JP2004299147A - Method and apparatus for laminating ceramic green sheets - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a ceramic green sheet laminating apparatus constituted so as to prevent the occurrence of deformation in a bank part even if a cavity pressure mold is inserted in a cavity part and pressed, and enhanced in the dimensional precision of the cavity part, and a laminating method using it. <P>SOLUTION: In the laminating apparatus 10 for a plurality of ceramic green sheets 20 having an upper mold 11 and a lower mold 16 for superposing a plurality of the ceramic green sheets 20, which are used for manufacturing a plurality of ceramic packages 30 equipped with an electronic part housing cavity parts 21 in an arranged state, one upon another to integrate them under heating and pressure, a rigid plate 13 provided with a cavity pressure mold mounting hole 14 through an elastic sheet 12 is provided to the pressing surface of the upper mold 11 and the cavity pressure mold 15, which comprises an elastomer and has not only one sheetlike planar surface but also another surface to which a plurality of protruded parts 19 capable of being fitted in cavity parts 21 are provided in an arranged state, is mounted in the cavity pressure mold mounting hole 14 so that the planar surface thereof comes into contact with the elastic sheet 12. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

【００２１】
シート状のキャビティ押圧型を用いた実施例の寸法バラツキは、個片のキャビティ押圧型を用いた従来例の１／２以下に低減できることが確認できた。
【００２２】
【発明の効果】
請求項１及びこれに従属する請求項２記載のセラミックグリーンシートの積層装置は、上金型の押圧面には弾性板を介してキャビティ押圧型装着用孔を設ける剛性板を有し、剛性板のキャビティ押圧型装着用孔にはシート状の一方の面が平面で他方の面にキャビティ部に嵌合できる凸部を複数配列して設ける弾性体からなるキャビティ押圧型が弾性板上に平面が接するように装着して有するので、セラミックグリーンシートを均一に加圧することができると同時に、キャビティ部の変形がなく寸法精度のよい積層体が形成できるセラミックグリーンシートの積層装置を提供することができる。
【００２３】
特に、請求項２記載のセラミックグリーンシートの積層装置は、キャビティ押圧型がオイル含浸ゴムからなるシート状の弾性体で形成されているので、キャビティ部内に形成するタングステンペースト等の導体配線パターンの付着を防止することができると同時に、キャビティ押圧型がシート状であるので、個片の時のような、キャビティ押圧型のボリュームバラツキを解消することができるセラミックグリーンシートの積層装置を提供することができる。
【００２４】
請求項３記載のセラミックグリーンシートの積層方法は、上金型の押圧面に弾性板を介してキャビティ押圧型装着用孔を有する剛性板を配すると共に、キャビティ押圧型装着用孔にシート状の一方の面が平面で他方の面にキャビティ部に嵌合できる凸部を複数配列して有する弾性体からなるキャビティ押圧型を弾性板上に平面が接するようにして剛性板で固定して装着する工程と、下金型の上面の所定位置に、複数枚のセラミックグリーンシートを重ね合わせて載置する工程と、キャビティ押圧型の凸部をキャビティ部に嵌合させると共に、剛性板とキャビティ押圧型をセラミックグリーンシートの表面に接触させて複数のセラミックグリーンシートを加熱しながら加圧して積層し積層体を形成する工程を有するので、シート状のキャビティ押圧型によってセラミックグリーンシートを均一に加圧することができると同時に、シート状のキャビティ押圧型で弾性体のボリュームのバランスがすばやく取れるようにしてキャビティ部の変形がなく寸法精度のよい積層体が形成できるセラミックグリーンシートの積層方法を提供することができる。
【図面の簡単な説明】
【図１】本発明の一実施の形態に係るセラミックグリーンシートの積層装置の説明図である。
【図２】（Ａ）〜（Ｄ）はそれぞれ同セラミックグリーンシートの積層方法の説明図である。
【図３】従来のセラミックグリーンシートの積層装置の説明図である。
【図４】従来のセラミックグリーンシートの積層方法において発生する問題点の説明図である。
【符号の説明】
１０：セラミックグリーンシートの積層装置、１１：上金型、１２：弾性板、１３：剛性板、１４：キャビティ押圧型装着用孔、１５：キャビティ押圧型、１６：下金型、１７：ヒーター、１８：枠体、１９：凸部、２０：セラミックグリーンシート、２１：キャビティ部、２２：積層体、３０：セラミックパッケージ、３１：切断位置[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a ceramic green sheet laminating apparatus and a laminating method for producing a ceramic package having a cavity for accommodating an electronic component such as a semiconductor element or a quartz oscillator.
