JP2004294170A

JP2004294170A - Inspection device and inspection method of surface condition

Info

Publication number: JP2004294170A
Application number: JP2003084675A
Authority: JP
Inventors: Hiroshi Nagira; 洋志柳楽
Original assignee: Mazda Motor Corp
Current assignee: Mazda Motor Corp
Priority date: 2003-03-26
Filing date: 2003-03-26
Publication date: 2004-10-21

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method for determining quality of the surface condition of an inspection object in a short time without lowering the operation rate of a line. <P>SOLUTION: A scanning head 11 provided relatively movably to the inspection surface 2 of the inspection object 1 is provided with a photoelectric sensor 13 for irradiating the inspection surface 2 with light and detecting the reflected light quantity therefrom, and a displacement sensor 14 for detecting the change of the surface shape of the inspection surface 2. While irradiating the inspection surface 2 with light by the photoelectric sensor 13, the scanning head 11 is relatively moved to the inspection surface 2, and an abnormal spot 4 on the inspection surface 2 is specified based on the reflected light quantity from the inspection surface 2. The displacement sensor 14 is positioned on the abnormal spot 4 on the inspection surface 2 by relative movement of the scanning head 11, and detects the change of the surface condition of the abnormal spot 4, and the quality of the surface condition of the abnormal spot 4 is determined based on the change of the surface condition of the abnormal spot 4 detected by the displacement sensor 14. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

【０００１】
【発明の属する技術分野】
本発明は、表面状態の検査装置及び検査方法に関する。
【０００２】
【従来の技術】
被検査物の表面状態の外観検査は、作業者の目視による検査が一般的であるが、良否判断の個人差や検査漏れにより不良品が後工程へ流出する等の懸念があり、品質保証が十分ではなかった。
【０００３】
そこで、作業者の目視に代わる検査方法として、レーザ光を被検査物の検査面に照射して、その反射光輝線パターンをデータ処理することにより、被検査物の良否を判断するものが知られている（特許文献１参照）。
【０００４】
【特許文献１】
特開２００２−３４６９２５号公報
【０００５】
【発明が解決しようとする課題】
しかし、上述の方法では、検査範囲が広い被検査物の場合、計測データの処理量が膨大となり処理時間がかかるため、検査面を走査する走査速度を遅くしなければならず検査時間が長くなるという問題がある。
【０００６】
そこで、本発明者は、検査面の異常箇所の検出手段として、光電センサを用いて被検査物の検査面に光を照射し、その反射光量の変化のみを計測して該検査面の不良箇所を短時間で検出することを考えた。しかし、この方法では、検査面の不良箇所だけでなく検査面に付着した汚れも不良箇所として検出してしまうため、誤検出が頻繁に発生しラインの稼働率を低下させる原因となっていた。
