JP2011235548A - Device and method of laminating ceramic green sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device and a method for laminating ceramic green sheets which can form a laminate having hollow-state projection parts in its intermediate layer by pressurizing once.SOLUTION: The laminate 20 has the projection parts 14 where a plurality of the ceramic green sheets 11 in the intermediate layer are projecting from upper/lower layers, and the laminating device 10 integrally forms the laminate 20 with upper/lower molds 12, 13. The laminating device 10 has elastic plates 15, 15a contacting pressing surfaces of the upper/lower molds 12, 13, rigid plates 16, 16a contacting the other main surfaces of the elastic plates 15, 15a, metal plates 17, 17a contacting the other main surfaces of the rigid plates 16, 16a to contact the outermost surfaces of the ceramic green sheets 11, and elastic pressing molds 19, 19a fitted to penetration holes 18, 18a provided for the rigid plates 16, 16a and the metal plates 17, 17a to press the projection parts 14. The projection parts 14 are pressurized via the elastic plates 15, 15a and the elastic pressing molds 19, 19a.

Description

  The present invention relates to a ceramic green sheet laminating apparatus and a laminating method used for producing a ceramic multi-layer substrate such as a package made of a multilayer structure of ceramic green sheets and a substrate.

  In general, a ceramic multilayer substrate used for a package for housing an electronic component element such as a semiconductor element or a substrate is first prepared by arranging a plurality of ceramic green substrates that can be formed by arranging a plurality of ceramic multilayer substrates. After forming through-holes for vias to make the upper and lower layers electrically conductive on the sheet, a conductor wiring pattern is formed by arranging a conductor paste on the surface and via-holes by screen printing etc. is doing. Next, the plurality of ceramic green sheets on which the conductor wiring pattern is formed are superposed and pressed while being heated using a laminating apparatus composed of an upper die and a lower die made of a flat plate surface to form a laminated body. Forming. And this laminated body is divided into individual packages or ceramic multilayer substrates such as substrates and then fired and plated to produce a package or ceramic multilayer substrate such as a substrate, or After firing and plating, a ceramic multilayer substrate such as a package or a substrate is manufactured by dividing.

  However, when a laminated body is formed by applying pressure while heating a plurality of ceramic green sheets as described above, if there is a step in the intermediate layer of the ceramic multilayer substrate, Since pressure is not applied to the upper surface of the step of the ceramic green sheet, it is impossible to form a laminate. Therefore, when there is a step in an intermediate layer of a ceramic multilayer substrate such as a package or a substrate, the laminate is formed by stacking them one by one and repeatedly applying pressure.

  However, when the laminate is formed by stacking one by one and repeatedly pressing as described above, since the number of times of pressing differs for each ceramic green sheet, the green density is different for each ceramic green sheet. There are warping and dimensional variations when firing. In addition, when the laminated body is formed by stacking one sheet at a time and repeatedly applying pressure as described above, it takes time to manufacture, and the cost of the ceramic package and the ceramic multilayer substrate is increased. Therefore, when there is a step in the intermediate layer of the ceramic package or ceramic multilayer substrate, an elastic pressing mold made of an elastic material such as rubber that fits into the stepped portion is fitted and pressed from above and below. To form a laminate.

  As shown in FIG. 4, a ceramic green sheet laminating method and laminating in which a laminated body is formed by fitting an elastic pressing mold made of rubber or the like that fits into the above stepped portion and pressing from above and below. In the apparatus 50, a rigid plate 55 having a through hole 54 for attaching an elastic pressing mold is disposed on a pressing surface of the upper mold 51 via a resilient plate 52 at a portion corresponding to a cavity 53 corresponding to a stepped portion. An elastic pressing die 56 is inserted into and attached to the through hole 54, and the rigid plate 55 and the elastic pressing die 56 are brought into contact with the surface of the ceramic green sheet 58 placed on the lower mold 57 so as to overlap each other. It has been proposed to pressurize and laminate the surface of the ceramic green sheet 58 to integrate a plurality of ceramic green sheets 58 (see, for example, Patent Document 1).

