JP5650569B2 - Apparatus and method for surface hardening of ferrous material - Google Patents
Apparatus and method for surface hardening of ferrous material Download PDFInfo
- Publication number
- JP5650569B2 JP5650569B2 JP2011062031A JP2011062031A JP5650569B2 JP 5650569 B2 JP5650569 B2 JP 5650569B2 JP 2011062031 A JP2011062031 A JP 2011062031A JP 2011062031 A JP2011062031 A JP 2011062031A JP 5650569 B2 JP5650569 B2 JP 5650569B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- iron
- based material
- nitrogen
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000463 material Substances 0.000 title claims description 56
- 238000000034 method Methods 0.000 title claims description 30
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 title description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 102
- 239000007789 gas Substances 0.000 claims description 102
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 70
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 65
- 238000010438 heat treatment Methods 0.000 claims description 60
- 229910052742 iron Inorganic materials 0.000 claims description 51
- 238000005121 nitriding Methods 0.000 claims description 49
- 238000000354 decomposition reaction Methods 0.000 claims description 38
- 229910052757 nitrogen Inorganic materials 0.000 claims description 36
- 150000002500 ions Chemical class 0.000 claims description 23
- 229910021529 ammonia Inorganic materials 0.000 claims description 21
- 150000003254 radicals Chemical class 0.000 claims description 19
- 150000002831 nitrogen free-radicals Chemical class 0.000 claims description 12
- 230000003197 catalytic effect Effects 0.000 claims description 10
- -1 nitrogen ions Chemical class 0.000 claims description 9
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 54
- 238000011282 treatment Methods 0.000 description 31
- 230000000052 comparative effect Effects 0.000 description 9
- 238000003682 fluorination reaction Methods 0.000 description 8
- 229910000831 Steel Inorganic materials 0.000 description 7
- 239000010959 steel Substances 0.000 description 7
- 239000002436 steel type Substances 0.000 description 6
- 230000003746 surface roughness Effects 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 4
- 229910001315 Tool steel Inorganic materials 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910000915 Free machining steel Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910000639 Spring steel Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Description
本発明は、窒化処理によって鉄系材料の表面に硬化層を形成する鉄系材料の表面硬化装置および方法に関するものである。 The present invention relates to an iron-based material surface hardening apparatus and method for forming a hardened layer on the surface of an iron-based material by nitriding.
鉄系材料を窒化処理することにより表面硬度を向上できることは、一般に知られており、ガス窒化やイオン窒化・塩浴窒化など、各種の窒化処理が提案され実施されている。 It is generally known that surface hardness can be improved by nitriding an iron-based material, and various nitriding treatments such as gas nitriding, ion nitriding and salt bath nitriding have been proposed and implemented.
これらの窒化処理の中でも、イオン窒化処理は、グロー放電を利用してアンモニアと水素を分解することで窒素系ラジカルを生成し窒化する処理方法である。この処理は、低温での処理が可能で、かつ処理面を荒らしにくいという特徴がある。 Among these nitriding treatments, ion nitriding treatment is a treatment method in which nitrogen radicals are generated and nitrided by decomposing ammonia and hydrogen using glow discharge. This process is characterized in that it can be processed at a low temperature and it is difficult to roughen the processing surface.
このようなイオン窒化処理を改良した技術として、面粗度をほとんど変化させないで窒化処理するために、ＮＨラジカルと窒素分子イオンの発光強度比を制御する窒化方法が提案されている（特開平７−１１８８２６：特許文献１）。 As a technique for improving such ion nitriding treatment, a nitriding method for controlling the emission intensity ratio of NH radicals and nitrogen molecular ions has been proposed in order to perform nitriding treatment with almost no change in surface roughness (Japanese Patent Laid-Open No. 7-1993). -118826: Patent Document 1).
また、ワークが直接放電にさらされずに面荒れが起こりにくい方法として、炉内のプラズマ電極に直接窒化ガスを通過させてワークを処理する、ポストプラズマを用いる窒化処理方法が開示されている（特開２００７−１９１７８４：特許文献２）。 Further, a nitriding treatment method using post-plasma is disclosed as a method in which a workpiece is not directly exposed to electric discharge and surface roughness is unlikely to occur, and the workpiece is processed by passing a nitriding gas directly through a plasma electrode in a furnace (special feature). Open 2007-191784: Patent Document 2).
一方、処理速度を向上させるとともに、低温で処理ができ、かつ通常の窒化では困難な鋼種に窒化ができる方法として、窒化の前にフッ化処理を行なう窒化処理方法が開示されている（特許文献３：特公平８−９７６６）。 On the other hand, a nitriding method that performs fluorination before nitriding is disclosed as a method that can increase the processing speed, perform nitriding to a steel type that can be processed at a low temperature, and is difficult by ordinary nitriding (Patent Document) 3: Tokuhei 8-9766).
しかしながら、従来のイオン窒化処理は、真空下でワークに直接放電されるので、ワーク表面がスパッタリングされ、面が荒れるという課題がある。 However, since the conventional ion nitriding treatment is directly discharged to the work under vacuum, there is a problem that the work surface is sputtered and the surface becomes rough.
これに対し、特許文献１（特開平０７−１１８８２６号）の方法は、ワークに対してスパッタリングが起きない電流密度（０．００１ｍＡ〜２ｍＡ／ｃｍ２）で処理するので、面粗度をほとんど変えずに処理できる。ところが、電流密度範囲を限定しているので、当然のことながら出力を高くすることができず、どうしても処理時間が長くなってしまうという問題がある。また、ワークが複雑な形状をしていると、部分的に放電されない箇所ができてしまい、結果的に処理むらになりやすいため、処理できるワークの形状に制限ができてしまうのも問題である。 On the other hand, in the method of Patent Document 1 (Japanese Patent Laid-Open No. 07-118826), since the workpiece is processed at a current density (0.001 mA to 2 mA / cm 2 ) at which sputtering does not occur, the surface roughness is almost changed. Can be processed without However, since the current density range is limited, the output cannot naturally be increased, and there is a problem that the processing time is inevitably increased. In addition, when the workpiece has a complicated shape, a part that is not partially discharged is generated, and as a result, processing unevenness is likely to occur, so that the shape of the workpiece that can be processed can be limited. .
また、特許文献２（特開２００７−１９１７８４）の方法は、真空下で炉をヒーターで加熱しながら、炉内のスクリーン網にプラズマを発生させて、通過する窒化ガスで処理するポストプラズマ窒化処理である。ところが、均一な窒化層を得るためには、どうしても処理時間が長くなってしまう（２〜８時間）という問題が避けられない。一方、処理時間を短縮しようと出力を高くすると、スクリーン網との距離が近いところと遠いところで温度ばらつきができてしまい、結果的に処理むらになりやすいという問題が生じてしまう。 Further, the method of Patent Document 2 (Japanese Patent Application Laid-Open No. 2007-191784) is a post-plasma nitriding process in which plasma is generated on a screen mesh in a furnace while the furnace is heated with a heater in a vacuum, and the nitriding gas is processed. It is. However, in order to obtain a uniform nitride layer, the problem that the processing time is inevitably long (2 to 8 hours) is unavoidable. On the other hand, if the output is increased in order to shorten the processing time, temperature variations occur at places where the distance to the screen network is short and far, resulting in a problem that processing tends to be uneven.
