JP2004321965A - Dry air supplying apparatus and its operation method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dry air supplying apparatus constituted so that dry air having a low dew point can be supplied to the objective space immediately when required by keeping this apparatus in an operated state even when not required. <P>SOLUTION: This dry air supplying apparatus 1 is provided with two rotors 4a, 4b on each of which an adsorbent is deposited and the rotational area of each of which is partitioned by a partitioning member 3 into at least an adsorption zone S and a regeneration zone U, a driving means 5 for rotary driving the rotors 4a, 4b, a supply route 6 for supplying to the objective space the dry air obtained by making the sucked air pass through the zones S of the rotors 4a, 4b successively to remove moisture and organic matter and a regeneration route 7 for regenerating the adsorbent deposited on each of the rotors 4a, 4b by heating a part of the obtained dry air and making the heated dry air pass through the zones U of the rotors 4a, 4b successively. A return route 27 is arranged for returning the dry air from the side of an outlet of the route 6 to the side of an inlet. Valves 30, 31 are arranged respectively on the route 27 and on the side of the outlet of the route 6. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a dry air supply device and a method for operating the same.
[0002]
[Prior art]
2. Description of the Related Art In the manufacture of semiconductor devices, there are steps of performing various processes such as oxidation, diffusion, and CVD on an object to be processed, for example, a semiconductor wafer, and various processing apparatuses (for example, heat treatment apparatuses) are used to execute these steps. Have been. For example, in a vertical heat treatment apparatus, a transfer space (loading area) for transferring wafers between a transfer container that stores a plurality of, for example, 25 wafers, and a processing container that stores the wafers and performs predetermined processing. Also called).
[0003]
Conventionally, in order to suppress the growth of a natural oxide film on a wafer in the transfer space, an inert gas such as nitrogen gas is supplied to the transfer space in a large amount (250 to 400 liters / minute) to reduce the oxygen concentration in the transfer space to 30 ppm. The atmosphere was as follows. In addition, a chemical filter is provided to remove organic gas in the transfer space. However, since a large amount of expensive nitrogen gas is consumed, not only running cost is increased, but also there is a risk of oxygen deficiency due to nitrogen gas. Further, although it was possible to remove organic substances by using a chemical filter, it was difficult to remove organic substances attached to the chemical filter and regenerate the chemical filter.
[0004]
In order to solve this problem, the present applicant has been able to suppress the growth of the natural oxide film on the object to be processed by supplying dry air to the transfer space instead of the inert gas, The applicant has previously filed a dry air supply device and a processing device that can avoid the danger of generating particles and can prevent the generation of particles (Japanese Patent Application No. 2002-274214, not disclosed).
[0005]
As related techniques, an invention for supplying a dry gas with a low dew point to the transport space (for example, see Japanese Patent Application Laid-Open No. 6-267933) and an invention for a dry dehumidifier for obtaining a dry gas with a low dew point (for example, (See Japanese Unexamined Patent Publication No. 2000-296309 and Japanese Patent Application Laid-Open No. 63-50047).
[0006]
[Patent Document 1]
JP-A-6-267933 [Patent Document 2]
JP 2000-296309 A [Patent Document 3]
JP-A-63-50047
[Problems to be solved by the invention]
By the way, in a dry dehumidifier or a dry air supply device that obtains a dry gas having a low dew point, when a device (eg, a processing device) that requires dry air is stopped, the dry air supply device is stopped only during the stop period. Is stopped, and the dry air supply device is operated at the same time when the device is operated. However, in this operation method, moisture is naturally adsorbed to the adsorbent of the rotor while the dry air supply device is stopped, and as a result, the dry air having a low dew point (for example, −70 ° C. or less) as a target is obtained. There is a problem that a test run of several hours (4 to 12 hours) from the start of operation is required until the above is obtained. Further, since the supply amount of the dry air supplied from the dry air supply device is constant, it corresponds to, for example, a case where a necessary amount of the dry air (for example, about twice as much as the normal amount) is required. It was difficult to do.
