JP2004346427A - Method and apparatus for surface-treating metallic workpiece - Google Patents

Method and apparatus for surface-treating metallic workpiece Download PDF

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JP2004346427A
JP2004346427A JP2004136179A JP2004136179A JP2004346427A JP 2004346427 A JP2004346427 A JP 2004346427A JP 2004136179 A JP2004136179 A JP 2004136179A JP 2004136179 A JP2004136179 A JP 2004136179A JP 2004346427 A JP2004346427 A JP 2004346427A
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processing space
metal work
surface treatment
metal
gas
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Akio Sakasawa
紀生 酒澤
Hiroaki Minagawa
弘明 皆川
Muneharu Yoshihara
宗治 吉原
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NAGAOKA NETSUREN KK
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a heretofore not attainably effective epochmaking method for surface-treating a metallic workpiece and to provide a surface treatment apparatus therefor. <P>SOLUTION: The method comprises setting the metallic workpiece in a treatment space 1, evacuating the space 1, and feeding high-pressure superheated steam into the space 1 to form an oxide film on the surface of the metallic workpiece. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、金属ワークの表面処理方法及び金属ワークの表面処理装置に関するものである。   The present invention relates to a metal workpiece surface treatment method and a metal workpiece surface treatment apparatus.

従来から、例えば切削工具や金型などの金属製品を構成する金属ワークの表面に酸化皮膜を形成する表面処理方法(通称Homo(ホモ)処理)が提案されている(以下、従来法という。)。   2. Description of the Related Art Conventionally, a surface treatment method for forming an oxide film on a surface of a metal work constituting a metal product such as a cutting tool or a mold (commonly called Homo (homo) treatment) has been proposed (hereinafter, referred to as a conventional method). .

この従来法は、まず、金属ワークを加熱炉の処理空間に配設して約400℃に加熱し(これにより次工程である水蒸気の吹込みによって水滴が金属ワークの表面に凝結して赤サビが発生するのを防止できる。)、続いて、約400℃に達した処理空間に水蒸気を吹き込むことで、処理空間内の空気を30分程度かけて外部に追い出し、続いて、金属ワークを処理温度(約500℃)で約2時間加熱するとともに処理空間に水蒸気を導入し続けて、金属ワークの表面に酸化皮膜(Fe)を形成する方法である。 In this conventional method, first, a metal work is disposed in a processing space of a heating furnace and heated to about 400 ° C. (this causes water droplets to condense on the surface of the metal work by blowing steam in the next step, and red rust occurs. Can be prevented.) Then, by blowing steam into the processing space that has reached approximately 400 ° C., the air in the processing space is expelled to the outside in about 30 minutes, and then the metal work is processed. This is a method of forming an oxide film (Fe 3 O 4 ) on the surface of a metal work by heating at a temperature (about 500 ° C.) for about 2 hours and continuously introducing steam into the processing space.

この従来法により金属ワークの表面に形成された酸化皮膜は多孔質である為、平滑性及び油の保有力が秀れ、よって、金属製品の寿命をも延ばすものとされている。   Since the oxide film formed on the surface of the metal work by this conventional method is porous, the oxide film has excellent smoothness and oil holding power, and thus extends the life of the metal product.

本出願人は、この従来法について更なる研究・開発を進め、従来法にない作用効果を発揮する画期的な金属ワークの表面処理方法及び金属ワークの表面処理装置を発明した。   The present applicant has further researched and developed the conventional method, and has invented a revolutionary metal work surface treatment method and a metal work surface treatment apparatus that exhibit an operation and effect not found in the conventional method.

添付図面を参照して本発明の要旨を説明する。   The gist of the present invention will be described with reference to the accompanying drawings.

処理空間1に金属ワークを配設し、この処理空間1を真空状態にした後、高圧過熱水蒸気を処理空間1に導入して前記金属ワークの表面に酸化皮膜を形成することを特徴とする金属ワークの表面処理方法に係るものである。   A metal work is provided in the processing space 1, and after the processing space 1 is evacuated, high-pressure superheated steam is introduced into the processing space 1 to form an oxide film on the surface of the metal work. The present invention relates to a surface treatment method for a work.