  However, in recent ceramic packages, with the miniaturization of products, after an electronic component is mounted in the cavity portion 53, the seal path width used for hermetically sealing the inside of the cavity portion 53 with a lid or the like becomes narrower. Yes. The ceramic green sheet can be uniformly pressed by inserting and pressing the cavity 53 with a laminating device made of an elastic pressing die 56 made of an elastic material such as rubber. However, when the elastic pressing die 56 made of individual pieces is inserted and pressed into the cavity portion 53 between the narrow bank portions that are adjacent seal path width portions, due to the variation in the pressing force due to the volume variation of the elastic pressing die 56 The weak bank portion is deformed, and the dimensional accuracy of the cavity 53 is lowered. Originally, the volume variation of the elastic pressing die 56 is structured to be absorbed by the flow of the elastic plate 52, but when the width of the bank portion is narrow, the bank portion is deformed before being absorbed by the elastic plate 52. .

  Therefore, as shown in FIG. 5, the ceramic green sheet laminating apparatus 50 a and the laminating method include a rigid plate 55 in which an elastic pressing mold mounting hole 54 is provided on the pressing surface of the upper mold 51 via an elastic plate 52. On the elastic plate 52, an elastic pressing die 56 made of an elastic body is provided on the elastic pressing mold mounting hole 54, with one surface of the sheet-like surface being flat and the other surface being provided with a plurality of convex portions that can be fitted into the cavity portion 53. It has been proposed to have a flat surface in contact (see, for example, Patent Document 2).

JP 7-245359 A JP 2004-299147 A

However, the conventional ceramic green sheet laminating apparatus and laminating method as described above have the following problems.
The laminated body of ceramic green sheets has a hollow projecting portion in which a plurality of ceramic green sheets are projected on the upper and lower ceramic green sheets on a plurality of intermediate layers obtained by superimposing a plurality of ceramic green sheets. Some have In the above conventional ceramic green sheet laminating apparatus for forming a laminated body by stacking all the ceramic green sheets between the upper mold and the lower mold and pressing them at once, the lower side of the protruding portion is supported. Therefore, it is impossible to form a laminated body at once by superimposing all the ceramic green sheets.
The present invention has been made in view of such circumstances, and a laminate of ceramic green sheets capable of forming a laminate of ceramic green sheets having a hollow projecting portion in an intermediate layer by a single press. An object is to provide an apparatus and a lamination method.

  The ceramic green sheet laminating apparatus according to the present invention that meets the above-described object is a hollow projecting portion in which a plurality of ceramic green sheets provided in a plurality of stacked intermediate layers protrude from the upper and lower ceramic green sheets. Is a ceramic green sheet laminating device for sandwiching a laminate having an upper mold and a lower mold and pressurizing while heating and integrally forming the laminated body, one on the pressing surface of the upper mold and the lower mold An elastic plate that makes contact with the main surface of the ceramic plate, a rigid plate that makes contact with the other main surface of the elastic plate, and a hard plate that makes contact with the other main surface of the rigid plate and makes contact with the outermost surface of the ceramic green sheet In addition to having a metal plate, it has a rigid plate and an elastic pressing die for pressing the protruding portion by fitting into a through hole provided in the metal plate, and the protruding portion is an elastic plate by pressing the upper mold and the lower mold as well as Pressurized through sexual press die.

  Here, in the ceramic green sheet laminating apparatus, the elastic plate and the elastic pressing mold are preferably made of oil-impregnated rubber having a hardness of 20 to 50 degrees.