【０００７】
すなわち、本発明の課題は、ラインの稼働率を低下させることなく、短時間で被検査物の表面状態の良否を判定する表面状態の検査装置及び検査方法を提供することを課題とする。
【０００８】
【課題を解決するための手段】
本発明は、上記課題に対して、被検査物の検査面に対して光電センサによる走査を行い、該走査によって特定された異常箇所に対して変位センサによる表面形状の変化の検出を行うことにより、異常箇所が汚れによるものか傷や巣等の不良によるものかを判定して、短時間で被検査物の表面状態の良否を判断できるようにした。
【０００９】
すなわち、請求項１に係る発明は、被検査物の表面状態の良否を検査する表面状態の検査装置であって、
上記被検査物の検査面に対して相対移動可能に設けられた走査ヘッドと、
上記走査ヘッドに搭載され、上記検査面に対して光を照射しながら相対移動し該検査面からの反射光量を検出する光電センサと、
上記光電センサによって検出された反射光量に基づいて、上記検査面の異常箇所を特定する異常箇所特定手段と、
上記走査ヘッドに搭載され、上記異常箇所特定手段によって上記検査面の異常箇所が特定されたときに、該異常箇所を走査し該異常箇所の表面形状の変化を検出する変位センサと、
上記変位センサによって検出された該異常箇所の表面形状の変化に基づいて、上記異常箇所の表面形状の良否を判定する良否判定手段とを備えていることを特徴とする。
【００１０】
従って、本発明によれば、光電センサによって検出された検査面からの反射光量に基づいて特定された該検査面の異常箇所に対して変位センサによる走査を行い、該変位センサによって検出された該異常箇所の表面形状の変化に基づいて該異常箇所の表面形状の良否を判定する良否判定手段により、被検査物の表面状態の良否を判定するから、該変位センサによる走査範囲を絞り込むことができ、該変位センサのみで検査面全体を走査する場合に比べて走査時間が短縮でき、工場ラインの稼働率の低下を防止することができる。
【００１１】
請求項２に係る発明は、請求項１に記載された表面状態の検査装置であって、
上記光電センサは、上記検査面の走査方向と直交する検査幅よりも狭い範囲に光を照射するものであり、
上記走査ヘッドには、上記検査面に対して互いに上記検査幅方向の異なる部位の走査を担う複数の光電センサが配設されていることを特徴とする。
【００１２】
従って、本発明によれば、上記走査ヘッドには、上記検査面に対して互いに上記検査幅方向の異なる部位の走査を担う複数の光電センサが配設されているから、該走査ヘッドを該検査面に対して相対移動させたときに、該検査面の検査幅の走査を一度に行うことができるため、該検査面に対する走査を繰り返し行う必要がなく作業効率が高まる。
【００１３】
請求項３に係る発明は、請求項１に記載された表面状態の検査装置であって、
上記変位センサとして、レーザ変位センサを用いることを特徴とする。
【００１４】
従って、本発明によれば、変位センサとしてレーザ変位センサを用いるから、レーザ光を集光させて検査面に照射することで光の拡散を抑えることができ、表面形状の変化を確実に検出することができる。
【００１５】
請求項４に係る発明は、被検査物の表面状態の良否を検査する表面状態の検査方法であって、
上記被検査物の検査面に対して相対移動可能に設けられた走査ヘッドに、上記検査面に対して光を照射しその反射光量を検出する光電センサと、上記検査面の表面形状の変化を検出する変位センサとを設けておき、
上記光電センサによって上記検査面に光を照射しながら該検査面に対して上記走査ヘッドを相対移動させて、該検査面からの反射光量に基づいて該検査面の異常箇所を特定し、
上記走査ヘッドの上記相対移動により、上記変位センサを上記検査面の異常箇所に位置付けて該異常箇所の表面状態の変化を検出し、
上記変位センサによって検出した上記異常箇所の表面形状の変化に基づいて、該異常箇所の表面形状の良否を判定することを特徴とする。
【００１６】
従って、本発明によれば、光電センサによって検出された検査面からの反射光量に基づいて特定された該検査面の異常箇所に対して変位センサによる走査を行い、該変位センサによって検出された該異常箇所の表面形状の変化に基づいて該異常箇所の表面形状の良否を判定する良否判定手段により、被検査物の表面状態の良否を判定するから、該変位センサによる走査範囲を絞り込むことができ、該変位センサのみで検査面全体を走査する場合に比べて走査時間が短縮でき、工場ラインの稼働率の低下を防止することができる。
【００１７】
請求項５に係る発明は、請求項４に記載された表面状態の検査方法において、
上記光電センサは、上記検査面の走査方向と直交する検査幅よりも狭い範囲に光を照射するものであり、
上記走査ヘッドには、上記検査面に対して互いに上記検査幅方向の異なる部位の走査を担う複数の光電センサが配設されていることを特徴とする。
【００１８】