また、処理空間1に金属ワークを配設し、続いて、適宜なガスを処理空間1に導入し、続いて、高圧過熱水蒸気を処理空間1に導入して前記金属ワークの表面に酸化皮膜を形成することを特徴とする金属ワークの表面処理方法に係るものである。   Further, a metal work is disposed in the processing space 1, subsequently, an appropriate gas is introduced into the processing space 1, and subsequently, high-pressure superheated steam is introduced into the processing space 1 to form an oxide film on the surface of the metal work. The present invention relates to a method for treating a surface of a metal workpiece, which is characterized by being formed.

また、処理空間1に金属ワークを配設し、この処理空間1を真空状態にした後、適宜なガスを処理空間1に導入し、続いて、高圧過熱水蒸気を処理空間1に導入して前記金属ワークの表面に酸化皮膜を形成することを特徴とする金属ワークの表面処理方法に係るものである。   Further, a metal work is disposed in the processing space 1, and after the processing space 1 is evacuated, an appropriate gas is introduced into the processing space 1, and subsequently, high-pressure superheated steam is introduced into the processing space 1, and The present invention relates to a method for treating a surface of a metal work, wherein an oxide film is formed on the surface of the metal work.

また、処理空間1に金属ワークを配設し、この処理空間1を真空状態にした後、適宜なガスを加熱した処理空間1に導入し、続いて、高圧過熱水蒸気を加熱した処理空間1に導入して前記金属ワークの表面に酸化皮膜を形成することを特徴とする金属ワークの表面処理方法に係るものである。   Further, a metal work is disposed in the processing space 1, and after the processing space 1 is evacuated, an appropriate gas is introduced into the heated processing space 1, and subsequently, the high-pressure superheated steam is heated into the processing space 1. The present invention relates to a method for treating a surface of a metal work, wherein the oxide film is formed on the surface of the metal work by being introduced.

また、請求項2〜4のいずれか1項に記載の金属ワークの表面処理方法において、前記ガスとしてHe、N、H、CO、NH、Cまたはこれらのガスから選択される数種のガスの混合ガスを採用したことを特徴とする金属ワークの表面処理方法に係るものである。 The selection method of surface treatment of a metal workpiece according to any one of claims 2 to 4, as the gas He, from N 2, H 2, CO 2 , NH 3, C 2 H 2 , or a gas The present invention relates to a method for treating a surface of a metal work, wherein a mixed gas of several kinds of gases is employed.

また、請求項2〜5のいずれか1項に記載の金属ワークの表面処理方法において、高圧過熱水蒸気の導入前に、真空排気により適宜なガスを処理空間1から排出することを特徴とする金属ワークの表面処理方法に係るものである。   Further, in the surface treatment method for a metal work according to any one of claims 2 to 5, a suitable gas is discharged from the processing space 1 by vacuum exhaust before introducing the high-pressure superheated steam. The present invention relates to a surface treatment method for a work.

また、請求項1〜6のいずれか1項に記載の金属ワークの表面処理方法において、酸化皮膜の形成後に処理空間を真空状態にすることを特徴とする金属ワークの表面処理方法に係るものである。   The surface treatment method of a metal work according to any one of claims 1 to 6, wherein the treatment space is evacuated after forming the oxide film. is there.

また、金属ワークの表面処理をする加熱可能な処理空間1を有し、更に、この処理空間1を真空状態にする真空処理機構,この処理空間1に適宜なガスを導入するガス導入部3及びこの処理空間1に高圧過熱水蒸気を導入する水蒸気導入部2が設けられていることを特徴とする金属ワークの表面処理装置に係るものである。   In addition, it has a heatable processing space 1 for performing a surface treatment of a metal work, further has a vacuum processing mechanism for bringing the processing space 1 into a vacuum state, a gas introduction unit 3 for introducing an appropriate gas into the processing space 1, and The present invention relates to a surface treatment apparatus for a metal work, wherein a steam introduction unit 2 for introducing high-pressure superheated steam is provided in the processing space 1.

本発明は上述のように構成したから、従来法にない作用効果を発揮する画期的な金属ワークの表面処理方法及び金属ワークの表面処理装置となる。   Since the present invention is configured as described above, it is an epoch-making metal work surface treatment method and a metal work surface treatment apparatus exhibiting a function and effect not found in the conventional method.

好適と考える本発明の実施形態を、図面に基づいて本発明の作用を示して簡単に説明する。   Preferred embodiments of the present invention will be briefly described with reference to the drawings, showing the operation of the present invention.