[0002]
[Prior art]
Usually, a ceramic package having a cavity for accommodating electronic components such as a semiconductor element and a crystal unit is manufactured by first forming a via hole in a ceramic green sheet that can be formed by arranging a plurality of ceramic packages. A conductor wiring pattern is formed by arranging a conductor paste on the surface of a ceramic green sheet or a hole for a via hole by a screen printing method or the like. Next, the plurality of ceramic green sheets on which the conductor wiring pattern is formed are stacked one above the other from the lowermost layer in the order of constituting the cavity portion, and the upper and lower molds each having a flat plate surface are used. A first bonded body is formed by applying pressure while heating using a laminating apparatus, and a second bonded body is formed by superimposing the next sheet on the first bonded body and pressing while heating. Are successively repeated, and a required number of sheets are laminated to form a laminate. Then, the laminated body is divided into individual ceramic packages and then fired and plated to produce a ceramic package. Alternatively, the laminated body is sintered and plated to be divided and the ceramic package is divided. We are making. However, in the method of laminating ceramic green sheets in which this lamination is repeated, the green density changes for each ceramic green sheet, and warpage and dimensional variation occur when firing is performed. Further, it takes time to manufacture, and the cost of the ceramic package is increased.
[0003]
Therefore, in the ceramic green sheet laminating apparatus and laminating method, as shown in FIG. 3, a cavity pressing die mounting hole 54 is formed on a pressing surface of the upper die 51 at a position corresponding to the cavity 53 via an elastic plate 52. The cavity pressing die 56 made of an elastic material is inserted and mounted in the cavity pressing die mounting hole 54, and a plurality of rigid plates 55 and the cavity pressing die 56 are superimposed on the lower die 57. A laminating method has been proposed in which a plurality of ceramic green sheets 58 are integrated by bringing the surfaces of the ceramic green sheets 57 into contact with the surface of the ceramic green sheets 57 placed thereon, and pressing and laminating the surfaces of the ceramic green sheets 58 (for example, patents). Reference 1).
[0004]
[Patent Document 1]
JP-A-7-245359 (pages 1-5, FIG. 1)
[0005]
[Problems to be solved by the invention]
However, the conventional ceramic green sheet laminating apparatus and laminating method as described above have the following problems.
As shown in FIG. 4, with recent miniaturization of the ceramic package, a seal path used for mounting electronic components in the cavity 53 and then sealing the interior of the cavity 53 with a lid or the like in an airtight manner is shown in FIG. The width 59 is narrow. Further, in order to improve the productivity, the center of the bank portion 60 for forming the seal path width 59 is cut so that each of the adjacent ceramic packages can be obtained so that the ceramics from the laminate of the ceramic green sheets 58 can be obtained. The number of packages is increasing. The ceramic green sheet can be uniformly pressed by being inserted into the cavity portion 53 and pressed by a laminating device including a cavity pressing die 56 formed of an individual body, for example, an elastic body such as rubber. However, when the cavity pressing die 56 made of an individual piece is inserted and pressed into the cavity 53 between the adjacent narrow bank portions 60, the strength of the bank portion 60 is reduced due to the variation in the pressing force due to the volume variation of the cavity pressing die 56. And the dimensional accuracy of the cavity 53 is reduced. Originally, the volume variation of the cavity pressing mold 56 is configured to be absorbed by the flow of the elastic plate 52. However, when the width of the bank portion 60 is narrow, the bank portion 60 is deformed before being absorbed by the elastic plate 52. ing.
The present invention has been made in view of such circumstances, and a ceramic green having high dimensional accuracy of a cavity portion without causing deformation of a bank portion even when a cavity pressing die is inserted and pressed into the cavity portion. An object of the present invention is to provide a sheet laminating apparatus and a sheet laminating method.
[0006]
[Means for Solving the Problems]
A ceramic green sheet laminating apparatus according to the present invention according to the present invention, in which a plurality of ceramic green sheets for arranging and fabricating a plurality of ceramic packages having a cavity portion for accommodating electronic components are stacked and heated. In a ceramic green sheet laminating apparatus having an upper mold and a lower mold that are integrated by pressing while pressing, the pressing surface of the upper mold has a rigid plate provided with a cavity pressing mold mounting hole via an elastic plate. A cavity pressing die made of an elastic body is provided in the cavity pressing die mounting hole of the rigid plate in which one surface of a sheet is flat and a plurality of convex portions which can be fitted to the cavity portion are arranged on the other surface. It is attached so that a plane may contact. Accordingly, it is possible to provide a ceramic green sheet laminating apparatus capable of uniformly pressing the ceramic green sheets and forming a laminated body having good dimensional accuracy without deformation of the cavity.
