JP2004340758A - Micro-fine flow passage, and micro chemical chip containing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a micro-fine flow passage with excellent workability and mass production performance, and allowing arrangement of an auxiliary measuring means and a physical environment regulation equipment in a periphery, and a micro chemical chip having the passage. <P>SOLUTION: The first and second plane members 101, 102 are arranged opposedly, and the micro-fine flow passage 103 is formed by protruded flow passage walls 101a, 101b provided on the opposed faces. The micro-fine flow passage is provided with the first plane member 111 wherein the first wall member 111a for constituting one side wall of the micro-fine flow passage is formed protrudely, and the second plane member 112 wherein the second wall member 112a for constituting the other side wall of the micro-fine flow passage is formed protrudely, and the micro-fine flow passage is formed by arranging a surface of the first plane member and the second plane member to form a micro-fine flow passage width by the first wall member and the second wall member. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
[Industrial applications]
The present invention relates to a microchannel, a microchemical chip including the microchannel, and a method for manufacturing the microchannel.
[0002]
[Prior art]
A microchemical chip in which a flow path including a fine groove having a width of about 100 μm and a depth of about 50 μm for optical analysis and a depression having a diameter of several hundred μm is integrated on a glass substrate having a side of several tens mm is used for flow analysis. It is used for reacting, synthesizing, and extracting trace amounts of chemical substances in the state, and for separating DNA fragments cut into various lengths. What is used for DNA analysis is called a DNA chip.
[0003]
In the analysis using this microchemical chip, a fluid flowing through the above-mentioned groove provided on the glass substrate by electrophoresis or the like and a chemical substance accumulated in the depression are analyzed, and ultraviolet light or the like is applied to these minute grooves or depressions. This is performed by irradiating infrared light and guiding reflected light and transmitted light from the portion to the analysis section through an optical element.
[0004]
The microchannel used for such an application is a micropipe having a typical dimension of an opening cross section of several tens μm to several hundred μm.
[0005]
FIG. 1 shows an example of a microchemical chip as a fine straight channel (capillary) electrophoresis apparatus used for separating DMA fragments and the like. FIG. 2 is a cross-sectional view of the microchannel 2, and FIG. 3 is an external view of the microchemical chip.
[0006]
On the transparent insulating substrate 1, there are recessed a quantitative flow path 2 and a detection flow path 3 which are two linear fine flow paths intersecting in a cross shape, and these fine flow paths 2 and 3 The sealing is carried out by laminating a transparent insulating plate 4 for sealing and tightly fixing it with an adhesive or the like. An opening 5 for injecting and extracting a sample is provided in the enclosing transparent insulating plate 4 so as to correspond to the fine channel. The transparent insulating substrate 4 for encapsulation is provided with electrodes at both ends of each microchannel. Further, a gel having a nanometer-scale network structure is sealed inside the fine channel.
[0007]
Here, since optical analysis is performed in the flow path as described later, quartz having excellent optical characteristics is often used as the transparent insulating substrate. And since a flow path is usually formed by digging a groove by etching, it has a substantially semicircular cross-sectional shape as shown in the cross-sectional view of FIG. ).
[0008]
FIG. 3 is a perspective view showing an appearance and an internal state of the completed microchemical chip 10 and shows an example in which an inlet and an electrode 6 for a fine channel are formed.
[0009]
Next, how to use such a microchemical chip will be described. When one of the electrodes provided at both ends of the fine channel is set to the ground potential and a predetermined positive voltage is applied to the other, an electrophoresis phenomenon occurs in which a negatively charged sample (such as DNA) moves to the positive electrode side. . In this example, the sample flows along with the buffer from the ground side of the flow path for quantification to the positive electrode side, accumulates in an amount corresponding to the volume of this portion at the intersection, and then moves the flow path for detection toward the positive side. Flows. At this time, since the amount of charge of the DNA varies depending on its length, and the interaction with the network structure of the sealed gel also differs, the shorter the length, the faster the DNA. Therefore, it is possible to perform separation by different positions on the flow channel depending on the length of the DNA.
[0010]
The DNA separated in this manner can be observed by utilizing ultraviolet absorption, or by subjecting DNA to fluorescent modification and measuring the amount of light.