特許文献３（特公平０８−００９７６６号）の方法は、イオン窒化やポストプラズマ窒化処理に比べて処理時間は短いものの、窒化処理時のアンモニア分解率が低いため処理効率が悪く、アンモニアガスの無駄が多いという問題がある。また、アンモニアの分解のほとんどが炉壁の触媒作用によってまかなわれるため、炉壁の直近でラジカルが発生し、炉壁が直接ラジカルに晒されて窒化されてしまい、炉壁寿命が短くなるという問題も生じる。 The method of Patent Document 3 (Japanese Patent Publication No. 08-009766) has a shorter processing time than ion nitriding or post-plasma nitriding, but has a low ammonia decomposition rate during nitriding, resulting in poor processing efficiency and waste of ammonia gas. There is a problem that there are many. In addition, since most of the decomposition of ammonia is performed by the catalytic action of the furnace wall, radicals are generated in the immediate vicinity of the furnace wall, the furnace wall is directly exposed to radicals and is nitrided, and the furnace wall life is shortened. Also occurs.
本発明は、このような課題を解決するためになされたものであり、処理時間を短縮できるうえ、雰囲気ガスの消費量を抑え、しかも炉壁のメンテナンス周期も延長することができる鉄系材料の表面硬化装置および方法の提供をその目的とする。
The present invention has been made to solve such a problem, and it is possible to shorten the processing time, suppress the consumption of atmospheric gas, and extend the maintenance cycle of the furnace wall. The object is to provide a surface curing apparatus and method.
上記目的を達成するため、本発明の鉄系材料の表面硬化装置は、
アンモニアを含むガスが導入され、このアンモニアを含むガスをプラズマで分解して窒素系ラジカルおよび／または窒素系イオンを含む雰囲気ガスを発生させる大気圧プラズマ分解装置と、
大気圧下の加熱空間内に鉄系材料を存在させ、上記窒素系ラジカルおよび／または窒素系イオンを含む雰囲気ガスが導入され、上記鉄系材料に作用させてその表面に窒化硬化層を形成させる加熱処理炉とを備え、
上記大気圧プラズマ分解装置と加熱処理炉は、上記雰囲気ガスが流通する雰囲気ガス路で接続された互いに別個の装置であり、
上記大気圧プラズマ分解装置のプラズマ空間において、上記雰囲気ガスを発生させ、
上記加熱処理炉の加熱空間において、上記雰囲気ガスを上記鉄系材料に作用させてその表面に窒化硬化層を形成させる
ことを要旨とする。
In order to achieve the above object, the surface hardening device for iron-based material of the present invention comprises:
An atmospheric pressure plasma decomposition apparatus in which a gas containing ammonia is introduced , and the gas containing ammonia is decomposed by plasma to generate an atmospheric gas containing nitrogen radicals and / or nitrogen ions;
An iron-based material is present in a heating space under atmospheric pressure, and an atmosphere gas containing the nitrogen-based radical and / or nitrogen-based ions is introduced to act on the iron-based material to form a nitrided hardened layer on the surface thereof. A heat treatment furnace ,
The atmospheric pressure plasma decomposition apparatus and the heat treatment furnace are separate apparatuses connected to each other through an atmospheric gas passage through which the atmospheric gas flows.
In the plasma space of the atmospheric pressure plasma decomposition apparatus, the atmospheric gas is generated,
The gist is to cause the atmosphere gas to act on the iron-based material in the heating space of the heat treatment furnace to form a nitrided hardened layer on the surface thereof.
上記目的を達成するため、本発明の鉄系材料の表面硬化方法は、
アンモニアを含むガスを導入し、このアンモニアを含むガスをプラズマで分解して窒素系ラジカルおよび／または窒素系イオンを含む雰囲気ガスを発生させる大気圧プラズマ分解工程と、
大気圧下の加熱空間内に鉄系材料を存在させ、上記窒素系ラジカルおよび／または窒素系イオンを含む雰囲気ガスを導入し、上記鉄系材料に作用させてその表面に窒化硬化層を形成させる加熱処理工程とを備え、
上記大気圧プラズマ分解工程を行う大気圧プラズマ分解装置と上記加熱処理工程を行う加熱処理炉は、上記雰囲気ガスが流通する雰囲気ガス路で接続された互いに別個の装置であり、
上記大気圧プラズマ分解装置のプラズマ空間において、上記雰囲気ガスを発生させ、
上記加熱処理炉の加熱空間において、上記雰囲気ガスを上記鉄系材料に作用させてその表面に窒化硬化層を形成させる
ことを要旨とする。
In order to achieve the above object, the surface hardening method of the iron-based material of the present invention comprises:
An atmospheric pressure plasma decomposition step of introducing a gas containing ammonia and decomposing the gas containing ammonia with plasma to generate an atmospheric gas containing nitrogen radicals and / or nitrogen ions;
An iron-based material is present in a heating space under atmospheric pressure, an atmosphere gas containing nitrogen-based radicals and / or nitrogen-based ions is introduced, and the nitrogen-based hardened layer is formed on the surface by acting on the iron-based material. A heat treatment process ,
The atmospheric pressure plasma decomposition apparatus that performs the atmospheric pressure plasma decomposition step and the heat treatment furnace that performs the heat treatment step are separate devices connected by an atmospheric gas path through which the atmospheric gas flows,
In the plasma space of the atmospheric pressure plasma decomposition apparatus, the atmospheric gas is generated,
The gist is to cause the atmosphere gas to act on the iron-based material in the heating space of the heat treatment furnace to form a nitrided hardened layer on the surface thereof.