  The ceramic green sheet laminating method according to the present invention that meets the above-described object is a hollow projecting portion in which a plurality of ceramic green sheets provided in a plurality of stacked intermediate layers protrude from the ceramic green sheets in the upper and lower layers. Is a method of laminating a ceramic green sheet that is formed by sandwiching a laminated body between an upper mold and a lower mold and applying pressure while heating, and is provided on one pressing surface of the elastic plate on the pressing surface of the upper mold Abut one of the rigid plates against the other principal surface of the elastic plate and a metal plate with which the outermost surface of the ceramic green sheet abuts against the other principal surface of the rigid plate. And a step of fitting a first elastic pressing die by fitting a protruding portion provided on a rigid plate and a metal plate into a first through hole provided for pressing from above, and a lower mold Pressing One main surface of the elastic plate is in contact with the other main surface of the elastic plate, one main surface of the rigid plate is in contact with the other main surface of the elastic plate, and the lowermost surface of the ceramic green sheet is in contact with the other main surface of the rigid plate The metal plate is placed in contact with it, and the protruding portion provided on the rigid plate and the metal plate is fitted into the second through-hole provided for pressing from below, and the second elastic pressing die is mounted. And inserting the second insertion hole provided at the same position as the first insertion hole provided at the predetermined position of the ceramic green sheet into the second elastic pressing mold at a predetermined position on the upper surface of the lower mold. In addition, a plurality of ceramic green sheets are stacked and placed, and a plurality of ceramic green sheets not provided with the first and second insertion holes are stacked and placed thereon. A plurality of ceramic groups provided with a first insertion hole A step of superposing and placing the sheet, and lowering the upper mold, inserting the first elastic pressing mold into the first insertion hole, and the rigid plate of the upper mold and the first elastic pressing mold, A step of bringing the rigid plate of the lower mold and the second elastic pressing die into contact with the surface of the ceramic green sheet and pressurizing and stacking the laminated ceramic green sheets to form a laminated body.

  In the ceramic green sheet laminating apparatus according to the present invention, a plurality of ceramic green sheets provided in a plurality of stacked intermediate layers have hollow projecting portions that protrude from the upper and lower ceramic green sheets. A ceramic green sheet laminating device for sandwiching a laminated body between an upper die and a lower die and applying pressure while heating to form an integrated body, and one main surface on the pressing surface of the upper die and the lower die An elastic plate that makes contact with the surface, a rigid plate that makes contact with the other main surface of the elastic plate, and a metal plate that makes contact with the other main surface of the rigid plate and makes contact with the outermost surface of the ceramic green sheet And an elastic pressing die for pressing the protruding portion by fitting into a through hole provided in the rigid plate and the metal plate, and the protruding portion is elastic plate and elastic by pressing the upper die and the lower die. Pressing Since all the ceramic green sheets including the protruding portion are pressed uniformly from above and below, the ceramics can form a low-cost ceramic green sheet laminate with good dimensional accuracy and no process. A green sheet laminating apparatus can be provided.

  Particularly, in the ceramic green sheet laminating apparatus, since the elastic plate and the elastic pressing mold are made of oil-impregnated rubber having a hardness of 20 to 50 degrees, the hardness is soft and the deformation of the protruding portion can be prevented, and the oil-impregnated rubber is made of tungsten paste. Thus, it is possible to provide a ceramic green sheet laminating apparatus capable of preventing the conductive wiring pattern formed by the above method.

  In the method for laminating ceramic green sheets according to the present invention, a plurality of ceramic green sheets provided in a plurality of stacked intermediate layers are provided with hollow projecting portions that protrude from the upper and lower ceramic green sheets. A method of laminating a ceramic green sheet that is formed by sandwiching a laminated body between an upper mold and a lower mold and applying pressure while heating, wherein one pressing surface of the elastic plate is applied to the pressing surface of the upper mold. The first main surface of the rigid plate is brought into contact with the other main surface of the elastic plate, and the metal plate with which the outermost surface of the ceramic green sheet comes into contact with the other main surface of the rigid plate is arranged. And a step of fitting a first elastic pressing die by fitting a protruding portion provided on the rigid plate and the metal plate into a first through hole provided for pressing from above, and pressing the lower die Elastic to the surface A metal plate in which one main surface of the rigid plate is brought into contact with the other main surface of the elastic plate, and the lowermost surface of the ceramic green sheet is brought into contact with the other main surface of the rigid plate. And a step of fitting the second elastic pressing die by fitting the protruding portion provided on the rigid plate and the metal plate into the second through-hole provided for pressing from below while being disposed in contact with each other A plurality of second insertion holes provided at the same positions as the first insertion holes provided at predetermined positions of the ceramic green sheet are inserted into the second elastic pressing mold at predetermined positions on the upper surface of the lower mold. A plurality of ceramic green sheets are placed on top of each other, and a plurality of ceramic green sheets not provided with the first and second insertion holes are placed on top of each other. Multiple ceramic green screens with insertion holes A step of superimposing and placing the upper mold, lowering the upper mold, and inserting the first elastic pressing mold into the first insertion hole, the rigid plate of the upper mold and the first elastic pressing mold, Since there is a step of bringing the rigid plate of the lower mold and the second elastic pressing die into contact with the surface of the ceramic green sheet and pressurizing and laminating the stacked ceramic green sheets to form a laminate. A method for laminating ceramic green sheets that can be pressed uniformly from the top and bottom of all ceramic green sheets including the part, and that can improve dimensional accuracy with a laminate of inexpensive ceramic green sheets that do not require any process. can do.

