannot be further reduced.
[0008]
In an exposure apparatus using a near-field, the differential distance between the lens tip and the master must be maintained at less than half the laser wavelength, and the surface of the master is scratched by the influence of minute dust. Is required, and there is an inconvenience of being expensive.
[0009]
Further, in the master exposure apparatus described in Patent Document 1, since the immersion liquid flows over the master and is immersed while being scattered, the scattered liquid dries and becomes dirty, and the scatter itself becomes a source of vibration, and the precision is reduced. There is a disadvantage that it deteriorates.
[0010]
Accordingly, the present invention has been made in view of such a point, and a master exposure apparatus and a liquid immersion differential discharge apparatus that use an immersion objective lens to increase the aperture ratio of the lens and prevent the liquid from scattering around. An object of the present invention is to provide a liquid exposure method apparatus.
[0011]
[Means for Solving the Problems]
The present invention firstly allows liquid to be discharged by sucking liquid from a plurality of annular suction grooves, and then is provided in a path of irradiation light, and is configured to be able to advance and retreat in a direction facing the master by a driving unit, An immersion objective lens is provided with an immersion objective lens that functions as a high aperture ratio objective lens by being in an immersion state impregnated with a liquid having a high refractive index. The liquid can be supplied to the surrounding liquid immersion part. Here, the liquid immersion objective lens moves forward and backward in the direction facing the master by driving means so that the irradiation light is focused by detecting the reflected irradiation light on the master. It is controlled so as to make it.
[0012]
Therefore, according to the present invention, the following operations are performed.
In a master disk exposure apparatus using a differential static pressure floating pad that has a plurality of annular grooves and performs differential evacuation to maintain the degree of vacuum in a non-contact manner, a liquid immersion lens was used for the differential static pressure floating pad and the objective lens. These are combined to form a liquid immersion differential drainage static pressure floating pad.
[0013]
Therefore, the inner periphery of the immersion lens is filled with liquid, the tip of the objective lens is immersed, and the vicinity of the differentially evacuated static pressure floating pad immersion objective lens is partially filled with a liquid having a high refractive index to open the exposure system. High density recording is possible by keeping several NA high and making the beam spot smaller than in the atmosphere.
[0014]
In addition, by collecting the liquid without leaking, it is possible to perform exposure with a beam spot smaller than that in the air according to the refractive index of the liquid while keeping the apparatus clean. The function of the liquid immersion differential drainage static pressure floating pad makes it possible to keep the apparatus clean and stable without scattering the liquid.
[0015]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings as appropriate.
[0016]
FIG. 1 is a conceptual diagram of a liquid immersion differential drainage static pressure floating pad applied to a master exposure apparatus.
The liquid immersion differential drainage static pressure floating pad 3 is provided on a turntable 11 on which a laser beam 22 from a laser drive unit 23 is rotated and slid by a spindle rotation mechanism 12 and a slide mechanism 13 via an optical system (not shown). The vacuum-adsorbed master 10 is irradiated so that it can be exposed.
[0017]
The liquid immersion differential drainage static pressure floating pad 3 is opposed to the master 10 at a minute interval (5 μm), and has an emission hole 8 for irradiating the master 10 with laser irradiation light 22. A plurality of annular suction grooves 5 and 6 are formed around the passage of the irradiation light communicating with the master disk 10 and open on the surface facing the master 10, and a porous gas discharge bearing portion of porous 4 is formed around the suction grooves 5 and 6. Is done.
[0018]
The liquid immersion differential drainage static pressure floating pad 3 is provided with a liquid immersion part 7 in the path of the laser irradiation light 22, provided in the liquid immersion part 7, and in a direction facing the master 10 by the actuator 21. It has an immersion objective lens 9 which is configured to be able to advance and retreat and which functions as an objective lens having a high aperture ratio by being in an immersion state in which a liquid having a high refractive index is impregnated.