[0011]
FIG. 4 is a schematic diagram summarizing the functions of the microchemical chip. This figure shows that two chemicals A and B can be mixed and reacted on the flow channel, separated on the flow channel, and the substance on the flow channel can be detected by light transmission. .
[0012]
[Non-patent literature]
"Preparation of quartz electrophoresis chip using micromachining technology and evaluation of its basic characteristics" Hiroaki Nakanishi et al., Shimadzu review, vol. 56 No. 1-2, 19999.8
[0013]
[Problems to be solved by the invention]
However, since quartz as a transparent substrate material is a substance that is very difficult to be etched, processing is extremely difficult, and the etching rate is as small as 1 μm or less per minute depending on conditions, and mass production is difficult. . In addition, a method of attaching an opening and a connector to a flat substrate member is also generally employed for an insertion port for extracting DNA or the like, and such a structure also hinders workability and mass productivity.
[0014]
In addition, in order to electronically measure the products generated by these fine channels, auxiliary measuring means such as a functional thin film or a chip-shaped silicon circuit may be provided near the fine channels. Generally, these measuring means and their associated elements and components are arranged on the upper surface or lower surface of the flow channel, and it is difficult to say that the peripheral portion of the micro flow channel is used optimally and efficiently. Was.
[0015]
Further, as a method of using the fine flow path, there is a case where the physical environment around the fine flow path is adjusted in addition to the simple measurement. For example, a heater for increasing the temperature around the fine flow path or a refrigerant pipe for lowering the temperature may be provided adjacent to the fine flow path. It is only installed in
[0016]
Also, when a fine channel is formed by press molding (see Japanese Patent Application No. 2002-89495b), it is necessary for a mold to have a convex portion which becomes a negative of the channel. Must be mechanically or etched away over a large area. In press molding, since the surface of a mold is accurately transferred to a material, it is necessary to perform processing for a considerable time to ensure accuracy.
[0017]
SUMMARY OF THE INVENTION An object of the present invention is to provide a fine flow path which is excellent in workability and mass productivity, and in which a measurement auxiliary means and a physical environment adjusting device can be arranged around the micro flow path, and a microchemical chip having the same.
[0018]
[Means for Solving the Problems]
According to the embodiment of the present invention, there is provided a fine channel formed by the first and second planar members facing each other and formed by the protruding channel walls provided on the facing surfaces.
[0019]
According to the embodiment of the present invention, a pair of wall members formed on one surface with a fine channel width therebetween is attached to the first flat member formed in a convex shape, and at least a top portion of the wall member. And a fine flow path formed by a closed space surrounded by the surface of the first planar member, the wall member, and the second planar member.
[0020]
According to the embodiment of the present invention, the first wall member forming one side wall of the fine channel is formed in a convex shape, and the first flat member forming the other side wall of the fine channel is formed. A second planar member having a second wall member formed in a convex shape, wherein the first planar member surface and the second planar member are separated from each other by the first wall member and the second wall member. Are arranged facing each other so as to form the fine channel width, thereby providing a fine channel.
[0021]
According to the embodiment of the present invention, a pair of wall members formed on one surface with a fine channel width therebetween is attached to the first flat member formed in a convex shape, and at least a top portion of the wall member. A plurality of micro-flows formed by a closed space surrounded by the surface of the first planar member, the wall member and the second planar member, and reacting or separating a chemical substance. A microchemical chip comprising a channel, a well provided at an end of the plurality of microchannels, and an optical element for analysis provided in the middle of the microchannels is provided.
[0022]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, some embodiments of the present invention will be described with reference to the drawings.
[0023]
FIG. 5 is a cross-sectional view showing a first embodiment of the fine channel according to the present invention, which is used for a microchemical chip.
[0024]
On the flat substrate 101, wall members 101a and 101b whose cross sections are substantially trapezoidal or substantially triangular are formed so as to protrude with a channel width separation distance, and a second flat substrate 102 is mounted on these wall members. Thus, the closed space forms the flow path 103. An adhesive layer 105 is interposed between the second planar substrate 102 and the wall materials 101a and 101b, and these members are fastened.
[0025]
The spaces 104a and 104b outside the flow path 103 of the wall materials 101a and 101b may be left hollow if the adhesive strength is sufficient, and observation element parts and environment adjustment parts in the flow paths can be mounted here. If the bonding strength is not sufficient, a filler such as a thermosetting resin can be injected and cured.