本発明は、アンモニアを含むガスをプラズマで分解して得られた、窒素系ラジカルおよび／または窒素系イオンを含む雰囲気ガスを、加熱処理炉の鉄系材料に作用させてその表面に窒化硬化層を形成させる。
このように、高出力のプラズマ放電でアンモニア分解率を向上させ、生成した大量の窒素系ラジカルを利用することによって、短時間で厚い窒化硬化層を得ることが可能になり、従来に比べて処理時間の短縮を図ることができるうえ、低温での窒化硬化層の形成が可能となる。
また、鉄系材料が直接放電にさらされることなく、イオン窒化処理のようにスパッタリングで表面が荒らされることがないので、面粗度をほとんど変化させず、綺麗な表面状態を保った処理が可能となる。
また、鉄系材料が直接放電にさらされないので、イオン窒化のような放電ムラによる窒化硬化層の不均一化という問題が起こらない。よって、鉄系材料が複雑な形状であっても、大気圧雰囲気で加熱処理炉内へ供給した窒素系ラジカルおよび／または窒素系イオンがその隅々まで作用し、満遍なく均一な窒化硬化層を形成することができる。
また、大気圧雰囲気での加熱処理炉による温度制御が可能なので、従来のイオン窒化やポストプラズマ窒化のように、放電による温度の上昇や真空下で行うことによるワーク温度のバラつきが無く、炉内を均一な温度で処理して均一な窒化層を形成することが可能である。
また、プラズマ処理によるアンモニアガスの分解率を向上させ、アンモニアの消費量を削減することができる。
また、アンモニアガス分解の大部分をプラズマでまかない、炉壁を触媒とした分解が少なくなるため、炉壁の損傷を大幅に軽減し、メンテナンス周期を大幅に延長して、生産性向上に大きく貢献することとなる。
The present invention, a gas containing ammonia is obtained by decomposing by plasma, a nitrogen-based radical and / or nitrogen-based atmosphere gas containing ions, nitrided hard layer on the surface thereof to act on an iron-based material of the heat treatment furnace To form.
In this way, it is possible to obtain a thick nitrided hardened layer in a short time by improving the ammonia decomposition rate with high-power plasma discharge and using a large amount of generated nitrogen radicals. The time can be shortened and a nitrided hardened layer can be formed at a low temperature.
In addition, iron-based materials are not directly exposed to electric discharge, and the surface is not roughened by sputtering unlike ion nitriding treatment, so that the surface roughness is hardly changed and a treatment with a clean surface state is possible. It becomes.
Further, since the iron-based material is not directly exposed to the discharge, the problem of non-uniform nitriding hardened layer due to discharge unevenness such as ion nitriding does not occur. Therefore, even if the iron-based material has a complicated shape, nitrogen-based radicals and / or nitrogen-based ions supplied into the heat treatment furnace in an atmospheric pressure atmosphere act to every corner to form a uniform and uniform nitrided hardened layer. can do.
In addition, because temperature control is possible with a heat treatment furnace in an atmospheric pressure atmosphere, there is no increase in temperature due to discharge or variation in work temperature due to vacuum, as in conventional ion nitriding and post-plasma nitriding. Can be processed at a uniform temperature to form a uniform nitride layer.
Moreover, the decomposition rate of ammonia gas by plasma treatment can be improved, and the consumption of ammonia can be reduced.
In addition, most of the ammonia gas decomposition is not covered with plasma, and the decomposition using the furnace wall as a catalyst is reduced, greatly reducing damage to the furnace wall and greatly extending the maintenance cycle, greatly contributing to productivity improvement. Will be.
本発明の装置において、上記加熱処理炉は、加熱空間内に露呈する炉内構造物による触媒効果により、プラズマ分解装置において未分解のアンモニアガスを分解させる場合および、
本発明の方法において、上記加熱処理工程は、加熱空間内に露呈する炉内構造物による触媒効果により、プラズマ分解工程において未分解のアンモニアガスを分解させる場合には、
プラズマによっても分解しきれなかったアンモニアガスを炉壁の触媒効果で分解させることにより、アンモニアガスの利用効率をさらに向上させ、雰囲気ガスの消費量を削減できる。
In the apparatus of the present invention, the heat treatment furnace is configured to decompose undecomposed ammonia gas in the plasma decomposition apparatus by the catalytic effect of the furnace internal structure exposed in the heating space; and
In the method of the present invention, the heat treatment step is performed when the undecomposed ammonia gas is decomposed in the plasma decomposition step due to the catalytic effect of the in-furnace structure exposed in the heating space.
By decomposing ammonia gas, which could not be decomposed even by plasma, by the catalytic effect of the furnace wall, the utilization efficiency of ammonia gas can be further improved, and the consumption of atmospheric gas can be reduced.
本発明の方法において、上記鉄系材料は、あらかじめ表面にフッ化層を形成したものである場合には、
フッ化層を形成させて鉄系材料表面の酸化膜をフッ化膜に置き換えることにより、窒素系ラジカルによる窒化効率を促進し、低温での窒化硬化層の形成が可能になった。
また、フッ化層を形成させて鉄系材料表面の酸化膜をフッ化膜に置き換えることにより、窒化硬化層を形成させる時の効率を促進でき、かつ通常の窒化処理が困難な鋼種に窒化硬化層を形成することができ、窒化硬化層による表面硬化を適用できる鋼種が広くなる。
In the method of the present invention, when the iron-based material has a fluoride layer formed on the surface in advance,
By forming a fluorinated layer and replacing the oxide film on the surface of the iron-based material with a fluorinated film, the nitriding efficiency by the nitrogen-based radicals is promoted, and a nitriding hardened layer can be formed at a low temperature.
Also, by forming a fluorinated layer and replacing the oxide film on the surface of the iron-based material with a fluorinated film, the efficiency at the time of forming the nitriding hardened layer can be promoted, and nitriding hardening is performed on steel types that are difficult to nitriding A wide variety of steel types can be formed, and surface hardening by a nitrided hardened layer can be applied.
つぎに、本発明を実施するための最良の形態を説明する。 Next, the best mode for carrying out the present invention will be described.
図１は、本発明の方法を実現する本発明の装置の一例を示す図であり、（Ａ）は一部破断側面図、（Ｂ）はＢ−Ｂ断面図である。 FIG. 1 is a view showing an example of an apparatus of the present invention for realizing the method of the present invention, in which (A) is a partially broken side view, and (B) is a BB cross-sectional view.
この装置は、プラズマ中にアンモニアガスを導入して分解し、窒素系ラジカルおよび／または窒素系イオンを含むガスを得るプラズマ分解装置１と、
鉄系材料３が加熱された大気圧の加熱空間内に上記窒素系ラジカルおよび／または窒素系イオンを含むガスを導入し、上記鉄系材料３に作用させてその表面に窒化硬化層を形成させる加熱処理炉２とを備えている。
This apparatus introduces and decomposes ammonia gas into plasma to obtain a gas containing nitrogen radicals and / or nitrogen ions, and a plasma decomposition apparatus 1
A gas containing nitrogen radicals and / or nitrogen ions is introduced into an atmospheric pressure heating space in which the iron-based material 3 is heated, and acts on the iron-based material 3 to form a nitrided hardened layer on the surface thereof. And a heat treatment furnace 2.