[0019]
The immersion differential drainage static pressure floating pad 3 includes a supply unit 16 that can supply a liquid to the immersion unit 7 around the immersion objective lens 9 via the compressed gas from the positive pressure unit 17, The liquid suction portion 14 is configured to be able to suck and discharge the liquid by sucking the compressed gas from the negative pressure portion 18 from the annular suction grooves 5 and 6. The compressed gas from the positive pressure unit 17 is supplied to the expansion / contraction unit 2 that expands / contracts the liquid immersion differential drainage static pressure floating pad 3 with respect to the base 1 in the direction opposite to the master 10. The gas is supplied to the porous member 4 functioning as a gas discharge bearing.
[0020]
The immersion differential drainage static pressure floating pad 3 controls the laser drive unit 23, the spindle rotation mechanism 12 and the slide mechanism 13, the drainage unit 14 and the supply unit 16, and emits reflected laser irradiation light to the master 10. The control unit 19 is configured to move the liquid immersion objective lens 9 forward and backward by the actuator 21 in the direction facing the master 10 so that the laser irradiation light is focused by the detection mechanism 20.
[0021]
Further, the immersion differential drainage static pressure floating pad 3 includes a tank 15 for storing the liquid sucked by the drainage unit 14 and supplying it to the supply unit 16, and collects the liquid sucked by the drainage unit 14 into the tank. Then, it is configured to be filtered, supplied to the supply unit 16 and reused.
[0022]
FIG. 2 shows a bottom view of the liquid immersion differential drainage static pressure floating pad.
In FIG. 2, the liquid immersion differential drainage static pressure floating pad 3 has an emission hole 8 for irradiating the laser beam 22 to the master 10 at the center of the circle, and the master 10 A plurality of annular suction grooves 5 and 6 are formed on the surface opposite to the suction groove 5, and an annular gas discharge bearing portion of porous 4 is formed on the outer periphery of the suction grooves 5 and 6.
[0023]
A series of operations of the liquid immersion differential drainage static pressure floating pad thus configured will be described.
[0024]
FIG. 3 is a flowchart showing a series of operations of the liquid immersion differential drainage static pressure floating pad.
In FIG. 3, in step S1, it is determined whether or not there is another work. Specifically, it is determined whether there is another master 10 that is vacuum-sucked on the turntable 11 and exposed by the laser drive unit 23.
[0025]
FIG. 4 is a flowchart showing the work exchange operation. FIG. 4 corresponds to step S1 in FIG.
[0026]
In step S11, the turntable is moved to the work changing position by the slide mechanism. Specifically, the control unit 19 is configured to expand and contract the compressed gas from the positive pressure unit 17 with respect to the base 1 so that the immersion differential drainage static pressure floating pad 3 expands and contracts in a direction facing the master 10. Then, the supply to the master 2 is stopped, and the immersion differential drainage static pressure floating pad 3 is contracted in a direction away from the master 10. At this time, the turntable is moved to the work exchange position by the slide mechanism.
[0027]
In step S12, the work is exchanged. Specifically, the work after exposure is removed, and a new master, which is another work, is vacuum-adsorbed on the turntable.
[0028]
In step S13, the turntable is moved to the exposure position by the slide mechanism. Specifically, the control unit 19 is configured to expand and contract the compressed gas from the positive pressure unit 17 with respect to the base 1 so that the immersion differential drainage static pressure floating pad 3 expands and contracts in a direction facing the master 10. 2 is stopped, and the turntable is moved to the exposure position by the slide mechanism with the immersion differential drainage static pressure floating pad 3 contracted in the direction away from the master 10.
[0029]
In step S14, it is determined whether or not there is another work. If there is another work, the process returns to step S11, and the processes and determinations in steps S11 to S14 are repeated. If there is no other work, the process ends.