[0026]
In addition, the flow path is assumed to extend from the near side to the back of the drawing, and electrodes and an inlet / outlet (not shown) are provided at both ends of the flow path. Since the present fine channel basically has a structure that is opened in the flow direction, it is possible to easily extend the channel and combine it with a channel having a different function by a joining means or a connecting means according to the material.
[0027]
FIG. 6 is a sectional view showing a second embodiment of the fine flow channel according to the present invention, and the configuration of the flow channel and the positions of the electrodes and the inlet / outlet (not shown) are completely the same. I'm
[0028]
In this embodiment, the first planar substrate 111 having a substantially trapezoidal or substantially triangular wall member 111a and the first planar substrate 112 having a substantially trapezoidal or substantially triangular wall member 112a are inverted from each other. And the closed space 113 thus formed is used as a fine channel. As in the first embodiment, the fastening is performed with an adhesive layer 115 interposed between the wall member and the flat substrate in contact with the wall member.
[0029]
Also in this embodiment, the spaces 114a and 114b outside the flow path 103 of the wall materials 111a and 112a are hardened by injecting a filler such as a thermosetting resin or glass, even if they are hollow, depending on the adhesive strength. Is also good.
[0030]
The features of this embodiment are that the number of components can be reduced and that the width of the fine channel can be freely adjusted. That is, since the distance between the two wall members 111a and 111b can be freely adjusted, the fine channel width can be selected according to the application. Note that the wall member is not limited to a linear shape, and various types of flat substrates 121 and 122 having curved wall members shown in FIG. 7 and flat substrates 131 and 132 having zigzag wall members shown in FIG. A shape can be adopted.
[0031]
FIG. 9 illustrates a third embodiment, in which planar substrates 141 and 142 in which two wall members having a triangular cross section are arranged in parallel are inverted and combined. In this case, the angle of the wall member of the opposing flat substrate is set such that the entire wall contacts, and the adhesive 143 is applied to and fixed to the contact surface. In this embodiment, the angle of the wall member is at an angle of 60 ° with respect to the horizontal. As a result, the bonding area can be increased, so that the strength can be secured without injecting the filler into the space. It has become.
[0032]
FIG. 10 is a schematic view illustrating a method of manufacturing a flat substrate having the above-described wall member by molding. Here, a state in which a breath is performed with a quartz material 303 interposed between an upper mold 301 and a lower mold 302 is shown.
[0033]
As described above, quartz is used in a microchannel such as a microchemical chip in terms of chemical resistance and optical characteristics. However, in the case of quartz, since a processing environment at a high temperature in a vacuum is required, it is difficult to apply a metallic mold, and glassy carbon is often used as a suitable material. However, this material is difficult to process, and at present, it is barely possible to dig a groove. In the present invention, each flat substrate is obtained by using the grooved die to obtain a flat substrate having a convex wall member. Therefore, since there is no need to grind or etch the mold material on a large area plane, mass production is possible and manufacturing costs can be reduced. For example, when a groove having a depth of about 100 μm is formed in quartz, a processing time of several hours has been required until now, but according to the configuration of the present invention, formation of the fine channel is completed in a few minutes.
[0034]
In addition, if the shape of the wall member is devised, the cross flow path can be formed in any of the first and second embodiments. Also, the wells at the injection portion and the extraction portion can be easily formed by performing additional processing on the flat substrate.
[0035]
Hereinafter, an embodiment in which various functions are provided in a space near a fine channel will be described.
[0036]
Since the microchannel according to the embodiment of the present invention described above is configured to be surrounded by a thin wall in a direction other than the flow direction, various members, components, elements, and the like can be arranged there. Will be possible. For example, it is possible to dispose a sensor for observing the state in the flow path, or an element component for changing a physical environment such as heat or electromagnetic. In the case of optical handling, a part of the wall material is formed into an optical component and used. Further, when a sensor or the like constructed on a silicon member is used, the member itself is used for a wall surface constituting a flow path.
[0037]
For the connection of the flow channels and the extraction of the reagent sample, members related to the cross-sectional direction of the flow are attached due to the structure of the fine flow channel of the present invention.
[0038]
Hereinafter, typical ones will be described in detail.
[0039]
FIG. 11 is a cross-sectional view showing an embodiment in which the wall member of the fine channel is used for a reflection optical system.