上記プラズマ分解装置１は、大気圧下でグロー放電を起こしてプラズマを発生させるものである。具体的には、この例では、横置きの円筒状に形成され、図において左端の処理ガス導入路４からアンモニアガスを含む処理ガスを導入し、内部でプラズマと接触させてアンモニアを分解して窒素系ラジカルおよび／または窒素系イオンを含む雰囲気ガスを得る。この雰囲気ガスを図において右端の雰囲気ガス排出路５から排出する。 The plasma decomposing apparatus 1 generates plasma by causing glow discharge under atmospheric pressure. Specifically, in this example, it is formed in a horizontal cylindrical shape, and a processing gas containing ammonia gas is introduced from the processing gas introduction path 4 at the left end in the figure, and the ammonia is decomposed by contacting with the plasma inside. An atmospheric gas containing nitrogen radicals and / or nitrogen ions is obtained. This atmospheric gas is discharged from the atmospheric gas discharge path 5 at the right end in the figure.
ここで、窒素系ラジカルとは、ＮＨ２ラジカルやＮＨラジカル、Ｎラジカル等をいい、窒素系イオンとは、ＮイオンやＮＨイオンをいう。 Here, the nitrogen radicals refer to NH 2 radicals, NH radicals, N radicals, and the like, and the nitrogen radicals refer to N ions and NH ions.
上記プラズマ分解装置１は、周りに誘電体層６が形成された中心電極７と、その周りを取り囲む外殻電極８とで構成された筒状構造であり、誘電体層６と外殻電極８の間に形成されたプラズマ空間９においてアンモニアガスを分解させるようになっている。 The plasma decomposing apparatus 1 has a cylindrical structure composed of a center electrode 7 having a dielectric layer 6 formed around it and an outer shell electrode 8 surrounding the periphery, and the dielectric layer 6 and the outer shell electrode 8. The ammonia gas is decomposed in the plasma space 9 formed between the two.
上記プラズマ分解装置１のガス導入側端部は、複数（この例では４つ）のガス導入孔１０が穿設された蓋板１１で蓋がされている。さらに、各ガス導入孔１０とガス導入路４は流路板１３に形成されたガス流路１２で連通されている。 The gas introduction side end of the plasma decomposition apparatus 1 is covered with a cover plate 11 having a plurality of (four in this example) gas introduction holes 10. Further, each gas introduction hole 10 and the gas introduction path 4 communicate with each other through a gas flow path 12 formed in the flow path plate 13.
上記プラズマ分解装置１のガス排出側端部も同様の構造であり、ガス排出孔１４が穿設された蓋板１５で蓋がされている。さらに、各ガス排出孔１４とガス排出路５は流路板１６に形成されたガス流路１７で連通されている。図において、符号１８は、蓋板１１、１５を固定するためのフランジである。 The gas discharge side end of the plasma decomposing apparatus 1 has a similar structure, and is covered with a cover plate 15 having a gas discharge hole 14 formed therein. Further, each gas discharge hole 14 and the gas discharge path 5 are communicated with each other through a gas flow path 17 formed in the flow path plate 16. In the figure, reference numeral 18 denotes a flange for fixing the cover plates 11 and 15.
上記プラズマ分解装置１では、処理ガス導入路４からアンモニアガスを含む処理ガスを大気圧で導入する。 In the plasma decomposition apparatus 1, a processing gas containing ammonia gas is introduced from the processing gas introduction path 4 at atmospheric pressure.
上記処理ガスは、窒素、ヘリウム、ネオン、アルゴン等の不活性ガスをキャリアガスとして反応ガスであるアンモニアガスを所定の割合となるよう添加したものである。アンモニアガスの濃度は、対象とする鉄系材料の種類や、プラズマ発生の電流密度等の処理条件に応じて種々設定することができるが、１〜７０容量％程度が好適である。 The processing gas is an inert gas such as nitrogen, helium, neon, or argon added as a carrier gas to which ammonia gas as a reaction gas is added at a predetermined ratio. The concentration of the ammonia gas can be variously set according to the processing conditions such as the type of the iron-based material to be processed and the current density of plasma generation, but about 1 to 70% by volume is preferable.
そして、この例では、外殻電極８を接地し、誘電体層６を有する中心電極７と外殻電極８の間に、例えば１〜７０ｍＡ／ｃｍ２程度の電流密度、１〜２０ｋＨｚのパルス周期、１〜２０ｋＶ、０．５〜１０ｋＷの高周波電力を印加する。上記誘電体層６を形成する誘電体としては、例えばガラス、セラミックス、樹脂等の耐熱性のものを使用することができる。なお、大気圧プラズマ装置の形状や大きさに応じて、公知の条件に適宜変更することができる。 In this example, the outer shell electrode 8 is grounded, and a current density of, for example, about 1 to 70 mA / cm 2 and a pulse period of 1 to 20 kHz are provided between the central electrode 7 having the dielectric layer 6 and the outer shell electrode 8. , 1-20 kV, 0.5-10 kW high frequency power is applied. As the dielectric for forming the dielectric layer 6, for example, a heat-resistant material such as glass, ceramics, or resin can be used. In addition, it can change suitably to a well-known condition according to the shape and magnitude | size of an atmospheric pressure plasma apparatus.
このようにすることにより、誘電体層６を有する中心電極７と外殻電極８の間のプラズマ空間９にグロー放電を生じ、キャリアガスと反応ガスを励起して、高エネルギーのプラズマを発生させる。このプラズマをアンモニアガスに作用させて窒素系ラジカルと窒素系イオンに分解し、これらの窒素系ラジカルを含む雰囲気ガスを生成する。生成された雰囲気ガスは雰囲気ガス排出路５から排出されて加熱処理炉２に導入される。 By doing so, a glow discharge is generated in the plasma space 9 between the central electrode 7 having the dielectric layer 6 and the outer shell electrode 8, and the carrier gas and the reactive gas are excited to generate high energy plasma. . This plasma is allowed to act on ammonia gas to be decomposed into nitrogen-based radicals and nitrogen-based ions, thereby generating an atmospheric gas containing these nitrogen-based radicals. The generated atmospheric gas is discharged from the atmospheric gas discharge path 5 and introduced into the heat treatment furnace 2.
上記加熱処理炉２は、横置きの円筒状で、雰囲気ガスの導入側に雰囲気ガス導入路１９が形成され、反対側に排ガス排出路２０が形成されている。上記雰囲気ガス導入路１９は、プラズマ分解装置１の雰囲気ガス排出路５に接続され、プラズマ分解装置１で生成した雰囲気ガスを加熱処理炉２内に導入する。 The heat treatment furnace 2 has a horizontal cylindrical shape, and an atmosphere gas introduction path 19 is formed on the atmosphere gas introduction side, and an exhaust gas discharge path 20 is formed on the opposite side. The atmospheric gas introduction path 19 is connected to the atmospheric gas discharge path 5 of the plasma decomposition apparatus 1 and introduces the atmospheric gas generated by the plasma decomposition apparatus 1 into the heat treatment furnace 2.