[0030]
Returning to FIG. 3, if there is no other work in step S1, the process ends. If there is another work, the process proceeds to step S2, and the pad is lowered in step S2. Specifically, the control unit 19 is configured to expand and contract the compressed gas from the positive pressure unit 17 with respect to the base 1 so that the immersion differential drainage static pressure floating pad 3 expands and contracts in a direction facing the master 10. 2 to expand the immersion differential drainage static pressure floating pad 3 in a direction approaching the master 10.
[0031]
In step S3, the pad is floated. Specifically, the control unit 19 supplies the compressed gas from the positive pressure unit 17 to the porous member 4 functioning as the annular gas discharge bearing unit, and the immersion differential drainage static pressure floating pad 3 Levitate in the direction opposite to.
[0032]
In step S4, the pad is lowered by collecting the liquid by the drain part, and the gap is set to 5 μm. More specifically, the control unit 19 sucks the compressed gas from the plurality of annular suction grooves 5 and 6 from the negative pressure unit 18 and sends the compressed gas from the positive pressure unit 17 to the porous 4 functioning as an annular gas discharge bearing unit. The immersion differential drainage static pressure levitation pad 3 is maintained so as to be opposed to the master 10 at a minute interval (5 μm) in a state where the levitation by the supply of the compressed gas is balanced.
[0033]
In step S5, the liquid is collected in a suction state. Specifically, the control unit 19 sucks and discharges the liquid by suction of the compressed gas from the negative pressure unit 18 from the plurality of annular suction grooves 5 and 6 by the drain unit 14. At this time, the liquid sucked by the drainage unit 14 is stored in the tank 15.
[0034]
FIG. 5 is a flowchart showing the liquid collecting operation. FIG. 5 corresponds to steps S4 and S5 in FIG.
In step S21, the drain part collects the liquid in the inner circumferential groove. Specifically, the control unit 19 causes the liquid discharging unit 14 to suction and discharge the liquid by suctioning the compressed gas from the inner peripheral groove 6 of the plurality of annular suction grooves 5 and 6 from the negative pressure unit 18.
[0035]
In step S22, it is determined whether or not the gap is 5 μm. If the gap is not 5 μm, the process returns to step S21, and the processing and determination in steps S21 to S22 are repeated. When the gap is 5 μm, the process proceeds to step S23.
[0036]
In step S23, the collected liquid is stored in a tank. Specifically, the control unit 19 is configured to use the liquid discharging unit 14 to suction and discharge the liquid by suctioning the compressed gas from the inner circumferential groove 6 of the plurality of annular suction grooves 5 and 6 from the negative pressure unit 18. Then, the liquid sucked by the drain unit 14 is stored in the tank 15.
[0037]
In step S24, the exhaust unit collects the leakage of the liquid in the outer peripheral groove from the exhaust air due to the floating of the pad. Specifically, the control unit 19 causes the drainage unit 14 to leak the compressed gas from the porous member 4 by suctioning the compressed gas from the outer peripheral groove 5 of the plurality of annular suction grooves 5 and 6 from the negative pressure unit 18. Collect.
[0038]
In step S25, it is determined whether or not the pressure of the outer circumferential groove 5 is slightly higher than the atmospheric pressure. If the pressure is slightly higher than the atmospheric pressure, the process returns to step S24, and the processing and determination of steps S24 to S25 are repeated. . If the pressure is slightly higher than the atmospheric pressure, the process proceeds to step S26.
[0039]
In step S26, the collected liquid is stored in a tank. Specifically, the control unit 19 causes the drainage unit 14 to leak the compressed gas from the porous member 4 by suctioning the compressed gas from the outer peripheral groove 5 of the plurality of annular suction grooves 5 and 6 from the negative pressure unit 18. The scattered liquid is collected and stored in a tank.
[0040]
Returning to FIG. 3, in step S6, liquid is supplied by the supply unit. Specifically, the control section 19 supplies the liquid to the liquid immersion section 7 around the liquid immersion objective lens 9 via the compressed gas from the positive pressure section 17 by the supply section 16. Thus, the liquid immersion objective lens 9 functions as a high aperture ratio objective lens by being in a liquid immersion state in which a liquid having a high refractive index is impregnated.