本出願人は、従来法による金属ワークの表面処理の場合、金属ワークを加熱炉の処理空間に配設して約400℃に加熱した際、金属ワークの表面にFeOやFeの酸化皮膜がところどころに1〜2ミクロン程度発生しており、このFeOやFeの酸化皮膜が金属製品の平滑性や耐久性を向上させる上での障害となっていることに着目し、金属ワークの表面にFeOやFeの酸化皮膜を形成することなく、金属ワークの平滑性や耐久性を向上させる上で有用とされる安定性ある酸化皮膜(四酸化三鉄:Fe)のみを形成することでより良質な表面皮膜が得られることを見出した。 In the case of the surface treatment of a metal work according to the conventional method, the present applicant disposes the metal work in a processing space of a heating furnace and heats the metal work to about 400 ° C., thereby oxidizing FeO or Fe 2 O 3 on the surface of the metal work. Attention was paid to the fact that a film was generated in some places of about 1 to 2 microns, and this oxide film of FeO or Fe 2 O 3 was an obstacle to improving the smoothness and durability of a metal product. Without forming an oxide film of FeO or Fe 2 O 3 on the surface of the work, a stable oxide film (triiron tetroxide: Fe 3 O) useful for improving the smoothness and durability of the metal work. 4 ) It was found that a higher quality surface film could be obtained by forming only ( 4 ).

そこで、本出願人は、この観点から種々の実験・研究を繰り返し行い、その結果、極めて画期的な本発明を完成させた。   Therefore, the applicant has repeatedly performed various experiments and studies from this viewpoint, and as a result, completed an extremely epoch-making invention.

即ち、露点において相反する性質を有する水蒸気と、例えばHe、N、H、CO、NH、Cなどのガスの炉内への導入は、水蒸気の影響が大きく、よって、露点調整が不可能であり、炉内に水蒸気が残留するため、これらのガスと水蒸気との複合処理は難しいものと考えられていたが、本発明はこの点を解決したのである。 That is, the introduction of a gas having a contradictory property at the dew point and a gas such as He, N 2 , H 2 , CO 2 , NH 3 , C 2 H 2 into the furnace is greatly affected by the water vapor. Since dew point adjustment was impossible and steam remained in the furnace, it was considered difficult to combine these gases with steam. However, the present invention has solved this point.

具体的には、本発明は、処理空間1に金属ワークを配設し、この処理空間1を真空状態にした後、高圧過熱水蒸気を処理空間1に導入して前記金属ワークの表面に酸化皮膜を形成するか、処理空間1に金属ワークを配設し、続いて、適宜なガスを処理空間1に導入し、続いて、高圧過熱水蒸気を処理空間に導入して前記金属ワークの表面に酸化皮膜を形成するか、若しくは、処理空間1に金属ワークを配設し、この処理空間1を真空状態にした後、適宜なガスを処理空間1に導入し、続いて、高圧過熱水蒸気を処理空間1に導入して前記金属ワークの表面に酸化皮膜を形成する。   Specifically, according to the present invention, a metal work is disposed in the processing space 1, and after the processing space 1 is evacuated, high-pressure superheated steam is introduced into the processing space 1 to form an oxide film on the surface of the metal work. Or a metal work is disposed in the processing space 1, then an appropriate gas is introduced into the processing space 1, and then high-pressure superheated steam is introduced into the processing space to oxidize the surface of the metal work. After forming a film or disposing a metal work in the processing space 1 and evacuating the processing space 1, an appropriate gas is introduced into the processing space 1. 1 to form an oxide film on the surface of the metal work.

このようにして得られた金属ワークの表面には、FeOやFeの酸化皮膜が形成されておらず、前述した有用とされる酸化皮膜(四酸化三鉄:Fe)のみが形成され、多孔質な表面組織に改質されることが顕微鏡による拡大写真によって確認できた(図3,4,5参照)。尚、金属ワーク中に存在する炭化物の上には酸化皮膜は形成されない。 An oxide film of FeO or Fe 2 O 3 was not formed on the surface of the metal workpiece thus obtained, and only the oxide film (triiron tetroxide: Fe 3 O 4 ) considered to be useful as described above was used. Was formed, and it was confirmed from the enlarged photographs by a microscope that the porous surface structure was modified (see FIGS. 3, 4, and 5). Note that an oxide film is not formed on the carbide present in the metal work.

従って、平滑性及び耐久性に秀れた良質な表面皮膜が得られることになり、この表面皮膜により高品位な金属ワークを提供し得ることになる。   Accordingly, a high quality surface film having excellent smoothness and durability can be obtained, and a high quality metal work can be provided by this surface film.