上記加熱処理炉２の天井部には、導入された雰囲気ガスを炉内で攪拌する攪拌ファン２１がもうけられ、治具２２に設置された鉄系材料３に、雰囲気ガスを接触させるようになっている。上記加熱処理炉２には、図示しないヒータが設けられ、炉内空間を４００〜６００℃程度の加熱空間とし、装入された鉄系材料３を加熱するようになっている。 The ceiling portion of the heat treatment furnace 2 is provided with a stirring fan 21 that stirs the introduced atmosphere gas in the furnace, and the atmosphere gas comes into contact with the iron-based material 3 installed on the jig 22. ing. The heat treatment furnace 2 is provided with a heater (not shown) so that the furnace space is a heating space of about 400 to 600 ° C., and the charged iron-based material 3 is heated.
上記加熱処理炉２の炉体２３や、鉄系材料３が装填される治具２２は、例えば、耐熱合金等の金属から形成され、導入された雰囲気ガス中に実分解のアンモニアガスが含まれる場合に、その触媒効果によって分解するようになっている。 The furnace body 23 of the heat treatment furnace 2 and the jig 22 loaded with the iron-based material 3 are formed of, for example, a metal such as a heat-resistant alloy, and the actually introduced ammonia gas is included in the introduced atmospheric gas. In some cases, it is decomposed by its catalytic effect.
このように、上記加熱処理炉２は、加熱空間２４内に露呈する炉内構造物である炉体２３の炉壁や治具２２による触媒効果により、プラズマ分解工程において未分解のアンモニアガスがある場合にそれを分解させるようになっている。 As described above, the heat treatment furnace 2 has undecomposed ammonia gas in the plasma decomposition process due to the catalytic effect of the furnace wall 23 and the jig 22 of the furnace body 23 which is the in-furnace structure exposed in the heating space 24. It is supposed to break it down in case.
上記鉄系材料３としては、例えば、一般構造用圧延鋼材、溶接構造用圧延鋼材、高張力鋼、機械構造用炭素鋼、機械構造用合金鋼、炭素工具鋼、合金工具鋼、金型用鋼、高速度工具鋼、軸受け鋼、快削鋼、ステンレス鋼、耐熱鋼、ばね鋼、ダイス鋼、鋳鉄等、各種の鉄系材料を使用することができる。 Examples of the iron-based material 3 include, for example, rolled steel for general structure, rolled steel for welded structure, high-tensile steel, carbon steel for machine structure, alloy steel for machine structure, carbon tool steel, alloy tool steel, and mold steel. Various iron-based materials such as high-speed tool steel, bearing steel, free-cutting steel, stainless steel, heat-resistant steel, spring steel, die steel, and cast iron can be used.
上記鉄系材料３を加熱処理炉２の加熱空間２４内に装入して所定の温度に加熱し、その状態で、大気圧下の加熱空間２４内に上記窒素系ラジカルおよび窒素系イオンを含むガスを導入する。これにより、上記鉄系材料３に窒素系ラジカルが作用してその表面に窒化硬化層が形成される。 The iron-based material 3 is charged into the heating space 24 of the heat treatment furnace 2 and heated to a predetermined temperature. In this state, the nitrogen-based radicals and nitrogen-based ions are contained in the heating space 24 under atmospheric pressure. Introduce gas. Thereby, a nitrogen-based radical acts on the iron-based material 3 to form a nitrided hardened layer on the surface thereof.
上記加熱処理炉２における鉄系材料３の加熱温度は、鋼種、プラズマ発生条件、アンモニアガスの濃度等の諸条件によって適宜の温度に設定することができるが、おおむね、４００〜６００℃程度が好適である。また、加熱処理炉２における処理時間は、おおむね、０．５〜３時間程度とすることができる。なお、処理時間は、特殊な低温・長時間処理を適用する場合この限りでなく、４８時間ないしそれ以上とすることもある。 The heating temperature of the iron-based material 3 in the heat treatment furnace 2 can be set to an appropriate temperature depending on various conditions such as the steel type, plasma generation conditions, and the concentration of ammonia gas, but is preferably about 400 to 600 ° C. It is. Moreover, the processing time in the heat treatment furnace 2 can be about 0.5 to 3 hours. The treatment time is not limited to this when a special low temperature / long time treatment is applied, and may be 48 hours or more.
上記鉄系材料３は、あらかじめ表面にフッ化層を形成したものであることが好ましい。窒化硬化層を形成する前処理としてフッ化処理を実施することにより、鉄系材料３の表面の酸化膜を除去し、窒化処理をより短時間で行ない、時間あたりに形成される窒化硬化層の厚みが厚くなる。 It is preferable that the iron-based material 3 has a fluoride layer formed on the surface in advance. By performing the fluorination treatment as a pretreatment for forming the nitrided hardened layer, the oxide film on the surface of the iron-based material 3 is removed, the nitriding treatment is performed in a shorter time, and the nitrided hardened layer formed per time Thickness increases.
上記フッ化処理は、フッ化ガス雰囲気中に鉄系材料３を置いて所定時間加熱処理することにより行うことができる。 The fluorination treatment can be performed by placing the iron-based material 3 in a fluorinated gas atmosphere and performing a heat treatment for a predetermined time.
上記フッ化処理に使用するフッ化ガスとしては、フッ素ガスやフッ素化合物ガスを含むガス等、Ｆを含むガスであれば特に限定されるものではないが、ＮＦ３ガスをＮ２ガス等で希釈したガスが取り扱い性等の面で最も利用しやすい。例えば、窒素ガスにＮＦ３ガスを０．１〜１０容量％程度添加したガスを使用することができる。 The fluorination gas used for the fluorination treatment is not particularly limited as long as it contains F, such as a gas containing fluorine gas or fluorine compound gas, but NF 3 gas is diluted with N 2 gas or the like. The gas is the easiest to use in terms of handleability. For example, a gas obtained by adding about 0.1 to 10% by volume of NF 3 gas to nitrogen gas can be used.
上記フッ化処理における加熱温度は１５０〜６００℃程度が好ましく、処理時間は、１０〜９０分程度に設定することができる。なお、ワークの積載量や炉体に応じて、処理時間や処理温度は適宜変更することができる。 The heating temperature in the fluorination treatment is preferably about 150 to 600 ° C., and the treatment time can be set to about 10 to 90 minutes. The processing time and the processing temperature can be changed as appropriate according to the work load and the furnace body.
つぎに、実施例について説明する。 Next, examples will be described.
図１に示した装置により、下記の条件でプラズマ分解処理および加熱処理を行った。
（鉄系材料）
オーステナイト系ステンレス ＳＵＨ３５ φ７ｍｍ丸棒
（フッ化処理）
処理ガス ＮＦ３ １Ｌ／ｍｉｎ
処理温度 ２８０℃
処理時間 １．５時間
（プラズマ分解処理）
処理ガス：窒素６Ｌ／ｍｉｎ＋アンモニア０．６Ｌ／ｍｉｎ
プラズマ条件：１０ｋＨｚ−１０ｋＶ−１．３ｋＷ
電流密度：１７ｍＡ／ｃｍ２
（加熱処理）
処理温度：５００℃
処理時間：１時間
With the apparatus shown in FIG. 1, plasma decomposition treatment and heat treatment were performed under the following conditions.