[0008]
The present invention has been made in view of the above circumstances, and a dry air supply that can supply dry air with a low dew point immediately when necessary by maintaining an operating state even when dry air is not required in a target space. It is an object to provide a device and a method of operating the device. Another object of the present invention is to provide a dry air supply device capable of supplying an increased amount of dry air when necessary and a method of operating the same.
[0009]
[Means for Solving the Problems]
Among the present invention, the invention of claim 1 is configured to carry an adsorbent, and to rotate two rotors which are formed by a partition member and whose rotation area is divided at least into an adsorption zone and a regeneration zone, and to rotate both rotors. Driving means, a supply path for supplying the dried air from which moisture and organic substances have been removed by sequentially passing the sucked air through the adsorption zone of each rotor, and a supply path for heating a part of the dried air to each of the rotors, A method for operating a dry air supply device having a regeneration path for regenerating an adsorbent by passing through a regeneration zone, wherein when the dry air is not required in the target space, the dry air flowing toward the outlet side of the supply path Is returned to the inlet side of the supply path to maintain the operating state.
[0010]
The invention according to claim 2 is configured such that the two rotors are configured to support the adsorbent, and the rotation area is defined by the partition member at least in the adsorption zone and the regeneration zone, and driving means for rotating and driving both rotors; A supply path for supplying the sucked air to the target space by removing the moisture and organic substances by sequentially passing the sucked air through the adsorption zone of each rotor, and a part of the dry air being heated and passed through the regeneration zone of each rotor. In the operating method of the dry air supply device having a regeneration path for regenerating the adsorbent, when the target space requires more dry air than a normal flow rate, the dry air flowing toward the regeneration path It is characterized in that the flow is reduced or cut off to increase the supply of dry air.
[0011]
The invention according to claim 3 is configured such that the two rotors are configured to support the adsorbent, and the rotation area is formed at least in the adsorption zone and the regeneration zone by the partition member, and driving means for rotating and driving both rotors; A supply path for supplying the sucked air to the target space by removing the moisture and organic substances by sequentially passing the sucked air through the adsorption zone of each rotor, and a part of the dry air being heated and passed through the regeneration zone of each rotor. And a regeneration path for regenerating the adsorbent by providing a return path for returning dry air from the outlet side of the supply path to the inlet side, and providing valves on the return path and the exit side of the supply path. Is provided.
[0012]
The invention according to claim 4 is configured such that the two rotors are configured to support the adsorbent, and the rotation area is defined at least in the adsorption zone and the regeneration zone by the partition member, and driving means for rotating and driving both rotors, A supply path for supplying the sucked air to the target space by removing the moisture and organic substances by sequentially passing the sucked air through the adsorption zone of each rotor, and a part of the dry air being heated and passed through the regeneration zone of each rotor. A regeneration path for regenerating the adsorbent, thereby reducing or interrupting the flow of the dry air toward the regeneration path in the regeneration path, thereby increasing the supply amount of the dry air. It is characterized by having been provided.
[0013]
According to a fifth aspect of the present invention, in the dry air supply device according to the third or fourth aspect, a control means for controlling the valve is provided.
[0014]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. 1 is a schematic configuration diagram showing a normal operation state of a dry air supply device according to an embodiment of the present invention, FIG. 2 is a schematic configuration diagram showing a warm-up operation state, and FIG. 3 is a schematic configuration showing an increase operation state. FIG. 4 is a perspective view showing an example of the rotor, and FIG. 5 is a perspective view showing an example of a support frame for rotatably supporting the rotor.
[0015]
In FIG. 1, reference numeral 1 denotes a dry air supply device for supplying dry air (dry air) having a low dew point to a target space such as a transfer space of a processing apparatus, and the dry air supply device 1 includes a support frame 2 (see FIG. 5) that is rotatably supported and configured to carry an adsorbent, and that a partition member 3 provided on a support frame 2 defines rotation regions at both ends at least in an adsorption zone S and a regeneration zone U. One rotor 4a, 4b, a driving means for rotating both rotors 4a, 4b, such as an electric motor 5, and the air sucked from the target space or the room are sequentially passed through the adsorption zone S of each rotor 4a, 4b to remove moisture and water. A supply path 6 for supplying dry air from which organic matter has been removed to a target space, and a part of the dry air which is heated and passed through a regeneration zone U of each of the rotors 4a and 4b to remove moisture and organic matter from the adsorbent. Desorbed and a playback path 7 for regenerating the adsorbent.