It is explanatory drawing of the lamination apparatus of the ceramic green sheet which concerns on one embodiment of this invention. (A), (B) is explanatory drawing of the ceramic multilayer substrate produced with the lamination apparatus of the ceramic green sheet, respectively. (A)-(C) are each explanatory drawings of the lamination | stacking method of the ceramic green sheet which concerns on one embodiment of this invention. It is explanatory drawing of the conventional ceramic green sheet lamination | stacking apparatus. It is explanatory drawing of the conventional lamination apparatus of the ceramic green sheet.

Next, embodiments of the present invention will be described with reference to the accompanying drawings to provide an understanding of the present invention.
As shown in FIG. 1, a ceramic green sheet laminating apparatus 10 according to an embodiment of the present invention aligns and superimposes a plurality of ceramic green sheets 11 and then combines an upper mold 12 and a lower mold. It is used to form a laminate 20 by being sandwiched by a mold 13 and pressurized while being heated and integrated. In this ceramic green sheet laminating apparatus 10, a laminate having a plurality of ceramic green sheets 11 provided in a plurality of intermediate layers and having hollow projecting portions 14 protruding from the upper and lower ceramic green sheets 11 a and 11 b. 20 can be formed.

  In the ceramic green sheet laminating apparatus 10, the laminated body 20 is usually formed by integrally pressing a plurality of ceramic green sheets 11 between an upper mold 12 and a lower mold 13 and applying pressure while heating. It is formed as an assembly in which a large number of pre-firing packages made of individual pieces and a ceramic multilayer substrate 30 such as a substrate (see FIG. 2B) are arranged. Then, as shown in FIGS. 2A and 2B, in the ceramic green sheet laminating apparatus 10, for example, the intermediate layer is in a hollow state by being taken out as an individual piece from an assembly in which a large number are arranged. The ceramic multilayer substrate 30 provided with the protruding portion 14 can be manufactured. From the aggregate, after cutting the cutting position 31 of the ceramic green sheet laminate 20 with a cutting blade so as to be a piece having a predetermined shape, each piece is fired to form a piece of ceramic. A ceramic multilayer substrate 30 such as a package or a substrate, for example, a feedthrough substrate described later is used. Alternatively, from the aggregate, the divided grooves are formed in the ceramic green sheet laminate 20 with a pressing blade so as to be individual pieces of a predetermined shape, fired, and then divided from the cutting position 31 of the divided grooves. A body package, for example, a ceramic multilayer substrate 30 such as a feedthrough substrate described later is used.