以上のように、本発明は、従来法にない画期的な作用効果を発揮し、極めて商品価値の高いものになる。   As described above, the present invention exerts an epoch-making action and effect not found in the conventional method, and becomes extremely high in commercial value.

本発明の具体的な実施例について図面に基づいて説明する。   A specific embodiment of the present invention will be described with reference to the drawings.

本実施例は、例えば切削工具や金型などの金属製品を構成する金属ワークの表面処理方法であり、図1に図示した処理装置Aによって実現される。   The present embodiment is a method for treating a surface of a metal work constituting a metal product such as a cutting tool or a mold, and is realized by the processing apparatus A shown in FIG.

具体的には、この処理装置Aは、金属ワークの表面処理をする処理空間1を有し、更に、この処理空間1を真空状態にする真空処理機構(図示省略)及び処理空間1に配設された金属ワークを加熱し得る加熱機構(図示省略)が設けられた真空加熱炉として構成されている。   More specifically, the processing apparatus A has a processing space 1 for performing a surface treatment of a metal work, and is further disposed in the processing space 1 and a vacuum processing mechanism (not shown) for bringing the processing space 1 into a vacuum state. It is configured as a vacuum heating furnace provided with a heating mechanism (not shown) capable of heating the metal work thus formed.

また、処理装置Aには、処理空間1に高圧過熱水蒸気を導入し得る水蒸気導入部2が設けられている。   Further, the processing apparatus A is provided with a steam introduction unit 2 that can introduce high-pressure superheated steam into the processing space 1.

この水蒸気導入部2は、約150℃〜180℃・4Kg/cm程度の高圧過熱水蒸気を処理空間1に一気に吹き込み導入し得るように構成されている。加圧した過熱水蒸気による短時間の酸化反応の為、FeO、Feは生成しない。即ち、緩やかな酸化では中間生成物が生じ易く、よって、Fe皮膜が剥がれ易くなるが、急激な酸化の為、このような問題は生じない。 The steam introduction unit 2 is configured to blow and introduce high-pressure superheated steam of about 150 ° C. to 180 ° C. · 4 kg / cm 3 into the processing space 1 at a stretch. Due to the short-time oxidation reaction by the pressurized superheated steam, FeO and Fe 2 O 3 are not generated. That is, an intermediate product is apt to be generated by moderate oxidation, and the Fe 3 O 4 film is easily peeled off. However, such a problem does not occur due to rapid oxidation.

また、この高圧過熱水蒸気は純水が採用されている。従って、この高圧過熱水蒸気を純水とすることで、金属ワークの表面には黒色光沢を発する綺麗な仕上がり面が得られ、そして、従来の黒染めメッキのように有害な化学薬品を使用していないため環境にやさしい処理となる。   Further, pure water is employed as the high-pressure superheated steam. Therefore, by using this high-pressure superheated steam as pure water, a beautiful finished surface with a black luster can be obtained on the surface of the metal work, and harmful chemicals are used like conventional black dye plating. There is no environment-friendly processing.

尚、この高圧過熱水蒸気の吹き込み量をコントロールすることで、Feの生成を制御するHの働きを促し、水蒸気の分解によって生ずる水酸化水素の発生のメカニズムを示す下記化学式の反応を抑制できる為、下記化学式2の反応を抑制でき、よって、高純度のFeが得られる。 By controlling the blowing amount of the high-pressure superheated steam, the action of H 2 for controlling the generation of Fe 2 O 3 is promoted, and the reaction of the following chemical formula showing the mechanism of generation of hydrogen hydroxide generated by the decomposition of steam is performed. Since the reaction can be suppressed, the reaction represented by the following chemical formula 2 can be suppressed, and thus, high-purity Fe 3 O 4 can be obtained.

Figure 2004346427
Figure 2004346427

Figure 2004346427
また、処理装置Aには、処理空間1にガスを導入し得るガス導入部3が設けられている。
Figure 2004346427
Further, the processing apparatus A is provided with a gas introduction unit 3 that can introduce a gas into the processing space 1.