[0016]
As shown in FIG. 4, the rotors 4a and 4b each include a cylindrical body 8 having both ends opened, a rotating shaft 10 disposed at an axial center of the cylindrical body 8, and a cylindrical member radially extending from the rotating shaft 10. Spokes 11 fixed to the inner peripheral surface of the body 8 and partitioning the inside of the cylindrical body 8 into a plurality of, for example, eight sector-shaped rooms, and a honeycomb structure having a sector-shaped cross-section attached to each room and carrying an adsorbent on a substrate. It is mainly composed of the body 12. In the process of flowing air in the axial direction of the rotors 4a and 4b, the honeycomb structure 12 removes moisture and organic substances contained in the air by adsorbing the adsorbent to obtain dry air.
[0017]
The adsorbent of the rotor 4a in the former stage is, for example, a faujasite Y-type zeolite (A ₅₆ Si) in order to efficiently adsorb moisture as pre-dehumidification (exit dew point temperature −20 ° C.) and also efficiently adsorb organic matter. ₁₃₆ O ₃₈₄ ) are preferred. As the adsorbent for the rotor 2b at the subsequent stage, for example, a faujasite X-type zeolite (A ₉₆ Si ₉₆ O ₃₈₄ ) is preferable in order to adsorb moisture as low dew point dehumidification (outlet dew point temperature −80 ° C.).
[0018]
On the other hand, as a substrate of the honeycomb structure 12, inorganic fiber paper is preferable because of excellent heat resistance, abrasion resistance and the like. The honeycomb structure 12 is formed by forming inorganic fiber paper into a honeycomb shape. As a method of supporting the adsorbent on the base material, for example, a method of impregnating the base material with a slurry containing the adsorbent by spraying, brushing, or the like, and drying is used. When the rotors 4a and 4b have the rotating shaft 10, they are rotatably supported by, for example, a box-shaped or frame-shaped support frame 2 as shown in FIG. In the illustrated example, openings 13 corresponding to both ends of the rotors 4 a and 4 b are formed at both ends of the support frame 2, and the partition member 3 is attached to the openings 13. A bearing 14 that rotatably supports both ends of the rotary shaft 10 is provided at the center of the opening 13 via a partition member 3.
[0019]
The partition member 3 includes an annular circumferential member 3a corresponding to the peripheral edge of the end of the rotor or the cylindrical body 8, and a radial member 3b provided at the center, for example, from the bearing to the circumferential member 3a. The member 3b is provided with a radial seal member that seals between the zones S, U, and T adjacent to and adjacent to the end face of the honeycomb structure 12 (end face of the rotor). The circumferential member 3a is provided with a circumferential seal member that seals between the inside and the outside in the vicinity of the flange 8a provided at the edge of the rotor or the cylindrical body 8.
[0020]
An adsorption zone S and a regeneration zone U are defined by the partition member 3 in the rotation regions at both ends of the preceding rotor 4a. A cooling zone T is defined by the partition member 3 in addition to the adsorption zone S and the regeneration zone U in the rotation regions at both ends of the rotor 4 b at the subsequent stage. The partition member 3 is provided with a cover member (not shown) for covering the surface thereof, and a pipe communicating with each zone S, U or T is connected to the cover member.
[0021]
The supply path 6 includes, for example, a suction pipe 6a that is introduced into the adsorption zone S of the preceding rotor 4a, and dry air with a low dew point from which moisture and organic substances have been removed through the adsorption zone S of the preceding rotor 4a. And a supply pipe 6c for supplying (introducing) dry air with a low dew point, which has passed through the adsorption zone S of the rotor 4b at the subsequent stage and has been further removed of moisture and organic substances, to the target space. It is composed of
[0022]
The suction pipe 6a is provided with a fan 15 for sucking air from a target space or a room and sending the air to the target space via the rotors 4a and 4b. The intermediate pipe 6b has a low dew point from which moisture and organic substances have been removed. A cooler 16 is provided as cooling means for cooling the dry air to a predetermined temperature, for example, about 15 ° C. In order to prevent particle contamination of a wafer in a target space caused by the dry air supply device 1, for example, a transfer space, a contact portion between the rotors 4a and 4b and a seal member of the partition member 3 is provided at an outlet side of the supply path 6. It is preferable that a filter (not shown) for removing particles generated from is provided.