  The ceramic green sheet laminating apparatus 10 includes an elastic plate 15 that abuts one main surface against the pressing surface of the upper mold 12, and an elastic plate 15 a that abuts one main surface against the pressing surface of the lower mold 13. Have. Further, the ceramic green sheet laminating apparatus 10 is provided on the pressing surface of the lower mold 13 and the rigid plate 16 that contacts one main surface with the other main surface of the elastic plate 15 provided on the pressing surface of the upper mold 12. The elastic plate 15a has a rigid plate 16a that comes into contact with the other main surface of the elastic plate 15a. Furthermore, the ceramic green sheet laminating apparatus 10 contacts the other main surface of the rigid plate 16 and a metal plate 17 that contacts the other main surface of the rigid plate 16 and the other main surface of the rigid plate 16a. And a metal plate 17a in contact with the outermost surface of the ceramic green sheet 11. At the same time, the ceramic green sheet laminating apparatus 10 has an elastic pressing die 19 for pressing the protruding portion 14 provided on the rigid plate 16 and the metal plate 17 of the upper mold 12 fitted in each through hole 18. Have. Further, the ceramic green sheet laminating apparatus 10 has an elastic pressing die 19a for pressing the protruding portion 14 provided on the rigid plate 16a and the metal plate 17a of the lower die 13 and is fitted to each through hole 18a. is doing.

  In the ceramic green sheet laminating apparatus 10 described above, the upper mold 12 and the lower mold 13 are pressed to form the recesses and the protruding parts 14 of the elastic plate 15 and the elastic pressing mold 19 of the upper mold 12 and the lower mold 13. While being pressurized through the elastic plate 15a and the elastic pressing die 19a, the upper and lower flat portions of the ceramic green sheet 11 are the rigid plate 16 and the metal plate 17 of the upper die 12, and the rigid plate 16a of the lower die 13. The pressure is applied via the metal plate 17a. The upper mold 12 and the lower mold 13 of the ceramic green sheet laminating apparatus 10 are the same as the upper mold and the lower mold of the conventional ceramic green sheet laminating apparatus, and each has a heater (see FIG. Not shown). Further, the metal plates 17 and 17a of the ceramic green sheet laminating apparatus 10 can be pressurized in response to slight undulations of the ceramic green sheet 11, and the resin and solvent ooze out from the ceramic green sheet 11. However, it is provided for easy cleaning.

  Although the ceramic green sheet laminating apparatus 10 is not shown, the jig 10 and the metal plate 17 provided on the pressing surface of the upper mold 12 support the elastic plate 15 and the elastic pressing die 19 in a mounting jig. It can be fixed and attached with etc. The ceramic green sheet laminating apparatus 10 is not shown, but the elastic plate 15a is placed on the pressing surface of the lower die 13 in a frame such as a frame-shaped set jig provided on the pressing surface of the lower die 13. The rigid plate 16a and the metal plate 17a that support the elastic pressing die 19a while being in contact with the metal plate 17a can be fitted together.

  The ceramic green sheet laminating apparatus 10 is preferably made of an oil impregnated rubber in which the elastic plates 15 and 15a and the elastic pressing dies 19 and 19a have a hardness of 20 to 50 degrees. If the hardness is less than 20 degrees, the elastic plates 15, 15a and the elastic pressing dies 19, 19a are too soft, the deformation during pressing increases, the pressing force decreases, and the lateral direction Therefore, the laminate 20 is not sufficiently joined, and the ceramic multilayer substrate 30 is poorly sealed and the through-hole portion is deformed due to peeling at the joining surface. When the hardness exceeds 50 degrees, the elastic plates 15 and 15a and the elastic pressing dies 19 and 19a are too hard to follow the complicated shape of the laminate 20, and cannot be pressed. Deformation and cracks are generated in the laminate 20. The oil-impregnated rubber is preferably, for example, silicon rubber, and adheres to the metallized paste of the conductor wiring pattern formed on the protruding portion 14 or the like by giving releasability by impregnating oil. Can be prevented.

Next, a method for laminating ceramic green sheets according to an embodiment of the present invention will be described with reference to FIGS.
The method of laminating ceramic green sheets is for producing a plurality of ceramic multilayer substrates 30 such as a package and a substrate, and in the same manner as the conventional method for producing a ceramic package, A ceramic green sheet laminating step including a conductor wiring pattern forming step, a ceramic green sheet laminating step, and a firing step will be described.