このガス導入部3は、第一ガス導入部3Aと第二ガス導入部3Bとで構成されており、この第一ガス導入部3A及び第二ガス導入部3Bのいずれか一方から一種類のガスを処理空間1に導入したり、その処理の目的に合わせて第一ガス導入部3A及び第二ガス導入部3B双方から二種類のガスを混合して処理空間1に導入することもできる。   The gas introduction unit 3 includes a first gas introduction unit 3A and a second gas introduction unit 3B, and one type of gas is supplied from one of the first gas introduction unit 3A and the second gas introduction unit 3B. Can be introduced into the processing space 1 or two types of gases can be mixed and introduced into the processing space 1 from both the first gas introduction unit 3A and the second gas introduction unit 3B in accordance with the purpose of the treatment.

また、ガス導入部3から導入されるガスとしてはHe、N、H、CO、NH、Cなどが採用されている。尚、Heは高価である為、He以外のガスを使用することが望ましい。 In addition, He, N 2 , H 2 , CO 2 , NH 3 , C 2 H 2, or the like is employed as a gas introduced from the gas introduction unit 3. Since He is expensive, it is desirable to use a gas other than He.

これらのガスは、水蒸気導入部2から高圧過熱水蒸気を導入して金属ワークの表面に酸化皮膜を形成する以前に該金属ワークの表面の下地処理をするものであり、良好な酸化皮膜(四酸化三鉄:Fe)の形成を促進することになる。 These gases are used for applying a high-pressure superheated steam from the steam introduction unit 2 to form a base treatment on the surface of the metal work before forming an oxide film on the surface of the metal work. The formation of triiron (Fe 3 O 4 ) is promoted.

これらのガスの導入は、均一に導入するより、断続的(パルス的)に導入した方が効果があることを確認している。   It has been confirmed that the introduction of these gases is more effective when introduced intermittently (pulsed) than when introduced uniformly.

以上の構成からなる処理装置Aを使用した金属ワークの表面処理方法について説明する(図2参照)。   A method for treating the surface of a metal work using the processing apparatus A having the above configuration will be described (see FIG. 2).

まず、金属ワーク(例えばギア、ドリルなど)を処理装置Aの処理空間1に入れ、真空処理機構により処理空間1を真空排気して真空状態とする。また、真空状態となるまでの間は処理空間1が約150℃(t)になるまで加熱する(h:約0.5時間)。従来法は水蒸気により空気を処理空間1から追い出す方法の為、長時間を要するが、本実施例は予め真空状態を作出しておく為、従来法のように時間を要しない。尚、tは常温でも良い。 First, a metal work (for example, a gear, a drill, etc.) is put into the processing space 1 of the processing apparatus A, and the processing space 1 is evacuated to a vacuum state by a vacuum processing mechanism. Until the vacuum state is reached, the processing space 1 is heated until it reaches about 150 ° C. (t 1 ) (h 1 : about 0.5 hour). The conventional method requires a long time because the air is expelled from the processing space 1 by using water vapor. However, in the present embodiment, a vacuum state is created in advance, so that time is not required unlike the conventional method. In addition, t 1 may be at room temperature.

続いて、処理空間1にガス導入部3から適宜なガス(He、N、H、CO、NH、C)を単独または混合して炉内に吹き込んで、所定温度まで昇温加熱し、均熱する(t:約500〜650℃、h:約1〜3時間)。尚、この適宜なガスを導入する場合には処理空間1は真空状態が望ましいが、必ずしも処理空間1は真空状態でなくても良い(Nガスのみ導入する場合)。 Subsequently, an appropriate gas (He, N 2 , H 2 , CO 2 , NH 3 , C 2 H 2 ) is injected into the processing space 1 from the gas introduction unit 3 alone or in a mixture, and is blown into the furnace to a predetermined temperature. The temperature is raised and the temperature is soaked (t 2 : about 500 to 650 ° C., h 2 : about 1 to 3 hours). When the appropriate gas is introduced, the processing space 1 is preferably in a vacuum state, but the processing space 1 is not necessarily required to be in a vacuum state (when only the N 2 gas is introduced).

続いて、水蒸気導入部2から、処理空間1をt:約480℃〜650℃として、h:約1〜3時間で、高圧過熱水蒸気(約120℃〜160℃)を処理空間に一気に吹き込み導入すると(5〜10分間、多量に吹き込んだ後、その後も吹き込み続ける)、急速な酸化作用によって酸化皮膜(四酸化三鉄:Fe)が金属ワークの表面に形成される。 Subsequently, the water vapor introduction part 2, the processing space 1 t 3: as about 480 ℃ ~650 ℃, h 3: In about 1-3 hours, once the high pressure superheated steam (about 120 ° C. to 160 ° C.) in the treatment space When introduced by blowing (after blowing in a large amount for 5 to 10 minutes and then continuing to blow), an oxide film (triiron tetroxide: Fe 3 O 4 ) is formed on the surface of the metal work by a rapid oxidizing action.