[0023]
The regeneration path 7 is branched from a supply pipe 6c immediately after the latter rotor 4b, and is a first pipe for extracting a part of clean dry air having a low dew point and introducing it as a cooling gas into a cooling zone T of the latter rotor 4b. 7a, a second pipe 7b for introducing the dry air passing through the cooling zone T to the regeneration zone U as a regeneration gas, and a second pipe 7b for introducing the air passing through the regeneration zone U to the regeneration zone U of the preceding rotor 4a. It is composed of three pipes 7c and a fourth pipe 7d for exhausting the air passing through the regeneration zone U to, for example, a factory exhaust system. The second pipe 7b is provided with a heating means such as a heater 17 for heating the air to a predetermined temperature in order to use the air as a regeneration gas, and the fourth pipe 7d is provided with an exhaust fan 18.
[0024]
During normal operation, the air for regeneration is heated to a temperature of about 130 to 200 ° C. by the heater 17 and supplied to the regeneration zone U to desorb moisture and gaseous impurities (organic substances) adsorbed on the adsorbent. However, when the high boiling organic compound is desorbed from the adsorbent, the air for regeneration may be heated to a high temperature of about 250 to 400 ° C. by the heater 17 and supplied to the regeneration zone U periodically. preferable.
[0025]
In FIG. 1, reference numeral 20 denotes a system for executing a method of operating a dry air supply device. The system 20 includes an inlet 21 of a suction pipe 6a, an outlet 22 of a supply pipe 6c, and a fourth pipe 7d. An outlet 23 is provided. For example, a target space or an indoor space is connected to the inlet 21 of the suction pipe 6a via the pipe. The outlet section 22 of the supply pipe 6c is connected to a target space via a pipe. A factory exhaust system is connected to the outlet 23 of the fourth pipe 7d via a pipe.
[0026]
A belt wheel (also referred to as a pulley) 25 is attached to the rotation shaft of the motor 5 to rotationally drive the rotors 4a and 4b. An endless belt 26 is wound around the belt wheel 25 and the rotors 4a and 4b. I have. The two rotors may be configured to be driven individually by two motors, or may be configured to be driven by one common motor.
[0027]
In order to efficiently adsorb moisture and organic substances on the adsorbents carried on the honeycomb structure 12 in the front and rear rotors, and to desorb moisture and organic substances from the adsorbents adsorbing the moisture and organic substances to efficiently regenerate the adsorbents The area ratio between the adsorption zone S and the regeneration zone U of the preceding rotor 4a (1: 1 in the illustrated example), or the area ratio between the adsorption zone S, the regeneration zone U, and the cooling zone T of the subsequent rotor 4b (2 in the illustrated example). : 1: 1), in the case of the illustrated example, for example, when the rotation speed of the rotor 4a at the front stage is 10 r. p. h, the rotational speed of the rotor 4b at the subsequent stage is 0.5 r. p. h is adjusted or set.
[0028]
When dry air is not required in the target space, the supply path is used to return the dry air toward the outlet side of the supply path 6 to the inlet side of the supply path 6 and maintain the operating state of the rotors 4a and 4b. A return path 27 for returning dry air from the outlet side to the inlet side of the feed path 6 is provided, and valves 30 and 31 are provided on the return path 27 and the outlet side of the supply path 6. The valves 30 and 31 are switching valves for switching the flow path of the dry air. When the valve 31 is opened and the valve 30 is closed, normal operation can be performed. When the valve 31 is closed and the valve 30 is opened, The dry air can be returned from the outlet side of the supply path 6 to the inlet side, and the operating state of the dry air supply device can be maintained. The operation at this time is called a warm-up operation, and when dry air is not required in the target space (period), the warm-up operation is performed, and the air for regeneration is always supplied to the rotors 4a and 4b. , 4b to prevent natural adsorption of water, and when dry air is required in the target space, by switching valves 30 and 31, clean dry air with a low dew point can be supplied immediately. The inlet of the return path 27 is connected to the supply pipe 6c on the upstream side of the valve 31, and the outlet of the return path 27 is connected to the suction pipe 6a.