[0007]
Here, in the ceramic green sheet laminating apparatus according to the present invention, the cavity pressing die is preferably formed of a sheet-like elastic body made of oil-impregnated rubber. Thereby, it is possible to prevent adhesion of a conductor wiring pattern such as a tungsten paste formed in the cavity portion, and at the same time, to eliminate a volume variation as in the case of an individual piece since the cavity pressing die is in a sheet shape. A ceramic green sheet laminating apparatus can be provided.
[0008]
The method for laminating ceramic green sheets according to the present invention according to the present invention, in which a plurality of ceramic green sheets are stacked one on top of another to form and arrange a plurality of ceramic packages having a cavity for accommodating electronic components. In a method of laminating ceramic green sheets, which are integrated by being pressed while being heated between a mold and a lower mold, a rigid plate having a cavity pressing die mounting hole is disposed on a pressing surface of an upper mold via an elastic plate. In addition, a cavity pressing die made of an elastic body having a sheet-shaped one surface flat in the cavity pressing die mounting hole and a plurality of convex portions arranged on the other surface capable of fitting into the cavity portion is flat on the elastic plate. A step of attaching and fixing with a rigid plate so that the ceramic green sheets come into contact with each other, and a step of stacking and placing a plurality of ceramic green sheets on a predetermined position on the upper surface of the lower mold. And, the convex portion of the cavity pressing die is fitted into the cavity portion, and the rigid plate and the cavity pressing die are brought into contact with the surface of the ceramic green sheet, and a plurality of ceramic green sheets are heated and pressurized and laminated to form a laminate. Forming step. As a result, the ceramic green sheet can be uniformly pressed by the sheet-shaped cavity pressing die, and at the same time, the volume of the elastic body can be quickly balanced by the sheet-shaped cavity pressing die so that the cavity portion is not deformed and the dimensions are reduced. It is possible to provide a method for laminating ceramic green sheets that can form a laminated body with high accuracy.
[0009]
BEST MODE FOR CARRYING OUT THE INVENTION
Next, embodiments of the present invention will be described with reference to the accompanying drawings to provide an understanding of the present invention.
FIG. 1 is an explanatory view of a ceramic green sheet laminating apparatus according to an embodiment of the present invention, and FIGS. 2A to 2D are explanatory views of a method of laminating the same ceramic green sheet.
[0010]
As shown in FIG. 1, a laminating apparatus 10 for ceramic green sheets 20 according to an embodiment of the present invention includes a ceramic package 30 having a cavity 21 for accommodating a semiconductor element and an electronic component such as a crystal unit. (See FIG. 2 (D)). In order to form a laminated body, a plurality of ceramic green sheets 20 are aligned, overlapped, and heated and pressurized to be integrated. Device. The ceramic green sheet 20 laminating apparatus 10 is, roughly speaking, an upper die 11, a rigid plate 13 via an elastic plate 12 disposed in contact with a pressing surface of the upper die 11, and a cavity of the rigid plate 13. It comprises a cavity pressing die 15 mounted in the pressing die mounting hole 14 and a lower die 16. The upper mold 11 and the lower mold 16 are the same as the upper mold and the lower mold of the conventional ceramic green sheet laminating apparatus, and each have a heater 17 for heating.
[0011]
The elastic plate 12 may be an elastic body having an appropriate hardness, but a low-hardness elastic body (for example, silicone rubber HS30) is provided at the center of the elastic plate 12, and a high-hardness elastic body (for example, silicone rubber HS50) is provided at the periphery. ) May be provided. In the elastic plate 12 having this structure, the pressure distribution of the upper mold 11 and the lower mold 16 can be dispersed by the high hardness elastic body of the upper and lower layers, respectively. It is considered that the variation in the pressure of the lower mold 16 can be absorbed and the deformation of the low hardness elastic body in the lateral direction can be restrained by the high hardness elastic body, so that the ceramic package 30 with high accuracy can be obtained.
[0012]
The laminating apparatus in which the rigid plate 13 is sandwiched between the elastic plate 12 and the pressing surface of the upper mold 11 so as not to drop the cavity pressing die 15 into the cavity pressing die mounting hole 14 and the upper die 11 is attached. It is removably attached to a frame 18 extending from the press body 10.