[0040]
In this embodiment, the reflective films 154a and 154b are formed on the surfaces of the wall members 151a and 151b constituting the fine channels 153 of the flat substrate 151, and the light emitting unit 155 such as an LED and the PD and the like are formed on the upper substrate 152. The light receiving section 156 was arranged in consideration of the refractive index of the planar member, and an optical path 157 crossing the fine channel was constructed.
[0041]
With such a configuration, velocity measurement and spectroscopic measurement of the microchannel fluid can be performed.
[0042]
FIG. 12 is a cross-sectional view showing an embodiment in which the wall member of the fine flow path is used for a reflection optical system, similarly to FIG. This embodiment is different from the first embodiment in that the light emitting unit 165 and the light receiving unit 166 are arranged below the flat substrate 161. That is, it is characterized in that an optical path is constructed using the internal reflection and refraction of the wall members 161a and 161b.
[0043]
FIG. 13 shows an embodiment in which the area outside the wall member is effectively used, in which a light emitting unit 173 and a light receiving unit 174 are directly provided on the surfaces of the wall members 171a and 171b. In order to dispose such a light emitting unit 173 and a light receiving unit 174, a film forming process may be performed directly on the surface of the wall member, or may be assembled later in a space between the upper and lower flat substrates. The material 175 to be filled later in this space is also used as a molding material for the light emitting unit 173 and the light receiving unit 174.
[0044]
FIG. 14 is a sectional view showing an embodiment in which one of the flat members is a silicon substrate. That is, the first flat substrate 181 has the same configuration as in each of the embodiments described above, but the second flat substrate 182 superposed thereon is a silicon substrate. Various sensor devices and processing electronic circuits can be directly formed on the silicon substrate 182. In the example shown in FIG. 14, the light emitting unit 183 and the light receiving unit 184 are formed on a silicon substrate 182.
[0045]
Further, in this embodiment, a reflection film 185 is provided on the bottom surface of the flow path, and an optical path is formed in which light emitted from the light emitting section 183 passes through the flow path, is reflected by the reflection film 185 on the bottom face, and reaches the light receiving section 184. I have. Further, by setting the apex angle θ of the wall member to be smaller than an angle that is specifically defined when etching the silicon crystal, it is possible to achieve easy positioning.
[0046]
In addition, a material other than silicon can be used as the flat substrate, but in that case, a groove for positioning and an apex angle θ may be set according to the material.
[0047]
Although an optical device has been described as an example, a temperature device or an electromagnetic device can form a film according to characteristics in a region near the flow path. Hereinafter, such an embodiment will be described.
[0048]
FIG. 15 is a cross-sectional view illustrating an embodiment in which the temperature control in the fine channel can be performed.
[0049]
In this embodiment, the dimensional relationship is such that the inner walls of the wall members 191a and 101b provided on the first planar substrate 191 and the outer walls of the wall members 192a and 192b provided on the second planar substrate 192 fit. The flow path is formed by these combinations.
[0050]
On the other hand, a cooling source 194 is provided on the lower surface of the first flat substrate 191, and a heating source 193 is provided on the upper surface of the second flat substrate 192. These heating / cooling sources are arranged along the flow path as needed. As a heating source, various types such as a normal heater, hot air, etc., and a water cooling pipe as a cooling source can be used, but if a laser or infrared ray formed to an appropriate size is used, only the heating according to the size of the heat source is used. The temperature can be raised in the area. The arrows in the figure indicate the transfer of heat from the heating source. Similarly, by using a Peltier element, a heat sink, or a fan as a cooling source, the temperature can be lowered by the cooling source when heating is stopped.
[0051]
In addition, a temperature measuring unit 195 is mounted on the second flat substrate immediately above the flow path, so that temperature control can be performed using a control device (not shown).
[0052]
FIG. 16 also shows an embodiment in which heating and cooling are performed, which is the same as the previous examples in that a first flat substrate 201 and a second flat substrate are mounted thereon. However, the difference is that a heating pipe 203 and a cooling pipe 204 are provided in the vicinity of the fine channel so as to penetrate them.
[0053]
In addition, a temperature control element is provided on the second flat substrate 202 immediately above the flow path, and a heat medium or a refrigerant is supplied to these tubes based on the measurement result, thereby forming a flow path area. Temperature can be controlled.