[0029]
On the other hand, when more dry air than the normal flow rate is required in the target space, an increasing operation is performed to reduce or cut off the flow of the dry air toward the regeneration path 7 to increase the supply amount of the dry air. Therefore, a valve 33 is provided in the regeneration path 7. This valve 33 is preferably provided in the first pipe 7a of the regeneration path 7. When the supply amount of the dry air during normal operation and 2m 3 ^/ min, of up to twice the supply of dry air to the target space by squeezing the valve 33 of the playback path 7 from 2m 3 ^/ min or more 4m ³ / Minutes (when fully closed or shut off). During the increasing operation, the regeneration of the adsorbent is reduced or stopped, so that the dew point of the dry intake air increases with time. For this reason, the increasing operation is performed for a predetermined time, for example, 6 to 9 minutes until the dew point of the dry air is detected, and then the valve 31 is closed and the valves 33 and 30 are opened to perform the warming-up operation. Switch to regenerate the adsorbent. That is, the increase operation is performed for a predetermined time when necessary, and when it is not necessary (for example, 12 to 14 minutes), the operation is switched to warm-up, so that it is performed intermittently instead of continuously. The dry air supply device 1 includes the control device (control means) 40 for controlling or switching the valves 30, 31, and 33 as described above in order to easily perform the operations of the various patterns.
[0030]
In the above configuration, during normal operation, the valve 30 is closed and the valves 31 and 33 are open as shown in FIG. ° C or a dew point of about 1.96 ° C) or indoor air is introduced into the adsorption zone S of the preceding rotor 4a, and the adsorbent carried on the rotor 4a performs dehumidification and purification (removal of moisture and organic substances). Is done). At this point, the temperature of the clean dry air is about 45 ° C and the dew point is about -20 ° C. Next, the clean dry air is cooled to about 15 ° C. by the cooler 16, and then introduced into the adsorption zone S of the rotor 4b at the subsequent stage, where further dehumidification and purification are performed. Clean dry air with a low dew point of -80 ° C is supplied to the target space.
[0031]
Further, in the rotor 4b at the subsequent stage, a part of the purified dry air having a low dew point is introduced into the cooling zone T through the first pipe 7a of the regeneration path 7, which is a branch pipe, to be used as a cooling gas, and then to the second pipe. Heated by the heater 17 of the pipe 7b and introduced into the regeneration zone U as a heated gas for regeneration, moisture and organic substances adsorbed by the adsorbent of the rotor 4b are removed by evaporation (desorption). The air (regeneration gas) discharged from the regeneration zone U is introduced into the regeneration zone U of the preceding rotor 4a via the third pipe 7c, and the water adsorbed on the adsorbent of the rotor 4a by the high-temperature regeneration gas is used. The organic matter is removed by evaporation (desorption), and the exhaust gas is exhausted through the fourth pipe 7d.
[0032]
On the other hand, when the apparatus receiving the supply of dry air (for example, a processing apparatus) shifts to a step that does not require dry air in the target space, the valve 31 is closed and the valve 30 is opened as shown in FIG. By switching, the dry air flowing toward the outlet side of the supply path 6 is returned to the inlet side of the supply path 6, the adsorbent of the rotors 3a and 3b is regenerated, and the operation of the dry air supply device 1 is stopped without stopping. Keep warm-up operation. In this case, since it is necessary to take in air as much as dry air is exhausted from the regeneration path 7, air in the target space or room is taken in through the suction pipe 6 a of the supply path 6. By performing the warm-up operation in this manner, when the apparatus shifts to a process requiring dry air, clean dry air having a low dew point can be supplied immediately.