(Iron-based materials)
Austenitic stainless steel SUH35 φ7mm round bar (fluorinated)
Process gas NF 3 1L / min
Processing temperature 280 ℃
Treatment time 1.5 hours (plasma decomposition treatment)
Process gas: Nitrogen 6L / min + Ammonia 0.6L / min
Plasma conditions: 10 kHz-10 kV-1.3 kW
Current density: 17 mA / cm 2
(Heat treatment)
Processing temperature: 500 ° C
Processing time: 1 hour
比較例として、下記の条件でフッ化処理およびガス窒化処理を行った。
（鉄系材料）
実施例と同様のオーステナイト系エンジンバルブを用いた。
（フッ化処理）
実施例と同様の条件でフッ化処理を行った。
（ガス窒化処理）
雰囲気ガス：窒素６Ｌ／ｍｉｎ＋アンモニア０．６Ｌ／ｍｉｎ
処理温度：５００℃
処理時間：１時間
As a comparative example, fluorination treatment and gas nitridation treatment were performed under the following conditions.
(Iron-based materials)
The same austenitic engine valve as in the example was used.
(Fluoride treatment)
The fluorination treatment was performed under the same conditions as in the example.
(Gas nitriding treatment)
Atmospheric gas: nitrogen 6L / min + ammonia 0.6L / min
Processing temperature: 500 ° C
Processing time: 1 hour
図２および図３は、上記実施例および比較例で得られたエンジンバルブの表層部断面写真（１０００倍）を示す。比較例の窒化硬化層が１１．５μｍであったのに対し、実施例では窒化硬化層が２３μｍである。実施例の処理ガス／比較例の雰囲気ガスの組成、実施例の加熱処理条件／比較例の窒化条件が共通であるにもかかわらず、実施例では、比較例の２倍の厚みで窒化硬化層が形成された。すなわち、実施例では同じ厚みの窒化硬化層を形成するのに、約半分の時間ですむことになる。したがって、必要な同じ厚みの窒化硬化層を得るのに必要なアンモニア量を約１／２に低減することが可能である。 2 and 3 show cross-sectional photographs (1000 times) of the surface layer portion of the engine valve obtained in the above-described Examples and Comparative Examples. The nitrided hard layer of the comparative example was 11.5 μm, whereas in the example, the nitrided hard layer was 23 μm. Although the composition of the processing gas of the example / the atmospheric gas composition of the comparative example and the heat treatment condition of the example / nitriding condition of the comparative example are the same, in the example, the nitrided hardened layer is twice as thick as the comparative example. Formed. That is, in the embodiment, it takes about half time to form the nitrided hard layer having the same thickness. Therefore, it is possible to reduce the amount of ammonia required to obtain a nitriding hardened layer having the same thickness as required to about 1/2.
図４は、処理時間を１時間、３時間、６時間とした以外は、上記実施例および比較例と同様の条件にして処理を行なったときの、窒化硬化層の厚みと処理時間との関係を示す線図である。１時間、３時間、６時間のいずれの処理時間においても、実施例では比較例の約２倍の厚みの窒化硬化層が得られた。 FIG. 4 shows the relationship between the thickness of the nitrided hardened layer and the treatment time when the treatment was carried out under the same conditions as in the above-mentioned examples and comparative examples, except that the treatment time was 1 hour, 3 hours, and 6 hours. FIG. In any of the treatment times of 1 hour, 3 hours, and 6 hours, a nitrided hardened layer having a thickness approximately twice that of the comparative example was obtained in the example.
図５は、電流密度すなわち放電出力を、７ｍＡ／ｃｍ２、１１ｍＡ／ｃｍ２、１７ｍＡ／ｃｍ２とした以外は、上記実施例と同様の条件にして処理を行なったときの、窒化硬化層の厚みと電流密度との関係を示す線図である。電流密度の高い１７ｍＡ／ｃｍ２において厚い窒化硬化層が得られている。 5, the current density or discharge power, except that the 7mA / cm 2, 11mA / cm 2, 17mA / cm 2 , the time of performing the process in the same conditions as described above in Example, the nitrided hard layer It is a diagram which shows the relationship between thickness and a current density. A thick nitrided hardened layer is obtained at 17 mA / cm 2 where the current density is high.
本実施形態は、アンモニアを含むガスをプラズマで分解して得られた窒素系ラジカルおよび／または窒素系イオンを含むガスを、加熱処理炉２の鉄系材料３に作用させてその表面に窒化硬化層を形成させる。
このように、高出力のプラズマ放電でアンモニア分解率を向上させ、生成した大量の窒素系ラジカルを利用することによって、短時間で厚い窒化硬化層を得ることが可能になり、従来に比べて処理時間の短縮を図ることができるうえ、低温での窒化硬化層の形成が可能となる。
また、鉄系材料３が直接放電にさらされることなく、イオン窒化処理のようにスパッタリングで表面が荒らされることがないので、面粗度をほとんど変化させず、綺麗な表面状態を保った処理が可能となる。
また、鉄系材料３が直接放電にさらされないので、イオン窒化のような放電ムラによる窒化硬化層の不均一化という問題が起こらない。よって、鉄系材料３が複雑な形状であっても、大気圧雰囲気で加熱処理炉２内へ供給した窒素系ラジカルおよび／または窒素系イオンがその隅々まで作用し、満遍なく均一な窒化硬化層を形成することができる。
また、大気圧雰囲気での加熱処理炉２による温度制御が可能なので、従来のイオン窒化やポストプラズマ窒化のように、放電による温度の上昇や真空下で行うことによるワーク温度のバラつきが無く、炉内を均一な温度で処理して均一な窒化層を形成することが可能である。
また、プラズマ処理によるアンモニアガスの分解率を向上させ、アンモニアの消費量を削減することができる。
また、アンモニアガス分解の大部分をプラズマでまかない、炉壁を触媒とした分解が少なくなるため、炉壁の損傷を大幅に軽減し、メンテナンス周期を大幅に延長して、生産性向上に大きく貢献することとなる。
In the present embodiment, a nitrogen-containing radical and / or a gas containing nitrogen-based ions obtained by decomposing ammonia-containing gas with plasma is allowed to act on the iron-based material 3 of the heat treatment furnace 2 to nitride and harden the surface. A layer is formed.
In this way, it is possible to obtain a thick nitrided hardened layer in a short time by improving the ammonia decomposition rate with high-power plasma discharge and using a large amount of generated nitrogen radicals. The time can be shortened and a nitrided hardened layer can be formed at a low temperature.