従って、本発明によれば、上記走査ヘッドには、上記検査面に対して互いに上記検査幅方向の異なる部位の走査を担う複数の光電センサが配設されているから、該走査ヘッドを該検査面に対して相対移動させたときに、該検査面の検査幅の走査を一度に行うことができるため、該検査面に対する走査を繰り返し行う必要がなく作業効率が高まる。
【００１９】
【発明の実施の形態】
以下、本発明の実施の形態を図面に基づいて説明する。
【００２０】
＜実施形態＞
図１は、エンジンの鋳物製シリンダヘッド（被検査物）のヘッドカバーとの合わせ面となる加工面（検査面）を検査する検査装置１０であって、被検査物１の検査面２を走査する走査ヘッド１１と、該走査ヘッド１１を吊設して該走査ヘッド１１を鉛直軸周りに回転させ且つ前後左右に移動させる移動ロボット１２と、該走査ヘッド１１の下端に取り付けられた光電センサ１３及び変位センサ１４と、該光電センサ１３で検出された検査面２からの反射光量に基づいて該検査面２の異常箇所４を特定し、且つ該変位センサ１４で検出された該異常箇所４の表面形状の変化に基づいて該異常箇所４の表面状態の良否を判定する判定手段１５と、上記光電センサ１３及び変位センサ１４のセンサ性能の異常をチェックするセンサ検定手段１６とから構成されている。ここで、３は該被検査物１を上流工程から搬送して該検査装置１０による検査作業位置で停止させ、検査終了後に該被検査物１を下流工程に搬送するコンベアを示す。
【００２１】
走査ヘッド１１は、その下端に上記光電センサ１３と変位センサ１４とを備えており、該光電センサ１３が該変位センサ１４よりも走査方向の前方に位置するように該変位センサ１４に隣接して取り付けられている。
【００２２】
移動ロボット１２は、上記走査ヘッド１１を吊設して上記検査面２に沿って走査させるものであり、該走査ヘッド１１を該検査面２に沿って鉛直軸周りに回転させる回転モータ１２ａと、前後左右方向に移動させる搬送部１２ｂとを備えている。
【００２３】
光電センサ１３は、図２又は図３にも示すように、該検査面２に光を照射してその反射光量を検出するものである。また、光の照射範囲は該検査面２の走査方向と直交する検査幅よりも狭く、該検査面２に対して互いに該検査幅方向の異なる部位の走査を担うように千鳥状に複数配設されている。なお、上記複数の光電センサ１３の配置は、千鳥状に限定するものではなく、該検査面２に対して互いに該検査幅方向の異なる部位の走査を行うことができれば、例えば検査幅方向に一列に配設したものであっても構わない。また、配設する光電センサ１３の数を増やして、該検査幅の略全面にわたって走査できるように配置しても構わない。
【００２４】
変位センサ１４は、該検査面２に対してレーザ光を照射して該検査面２の表面形状の変化を検出するものである。なお、該変位センサ１４は、レーザ光を用いるレーザ変位センサに限定するものではなく、該検査面２の表面形状の変化を検出できるものであれば構わない。
【００２５】
判定手段１５は、上記光電センサ１３によって検出された上記検査面２からの反射光量に基づいて該検査面２の異常箇所４を特定し、また、該変位センサ１４によって該異常箇所４を走査して検出された表面形状の変化に基づいて該異常箇所４の良否を判定するものである。
【００２６】
センサ検定手段１６は、上記走査ヘッド１１により上記検査面２に対して走査を行う前に、該走査ヘッド１１に設けられた上記光電センサ１３及び変位センサ１４のセンサ性能の異常をチェックするものである。
【００２７】
以下に、本実施形態における表面状態の検査方法について説明する。
【００２８】
図１に示すように、移動ロボット１２により走査ヘッド１１をセンサ検定手段１６の上方に移動させ、該センサ検定手段１６により、該走査ヘッド１１の下端に取り付けられている光電センサ１３及び変位センサ１４のセンサ性能の異常をチェックする。ここで、センサ性能の異常が検出された場合は、作業者がセンサの感度調整又は交換作業を行う。
【００２９】
次に、上記移動ロボット１２により上記走査ヘッド１１を被検査物１の検査面２の上方に移動し、図３に示すように該検査面２に対して走査ヘッド１１を図の左から右へ走査させ、該走査ヘッド１１の下端に取り付けられた複数の光電センサ１３，１３，・・・により該検査面２に対して光を照射し、その反射光量を検出する。
【００３０】
そして、該光電センサ１３による反射光量の検出情報及び走査ヘッド１１の位置情報を判定手段１５（図１に図示）に送信して、該判定手段１５により検出情報及び位置情報を管理する。
【００３１】
そして、該検査面２の走査が終了したときに、上記判定手段１５によって管理されている上記光電センサ１３による反射光量の検出情報を分析し、該検査面２のどの位置に異常箇所４があるのかを特定する。
【００３２】
次に、図４に示すように、特定された異常箇所４の位置情報に基づいて、上記移動ロボット１２により上記走査ヘッド１１を当該異常箇所４近傍の上方へ位置付け、該異常箇所４に対して該走査ヘッド１１に取り付けられた変位センサ１４からレーザ光を照射し、該異常箇所４の表面形状の変化を検出する。
【００３３】