[0033]
Thus, by combining the normal operation and the warm-up operation, the waiting time on the side of the apparatus that needs the dry air can be eliminated, and the throughput and the productivity can be improved. Further, some devices that require dry air may need more dry air intermittently than usual, rather than continuously. In such a device, as shown in FIG. By closing the valves 30 and 33 and opening the valve 31, the flow of the dry air toward the regeneration path 7 is reduced or cut off to increase the supply amount of the dry air. When the supply amount of the dry air during normal operation and 2m 3 ^/ min, of up to twice the supply of dry air to the target space by squeezing the valve 33 of the playback path 7 from 2m 3 ^/ min or more 4m ³ / Minutes (when fully closed or shut off). During the increasing operation, the regeneration of the adsorbent is reduced or stopped, so that the dew point of the dry intake air increases with time. Therefore, the increasing operation is performed for a predetermined time until the dew point of the dry air is detected and reaches a predetermined dew point. Thereafter, the valve 31 is closed and the valves 30 and 33 are opened to switch to the warming-up operation to switch the adsorbent. Perform playback. That is, this increasing operation is performed intermittently and alternately in combination with the warm-up operation.
[0034]
As described above, the embodiments of the present invention have been described in detail with reference to the drawings. However, the present invention is not limited to the above embodiments, and various design changes and the like can be made without departing from the gist of the present invention. is there. For example, a contact-type seal member that slides on the rotor is used as the partition member to seal the space between the rotor and the rotor, but a non-contact type seal member may be used as the seal member. Further, the two rotors may have an integral structure arranged in series with a partition member interposed therebetween. In this case, piping and a cooler between the rotors can be omitted, and the apparatus can be made compact. In this case, a cooling zone is provided in the former rotor so as to correspond to the latter rotor, and dry air for regeneration flows from the cooling zone of the former rotor to the cooling zone of the latter rotor.
[0035]
【The invention's effect】
In short, according to the present invention, the following effects can be obtained.
[0036]
(1) According to the first aspect of the invention, the two rotors are configured to support the adsorbent, and the partition member has a rotation area defined at least in the adsorption zone and the regeneration zone. Driving means, a supply path for supplying the dried air from which moisture and organic substances have been removed by sequentially passing the sucked air through the adsorption zone of each rotor, and a supply path for heating a part of the dried air to each of the rotors, A method for operating a dry air supply device having a regeneration path for regenerating an adsorbent by passing through a regeneration zone, wherein when the dry air is not required in the target space, the dry air flowing toward the outlet side of the supply path Return to the inlet side of the supply path to maintain the operating state, so that even when dry air is not required in the target space, the operating state is maintained, so that dry air with a low dew point It can be supplied.
[0037]
(2) According to the second aspect of the present invention, the two rotors are configured to support the adsorbent, and the rotation area is formed at least into the adsorption zone and the regeneration zone by the partition member, and the two rotors are rotationally driven. Driving means, a supply path for supplying the dried air from which moisture and organic substances have been removed by sequentially passing the sucked air through the adsorption zone of each rotor, and a supply path for heating a part of the dried air to each of the rotors, A regeneration path for regenerating the adsorbent by passing through the regeneration zone, wherein when the target space requires more dry air than the normal flow rate, the regeneration path In order to increase or decrease the supply of the dry air by reducing or blocking the flow of the dry air toward the dry air, it is possible to increase and supply the dry air when necessary.
[0038]
(3) According to the third aspect of the present invention, the two rotors are configured to support the adsorbent, and the rotation area is formed at least in the adsorption zone and the regeneration zone by the partition member, and the two rotors are rotationally driven. Driving means, a supply path for supplying the dried air from which moisture and organic substances have been removed by sequentially passing the sucked air through the adsorption zone of each rotor, and a supply path for heating a part of the dried air to each of the rotors, In a dry air supply device having a regeneration path for regenerating an adsorbent by passing through a regeneration zone, a return path for returning dry air from an outlet side to an entrance side of the supply path is provided, and the return path and the supply path Since a valve is provided on the outlet side, even when dry air is not required in the target space, the operating state is maintained, so that dry air with a low dew point can be supplied immediately when necessary.