適宜なガスとしてHやNHを処理空間1に多量に導入した場合には、水蒸気の導入によって生じる爆発を防止する為、高圧過熱水蒸気の導入前(図2中rの時点)に処理空間1の真空排気を約10分程度行う。 When a large amount of H 2 or NH 3 is introduced into the processing space 1 as an appropriate gas, the processing space is introduced before the introduction of high-pressure superheated steam (at the point r in FIG. 2) in order to prevent an explosion caused by the introduction of steam. The evacuation of step 1 is performed for about 10 minutes.

尚、酸化皮膜の厚みを得るために重要なことは炉内圧を上昇させることが最大の因子となる。この点は実験によって得られた炉内圧と皮膜厚さの関係を示すデータで確認された(図6〜12参照)。これらのデータから炉内圧を高くした方が酸化皮膜が厚くなることが分かる。   The most important factor for obtaining the thickness of the oxide film is to increase the furnace pressure. This point was confirmed by data showing the relationship between the furnace pressure and the film thickness obtained by the experiment (see FIGS. 6 to 12). From these data, it is understood that the oxide film becomes thicker when the furnace pressure is increased.

その後、酸化皮膜の内部組織への浸透を促すため所定温度を所定時間維持し続ける(残存する水蒸気や酸化物質を除去するためt:約300℃、h:約2時間の実施が望ましい。)。 Thereafter, a predetermined temperature is maintained for a predetermined time in order to promote the permeation of the oxide film into the internal structure. (It is desirable to carry out t 4 : about 300 ° C. and h 4 : about 2 hours in order to remove remaining water vapor and oxidized substances.) ).

その後、若しくは併せて再度真空排気若しくは真空排気とともに還元性の強いHの導入を行っても良く、この真空排気若しくは真空排気とともにする還元性の強いHの導入は、次の新たな金属ワークに同様な表面処理を施す際の最初の真空排気工程を水蒸気が存在しない状態で確実に行う為のものである(処理装置Aを連続しようの為、或いは、爆発等の危険を減少させる為など、メンテナンス上の理由もある。)。従って、金属ワークの表面処理を連続的に行う場合には、この最後の真空排気若しくは真空排気とともに行う還元性の強いHの導入は有用である。 Thereafter, or in conjunction may be performed to introduce strong reducing H 2 with again evacuated or evacuated, the introduction of a strong H 2 reducing property that with this evacuation or vacuum evacuation, the following new metal workpiece The first vacuum evacuation step when the same surface treatment is performed is performed in the absence of water vapor (in order to keep the processing apparatus A continuous or to reduce the risk of explosion, etc.). , For maintenance reasons.) Therefore, in the case where the surface treatment of the metal work is performed continuously, it is useful to introduce the last vacuum exhaust or the highly reducing H 2 that is performed together with the vacuum exhaust.

尚、本実施例に係る金属ワークの表面処理方法で設定された温度(t〜t)及び時間(h〜h)の数値は、良質な表面皮膜を形成するにあたり最適な数値であり、この温度及び時間の範囲外では良質な表面皮膜が形成されないことを実験により確認している。 The values of the set temperature in the surface treatment method for a metal workpiece according to the present embodiment (t 1 ~t 4) and time (h 1 ~h 4) it is in an optimal numerical in forming a high-quality surface film It has been confirmed by experiments that a high-quality surface film is not formed outside the range of the temperature and the time.

以上のようにして得られた金属ワークの表面には、FeOやFeの酸化皮膜が形成されておらず、所謂黒サビと称される酸化皮膜(四酸化三鉄:Fe)のみが形成されており(皮膜5ミクロン前後)、この酸化皮膜の形成により金属ワークは平滑性(潤滑性)、耐久性(耐磨耗性及び耐食性)に秀れたものとなる。このことは本出願人は実験により確認している。 An oxide film of FeO or Fe 2 O 3 is not formed on the surface of the metal workpiece obtained as described above, and an oxide film (triiron tetroxide: Fe 3 O 4) called black rust is formed. ) Is formed (approximately 5 microns in film), and the formation of this oxide film makes the metal work excellent in smoothness (lubricity) and durability (abrasion resistance and corrosion resistance). This has been confirmed by the applicant through experiments.

本実施例は上述のように構成したから、平滑性及び耐久性に秀れた良質な金属ワークが簡易且つ迅速に得られることになり、この金属ワークから高品位な金属製品を提供し得ることに成る。   Since this embodiment is configured as described above, a high-quality metal work excellent in smoothness and durability can be easily and quickly obtained, and a high-quality metal product can be provided from this metal work. It becomes.

尚、本発明は、本実施例に限られるものではなく、各構成要件の具体的構成は適宜設計し得るものである。   It should be noted that the present invention is not limited to the present embodiment, and a specific configuration of each component can be appropriately designed.

本実施例に係る金属ワークの表面処理装置の説明図である。It is explanatory drawing of the surface treatment apparatus of the metal workpiece which concerns on a present Example. 本実施例に係る金属ワークの表面処理方法における概略説明図である。It is a schematic explanatory view in the surface treatment method of the metal work concerning this example. 本実施例に係る表面処理を施した金属ワークの表面の拡大写真である。4 is an enlarged photograph of the surface of a metal workpiece subjected to a surface treatment according to the present embodiment. 本実施例に係る表面処理を施した金属ワークの表面の拡大写真である。4 is an enlarged photograph of the surface of a metal workpiece subjected to a surface treatment according to the present embodiment. 本実施例に係る表面処理を施した金属ワークの表面の拡大写真である。4 is an enlarged photograph of the surface of a metal workpiece subjected to a surface treatment according to the present embodiment. 本実施例に係る表面処理における炉内圧と皮膜厚さの関係を示す実験データである。6 is experimental data showing the relationship between the furnace pressure and the film thickness in the surface treatment according to the present example. 本実施例に係る表面処理における炉内圧と皮膜厚さの関係を示す実験データである。6 is experimental data showing the relationship between the furnace pressure and the film thickness in the surface treatment according to the present example. 本実施例に係る表面処理における炉内圧と皮膜厚さの関係を示す実験データである。6 is experimental data showing the relationship between the furnace pressure and the film thickness in the surface treatment according to the present example. 本実施例に係る表面処理における炉内圧と皮膜厚さの関係を示す実験データである。6 is experimental data showing the relationship between the furnace pressure and the film thickness in the surface treatment according to the present example. 本実施例に係る表面処理における炉内圧と皮膜厚さの関係を示す実験データである。6 is experimental data showing the relationship between the furnace pressure and the film thickness in the surface treatment according to the present example. 本実施例に係る表面処理における炉内圧と皮膜厚さの関係を示す実験データである。6 is experimental data showing the relationship between the furnace pressure and the film thickness in the surface treatment according to the present example. 本実施例に係る表面処理における炉内圧と皮膜厚さの関係を示す実験データである。6 is experimental data showing the relationship between the furnace pressure and the film thickness in the surface treatment according to the present example.

符号の説明Explanation of reference numerals

1 処理空間
2 水蒸気導入部
3 ガス導入部
1 processing space 2 steam introduction section 3 gas introduction section

Claims (8)