そして、該変位センサ１４により検出された表面形状の変化の検出情報を上記判定手段１５に送信して、該判定手段１５により該異常箇所４の表面形状の良否を判定する。
【００３４】
そして、図１に示すように、上記判定手段１５により良品と判定された被検査物１は、コンベア３により下流工程へ搬送される。一方、不良と判定された被検査物１は、図示しない払い出し手段によりコンベア３上から取り除かれる。
【００３５】
【発明の効果】
請求項１に係る発明によれば、光電センサによって検出された検査面からの反射光量に基づいて特定された該検査面の異常箇所に対して変位センサによる走査を行い、該変位センサによって検出された該異常箇所の表面形状の変化に基づいて該異常箇所の表面形状の良否を判定する良否判定手段により、被検査物の表面状態の良否を判定するから、該変位センサによる走査範囲を絞り込むことができ、該変位センサのみで検査面全体を走査する場合に比べて走査時間が短縮でき、工場ラインの稼働率の低下を防止することができる。
【００３６】
請求項２に係る発明によれば、請求項１に記載された表面状態の検査装置であって、上記走査ヘッドには、上記検査面に対して互いに上記検査幅方向の異なる部位の走査を担う複数の光電センサが配設されているから、該走査ヘッドを該検査面に対して相対移動させたときに、該検査面の検査幅の走査を一度に行うことができるため、該検査面に対する走査を繰り返し行う必要がなく作業効率が高まる。
【００３７】
請求項３に係る発明によれば、請求項１に記載された表面状態の検査装置であって、変位センサとしてレーザ変位センサを用いるから、レーザ光を集光させて検査面に照射することで光の拡散を抑えることができ、表面形状の変化を確実に検出することができる。
【００３８】
請求項４に係る発明によれば、光電センサによって検出された検査面からの反射光量に基づいて特定された該検査面の異常箇所に対して変位センサによる走査を行い、該変位センサによって検出された該異常箇所の表面形状の変化に基づいて該異常箇所の表面形状の良否を判定する良否判定手段により、被検査物の表面状態の良否を判定するから、該変位センサによる走査範囲を絞り込むことができ、該変位センサのみで検査面全体を走査する場合に比べて走査時間が短縮でき、工場ラインの稼働率の低下を防止することができる。
【００３９】
請求項５に係る発明によれば、請求項４に記載された表面状態の検査方法において、上記走査ヘッドには、上記検査面に対して互いに上記検査幅方向の異なる部位の走査を担う複数の光電センサが配設されているから、該走査ヘッドを該検査面に対して相対移動させたときに、該検査面の検査幅の走査を一度に行うことができるため、該検査面に対する走査を繰り返し行う必要がなく作業効率が高まる。
【図面の簡単な説明】
【図１】本実施形態に係る走査ヘッドを示す斜視図。
【図２】本実施形態に係る走査ヘッドを示す平面図。
【図３】本実施形態に係る走査ヘッドの光電センサによる走査を示す斜視図。
【図４】本実施形態に係る走査ヘッドの変位センサによる走査を示す斜視図。
【符号の説明】
１被検査物
２検査面
３コンベア
４異常箇所
１０検査装置
１１走査ヘッド
１２移動ロボット
１３光電センサ
１４変位センサ
１５判定手段
１６センサ検定手段[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a surface condition inspection apparatus and an inspection method.
[0002]
[Prior art]
The visual inspection of the surface condition of the inspection object is generally performed by visual inspection of the operator.However, there is a concern that defective products may flow out to the subsequent process due to individual differences in quality judgment or omission of inspection. Was not enough.
[0003]
Therefore, as an inspection method that replaces the visual inspection of an operator, a method of irradiating a laser beam to an inspection surface of an inspection object and performing data processing on a reflected luminescent line pattern to determine the quality of the inspection object is known. (See Patent Document 1).
