JP2004325460A5 - - Google Patents
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- JP2004325460A5 JP2004325460A5 JP2004167934A JP2004167934A JP2004325460A5 JP 2004325460 A5 JP2004325460 A5 JP 2004325460A5 JP 2004167934 A JP2004167934 A JP 2004167934A JP 2004167934 A JP2004167934 A JP 2004167934A JP 2004325460 A5 JP2004325460 A5 JP 2004325460A5
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- JP
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- Prior art keywords
- sample
- analysis method
- coordinate information
- sample analysis
- piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000012284 sample analysis method Methods 0.000 claims description 16
- 238000012545 processing Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 238000004458 analytical method Methods 0.000 claims description 7
- 238000007689 inspection Methods 0.000 claims description 7
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 claims 1
- 239000000523 sample Substances 0.000 description 48
- 230000008021 deposition Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000000605 extraction Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007730 finishing process Methods 0.000 description 1
- 238000005464 sample preparation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004167934A JP2004325460A (ja) | 2004-06-07 | 2004-06-07 | 試料解析方法および装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004167934A JP2004325460A (ja) | 2004-06-07 | 2004-06-07 | 試料解析方法および装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26836397A Division JP3677968B2 (ja) | 1997-10-01 | 1997-10-01 | 試料解析方法および装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004325460A JP2004325460A (ja) | 2004-11-18 |
| JP2004325460A5 true JP2004325460A5 (https=) | 2005-05-26 |
Family
ID=33509292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004167934A Pending JP2004325460A (ja) | 2004-06-07 | 2004-06-07 | 試料解析方法および装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004325460A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113223976B (zh) * | 2020-01-21 | 2024-09-20 | 台湾积体电路制造股份有限公司 | 显微试片制备方法、装置及记录介质 |
-
2004
- 2004-06-07 JP JP2004167934A patent/JP2004325460A/ja active Pending
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