[0039]
(4) According to the fourth aspect of the present invention, the two rotors are configured to support the adsorbent, and the rotation region is formed by the partition member into at least the adsorption zone and the regeneration zone, and the two rotors are rotationally driven. Driving means, a supply path for supplying the dried air from which moisture and organic substances have been removed by sequentially passing the sucked air through the adsorption zone of each rotor, and a supply path for heating a part of the dried air to each of the rotors, In a dry air supply device having a regeneration path for regenerating an adsorbent by passing through a regeneration zone, the flow of dry air toward the regeneration path is reduced or cut off in the regeneration path to increase the supply amount of dry air. Since a valve is provided for drying, it is possible to increase and supply dry air when necessary.
[0040]
(5) According to the fifth aspect of the present invention, since the control means for controlling the valve is provided, various patterns of operation can be easily performed.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram showing a normal operation state of a dry air supply device according to an embodiment of the present invention.
FIG. 2 is a schematic configuration diagram showing a warm-up operation state.
FIG. 3 is a schematic configuration diagram showing a boost operation state.
FIG. 4 is a perspective view showing an example of a rotor.
FIG. 5 is a perspective view showing an example of a support frame that rotatably supports a rotor.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Dry air supply device 3 Partition member 4a, 4b Rotor 5 Motor (drive means)
6 Supply path 7 Regeneration path 27 Return paths 30, 31, 33 Valve 40 Controller (control means)

Claims (5)

The two rotors are configured to carry the adsorbent, and the rotation area is formed by the partition member into at least the adsorption zone and the regeneration zone, driving means for rotating both rotors, and the sucked air of each rotor. A supply path for supplying dry air from which moisture and organic substances have been removed to the target space by sequentially passing through the adsorption zone, and a part of the dry air is heated to regenerate the adsorbent by passing through the regeneration zone of each rotor. In the method of operating a dry air supply device having a regeneration path, when dry air is not required in the target space, the dry air flowing toward the outlet side of the supply path is returned to the inlet side of the supply path to change the operation state. A method for operating a dry air supply device characterized by maintaining. The two rotors are configured to carry the adsorbent, and the rotation area is formed by the partition member into at least the adsorption zone and the regeneration zone, driving means for rotating both rotors, and the sucked air of each rotor. A supply path for supplying dry air from which moisture and organic substances have been removed by sequentially passing through the adsorption zone to the target space, and a part of the dry air is heated to regenerate the adsorbent by passing through the regeneration zone of each rotor. In the method of operating a dry air supply device having a regeneration path, when the target space requires more dry air than a normal flow rate, the flow of the dry air toward the regeneration path is reduced or cut off. A method for operating a dry air supply device, characterized by increasing a supply amount of dry air. The two rotors are configured to carry the adsorbent, and the rotation area is formed by the partition member into at least the adsorption zone and the regeneration zone, driving means for rotating both rotors, and the sucked air of each rotor. A supply path for supplying dry air from which moisture and organic substances have been removed to the target space by sequentially passing through the adsorption zone, and a part of the dry air is heated to regenerate the adsorbent by passing through the regeneration zone of each rotor. In a dry air supply device including a regeneration path, a return path for returning dry air from an outlet side of the supply path to an inlet side is provided, and a valve is provided on the return path and an outlet side of the supply path. Dry air supply device. The two rotors are configured to carry the adsorbent, and the rotation area is formed by the partition member into at least the adsorption zone and the regeneration zone, driving means for rotating both rotors, and the sucked air of each rotor. A supply path for supplying dry air from which moisture and organic substances have been removed to the target space by sequentially passing through the adsorption zone, and a part of the dry air is heated to regenerate the adsorbent by passing through the regeneration zone of each rotor. A dry air supply device having a regeneration path, wherein the regeneration path is provided with a valve for decreasing or cutting off the flow of the dry air toward the regeneration path to increase the supply amount of the dry air. Dry air supply. The dry air supply device according to claim 3 or 4, further comprising control means for controlling the valve.

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