  As shown in FIG. 3A, in the method of laminating ceramic green sheets, first, the elastic plates 15 and 15a, the rigid plates 16 and 16a, the metal plates 17 and 17a, and the elastic pressing dies 19 and 19a are laminated ceramic. A preferable one is selected according to the number of stacked green sheets 11, thickness, uneven state, and the like. Next, on the pressing surface of the upper mold 12, a rigid plate 16 and a metal plate 17 having a through hole 18 for mounting an elastic pressing die are arranged via an elastic plate 15, and an elastic pressing die 19 is placed in the through hole 18. The elastic plate 15 and the elastic pressing die 19 are fixed and attached by the rigid plate 16 and the metal plate 17. The elastic pressing die 19 used here can be fitted with a slight clearance in a recess provided on the ceramic green sheet 11 on one surface and a hole for pressing the protruding portion 14 on the other surface. Has a convex part. The elastic pressing die 19 is mounted so as to be in contact with the elastic plate 15 on the plane of one surface. Although not shown, the rigid plate 16 and the metal plate 17 are fixed to the pressing surface of the upper mold 12 with an attachment jig or the like.

  On the other hand, on the pressing surface of the lower mold 13, a rigid plate 16a having a through hole 18a for mounting an elastic pressing die and a metal plate 17a are arranged via an elastic plate 15a, and the elastic pressing die 19a is provided in the through hole 18a. The elastic plate 15a and the elastic pressing die 19a are fixedly mounted by the rigid plate 16a and the metal plate 17a. The elastic pressing die 19a used here has a convex portion that can be fitted with a slight clearance on the protruding portion 14 provided on the ceramic green sheet 11 on one side being a flat surface. The elastic plate 15 mounted so that one surface of the elastic pressing die 19 of the upper mold 12 is in contact with the elastic plate 15 is a frame-shaped set jig (not shown) placed on the pressing surface of the lower mold 13. ) Or the like. Then, when a plurality of ceramic green sheets 11b having holes for pressing the lower side of the protruding portion 14 are overlaid on the metal plate 17a on the upper surface of the lower mold 13, the upper and lower positions are aligned. In addition, for example, a guide hole provided in the ceramic green sheet 11b is aligned while being inserted into a guide pin (not shown) provided in a setting jig or the like, and elastically pressed into a hole for pressing the lower side of the protruding portion 14 The mold 19a is inserted and placed. Next, a plurality of ceramic green sheets 11 provided with protruding portions 14 are placed on the ceramic green sheet 11b. Furthermore, a plurality of ceramic green sheets 11 a having holes for pressing the lower side of the protruding portions 14 are placed on the plurality of ceramic green sheets 11 provided with the protruding portions 14. The ceramic green sheet 11 used here has undergone the above-described ceramic green sheet manufacturing process and conductor wiring pattern forming process.

  Next, as shown in FIG. 3 (B), the upper mold 12 is lowered so that the convex portion of the elastic pressing mold 19 is placed on the lower mold 13 so as to overlap the ceramic green sheet 11. The recess is inserted into the hole for pressing the protruding portion 14 with a slight clearance. Further, when the upper mold 12 is lowered, the metal plate 17 and the elastic pressing mold 19 are brought into contact with the surface of the ceramic green sheet 11, the concave portion, and the protruding portion 14, so that a plurality of ceramic green sheets 11 are formed. The laminated body 20 is produced in which the protruding portion 14 is provided by applying pressure while heating from above and below with the upper die 12 and the lower die 13.

  Next, as shown in FIG. 3C, the upper mold 12 is lifted to take out the stacked body 20 placed on the lower mold 13. Then, the ceramic multilayer substrate 30 is manufactured by cutting and firing at the cutting position 31 before firing the laminate 20, or by cutting at the cutting position 31 after firing the laminate 20. ing.