[0054]
These heat sources and cooling sources, as well as the shapes of the temperature measuring means and the fine channel, can be arbitrarily combined according to the purpose. Further, the temperature control range can be arbitrarily selected. Note that, with the configuration as shown in FIG. 16, a similar arrangement method can be used when not only the temperature but also an electromagnetic or optical radiation source is used.
[0055]
FIG. 17 is a cross-sectional view showing still another embodiment. In each of the above-described embodiments, the flat substrate is a dense material such as a glass plate. In this embodiment, the first substrate in which the grooves are formed so that the flow paths each having a substantially triangular cross section are arranged side by side. Mounted on top of the planar substrate 211 is a porous substrate 212. Then, a functional material film 213 is formed on the porous substrate 212. This functional material film is optional. A heat source 215 is provided on the lower surface of the first planar substrate 212.
[0056]
In such a flow path, when a substance smaller than the pore diameter of the porous member is present in the flow path, this substance selectively permeates and flows out as indicated by reference numeral 214. As a result, a pressure difference is generated inside and outside the flow path, and this pressure difference is increased by pressurizing the passing material in the flow path with a pressure source or heating the material with a heat source 215 to apply thermal energy to the substance in the flow path. You. Further, laser irradiation or reaction energy of a substance can be used.
[0057]
As the functional substance added to the surface of the porous substrate or the inside of the pore, a film or the like having a function of increasing the selectivity of the substance is used. This is because, generally, the higher the temperature, the better the permeation of the substance in the porous substrate, but in order to keep the thermal expansion coefficients of the flow path side and the sealing side substrate close, for example, use quartz for the flow path side substrate At this time, if a high silicate glass is used on the sealing side and a material obtained by sintering Rh or silica sol as the functional substance is used, hydrogen can be selectively made.
[0058]
In each of the above embodiments, the substrate is substantially flat, and the wall member has a rectangular cross section such as a triangle or a trapezoid. However, the present invention is not limited to this as long as processing is possible. For example, the substrate may have undulations, and the formed fine channels need not be of the same depth or height.
[0059]
【The invention's effect】
As described above, according to the embodiment of the present invention, since the fine flow path is constructed by assembling press-formed parts, die processing is easy and excellent in mass productivity.
[0060]
Further, since the fine flow path has many voids outside the wall member constituting the flow path, various functional components and the like can be arranged in these voids, and the usefulness can be enhanced.
[0061]
Further, in the case where the fine flow channel is formed by arranging two flat substrates each having a convex portion serving as a wall member facing each other, it is possible to adjust the width of the flow channel, which was impossible in the related art.
[Brief description of the drawings]
FIG. 1 is a perspective view illustrating a configuration of a conventional microchemical chip.
FIG. 2 is a cross-sectional view illustrating a groove used in a conventional microchemical chip.
FIG. 3 is a perspective view showing the appearance of a finished microchemical chip.
FIG. 4 is an explanatory diagram of functions of a microchemical chip.
FIG. 5 is a cross-sectional view illustrating formation of a fine channel according to the embodiment of the present invention.
FIG. 6 is a cross-sectional view showing the formation of a fine channel according to another embodiment of the present invention.
FIG. 7 is an explanatory diagram showing a fine path formed in a curved shape.
FIG. 8 is an explanatory view showing a fine quantity path formed in a bent shape.
FIG. 9 is a sectional view showing an embodiment in which an adhesive layer is provided on a side surface of a wall member to form a flow channel.
FIG. 10 is a cross-sectional view showing a state in which a substrate including a wall member forming a fine flow channel is molded by a mold.
FIG. 11 is a cross-sectional view showing an embodiment in which a wall member of a fine channel is used for a reflection optical system.
FIG. 12 is a cross-sectional view illustrating an embodiment in which a light emitting unit and a light receiving unit are provided on a flat substrate.
FIG. 13 is a cross-sectional view showing an embodiment in which a light emitting unit and a light receiving unit are provided on a wall member.
FIG. 14 is a sectional view showing an embodiment in which one of the planar members is a silicon substrate.
FIG. 15 is a cross-sectional view illustrating an embodiment in which a heating source is provided in order to control the temperature in the fine channel.
FIG. 16 is a cross-sectional view showing an embodiment in which a heating / cooling pipe is provided near a fine flow.