[0013]
The cavity pressing die 15 is made of a sheet-like elastic body such as silicon rubber, for example, and has a flat surface on one side, which is in contact with the elastic plate 12, and a slight clearance between the cavity surface 21 and the other surface. And a plurality of convex portions 19 that can be fitted and provided. The cavity pressing die 15 is preferably made of a sheet-like elastic body made of oil-impregnated rubber. Since the oil impregnated rubber has releasability, it is possible to prevent the conductive wiring pattern formed in the cavity 21 from sticking to the metallized paste.
[0014]
Next, a method for laminating the ceramic green sheets 20 according to one embodiment of the present invention will be described with reference to FIGS.
The method for laminating the ceramic green sheets 20 is for arranging a plurality of ceramic packages 30 each having a cavity 21 for accommodating electronic components, and is similar to the conventional method for manufacturing a ceramic package. The following describes a ceramic green sheet laminating step including a green sheet producing step, a conductor wiring pattern forming step, a ceramic green sheet laminating step, and a firing step.
[0015]
As shown in FIG. 2A, first, the elastic plate 12, the rigid plate 13, and the cavity pressing die 15 are preferably selected according to the number of ceramic green sheets 20 to be laminated, the thickness, the unevenness, and the like. . Next, a rigid plate 13 having a cavity pressing die mounting hole 14 is arranged on the pressing surface of the upper die 11 via an elastic plate 12, and the cavity pressing die 15 is inserted into the cavity pressing die mounting hole 14. The elastic plate 12 and the cavity pressing die 15 are fixed with the rigid plate 13 and mounted. The cavity pressing die 15 used here is formed in a sheet shape, and one surface is a flat surface, and the other surface is provided with a plurality of convex portions 19 that can be fitted into the cavity portion 21 with some clearance. are doing. The cavity pressing die 15 is mounted so as to be in contact with the elastic plate 12 on one plane.
[0016]
Next, as shown in FIG. 2 (B), for example, the ceramic upper and lower positions are aligned at a predetermined position on the upper surface of the lower mold 16 when a plurality of ceramic green sheets 20 are overlapped. The guide holes provided in the green sheet 20 are inserted into guide pins provided on the lower mold 16 side to be aligned, and a plurality of ceramic green sheets 20 are placed on top of each other. The ceramic green sheet 20 used here has been subjected to a ceramic green sheet manufacturing step and a conductor wiring pattern forming step.
[0017]
Next, as shown in FIG. 2 (C), by lowering the upper die 11, the convex portion 19 of the cavity pressing die 15 attached to the upper die 11 has a slight clearance in the cavity portion 21. And the rigid plate 13 and the cavity pressing die 15 come into contact with the surface of the ceramic green sheet 20 and heat the plurality of ceramic green sheets 20 with the heater 17 while the upper die 11 and the lower die The laminate 22 is produced by pressing at 16.
[0018]
Next, as shown in FIG. 2D, the stacked body 22 placed on the lower mold 16 is taken out by raising the upper mold 11. Then, the ceramic package 30 is manufactured by cutting and firing at the cutting position 31 before firing the laminate 22 or by manufacturing at the cutting position 31 after firing the laminate 22. I have.
[0019]
【Example】
The present inventor uses a cavity pressing die formed of a sheet shape in which 144 ceramic packages having a length of 13.1 mm, a width of 10.6 mm, a height of 2.4 mm, and a seal path width of 0.46 mm are arranged in a ceramic green sheet. The laminated body of the example was produced by the laminating apparatus and laminating method of the ceramic green sheet according to the present invention. At the same time, a conventional laminate using a cavity pressing die made of individual pieces was produced. The lengths and widths of the ceramic packages were measured for the laminates of the example and the conventional example, and the degree of dimensional variation was compared. Table 1 shows the results.
[0020]
[Table 1]

[0021]
It was confirmed that the dimensional variation of the example using the sheet-shaped cavity pressing die can be reduced to half or less of the conventional example using the individual cavity pressing die.
[0022]
【The invention's effect】
The ceramic green sheet laminating apparatus according to claim 1 or 2 has a rigid plate provided with a cavity pressing die mounting hole through an elastic plate on the pressing surface of the upper mold, The cavity-pressing die mounting hole has a sheet-like one-sided surface, and the other surface is provided with a plurality of projections that can be fitted into the cavity portion. Since the ceramic green sheets are mounted so as to be in contact with each other, the ceramic green sheets can be uniformly pressed, and at the same time, a ceramic green sheet laminating apparatus capable of forming a laminated body with high dimensional accuracy without deformation of the cavity can be provided. .