  In the ceramic green sheet laminating apparatus and laminating method of the present invention, since the ceramic multilayer substrate produced by this has a protruding portion, the feed attached to the cutout portion provided on the side surface of the metal frame of the package made of a metal box. It can be used as a through substrate. In this feedthrough substrate, metallized patterns are formed on the upper and lower surfaces of the ceramic multilayer substrate, and this portion is brazed and joined to the cutout portion of the metal frame. In addition, the feedthrough substrate forms a metallized pattern on the protruding portion and on the opposite side of the ceramic substrate with the wall portion therebetween, with the wire bond pad on the inner side and the external connection terminal pad on the outer side. can do. Then, in the package to which this is attached, a semiconductor element that can exchange the optical signal from the optical fiber mounting portion provided on the side surface of the metal frame into an electrical signal or vice versa is mounted, and the semiconductor element and the wire bond It can be used for an optical communication package in which a pad is connected via a bonding wire, and an external connection terminal brazed to the external connection terminal pad and an optical signal of an optical fiber can be brought into conduction.

  10: Laminating device for ceramic green sheet 11, 11a, 11b: Ceramic green sheet, 12: Upper mold, 13: Lower mold, 14: Protruding part, 15, 15a: Elastic plate, 16, 16a: Rigid plate, 17, 17a: Metal plate, 18, 18a: Through hole, 19, 19a: Elastic pressing type, 20: Laminated body, 30: Ceramic multilayer substrate, 31: Cutting position

Claims (3)

A laminate having a protruding portion in a hollow state in which a plurality of ceramic green sheets provided on a plurality of stacked intermediate layers are protruded from the upper and lower ceramic green sheets is sandwiched between an upper mold and a lower mold. A ceramic green sheet laminating device for integrally forming by heating and pressurizing,
An elastic plate that abuts one main surface against the pressing surfaces of the upper die and the lower die, a rigid plate that abuts one main surface against the other main surface of the elastic plate, and the other main surface of the rigid plate An elastic pressing mold for pressing the protruding portion by being fitted into a through-hole provided in the rigid plate and the metal plate, and having a metal plate that is in contact with the surface and in contact with the outermost surface of the ceramic green sheet A ceramic green sheet laminating apparatus, wherein the protruding portion is pressed through the elastic plate and the elastic pressing die by pressurization of the upper die and the lower die.   2. The ceramic green sheet laminating apparatus according to claim 1, wherein the elastic plate and the elastic pressing mold are made of oil impregnated rubber having a hardness of 20 to 50 degrees. A laminated body in which a plurality of ceramic green sheets provided in a plurality of stacked intermediate layers are provided with a protruding portion in a hollow state protruding from the ceramic green sheets in the lower layer is sandwiched between an upper mold and a lower mold. A method of laminating ceramic green sheets that is integrally formed by heating and pressing,
One main surface of the elastic plate is brought into contact with the pressing surface of the upper mold, one main surface of the rigid plate is brought into contact with the other main surface of the elastic plate, and the other main surface of the rigid plate is contacted A metal plate with which the outermost surface of the ceramic green sheet abuts is disposed, and a first penetration is provided to press the rigid plate and the protruding portion provided on the metal plate from above. Fitting the first elastic pressing mold into the hole; and
One main surface of the elastic plate is brought into contact with the pressing surface of the lower mold, one main surface of the rigid plate is brought into contact with the other main surface of the elastic plate, and the other main surface of the rigid plate is contacted The metal plate with which the lowermost surface of the ceramic green sheet is in contact with the main surface is disposed so as to be in contact with the rigid plate and the protruding portion provided on the metal plate to be pressed from below. A step of fitting the second elastic pressing mold into the two through holes;
A second insertion hole provided at the same position as the first insertion hole provided at a predetermined position of the ceramic green sheet is inserted into the second elastic pressing mold at a predetermined position on the upper surface of the lower mold. While the plurality of ceramic green sheets are stacked and placed, the plurality of ceramic green sheets not provided with the first and second insertion holes are stacked and placed thereon. A step of superposing and placing a plurality of the ceramic green sheets provided with the first insertion hole on the top;
Lowering the upper mold and inserting the first elastic pressing mold into the first insertion hole, the rigid plate of the upper mold and the first elastic pressing mold, and the lower mold The method includes a step of bringing the rigid plate and the second elastic pressing die into contact with the surface of the ceramic green sheet and pressurizing and stacking the stacked ceramic green sheets to form a laminate. A method for laminating ceramic green sheets.

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