[0041]
FIG. 6 is a flowchart showing the liquid supply operation. FIG. 6 corresponds to step S6 in FIG.
In step S31, the supply unit discharges the liquid from the tank by positive pressure. Specifically, the control section 19 supplies the liquid to the liquid immersion section 7 around the liquid immersion objective lens 9 via the compressed gas from the positive pressure section 17 by the supply section 16.
[0042]
In step S32, the liquid is supplied to the liquid immersion section 7 on the inner periphery. Specifically, the liquid immersion objective lens 9 functions as a high aperture ratio objective lens by being immersed in a liquid having a high refractive index.
[0043]
Returning to FIG. 3, in step S7, the objective lens is lowered. Specifically, the controller 19 causes the actuator 21 to advance the immersion objective lens 9 in a direction facing the master 10.
[0044]
In step S8, it is determined whether or not the subject is in focus. Specifically, the control unit 19 moves the liquid immersion objective lens 9 toward the master 10 by the actuator 21 so that the laser irradiation light is focused by the detection mechanism 20 of the reflected laser irradiation light on the master 10. To advance.
[0045]
FIG. 7 is a flowchart showing the immersion objective lens lowering operation. FIG. 7 corresponds to steps S7 and S8 in FIG.
[0046]
In step S41, the control unit supplies a drive signal to the actuator. Specifically, the control unit 19 supplies a drive signal for lowering the liquid immersion objective lens to an actuator including a piezoelectric element and a voice coil motor.
[0047]
In step S42, the actuator lowers the immersion objective lens. Specifically, the immersion objective lens is lowered by the actuator constituted by the piezoelectric element and the voice coil motor moving downward.
[0048]
In step S43, the laser driver irradiates the laser for focus adjustment. Specifically, the control unit 19 causes the laser driving unit 23 to emit a focus adjustment laser.
[0049]
In step S44, reflection is detected by the reflection detection mechanism. Specifically, the control unit 19 detects the laser irradiation light by the reflected laser irradiation light detection mechanism 20 for the master 10.
[0050]
In step S45, it is determined whether or not the subject is in focus. Specifically, the control unit 19 determines whether the laser irradiation light detected by the reflected laser irradiation light detection mechanism 20 for the master 10 is in a focused state. If it is not in the focused state, the process returns to step S41, and the processing and determination of steps S41 to S45 are repeated. If the camera is in the focused state, the process ends.
[0051]
Returning to FIG. 3, when it is determined that the focal point is in focus at step S8, the process proceeds to step S9, and when it is not the focal point at step S8, the process returns to step S7 to repeat the processing and determination of step S7 and step S8.
[0052]
If the focal point is found in step S8, an exposure operation is performed in step S8. Specifically, the control unit 19 uses the immersion differential drainage static pressure floating pad 3 to rotate and slide by the spindle rotation mechanism 12 and the slide mechanism 13 via the laser beam 22 from the laser drive unit 23. Exposure is performed on the master 10 vacuum-adsorbed on the moving turntable 11.
[0053]
FIG. 8 is a flowchart showing the exposure operation. FIG. 8 corresponds to step S9 in FIG.
[0054]
In step S51, the laser driving unit irradiates an exposure laser. Specifically, the control unit 19 causes the laser driving unit 23 to irradiate an exposure laser.
[0055]
In step S52, the turntable is moved from the inner circumference to the outer circumference by the slide mechanism according to the rotation of the spindle. Specifically, the control unit 19 uses the immersion differential drainage static pressure floating pad 3 to rotate and slide the laser beam 22 from the laser drive unit 23 by the spindle rotation mechanism 12 and the slide mechanism 13. Irradiation is performed so that the master 10 vacuum-adsorbed on the turntable 11 is exposed spirally.