[0004]
[Patent Document 1]
JP-A-2002-346925 [0005]
[Problems to be solved by the invention]
However, in the above-described method, in the case of an inspection object having a wide inspection range, the processing amount of the measurement data is enormous and the processing time is long. There is a problem.
[0006]
Therefore, the inventor of the present invention irradiates the inspection surface of the inspection object with light using a photoelectric sensor as a means for detecting an abnormal portion of the inspection surface, measures only the change in the amount of reflected light, and detects the defective portion of the inspection surface. To be detected in a short time. However, according to this method, not only a defective portion on the inspection surface but also dirt adhering to the inspection surface is detected as a defective portion, so that erroneous detection frequently occurs and causes a reduction in the line operation rate.
[0007]
That is, an object of the present invention is to provide a surface state inspection apparatus and an inspection method for determining the quality of the surface state of an object to be inspected in a short time without reducing the operation rate of a line.
[0008]
[Means for Solving the Problems]
The present invention solves the above problem by performing scanning by a photoelectric sensor on an inspection surface of an object to be inspected, and detecting a change in surface shape by a displacement sensor at an abnormal portion specified by the scanning. By judging whether the abnormal portion is caused by dirt or a defect such as a scratch or a nest, the quality of the surface condition of the inspection object can be determined in a short time.
[0009]
That is, the invention according to claim 1 is a surface state inspection apparatus that inspects the quality of the surface state of the inspection object,
A scanning head provided to be relatively movable with respect to the inspection surface of the inspection object,
A photoelectric sensor mounted on the scanning head and relatively moving while irradiating the inspection surface with light to detect the amount of reflected light from the inspection surface,
Abnormal spot specifying means for specifying an abnormal spot on the inspection surface based on the amount of reflected light detected by the photoelectric sensor,
A displacement sensor mounted on the scanning head and scanning the abnormal location and detecting a change in the surface shape of the abnormal location when the abnormal location on the inspection surface is identified by the abnormal location identifying means,
The apparatus further comprises a quality judgment unit for judging the quality of the surface shape of the abnormal portion based on a change in the surface shape of the abnormal portion detected by the displacement sensor.
[0010]
Therefore, according to the present invention, a scan is performed by the displacement sensor on an abnormal portion of the inspection surface specified based on the amount of reflected light from the inspection surface detected by the photoelectric sensor, and the abnormality detected by the displacement sensor is scanned. Since the quality of the surface state of the inspection object is determined by the quality determination unit that determines the quality of the surface shape of the abnormal location based on the change in the surface shape of the abnormal location, the scanning range of the displacement sensor can be narrowed. The scanning time can be reduced as compared with the case where the entire inspection surface is scanned only by the displacement sensor, and a reduction in the operation rate of the factory line can be prevented.
[0011]
The invention according to claim 2 is the surface condition inspection apparatus according to claim 1,
The photoelectric sensor is for irradiating light to an area narrower than an inspection width orthogonal to a scanning direction of the inspection surface,
The scanning head is characterized in that a plurality of photoelectric sensors for scanning different portions in the inspection width direction with respect to the inspection surface are provided.
[0012]
Therefore, according to the present invention, since the scanning head is provided with the plurality of photoelectric sensors that scan the portions different from each other in the inspection width direction with respect to the inspection surface, the scanning head is provided with the inspection head. When the relative movement with respect to the surface is performed, scanning of the inspection width of the inspection surface can be performed at a time, so that it is not necessary to repeatedly perform the scanning of the inspection surface, thereby increasing work efficiency.
[0013]
The invention according to claim 3 is the surface condition inspection apparatus according to claim 1,
A laser displacement sensor is used as the displacement sensor.
[0014]
Therefore, according to the present invention, since a laser displacement sensor is used as the displacement sensor, laser light can be condensed and irradiated on the inspection surface to suppress light diffusion, and a change in surface shape can be reliably detected. be able to.