処理空間に金属ワークを配設し、この処理空間を真空状態にした後、高圧過熱水蒸気を処理空間に導入して前記金属ワークの表面に酸化皮膜を形成することを特徴とする金属ワークの表面処理方法。   Disposing a metal work in the processing space, evacuating the processing space, and then introducing high-pressure superheated steam into the processing space to form an oxide film on the surface of the metal work; Processing method. 処理空間に金属ワークを配設し、続いて、適宜なガスを処理空間に導入し、続いて、高圧過熱水蒸気を処理空間に導入して前記金属ワークの表面に酸化皮膜を形成することを特徴とする金属ワークの表面処理方法。   Arranging a metal work in the processing space, subsequently introducing an appropriate gas into the processing space, and subsequently introducing high-pressure superheated steam into the processing space to form an oxide film on the surface of the metal work. Surface treatment method for metal work. 処理空間に金属ワークを配設し、この処理空間を真空状態にした後、適宜なガスを処理空間に導入し、続いて、高圧過熱水蒸気を処理空間に導入して前記金属ワークの表面に酸化皮膜を形成することを特徴とする金属ワークの表面処理方法。   A metal work is disposed in the processing space, and after the processing space is evacuated, an appropriate gas is introduced into the processing space, and then high-pressure superheated steam is introduced into the processing space to oxidize the surface of the metal work. A surface treatment method for a metal work, comprising forming a film. 処理空間に金属ワークを配設し、この処理空間を真空状態にした後、適宜なガスを加熱した処理空間に導入し、続いて、高圧過熱水蒸気を加熱した処理空間に導入して前記金属ワークの表面に酸化皮膜を形成することを特徴とする金属ワークの表面処理方法。   A metal work is disposed in the processing space, and after the processing space is evacuated, an appropriate gas is introduced into the heated processing space. Subsequently, high-pressure superheated steam is introduced into the heated processing space, and the metal work is introduced. A method for treating a surface of a metal work, comprising forming an oxide film on the surface of the metal workpiece. 請求項2〜4のいずれか1項に記載の金属ワークの表面処理方法において、前記ガスとしてHe、N、H、CO、NH、Cまたはこれらのガスから選択される数種のガスの混合ガスを採用したことを特徴とする金属ワークの表面処理方法。 In the surface treatment method for a metal workpiece according to any one of claims 2 to 4, is selected as the gas He, from N 2, H 2, CO 2 , NH 3, C 2 H 2 , or a gas A surface treatment method for a metal work, wherein a mixed gas of several kinds of gases is employed. 請求項2〜5のいずれか1項に記載の金属ワークの表面処理方法において、高圧過熱水蒸気の導入前に、真空排気により適宜なガスを処理空間から排出することを特徴とする金属ワークの表面処理方法。   The surface treatment method for a metal work according to any one of claims 2 to 5, wherein an appropriate gas is exhausted from the processing space by vacuum evacuation before introducing the high-pressure superheated steam. Processing method. 請求項1〜6のいずれか1項に記載の金属ワークの表面処理方法において、酸化皮膜の形成後に処理空間を真空状態にすることを特徴とする金属ワークの表面処理方法。   7. The surface treatment method for a metal work according to claim 1, wherein the processing space is evacuated after forming the oxide film. 金属ワークの表面処理をする加熱可能な処理空間を有し、更に、この処理空間を真空状態にする真空処理機構,この処理空間に適宜なガスを導入するガス導入部及びこの処理空間に高圧過熱水蒸気を導入する水蒸気導入部が設けられていることを特徴とする金属ワークの表面処理装置。

It has a heatable processing space for surface treatment of metal work, and further has a vacuum processing mechanism for evacuating the processing space, a gas introduction unit for introducing an appropriate gas into the processing space, and high-pressure heating in the processing space. A surface treatment apparatus for a metal work, comprising a steam introduction section for introducing steam.

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Cited By (4)

* Cited by examiner, † Cited by third party
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WO2007000901A1 (en) * 2005-06-28 2007-01-04 Asahi Tech Co., Ltd. Surface modified member, surface treating method and surface treating system
JPWO2008044555A1 (en) * 2006-10-06 2010-02-12 旭テック株式会社 Corrosion resistant member and manufacturing method thereof
CN103074571A (en) * 2012-12-20 2013-05-01 华南理工大学 Steam action-based metal material surface modification method and device therefor
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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007000901A1 (en) * 2005-06-28 2007-01-04 Asahi Tech Co., Ltd. Surface modified member, surface treating method and surface treating system
JPWO2007000901A1 (en) * 2005-06-28 2009-01-22 旭テック株式会社 Surface-modified member, surface treatment method and surface treatment apparatus
JP4553939B2 (en) * 2005-06-28 2010-09-29 カナン精機株式会社 Surface-modified member, surface treatment method and surface treatment apparatus
CN101262938B (en) * 2005-06-28 2011-10-26 迦南精机株式会社 Surface modified member, surface treating method and surface treating device
US8216663B2 (en) 2005-06-28 2012-07-10 Canaan Precision Co., Ltd. Surface-modified member, surface-treating process and apparatus therefor
JPWO2008044555A1 (en) * 2006-10-06 2010-02-12 旭テック株式会社 Corrosion resistant member and manufacturing method thereof
JP4571217B2 (en) * 2006-10-06 2010-10-27 カナン精機株式会社 Corrosion resistant member and manufacturing method thereof
CN103074571A (en) * 2012-12-20 2013-05-01 华南理工大学 Steam action-based metal material surface modification method and device therefor
CN107268060A (en) * 2016-04-08 2017-10-20 科闳电子股份有限公司 Hole sealing equipment and method for sealing hole of anodic oxide film by using vacuum and jet steam

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