[0023]
In particular, in the ceramic green sheet laminating apparatus according to the second aspect, since the cavity pressing die is formed of a sheet-like elastic body made of oil impregnated rubber, the conductive wiring pattern such as tungsten paste formed in the cavity portion is adhered. It is possible to provide a ceramic green sheet laminating apparatus capable of preventing the cavity pressing die from being in a sheet shape at the same time as preventing the cavity pressing die from having a volume variation as in the case of individual pieces. it can.
[0024]
In the method for laminating ceramic green sheets according to the third aspect, a rigid plate having a cavity pressing die mounting hole is disposed on the pressing surface of the upper mold via an elastic plate, and a sheet-like shape is formed in the cavity pressing die mounting hole. A cavity pressing die made of an elastic body having a plurality of protrusions arranged on the other surface and having a plurality of projections that can be fitted into the cavity portion is fixed on the elastic plate by the rigid plate so that the flat surface is in contact with the elastic plate. A step of superposing and placing a plurality of ceramic green sheets on a predetermined position on the upper surface of the lower mold; and fitting a convex portion of the cavity pressing die into the cavity portion, and a rigid plate and a cavity pressing die. To contact the surface of the ceramic green sheet and pressurize and stack a plurality of ceramic green sheets while heating to form a laminate, so that a sheet-shaped cavity is formed. The ceramic green sheet can be uniformly pressed by the pressing die, and at the same time, the volume of the elastic body can be quickly balanced by the sheet-shaped cavity pressing die, so that a laminate having good dimensional accuracy without deformation of the cavity can be formed. A method for laminating ceramic green sheets can be provided.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram of a ceramic green sheet laminating apparatus according to an embodiment of the present invention.
FIGS. 2A to 2D are explanatory views of a method for laminating the same ceramic green sheets.
FIG. 3 is an explanatory view of a conventional ceramic green sheet laminating apparatus.
FIG. 4 is an explanatory view of a problem that occurs in a conventional ceramic green sheet laminating method.
[Explanation of symbols]
10: Laminating apparatus for ceramic green sheets, 11: Upper mold, 12: Elastic plate, 13: Rigid plate, 14: Cavity pressing die mounting hole, 15: Cavity pressing die, 16: Lower die, 17: Heater, 18: frame, 19: convex, 20: ceramic green sheet, 21: cavity, 22: laminate, 30: ceramic package, 31: cutting position

Claims (3)

It has an upper mold and a lower mold that combine and stack a plurality of ceramic green sheets for manufacturing by arranging a plurality of ceramic packages having a cavity for accommodating electronic components. In the ceramic green sheet laminating device,
The pressing surface of the upper mold has a rigid plate provided with a cavity pressing die mounting hole via an elastic plate, and the cavity pressing die mounting hole of the rigid plate has a flat sheet-like surface. A ceramic green sheet, comprising: a cavity pressing die made of an elastic body provided with a plurality of projections that can be fitted into the cavity on the other surface, the cavity pressing die being mounted on the elastic plate so that the flat surface comes into contact with the cavity pressing die. Laminating equipment. The ceramic green sheet laminating apparatus according to claim 1, wherein the cavity pressing die is formed of a sheet-like elastic body made of oil-impregnated rubber. In order to produce multiple ceramic packages with cavities for storing electronic components in an array, multiple ceramic green sheets are stacked and heated and pressed between the upper and lower molds to form an integrated body. In the method of laminating ceramic green sheets to be
A rigid plate having a cavity pressing die mounting hole is disposed on the pressing surface of the upper mold via an elastic plate, and one surface of a sheet is flat on the cavity pressing die mounting hole and the other surface is A step of fixing and mounting the cavity pressing die made of an elastic body having a plurality of projections that can be fitted into the cavity portion with the rigid plate so that the flat surface is in contact with the elastic plate,
At a predetermined position on the upper surface of the lower mold, a step of stacking and placing a plurality of the ceramic green sheets,
The convex portion of the cavity pressing die is fitted into the cavity portion, and the rigid plate and the cavity pressing die are brought into contact with the surface of the ceramic green sheet to apply pressure while heating a plurality of the ceramic green sheets. A method for laminating ceramic green sheets, comprising a step of laminating to form a laminate.

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