FIG. 17 is a cross-sectional view showing an embodiment including a porous member.
[Explanation of symbols]
111, 112, 121, 122, 131, 132, 141, 142, 151, 181, 182, 191, 211 Planar substrates 111a, 112a, 151a, 151b, 161a, 161b, 171a, 171b, 191a, 192b Wall member 115 adhesion Layer 301 Upper mold 302 Lower mold 153 Micro flow path 154a, 154b, 185 Reflective film 152 Upper substrate 155, 165, 173, 183, 184 Light emitting unit 156, 166, 174 Light receiving unit 193 Heat source 194 Cooling source 212 Porous Substrate 213 Functional material film

Claims (24)

A fine channel formed by first and second planar members opposed to each other and formed by projecting channel walls provided on these opposed surfaces. 2. The microchannel according to claim 1, wherein the channel wall is entirely provided on one of the first and second planar members, and the other planar member is a flat plate. 3. 2. The fine flow path according to claim 1, wherein the flow path wall has one side and the other side of a side wall forming the fine flow path provided on the first and second planar members, respectively. 3. The microchannel according to any one of claims 1 to 3, wherein the flat member is made of glass. The microchannel according to any one of claims 1 to 4, wherein a portion between the first and second planar members other than a portion surrounded by the channel wall is filled with a filler. The micro flow channel according to any one of claims 1 to 5, wherein the flow channel wall has a substantially trapezoidal cross-sectional shape, and a light reflection film is formed on at least one of its side edges. . A first planar member in which a pair of wall members is formed in a convex shape on one surface with a fine channel width therebetween,
A second planar member attached so as to be in contact with at least the top of the wall member,
A fine channel formed by a closed space surrounded by the surface of the first planar member, the wall member, and the second planar member. The microchannel according to claim 7, wherein the flat member is made of glass. The microchannel according to claim 7, wherein a portion between the first and second planar members other than a portion surrounded by the channel wall is filled with a filler. 10. The flow channel wall according to claim 7, wherein the flow channel wall has a triangular or substantially trapezoidal cross-sectional shape, and a light reflecting film is formed on at least one of its sides. Micro channel. The microchannel according to claim 7, wherein an optical element is formed on a surface of the channel wall. The microchannel according to claim 7, wherein the second planar member is a semiconductor substrate. The microchannel according to claim 12, wherein an active element is formed on the semiconductor substrate. The microchannel according to claim 7, wherein an element for raising and lowering the temperature is formed near the microchannel. The microchannel according to claim 7, wherein the second planar member is made of a porous material. The fine flow path according to claim 15, wherein a temperature raising part for raising a temperature is provided on a back surface of the first planar member. A first plane member in which a first wall member forming one side wall of the fine channel is formed in a convex shape;
A second wall member forming the other side wall of the fine flow path, and a second flat member formed in a convex shape;
The minute plane formed by arranging the surface of the first plane member and the second plane member to face each other so that the first wall member and the second wall member form the fine flow path width. Channel. The fine channel according to claim 17, wherein the flat member is made of glass. 19. The microchannel according to claim 17, wherein a portion between the first and second planar members other than a portion surrounded by the channel wall is filled with a filler. 20. The flow channel according to claim 17, wherein the flow channel wall has a triangular or substantially trapezoidal cross-sectional shape, and a light reflecting film is formed on at least one of its side edges. Micro channel. A first planar member in which a pair of wall members is formed in a convex shape on one surface with a fine channel width therebetween,
A second planar member attached so as to be in contact with at least the top of the wall member,
A plurality of microchannels formed by a closed space surrounded by the first plane member surface, the wall member and the second plane member, and reacting or separating a chemical substance;
A well provided at an end of the plurality of fine channels,
A microchemical chip comprising: an optical element for analysis, provided in the middle of the fine channel. 22. The microchemical chip according to claim 21, wherein the optical element is an optical lens attached to the first or second planar member. A fine channel formed by first and second planar members opposed to each other and formed by projecting channel walls provided on these opposed surfaces;
A well provided at an end of the plurality of fine channels,
A microchemical chip comprising: an optical element for analysis provided in the middle of the fine channel. 24. The micro flow according to claim 23, wherein the flow channel wall has a substantially triangular or substantially trapezoidal cross-sectional shape, and a light reflection film is formed on at least one of the side edges. Road.

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