Further, since the surface of the iron-based material 3 is not directly exposed to discharge and the surface is not roughened by sputtering as in the case of ion nitriding, the surface roughness is hardly changed, and a process with a clean surface state is maintained. It becomes possible.
Further, since the iron-based material 3 is not directly exposed to the discharge, the problem of non-uniformization of the nitrided hard layer due to discharge unevenness such as ion nitriding does not occur. Therefore, even if the iron-based material 3 has a complicated shape, nitrogen-based radicals and / or nitrogen-based ions supplied into the heat treatment furnace 2 in an atmospheric pressure atmosphere act to every corner, and a uniform and uniform nitriding hardened layer Can be formed.
In addition, since the temperature can be controlled by the heat treatment furnace 2 in an atmospheric pressure atmosphere, there is no increase in temperature due to discharge or variation in the work temperature due to being performed under vacuum as in conventional ion nitriding or post-plasma nitriding, and the furnace The inside can be processed at a uniform temperature to form a uniform nitride layer.
Moreover, the decomposition rate of ammonia gas by plasma treatment can be improved, and the consumption of ammonia can be reduced.
In addition, since most of the ammonia gas decomposition is not covered with plasma and the decomposition using the furnace wall as a catalyst is reduced, damage to the furnace wall is greatly reduced, and the maintenance cycle is greatly extended, greatly contributing to productivity improvement. Will be.
本実施形態は、上記プラズマ分解装置１は、周りに誘電体層６が形成された中心電極７と、その周りを取り囲む外殻電極８とで構成された筒状構造であり、誘電体層６と外殻電極８の間に形成されたプラズマ空間９においてアンモニアガスを分解させるため、
円筒形のプラズマ空間９においてアンモニアガスを分解することにより、放電面積が大きくなってアンモニアガスの分解効率が高くなり、アンモニアガスの利用効率をさらに向上させ、雰囲気ガスの消費量を削減できる。
In this embodiment, the plasma decomposing apparatus 1 has a cylindrical structure including a center electrode 7 around which a dielectric layer 6 is formed and an outer shell electrode 8 surrounding the center electrode 7. In order to decompose ammonia gas in the plasma space 9 formed between the outer shell electrode 8 and the outer shell electrode 8,
By decomposing ammonia gas in the cylindrical plasma space 9, the discharge area is increased, the efficiency of decomposing ammonia gas is increased, the utilization efficiency of ammonia gas is further improved, and the consumption of atmospheric gas can be reduced.
本実施形態は、上記加熱処理炉２は、加熱空間２４内に露呈する炉内構造物による触媒効果により、プラズマ分解工程において未分解のアンモニアガスを分解させるため、
プラズマによっても分解しきれなかったアンモニアガスを炉壁の触媒効果で分解させることにより、アンモニアガスの利用効率をさらに向上させ、雰囲気ガスの消費量を削減できる。
In the present embodiment, the heat treatment furnace 2 decomposes undecomposed ammonia gas in the plasma decomposition step by the catalytic effect of the furnace internal structure exposed in the heating space 24.
By decomposing ammonia gas, which could not be decomposed even by plasma, by the catalytic effect of the furnace wall, the utilization efficiency of ammonia gas can be further improved, and the consumption of atmospheric gas can be reduced.
本実施形態は、上記鉄系材料３は、あらかじめ表面にフッ化層を形成したものとすることにより、
フッ化層を形成させて鉄系材料３表面の酸化膜をフッ化膜に置き換えることにより、窒素系ラジカルによる窒化効率を促進し、低温での窒化硬化層の形成が可能になった。
また、フッ化層を形成させて鉄系材料３表面の酸化膜をフッ化膜に置き換えることにより、窒化硬化層を形成させる時の効率を促進でき、かつ通常の窒化処理が困難な鋼種に窒化硬化層を形成することができ、窒化硬化層による表面硬化を適用できる鋼種が広くなる。
In the present embodiment, the iron-based material 3 has a fluoride layer formed on the surface in advance.
By forming a fluorinated layer and replacing the oxide film on the surface of the iron-based material 3 with a fluorinated film, the nitriding efficiency by nitrogen-based radicals is promoted, and a nitriding hardened layer can be formed at a low temperature.
In addition, by forming a fluoride layer and replacing the oxide film on the surface of the iron-based material 3 with a fluoride film, the efficiency at the time of forming the nitrided hardened layer can be promoted, and nitriding into a steel type that is difficult to perform normal nitriding treatment A hardened layer can be formed, and steel types to which surface hardening by a nitrided hardened layer can be applied are widened.
１ プラズマ分解装置
２ 加熱処理炉
３ 鉄系材料
４ 処理ガス導入路
５ 雰囲気ガス排出路
６ 誘電体層
７ 中心電極
８ 外殻電極
９ プラズマ空間
１０ ガス導入孔
１１ 蓋板
１２ ガス流路
１３ 流路板
１４ ガス排出孔
１５ 蓋板
１６ 流路板
１７ ガス流路
１８ フランジ
１９ 雰囲気ガス導入路
２０ 排ガス排出路
２１ 攪拌ファン
２２ 治具
２３ 炉体
２４ 加熱空間
DESCRIPTION OF SYMBOLS 1 Plasma decomposition apparatus 2 Heat processing furnace 3 Ferrous material 4 Process gas introduction path 5 Atmospheric gas discharge path 6 Dielectric layer 7 Center electrode 8 Outer shell electrode 9 Plasma space 10 Gas introduction hole 11 Cover plate 12 Gas flow path 13 Flow path Plate 14 Gas discharge hole 15 Cover plate 16 Channel plate 17 Gas channel 18 Flange 19 Atmospheric gas introduction path 20 Exhaust gas discharge path 21 Stirring fan 22 Jig 23 Furnace body 24 Heating space
Claims (5)
大気圧下の加熱空間内に鉄系材料を存在させ、上記窒素系ラジカルおよび／または窒素系イオンを含む雰囲気ガスが導入され、上記鉄系材料に作用させてその表面に窒化硬化層を形成させる加熱処理炉とを備え、
上記大気圧プラズマ分解装置と加熱処理炉は、上記雰囲気ガスが流通する雰囲気ガス路で接続された互いに別個の装置であり、
上記大気圧プラズマ分解装置のプラズマ空間において、上記雰囲気ガスを発生させ、
上記加熱処理炉の加熱空間において、上記雰囲気ガスを上記鉄系材料に作用させてその表面に窒化硬化層を形成させる
ことを特徴とする鉄系材料の表面硬化装置。 An atmospheric pressure plasma decomposition apparatus in which a gas containing ammonia is introduced , and the gas containing ammonia is decomposed by plasma to generate an atmospheric gas containing nitrogen radicals and / or nitrogen ions;
An iron-based material is present in a heating space under atmospheric pressure, and an atmosphere gas containing the nitrogen-based radical and / or nitrogen-based ions is introduced to act on the iron-based material to form a nitrided hardened layer on the surface thereof. A heat treatment furnace ,
The atmospheric pressure plasma decomposition apparatus and the heat treatment furnace are separate apparatuses connected to each other through an atmospheric gas passage through which the atmospheric gas flows.