[0015]
The invention according to claim 4 is a surface state inspection method for inspecting the quality of the surface state of the inspection object,
A scanning sensor provided to be relatively movable with respect to the inspection surface of the inspection object, a photoelectric sensor for irradiating the inspection surface with light and detecting the amount of reflected light, and a change in the surface shape of the inspection surface. A displacement sensor for detection is provided,
The scanning head is relatively moved with respect to the inspection surface while irradiating the inspection surface with light by the photoelectric sensor, and an abnormal portion of the inspection surface is identified based on the amount of reflected light from the inspection surface,
By the relative movement of the scanning head, the displacement sensor is positioned at an abnormal location on the inspection surface to detect a change in the surface state of the abnormal location,
Based on the change in the surface shape of the abnormal part detected by the displacement sensor, the quality of the surface shape of the abnormal part is determined.
[0016]
Therefore, according to the present invention, a scan is performed by the displacement sensor on an abnormal portion of the inspection surface specified based on the amount of reflected light from the inspection surface detected by the photoelectric sensor, and the abnormality detected by the displacement sensor is scanned. Since the quality of the surface state of the inspection object is determined by the quality determination unit that determines the quality of the surface shape of the abnormal location based on the change in the surface shape of the abnormal location, the scanning range of the displacement sensor can be narrowed. The scanning time can be reduced as compared with the case where the entire inspection surface is scanned only by the displacement sensor, and a reduction in the operation rate of the factory line can be prevented.
[0017]
The invention according to claim 5 is a method for inspecting a surface condition according to claim 4, wherein
The photoelectric sensor is for irradiating light to an area narrower than an inspection width orthogonal to a scanning direction of the inspection surface,
The scanning head is characterized in that a plurality of photoelectric sensors for scanning different portions in the inspection width direction with respect to the inspection surface are provided.
[0018]
Therefore, according to the present invention, since the scanning head is provided with the plurality of photoelectric sensors that scan the portions different from each other in the inspection width direction with respect to the inspection surface, the scanning head is provided with the inspection head. When the relative movement with respect to the surface is performed, scanning of the inspection width of the inspection surface can be performed at a time, so that it is not necessary to repeatedly perform the scanning of the inspection surface, thereby increasing work efficiency.
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0020]
<Embodiment>
FIG. 1 shows an inspection apparatus 10 for inspecting a processing surface (inspection surface) which is a mating surface of a cylinder head (inspection object) made of an engine with a head cover, and scans an inspection surface 2 of an inspection object 1. A scanning head 11, a mobile robot 12 that suspends the scanning head 11, rotates the scanning head 11 around a vertical axis, and moves forward, backward, left and right, and a photoelectric sensor 13 attached to a lower end of the scanning head 11; An abnormal portion 4 of the inspection surface 2 is specified based on the displacement sensor 14 and the amount of reflected light from the inspection surface 2 detected by the photoelectric sensor 13, and the surface of the abnormal portion 4 detected by the displacement sensor 14 A determination unit 15 for determining whether the surface state of the abnormal portion 4 is good or bad based on a change in the shape; a sensor verification unit 16 for checking an abnormality in the sensor performance of the photoelectric sensor 13 and the displacement sensor 14; It is configured. Here, reference numeral 3 denotes a conveyor that transports the inspection object 1 from an upstream process, stops the inspection object 1 at an inspection operation position by the inspection device 10, and transports the inspection object 1 to a downstream process after the inspection.
[0021]
The scanning head 11 has the photoelectric sensor 13 and the displacement sensor 14 at its lower end, and is adjacent to the displacement sensor 14 so that the photoelectric sensor 13 is located forward of the displacement sensor 14 in the scanning direction. Installed.
[0022]
The mobile robot 12 suspends the scanning head 11 to scan along the inspection surface 2, and rotates the scanning head 11 about the vertical axis along the inspection surface 2; And a transport unit 12b that moves in the front-rear and left-right directions.
[0023]
As shown in FIG. 2 or FIG. 3, the photoelectric sensor 13 irradiates the inspection surface 2 with light and detects the amount of reflected light. Further, the light irradiation range is narrower than the inspection width orthogonal to the scanning direction of the inspection surface 2, and a plurality of light irradiation ranges are arranged in a staggered manner with respect to the inspection surface 2 so as to scan different portions in the inspection width direction. Have been. Note that the arrangement of the plurality of photoelectric sensors 13 is not limited to a staggered pattern. If the inspection surface 2 can be scanned with respect to different portions in the inspection width direction, for example, one line may be arranged in the inspection width direction. It may be arranged in the. Further, the number of the photoelectric sensors 13 to be provided may be increased so that the photoelectric sensors 13 can be scanned over substantially the entire inspection width.
[0024]
The displacement sensor 14 irradiates the inspection surface 2 with a laser beam and detects a change in the surface shape of the inspection surface 2. The displacement sensor 14 is not limited to a laser displacement sensor using laser light, but may be any sensor that can detect a change in the surface shape of the inspection surface 2.
[0025]
The judging means 15 specifies the abnormal portion 4 of the inspection surface 2 based on the amount of reflected light from the inspection surface 2 detected by the photoelectric sensor 13, and scans the abnormal portion 4 by the displacement sensor 14. The quality of the abnormal portion 4 is determined based on the detected change in the surface shape.
[0026]
The sensor verifying means 16 checks the sensor performance of the photoelectric sensor 13 and the displacement sensor 14 provided on the scanning head 11 before scanning the inspection surface 2 with the scanning head 11. is there.
[0027]
Hereinafter, a method for inspecting a surface state according to the present embodiment will be described.
[0028]
As shown in FIG. 1, the scanning head 11 is moved above the sensor verification means 16 by the mobile robot 12, and the photoelectric sensor 13 and the displacement sensor 14 attached to the lower end of the scanning head 11 are moved by the sensor verification means 16. Check for abnormal sensor performance. Here, if an abnormality in the sensor performance is detected, the operator performs sensor sensitivity adjustment or replacement work.
[0029]
Next, the scanning head 11 is moved above the inspection surface 2 of the inspection object 1 by the mobile robot 12, and the scanning head 11 is moved relative to the inspection surface 2 from left to right in the figure as shown in FIG. Scanning is performed, and the inspection surface 2 is irradiated with light by a plurality of photoelectric sensors 13, 13,... Attached to the lower end of the scanning head 11, and the amount of reflected light is detected.
[0030]
Then, the detection information of the amount of light reflected by the photoelectric sensor 13 and the position information of the scanning head 11 are transmitted to the judging means 15 (shown in FIG. 1), and the judging means 15 manages the detection information and the position information.
[0031]
Then, when the scanning of the inspection surface 2 is completed, the detection information of the amount of reflected light by the photoelectric sensor 13 managed by the determination unit 15 is analyzed. Identify what.
[0032]
Next, as shown in FIG. 4, the scanning head 11 is positioned above the vicinity of the abnormal location 4 by the mobile robot 12 based on the position information of the identified abnormal location 4, and Laser light is emitted from a displacement sensor 14 attached to the scanning head 11 to detect a change in the surface shape of the abnormal portion 4.
[0033]
Then, the detection information of the change in the surface shape detected by the displacement sensor 14 is transmitted to the determination means 15, and the determination means 15 determines the quality of the surface shape of the abnormal portion 4.
[0034]
Then, as shown in FIG. 1, the inspection object 1 determined to be non-defective by the determination means 15 is transported to a downstream process by the conveyor 3. On the other hand, the inspection object 1 determined to be defective is removed from the conveyor 3 by a delivery unit (not shown).
[0035]
【The invention's effect】
According to the invention according to claim 1, scanning is performed by the displacement sensor on an abnormal portion of the inspection surface specified based on the amount of reflected light from the inspection surface detected by the photoelectric sensor, and the abnormality is detected by the displacement sensor. The quality of the surface shape of the inspection object is determined by the quality determination unit that determines the quality of the surface shape of the abnormal location based on the change in the surface shape of the abnormal location. The scanning time can be reduced as compared with the case where the entire inspection surface is scanned only by the displacement sensor, and a reduction in the operation rate of the factory line can be prevented.
[0036]
According to the second aspect of the present invention, in the surface state inspection apparatus according to the first aspect, the scanning head is configured to scan the inspection surface at different portions in the inspection width direction with respect to the inspection surface. Since a plurality of photoelectric sensors are provided, when the scanning head is relatively moved with respect to the inspection surface, scanning of the inspection width of the inspection surface can be performed at one time. There is no need to repeat the scanning, and the working efficiency is increased.
[0037]
According to the third aspect of the present invention, in the surface state inspection apparatus according to the first aspect, a laser displacement sensor is used as the displacement sensor. Light diffusion can be suppressed, and a change in surface shape can be reliably detected.
[0038]
According to the invention according to claim 4, scanning is performed by the displacement sensor on an abnormal portion of the inspection surface specified based on the amount of reflected light from the inspection surface detected by the photoelectric sensor, and the abnormal position is detected by the displacement sensor. The quality of the surface shape of the inspection object is determined by the quality determination unit that determines the quality of the surface shape of the abnormal location based on the change in the surface shape of the abnormal location. The scanning time can be reduced as compared with the case where the entire inspection surface is scanned only by the displacement sensor, and a reduction in the operation rate of the factory line can be prevented.
[0039]
According to a fifth aspect of the present invention, in the surface state inspection method according to the fourth aspect, the scanning head is configured to scan a plurality of different portions in the inspection width direction with respect to the inspection surface. Since the photoelectric sensor is provided, when the scanning head is relatively moved with respect to the inspection surface, the scanning of the inspection width of the inspection surface can be performed at one time. There is no need to repeat, and the work efficiency is increased.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a scanning head according to an embodiment.
FIG. 2 is a plan view showing a scanning head according to the embodiment.
FIG. 3 is a perspective view showing scanning by a photoelectric sensor of the scanning head according to the embodiment.
FIG. 4 is a perspective view showing scanning by a displacement sensor of the scanning head according to the embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Inspection object 2 Inspection surface 3 Conveyor 4 Abnormal place 10 Inspection device 11 Scanning head 12 Mobile robot 13 Photoelectric sensor 14 Displacement sensor 15 Judgment means 16 Sensor verification means

Claims

A surface state inspection device for inspecting the quality of the surface state of the inspection object,
A scanning head provided to be relatively movable with respect to the inspection surface of the inspection object,
A photoelectric sensor mounted on the scanning head and relatively moving while irradiating the inspection surface with light to detect the amount of reflected light from the inspection surface,
Abnormal spot specifying means for specifying an abnormal spot on the inspection surface based on the amount of reflected light detected by the photoelectric sensor,
A displacement sensor mounted on the scanning head and scanning the abnormal location and detecting a change in the surface shape of the abnormal location when the abnormal location on the inspection surface is identified by the abnormal location identifying means,
A surface condition inspection apparatus comprising: a quality judgment unit that judges quality of the surface shape of the abnormal portion based on a change in the surface shape of the abnormal portion detected by the displacement sensor.

It is a surface condition inspection device according to claim 1,
The photoelectric sensor is for irradiating light to an area narrower than an inspection width orthogonal to a scanning direction of the inspection surface,
A surface state inspection apparatus, wherein the scanning head is provided with a plurality of photoelectric sensors for scanning different portions in the inspection width direction with respect to the inspection surface.

It is a surface condition inspection device according to claim 1,
A surface state inspection apparatus, wherein a laser displacement sensor is used as the displacement sensor.

A surface state inspection method for inspecting the quality of the surface state of the inspection object,
A scanning sensor provided to be relatively movable with respect to the inspection surface of the inspection object, a photoelectric sensor for irradiating the inspection surface with light and detecting the amount of reflected light, and a change in the surface shape of the inspection surface. A displacement sensor to detect is provided,
The scanning head is relatively moved with respect to the inspection surface while irradiating the inspection surface with light by the photoelectric sensor, and an abnormal portion of the inspection surface is identified based on the amount of reflected light from the inspection surface,
By the relative movement of the scanning head, the displacement sensor is positioned at an abnormal location on the inspection surface to detect a change in the surface state of the abnormal location,
A method for inspecting a surface state, comprising determining whether the surface shape of the abnormal portion is good or bad based on a change in the surface shape of the abnormal portion detected by the displacement sensor.

In the surface state inspection method according to claim 4,
The photoelectric sensor is for irradiating light to an area narrower than an inspection width orthogonal to a scanning direction of the inspection surface,
A method for inspecting a surface state, wherein the scanning head is provided with a plurality of photoelectric sensors for scanning different portions in the inspection width direction with respect to the inspection surface.