[0056]
In step S53, it is determined whether or not the exposure is completed. The process returns to step S52 until the exposure is completed, and the processes and determinations in step S522 and step S53 are repeated.
[0057]
Although the embodiment of the present invention has been described with respect to the invention of the liquid immersion differential drainage static pressure floating pad 3 of the optical disk master exposure apparatus, the same effect can be detected, for example, by irradiating a laser beam to detect an opponent. It can be used for all applications such as television receiver tube surface detectors and semiconductor inspection devices.
[0058]
As described above, the liquid is supplied to the liquid immersion portion 7 at the center of the liquid immersion differential drainage static pressure floating pad 3, and the liquid is applied to the outer peripheral side so that the liquid can be sucked like a vacuum cleaner using an appropriate negative pressure. By providing the annular grooves 5 and 6 and collecting by suction, the clearance between the pad bottom surface and the master can be maintained at about 5 μm, and at the same time, the liquid can be made hard to leak to the outer peripheral side. Since the air for floating the air bearing applies a pressure to the inner circumference, the liquid can be kept on the inner circumference side of the suction annular groove 6. The annular groove 5 is provided on the outer periphery of the inner peripheral suction groove 6, whereby the exhaust gas can be collected while preventing the leakage of the liquid by an appropriate positive pressure of the air bearing by the porous material 4.
[0059]
【The invention's effect】
According to the present invention, the liquid immersion lens can be configured without liquid leakage by using the differential exhaust type static pressure floating pad, so that the refractive index between the working distance between the objective lens and the irradiation target is set to be higher than 1. Therefore, the spot can be made smaller than that in the air, so that high-density exposure can be performed.
[0060]
Further, since the liquid does not scatter, it is easy to keep the apparatus clean, and it is possible to prevent the accuracy from being deteriorated by the vibration due to the scatter.
[Brief description of the drawings]
FIG. 1 is a conceptual diagram of a liquid immersion differential drainage static pressure floating pad used in a master exposure apparatus applied to an embodiment of the present invention.
FIG. 2 is a bottom view of a liquid immersion differential drainage static pressure floating pad.
FIG. 3 is a flowchart showing a series of operations.
FIG. 4 is a flowchart showing a work exchange operation.
FIG. 5 is a flowchart showing a liquid recovery operation.
FIG. 6 is a flowchart showing a liquid supply operation.
FIG. 7 is a flowchart showing a lowering operation of the immersion objective lens.
FIG. 8 is a flowchart illustrating an exposure operation.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Base, 2 ... Elastic part, 3 ... Static pressure floating pad, 4 ... Porous, 5 ... Groove, 6 ... Groove, 7 ... Liquid immersion part, 8 ... Hole, 9 ... ... Immersion objective lens, 10 ... Master disk, 11 ... Turntable, 12 ... Spindle, 13 ... Slide mechanism, 14 ... Drainage unit, 15 ... Tank, 16 ... Supply unit, 17 ... Positive Pressure unit, 18 Negative pressure unit, 19 Control unit, 20 Reflection detection mechanism, 21 Actuator, 22 Laser irradiation light, 23 Laser drive unit

Claims (7)

It is intended to irradiate the irradiation light from the laser irradiation means to a master that is rotationally and slidably moved by a rotation mechanism and a slide mechanism via an optical system so as to be exposed,
A plurality of openings opposed to the master at a small interval, and having an emission hole for irradiating the master with irradiation light, and having an opening on a surface facing the master around a path of irradiation light communicating with the emission hole; An annular suction groove is formed, and a static pressure floating pad in which an annular gas discharge bearing portion is formed around the suction groove,
It is provided in the path of the irradiation light, is configured to be able to advance and retreat in a direction facing the master by a driving unit, and functions as an objective lens having a high aperture ratio by being immersed in a liquid having a high refractive index. Liquid immersion objective lens,
Supply means capable of supplying a liquid to a liquid immersion part around the liquid immersion objective lens;
Drainage means capable of sucking and draining liquid from the plurality of annular suction grooves,
The laser irradiating means, the rotating mechanism and the sliding mechanism, the drainage means and the supply means are controlled, and the liquid immersion objective is set so that the irradiation light is focused by detecting reflected irradiation light with respect to the master. A liquid immersion differential drainage static pressure floating pad having control means for moving the lens forward and backward with respect to the master by the driving means. The immersion differential drainage static pressure floating pad according to claim 1,
Storage means for storing the liquid sucked by the drainage means and supplying the liquid to the supply means; collecting the liquid sucked by the drainage means in the storage means; filtering and supplying the liquid to the supply means; Liquid immersion differential drainage static pressure levitation pad characterized by use. The immersion differential drainage static pressure floating pad according to claim 1,
A liquid immersion differential drainage static pressure floating pad, wherein the control means performs the exposure operation after the focusing state in the liquid immersion state. In a master exposure apparatus that irradiates irradiation light from a laser irradiation unit onto a master that is rotationally and slidably moved by a rotation mechanism and a slide mechanism via an optical system so as to be capable of exposing,
It is to irradiate the master disc with irradiation light so that it can be exposed,
A plurality of openings opposed to the master at a small interval, and having an emission hole for irradiating the master with irradiation light, and having an opening on a surface facing the master around a path of irradiation light communicating with the emission hole; An annular suction groove is formed, and a static pressure floating pad in which an annular gas discharge bearing portion is formed around the suction groove,
It is provided in the path of the irradiation light, is configured to be able to advance and retreat in a direction facing the master by a driving unit, and functions as an objective lens having a high aperture ratio by being immersed in a liquid having a high refractive index. Liquid immersion objective lens,
Supply means capable of supplying a liquid to a liquid immersion part around the liquid immersion objective lens;
Drainage means capable of sucking and draining liquid from the plurality of annular suction grooves,
The laser irradiating means, the rotating mechanism and the sliding mechanism, the drainage means and the supply means are controlled, and the liquid immersion objective is set so that the irradiation light is focused by detecting reflected irradiation light with respect to the master. A master exposure apparatus, comprising: a liquid immersion differential drainage static pressure floating pad having control means for moving the lens forward and backward with respect to the master by the driving means. The master exposure apparatus according to claim 4,
Storage means for storing the liquid sucked by the drainage means and supplying the liquid to the supply means; collecting the liquid sucked by the drainage means in the storage means; filtering and supplying the liquid to the supply means; Master exposure equipment characterized by being used. The master exposure apparatus according to claim 4,
The master exposure apparatus, wherein the control unit performs the exposure operation after the in-focus state in the liquid immersion state. Irradiation light from a laser irradiating means is applied to the master so as to be capable of exposing the master, and the master is opposed to the master at a small interval, and has an emission hole for irradiating the master with irradiation light. A plurality of annular suction grooves are formed around the passage of the irradiation light communicating with the master disk, and a plurality of annular suction grooves are formed on the surface facing the master, and an annular gas discharge bearing portion is formed around the suction grooves using a static pressure floating pad. In an exposure method by immersion differential drainage using a master exposure apparatus that exposes a master that is rotationally and slid by a rotation mechanism and a slide mechanism via an optical system,
A draining step capable of suctioning and draining liquid from the plurality of annular suction grooves,
It is provided in the path of the irradiation light, is configured to be able to advance and retreat in a direction facing the master by a driving unit, and functions as an objective lens having a high aperture ratio by being immersed in a liquid having a high refractive index. A supply step capable of supplying a liquid to an immersion portion around the immersion objective lens for the immersion differential drainage static pressure floating pad provided with the immersion objective lens to be provided;
A control step of moving the liquid immersion objective lens forward and backward by the driving means in a direction facing the master so that the irradiation light is brought into a focused state by detecting reflected irradiation light with respect to the master. Exposure method using liquid immersion differential drainage.

Images