In the plasma space of the atmospheric pressure plasma decomposition apparatus, the atmospheric gas is generated,
In the heating space of the said heat processing furnace, the said atmosphere gas is made to act on the said iron-type material, and the nitriding hardening layer is formed in the surface, The surface hardening apparatus of the iron-type material characterized by the above-mentioned .
大気圧下の加熱空間内に鉄系材料を存在させ、上記窒素系ラジカルおよび／または窒素系イオンを含む雰囲気ガスを導入し、上記鉄系材料に作用させてその表面に窒化硬化層を形成させる加熱処理工程とを備え、
上記大気圧プラズマ分解工程を行う大気圧プラズマ分解装置と上記加熱処理工程を行う加熱処理炉は、上記雰囲気ガスが流通する雰囲気ガス路で接続された互いに別個の装置であり、
上記大気圧プラズマ分解装置のプラズマ空間において、上記雰囲気ガスを発生させ、
上記加熱処理炉の加熱空間において、上記雰囲気ガスを上記鉄系材料に作用させてその表面に窒化硬化層を形成させる
ことを特徴とする鉄系材料の表面硬化方法。 An atmospheric pressure plasma decomposition step of introducing a gas containing ammonia and decomposing the gas containing ammonia with plasma to generate an atmospheric gas containing nitrogen radicals and / or nitrogen ions;
An iron-based material is present in a heating space under atmospheric pressure, an atmosphere gas containing nitrogen-based radicals and / or nitrogen-based ions is introduced, and the nitrogen-based hardened layer is formed on the surface by acting on the iron-based material. A heat treatment process ,
The atmospheric pressure plasma decomposition apparatus that performs the atmospheric pressure plasma decomposition step and the heat treatment furnace that performs the heat treatment step are separate devices connected by an atmospheric gas path through which the atmospheric gas flows,
In the plasma space of the atmospheric pressure plasma decomposition apparatus, the atmospheric gas is generated,
A method for hardening a surface of an iron-based material, wherein the atmosphere gas is allowed to act on the iron-based material in a heating space of the heat treatment furnace to form a nitrided hardened layer on the surface thereof .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011062031A JP5650569B2 (en) | 2011-03-22 | 2011-03-22 | Apparatus and method for surface hardening of ferrous material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011062031A JP5650569B2 (en) | 2011-03-22 | 2011-03-22 | Apparatus and method for surface hardening of ferrous material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012197479A JP2012197479A (en) | 2012-10-18 |
| JP5650569B2 true JP5650569B2 (en) | 2015-01-07 |
Family
ID=47179992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011062031A Expired - Fee Related JP5650569B2 (en) | 2011-03-22 | 2011-03-22 | Apparatus and method for surface hardening of ferrous material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5650569B2 (en) |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6386857A (en) * | 1986-09-30 | 1988-04-18 | Toshiba Corp | Surface treatment of metal member with plasma |
| JPH08109466A (en) * | 1994-10-11 | 1996-04-30 | Nippon Steel Corp | Nitriding of steel sheet |
| JPH08180998A (en) * | 1994-12-26 | 1996-07-12 | Mitsubishi Heavy Ind Ltd | Method and device for forming diffusion film on surface of steel plate |
| JP2002194527A (en) * | 2000-12-27 | 2002-07-10 | Kawasaki Heavy Ind Ltd | Nitriding equipment with electron beam excitation plasma |
| JP3698065B2 (en) * | 2001-03-28 | 2005-09-21 | セイコーエプソン株式会社 | Surface treatment method and apparatus, and solid joining method |
| JP4252749B2 (en) * | 2001-12-13 | 2009-04-08 | 忠弘 大見 | Substrate processing method and substrate processing apparatus |
| JP4295350B1 (en) * | 2008-09-17 | 2009-07-15 | エア・ウォーター株式会社 | Method of using heat treatment furnace, heat treatment method and heat treatment furnace |
| JP5590810B2 (en) * | 2009-02-26 | 2014-09-17 | トヨタ自動車株式会社 | Steel manufacturing method |
| JP5606707B2 (en) * | 2009-09-04 | 2014-10-15 | 学校法人 名城大学 | Nitriding processing apparatus and nitriding processing method |
| WO2012153767A1 (en) * | 2011-05-09 | 2012-11-15 | 学校法人トヨタ学園 | Nitriding method and nitriding equipment |
-
2011
- 2011-03-22 JP JP2011062031A patent/JP5650569B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012197479A (en) | 2012-10-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0872569B1 (en) | Nitriding process and nitriding furnace thereof | |
| MXPA02007348A (en) | Modified low temperature case hardening processes. | |
| Roliński | Plasma-assisted nitriding and nitrocarburizing of steel and other ferrous alloys | |
| RU2418096C2 (en) | Procedure for creation of macro non-uniform structure of material at nitriding | |
| CN101238236B (en) | Ion nitriding method | |
| JP5650569B2 (en) | Apparatus and method for surface hardening of ferrous material | |
| WO2020189195A1 (en) | Plasma nitridization method | |
| JP5944797B2 (en) | Iron-based alloy material and method for producing the same | |
| RU2562185C1 (en) | Modification method of surface of items from titanium alloys in vacuum | |
| JP2008115422A (en) | Plasma nitriding device and nitriding method | |
| JP2004332074A (en) | Carburizing method | |
| US3616383A (en) | Method of ionitriding objects made of high-alloyed particularly stainless iron and steel | |
| RU2534907C1 (en) | Procedure for local treatment of material at nitriding in glow discharge | |
| RU2558320C1 (en) | Surface hardening of titanium alloys in vacuum | |
| JP2006028588A (en) | Nitriding treatment method | |
| JP2005272884A (en) | Gas nitriding method | |
| KR100594998B1 (en) | Method for nitriding of Ti and Ti alloy | |
| JP2002356764A (en) | Nitriding method and device using electron beam excitation plasma | |
| RU2562187C1 (en) | Method of modification of surface of products from titanic alloys in glow discharge | |
| JP2006249508A (en) | Method for nitriding titanium and titanium alloy | |
| JP2890422B2 (en) | Plasma carburizing method | |
| TWI629378B (en) | Surface treatment for stainless steel | |
| RU2534697C1 (en) | Method of local material treatment with effect of hollow cathode during ionic nitriding | |
| RU2534906C1 (en) | Method of local material treatment with effect of hollow cathode during ionic nitriding | |
| RU2682986C1 (en) | Steel product strengthening method by ion-plasma carbonitriding |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20131018 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140428 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140603 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140707 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20141111 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20141113 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5650569 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |