JP2004269977A - Insoluble anode for plating - Google Patents

Insoluble anode for plating Download PDF

Info

Publication number
JP2004269977A
JP2004269977A JP2003063512A JP2003063512A JP2004269977A JP 2004269977 A JP2004269977 A JP 2004269977A JP 2003063512 A JP2003063512 A JP 2003063512A JP 2003063512 A JP2003063512 A JP 2003063512A JP 2004269977 A JP2004269977 A JP 2004269977A
Authority
JP
Japan
Prior art keywords
anode chamber
anode
plating
exchange membrane
cation exchange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003063512A
Other languages
Japanese (ja)
Other versions
JP3928013B2 (en
Inventor
Masayuki Yokoi
昌幸 横井
Tsutomu Morikawa
務 森河
Takao Nakade
卓男 中出
Shinichi Sato
眞市 左藤
Susumu Yuya
進 湯屋
Toshio Muranaga
外志雄 村永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UINGU KK
Osaka Prefecture
Osaka Soda Co Ltd
Original Assignee
UINGU KK
Daiso Co Ltd
Osaka Prefecture
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UINGU KK, Daiso Co Ltd, Osaka Prefecture filed Critical UINGU KK
Priority to JP2003063512A priority Critical patent/JP3928013B2/en
Publication of JP2004269977A publication Critical patent/JP2004269977A/en
Application granted granted Critical
Publication of JP3928013B2 publication Critical patent/JP3928013B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Water Treatment By Electricity Or Magnetism (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problems that, as for the conventional anode chamber using plastics, the volume of the anode chamber is made excessive, and also, the weight thereof is large, so that its handling is troublesome, and further, liquid leakage from the anode chamber or the leakage of a plating liquid to the anode chamber is easy to occur. <P>SOLUTION: In the anode chamber separated from a plating liquid in which the material to be plated as a cathode is dipped with a cation exchange membrane, the material of the anode chamber is essentially composed of titanium, and also, the whole part or a part of the wall faces at the inside of the anode chamber is coated with at least one selected from platinum, platinum-iridium oxide, and iridium oxide to compose the insoluble anode for anode chamber-integrated type plating. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

【0001】
【発明の属する技術分野】
本発明は印刷用ロールの銅めっき、プリント配線基盤のスルホール銅めっき、電解銅箔等の硫酸銅めっき浴からの銅めっき、装飾用光沢ニッケルめっき、半光沢ニッケルめっきなどのニッケルめっき、Ni−W、Ni−P、Ni−Fe、Sn−Pb、Sn−Agなどの各種合金めっき技術に関するものである。
【0002】
【従来の技術】
従来のニッケルめっき、Snめっきなどの水溶液からの電気めっきプロセスにおいて、めっき液中の金属イオンや水素イオン濃度を制御するため、めっき槽内にカチオン交換膜でめっき液から隔てた陽極室を設置し、この中に黒鉛、フェライト、鉛などからなる不溶性陽極、Pt被覆あるいは酸化物を塗布したチタン性陽極を装入してめっきすることが提案され、使われ始めている。
【0003】
これらの陽極室は、塩化ビニル材、PP材、アクリル材、FRPなどで作製され、陽極室材料の強度を確保するため板厚1cm程度以上の材料を用い、また、壁面の一部にカチオン交換膜などのイオン交換膜を取り付けるため、陽極室の大きさはめっき槽内で大きな容積を占める。また、陽極室重量が大きくなり、陽極室のめっき槽からの取り付け、取り外しが容易ではない。さらに、イオン交換膜をこれら樹脂製の陽極室に取り付ける際に、取り付け具を締め付け過ぎると樹脂に亀裂が生じて破壊されることから、陽極室材とイオン交換膜接合部からの液漏れを起こさないようにしっかり固定することも容易ではない。
【0004】
【発明が解決しようとする課題】
以上のように、従来のプラスチックスを使った陽極室では陽極室の容積が過大になり、また、重量も大きいため取り扱いが面倒であった。更に陽極室からの液漏れ、あるいはめっき液の陽極室への液漏れが生じ易かった。このことはめっき作業において大きな問題となっていた。
【0005】
【課題を解決するための手段】
本発明者らは、上記問題を解決するために鋭意検討した結果、新規な不溶性陽極を見出し、本発明を完成するに至った。
【0006】
すなわち、本発明は、陰極である被めっき材が浸せきされためっき液から、カチオン交換膜で隔てられた陽極室において、該陽極室の材質が本質的にチタンからなり、かつ該陽極室内壁面の全部または一部に白金、白金−酸化イリジウム、酸化イリジウムから選ばれる少なくとも一つを被覆してなる陽極室一体型めっき用不溶性陽極である。
【0007】
陽極室構造材は本質的にチタニウムからなる。従って、主成分がチタニウムであれば、他の金属が従属的に含まれた合金であってよいが、純粋なチタニウムが好ましい。陽極室構造材の厚さはめっき装置全体のスケールにもよるが、1〜5mmの金属チタニウム板であってよい。
【0008】
陽極室の側壁の一部は壁が取り払われているか又は多数の穴が空けられており、当該箇所にカチオン交換膜が取り付けられ、めっき液側と陽極室内部が分離される。通常、陽極室に取り付けられたカチオン交換膜の存在する面をめっき対象物と向かい合うように陽極室を配置するのがイオンの移動の観点から好ましい。
【0009】
陽極室内壁面の全部または一部被覆される白金、白金−酸化イリジウムまたは酸化イリジウムはそれぞれ単独で皮膜を形成していてもよいし、成分が混ざり合った複合皮膜であってもよい。また、種々の目的に合わせ、陽極室内壁面を区画し、区分ごとに異なる皮膜を形成してもよい。酸化イリジウムが好ましい。
【0010】
陽極室内壁面を部分的に被覆する場合は、カチオン交換膜の対抗面であることが好ましい。ここで「対抗面」とは、カチオン交換膜が取り付けられている壁のいわゆる対面にある陽極室内壁面を意味するものとする(側面図1−1参照)。
また、当該対抗面は陽極室内部に向かって突出しているのがカチオン交換膜までの距離が短くなる点で好ましい。ここで、「突出」とは、不溶性陽極部分が対抗面である本来の陽極室壁位置からカチオン交換膜面側に向かって相対的に近接している状態を意味するものとする(側面図1−2参照)。
【0011】
一方、別法として、上記カチオン交換膜が装着される陽極室開口部が網状に成型加工されている場合は、当該網状部分の全部または一部に被覆することが可能である。
【0012】
カチオン交換膜は特に限定されるものではなく、めっき液の種類、めっき方法等に応じて種々選定することができる。めっき液についても特に限定はないが、銅めっきをする場合には硫酸銅水溶液を好ましく使用することができる。陰極には被めっき材が装着される。
【0013】
【発明の実施の形態】
本発明の陽極室模式図を図1に例示具体的に示す。陽極室(1)は金属チタニウム材からなり、その内壁面の全部または一部が白金、白金−酸化イリジウム、酸化イリジウムから選ばれる少なくとも一つで被覆してなるものである。被覆は陽極室組立て後に該当する内壁面にこれら白金等を塗布・焼付けしてもよく、また組立て前の部品に予め塗布・焼付けしてもよい。更には、加工前の板金に塗布・焼付けしておいてもよい。
【0014】
カチオン交換膜(2)はこれら不溶性陽極が施された壁の対面にある壁か(側面図1−1、1−2)、あるいは不溶性陽極が施された壁と同じ壁の外壁側(側面図2)に取り付けることができる。
【0015】
カチオン交換膜を、不溶性陽極が施された壁の対面の壁(側面図1−1、1−2)に取り付ける場合は、不溶性陽極は板状チタン、パンチングチタンやメッシュ状チタンの採用が可能である。板状チタンを採用する場合は陽極室内壁面に直接被覆することができ、一方パンチングチタンやメッシュ状チタンを採用する場合は別途作製した陽極板を陽極室内壁面に溶接やボルト締め等により固定してもよい(側面図1−1)。
この場合、不溶性陽極部分はカチオン交換膜側に突出させることができる。例えば、不溶性陽極部分を桁状に別途取り付けて当該部分を陽極室の壁面から浮かせたり、また、陽極室の壁自体を内部に向けて凸状に加工して変形させてもよい(側面図1−2)。
陽極室の壁のうち、カチオン交換膜で覆われる部分は壁が取り払われているか又は多数の穴が空けられ、イオン交換膜を介して特定物質(イオン)の膜内外の移動を可能としている。
【0016】
カチオン交換膜を不溶性陽極が施された壁と同じ壁の外壁側(側面図2)に取り付ける場合は、不溶性陽極が施された壁には開口部として網状に多数の穴が空けられている。当該穴の空けられた壁はパンチングチタンやメッシュ状チタンの構造であるのがよい。これらの形状は陽極室の壁をそのまま加工したり、また別途作製した部材を陽極室と溶接やボルト締めにより固定(4)することで得ることができる。
【0017】
不溶性陽極は白金、白金−酸化イリジウムまたは酸化イリジウムにより被覆されてよい。中でも酸化イリジウムを主成分として被覆した陽極は酸素発生に触媒活性があり、かつ耐久性が優れている点で好ましい。
【0018】
カチオン交換膜(2)は金網やメッシュのついたチタン製のフレーム(3)で陽極室外面からねじ(4)などで固定して取り付けることができる。カチオン交換膜としてはデュポン社製のナフィオン、旭硝子製のセレミオンやトクヤマ製のネオセプタ等の使用が可能である。
【0019】
電源からのブスバーと接続するための取り付け治具は、チタン製で陽極室の大きさ、通電量に応じて接合数を決め、陽極室に溶接してよい。陽極室は酸水溶液で満たされており、中でも希硫酸、リン酸などの酸水溶液を好ましく使用することができる。
【0020】
【作用】
図2には、硫酸銅めっき液中と硫酸中での金属チタニウムの電流電位曲線、および希硫酸中での酸化イリジウムを被覆したチタニウム電極の電流電位曲線が示されている。金属チタニウムでは1.6Vまで陽分極しても10μA/cm以下の不働態化電流が認められるのみであるのに対し、酸化イリジウム電極上では激しく酸素発生を伴い500mA/cmに達する電流が認められる。従って、金属チタニウムは水溶液中での電解による酸素発生に対して極めて大きな過電圧を持ち、めっき液中で不働態化しており、これを陽極室構造材として用いてもこの上での陽極反応は起こらず、陽極室構造材の面上に施された酸化物皮膜あるいは白金皮膜上でのみ陽極反応が起こる。
【0021】
次に実施の一例を示す。本発明はこれに限定されるものではない。
【実施例1】
高さ15cm、幅5cm、陽極室厚さ2cm、陽極室容量125mlのカチオン交換膜を取り付けたチタニウム製不溶性陽極固着型陽極室を作製し、これを耐熱塩ビ製の槽容量2リットルのめっき槽(高さ15cm、幅10cm、長さ16cm)に装着した。陽極室の構造材は厚さ1mmのチタン板とした。カチオン交換膜(旭硝子製セレミオン)は、面積0.3dmとし、陽極室内の壁面(カチオン交換膜の対抗面側)に酸化イリジウムを塗布・焼き付けして陽極材料とした。酸化イリジウム被覆面積は0.3dmとした。
めっき槽には光沢銅めっき液を満たし、陽極室には5%硫酸を満たして、ハルセル板(真鍮板10cm×6cm、厚さ0.5mm)に銅めっきを行った。液組成を表1に示す。めっきを行うと、陽極室内の酸化物電極表面上でのみ酸素発生反応が起こり、めっきも良好な光沢銅めっきが得られた。
【0022】
【表1】

Figure 2004269977
【0023】
【発明の効果】
本発明による陽極室一体型めっき用不溶性陽極をめっき処理に使用した場合、陽極反応である酸素発生反応は陽極室内に施された不溶性陽極上でのみ起こり、従来の樹脂製陽極室内に不溶性陽極を装入した場合と同様な機能を有するものである。また、硫酸銅めっき、ニッケルめっきなど多くのめっき液に適用が可能であり、陽極室および陽極構造がコンパクトかつ軽量となることから、作業性の改善や陽極液の液漏れを効果的に防止でき、その結果経済的メリットが大きい。
【図面の簡単な説明】
【図1】陽極室一体型めっき用不溶性陽極の構造を示した図である。
【図2】金属チタンと酸化イリジウムの電流電位曲線を示した図である。
【符号の説明】
1 陽極室
2 イオン交換膜
3 抑えフレーム
4 抑えねじ
5 不溶性陽極
6 不溶性陽極固定具[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to copper plating of a printing roll, through-hole copper plating of a printed wiring board, copper plating from a copper sulfate plating bath such as electrolytic copper foil, bright nickel plating for decoration, nickel plating such as semi-bright nickel plating, Ni-W , Ni-P, Ni-Fe, Sn-Pb, Sn-Ag and the like.
[0002]
[Prior art]
In conventional electroplating processes from aqueous solutions such as nickel plating and Sn plating, an anode chamber separated from the plating solution by a cation exchange membrane is installed in the plating tank to control the concentration of metal ions and hydrogen ions in the plating solution. It has been proposed that an insoluble anode made of graphite, ferrite, lead, or the like, and a titanium anode coated with Pt or an oxide are charged and plated.
[0003]
These anode chambers are made of a vinyl chloride material, a PP material, an acrylic material, FRP, or the like, and are made of a material having a thickness of about 1 cm or more to secure the strength of the anode chamber material. In order to mount an ion exchange membrane such as a membrane, the size of the anode chamber occupies a large volume in the plating tank. In addition, the weight of the anode chamber increases, and it is not easy to mount and remove the anode chamber from the plating tank. In addition, when the ion exchange membrane is attached to these resin anode chambers, if the attachment is overtightened, the resin will crack and break, causing liquid leakage from the anode chamber material and the ion exchange membrane junction. It is not easy to fix it firmly.
[0004]
[Problems to be solved by the invention]
As described above, in the conventional anode chamber using plastics, the volume of the anode chamber is excessively large and the weight is large, so that handling is troublesome. Further, liquid leakage from the anode chamber or liquid leakage of the plating solution to the anode chamber was likely to occur. This has been a major problem in the plating operation.
[0005]
[Means for Solving the Problems]
The present inventors have conducted intensive studies to solve the above problems, and as a result, have found a new insoluble anode, and have completed the present invention.
[0006]
That is, the present invention provides, in a plating solution in which a material to be plated, which is a cathode, is immersed, in an anode chamber separated by a cation exchange membrane, the material of the anode chamber consists essentially of titanium, and An insoluble anode for plating integrally with an anode chamber, which is entirely or partially coated with at least one selected from platinum, platinum-iridium oxide, and iridium oxide.
[0007]
The anode compartment structural material consists essentially of titanium. Therefore, if the main component is titanium, an alloy containing another metal depending may be used, but pure titanium is preferable. The thickness of the anode chamber structural material depends on the scale of the entire plating apparatus, but may be a metal titanium plate of 1 to 5 mm.
[0008]
A part of the side wall of the anode chamber has a wall removed or a large number of holes formed therein. A cation exchange membrane is attached to the portion, and the plating solution side and the inside of the anode chamber are separated. Usually, it is preferable to dispose the anode chamber so that the surface on which the cation exchange membrane attached to the anode chamber is present faces the plating object from the viewpoint of ion movement.
[0009]
Platinum, platinum-iridium oxide or iridium oxide, which covers all or part of the inner wall surface of the anode chamber, may form a film alone, or may be a composite film in which components are mixed. Further, the wall surface of the anode chamber may be partitioned according to various purposes, and a different coating may be formed for each section. Iridium oxide is preferred.
[0010]
In the case where the wall surface of the anode chamber is partially covered, it is preferable to face the cation exchange membrane. Here, the term "opposite surface" means the wall surface of the anode chamber that is the so-called opposite surface of the wall to which the cation exchange membrane is attached (see side view 1-1).
Further, it is preferable that the opposing surface protrudes toward the inside of the anode chamber in that the distance to the cation exchange membrane is reduced. Here, "projection" means a state where the insoluble anode portion is relatively close to the cation exchange membrane surface side from the original anode chamber wall position which is the opposing surface (side view 1). -2).
[0011]
On the other hand, as another method, when the opening of the anode chamber to which the cation exchange membrane is mounted is formed in a net shape, it is possible to cover all or a part of the net portion.
[0012]
The cation exchange membrane is not particularly limited, and can be variously selected according to the type of plating solution, plating method, and the like. There is no particular limitation on the plating solution, but in the case of copper plating, an aqueous solution of copper sulfate can be preferably used. A material to be plated is mounted on the cathode.
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
A schematic diagram of the anode chamber of the present invention is specifically shown in FIG. The anode chamber (1) is made of a metallic titanium material, and the whole or a part of the inner wall surface is coated with at least one selected from platinum, platinum-iridium oxide, and iridium oxide. The coating may be applied and baked with platinum or the like on the corresponding inner wall surface after assembling the anode chamber, or may be applied and baked in advance on parts before assembling. Further, it may be applied and baked on a sheet metal before processing.
[0014]
The cation exchange membrane (2) is either a wall opposite to the wall provided with the insoluble anode (side view 1-1, 1-2) or an outer wall side of the same wall provided with the insoluble anode (side view). 2) Can be attached.
[0015]
When the cation exchange membrane is attached to the wall opposite to the wall provided with the insoluble anode (side view 1-1, 1-2), the insoluble anode may be titanium plate, punched titanium or mesh titanium. is there. When plate-like titanium is used, it can be directly coated on the wall of the anode chamber.On the other hand, when punching titanium or mesh-like titanium is used, an anode plate made separately is fixed to the wall of the anode chamber by welding or bolting. (Side view 1-1).
In this case, the insoluble anode portion can protrude toward the cation exchange membrane. For example, an insoluble anode portion may be separately attached in a girder shape and the portion may be floated from the wall surface of the anode chamber, or the wall itself of the anode chamber may be formed into a convex shape toward the inside and deformed (side view 1). -2).
The portion of the wall of the anode chamber that is covered with the cation exchange membrane has the wall removed or a large number of holes formed therein, so that a specific substance (ion) can move inside and outside the membrane via the ion exchange membrane.
[0016]
When the cation exchange membrane is mounted on the outer wall side (side view 2) of the same wall as the wall provided with the insoluble anode, a large number of holes are formed as openings in the wall provided with the insoluble anode. The perforated wall may have a structure of punched titanium or mesh titanium. These shapes can be obtained by processing the wall of the anode chamber as it is or by fixing (4) a separately prepared member to the anode chamber by welding or bolting.
[0017]
The insoluble anode may be coated with platinum, platinum-iridium oxide or iridium oxide. Among them, an anode coated with iridium oxide as a main component is preferable because it has catalytic activity for generating oxygen and has excellent durability.
[0018]
The cation exchange membrane (2) can be fixedly attached with screws (4) or the like from the outer surface of the anode chamber with a titanium frame (3) provided with a wire mesh or a mesh. As the cation exchange membrane, Nafion manufactured by DuPont, Selemion manufactured by Asahi Glass or Neosepta manufactured by Tokuyama can be used.
[0019]
The mounting jig for connecting to the bus bar from the power source may be made of titanium, and the number of joints may be determined according to the size of the anode chamber and the amount of current supplied, and may be welded to the anode chamber. The anode chamber is filled with an aqueous acid solution, and among them, an aqueous acid solution such as dilute sulfuric acid or phosphoric acid can be preferably used.
[0020]
[Action]
FIG. 2 shows a current potential curve of titanium metal in a copper sulfate plating solution and sulfuric acid, and a current potential curve of a titanium electrode coated with iridium oxide in dilute sulfuric acid. In the case of metallic titanium, even when the polarization is positively increased to 1.6 V, only a passivation current of 10 μA / cm 2 or less is observed. On the iridium oxide electrode, a current that reaches 500 mA / cm 2 accompanied by vigorous oxygen generation. Is recognized. Therefore, titanium metal has a very large overvoltage against oxygen generation due to electrolysis in an aqueous solution, and is passivated in the plating solution. Even when this is used as an anode chamber structural material, an anodic reaction occurs on this. However, the anodic reaction occurs only on the oxide film or the platinum film applied on the surface of the anode chamber structural material.
[0021]
Next, an example of the embodiment will be described. The present invention is not limited to this.
Embodiment 1
A titanium insoluble anode-fixed anode chamber having a cation exchange membrane having a height of 15 cm, a width of 5 cm, an anode chamber thickness of 2 cm, and an anode chamber capacity of 125 ml was prepared. (Height 15 cm, width 10 cm, length 16 cm). The structural material of the anode chamber was a titanium plate having a thickness of 1 mm. The cation exchange membrane (Selemion manufactured by Asahi Glass) had an area of 0.3 dm 2, and iridium oxide was applied to the wall surface in the anode chamber (the side opposite to the cation exchange membrane) and baked to form an anode material. The iridium oxide coating area was 0.3 dm 2 .
The plating tank was filled with a bright copper plating solution, the anode chamber was filled with 5% sulfuric acid, and a Hull cell plate (brass plate 10 cm × 6 cm, thickness 0.5 mm) was plated with copper. Table 1 shows the liquid composition. When plating was performed, an oxygen evolution reaction occurred only on the surface of the oxide electrode in the anode chamber, and bright copper plating was obtained with good plating.
[0022]
[Table 1]
Figure 2004269977
[0023]
【The invention's effect】
When the insoluble anode for plating with the anode chamber integrated according to the present invention is used for plating, the oxygen generation reaction, which is the anode reaction, occurs only on the insoluble anode provided in the anode chamber, and the insoluble anode is placed in the conventional resin anode chamber. It has the same function as when it is inserted. In addition, it can be applied to many plating solutions such as copper sulfate plating and nickel plating, and the anode chamber and anode structure are compact and lightweight, so that workability can be improved and anolyte solution leakage can be effectively prevented. As a result, the economic benefits are great.
[Brief description of the drawings]
FIG. 1 is a diagram showing a structure of an insoluble anode for plating with an anode chamber integrated type.
FIG. 2 is a diagram showing current potential curves of titanium metal and iridium oxide.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Anode chamber 2 Ion exchange membrane 3 Holding frame 4 Holding screw 5 Insoluble anode 6 Insoluble anode fixture

Claims (5)

陰極である被めっき材が浸せきされためっき液からカチオン交換膜で隔てられた陽極室において、該陽極室の材質が本質的にチタンからなり、かつ該陽極室内壁面の全部または一部に白金、白金−酸化イリジウム、酸化イリジウムから選ばれる少なくとも一つを被覆してなる陽極室一体型めっき用不溶性陽極。In the anode chamber separated by the cation exchange membrane from the plating solution in which the material to be plated as the cathode is immersed, the material of the anode chamber is essentially made of titanium, and platinum is contained in all or a part of the wall of the anode chamber. An insoluble anode for plating integrally with an anode chamber, which is coated with at least one selected from platinum-iridium oxide and iridium oxide. 被覆されるべき陽極室内壁面が、カチオン交換膜の対抗面であることを特徴とする請求項1記載の陽極室一体型めっき用不溶性陽極。2. The insoluble anode for anode-plate-integrated plating according to claim 1, wherein the wall surface of the anode chamber to be coated is the opposite surface of the cation exchange membrane. 被覆されるべきめっき用不溶性陽極が陽極室内壁面から、カチオン交換膜方向に突出していることを特徴とする請求項1または2に記載の陽極室一体型めっき用不溶性陽極。3. The insoluble anode for anode chamber-integrated plating according to claim 1, wherein the insoluble anode for plating to be coated projects from the wall surface of the anode chamber in the direction of the cation exchange membrane. 陰極である被めっき材が浸せきされためっき液からカチオン交換膜で隔てられた陽極室において、該陽極室の材質が本質的にチタンからなり、かつカチオン交換膜が装着される陽極室開口部の網状部分の全部または一部に白金、白金−酸化イリジウム、酸化イリジウムから選ばれる少なくとも一つを被覆してなる陽極室一体型めっき用不溶性陽極。In the anode chamber separated by the cation exchange membrane from the plating solution in which the material to be plated as the cathode is immersed, the material of the anode chamber is essentially made of titanium, and the opening of the anode chamber where the cation exchange membrane is mounted is formed. An insoluble anode for an anode chamber-integrated plating in which the whole or a part of the mesh portion is coated with at least one selected from platinum, platinum-iridium oxide, and iridium oxide. 陽極室壁面に被覆されるのが酸化イリジウムであることを特徴とする請求項1〜5のいずれかに記載の陽極室一体型めっき用不溶性陽極。The insoluble anode for anode chamber-integrated plating according to any one of claims 1 to 5, wherein the wall of the anode chamber is coated with iridium oxide.
JP2003063512A 2003-03-10 2003-03-10 Insoluble anode for plating Expired - Lifetime JP3928013B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003063512A JP3928013B2 (en) 2003-03-10 2003-03-10 Insoluble anode for plating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003063512A JP3928013B2 (en) 2003-03-10 2003-03-10 Insoluble anode for plating

Publications (2)

Publication Number Publication Date
JP2004269977A true JP2004269977A (en) 2004-09-30
JP3928013B2 JP3928013B2 (en) 2007-06-13

Family

ID=33125074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003063512A Expired - Lifetime JP3928013B2 (en) 2003-03-10 2003-03-10 Insoluble anode for plating

Country Status (1)

Country Link
JP (1) JP3928013B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007046092A (en) * 2005-08-09 2007-02-22 Hyomen Shori System:Kk Apparatus and method for plating copper on sheet-shaped workpiece
JP2014510842A (en) * 2011-04-14 2014-05-01 ティーイーエル ネックス,インコーポレイテッド Electrochemical deposition apparatus and replenishment apparatus
KR101415680B1 (en) 2012-08-09 2014-07-04 (주)포인텍 Shield box and electrode plate for electrolysis plating apparatus
CN104562162A (en) * 2013-10-21 2015-04-29 欣兴电子股份有限公司 Diaphragm device
CN109735879A (en) * 2019-03-11 2019-05-10 江阴安诺电极有限公司 The preparation method of electrolytic copper foil anode plate

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007046092A (en) * 2005-08-09 2007-02-22 Hyomen Shori System:Kk Apparatus and method for plating copper on sheet-shaped workpiece
JP2014510842A (en) * 2011-04-14 2014-05-01 ティーイーエル ネックス,インコーポレイテッド Electrochemical deposition apparatus and replenishment apparatus
KR101415680B1 (en) 2012-08-09 2014-07-04 (주)포인텍 Shield box and electrode plate for electrolysis plating apparatus
CN104562162A (en) * 2013-10-21 2015-04-29 欣兴电子股份有限公司 Diaphragm device
CN104562162B (en) * 2013-10-21 2018-03-23 欣兴电子股份有限公司 Diaphragm apparatus
CN109735879A (en) * 2019-03-11 2019-05-10 江阴安诺电极有限公司 The preparation method of electrolytic copper foil anode plate

Also Published As

Publication number Publication date
JP3928013B2 (en) 2007-06-13

Similar Documents

Publication Publication Date Title
CN101855390B (en) Anode assembly for electroplating
RU2004102511A (en) ELECTROLYSIS CELL FOR COMPLETING THE CONCENTRATION OF METAL IONS IN ELECTRODEPOSITION METHODS
US7943032B2 (en) Anode used for electroplating
US20110198230A1 (en) Process for producing an active cathode for electrolysis
CN114790564A (en) Electroplating device with deplating function
JP3928013B2 (en) Insoluble anode for plating
FI82488C (en) ELEKTRODKONSTRUKTION FOER GASBILDANDE MONOPOLAERA ELEKTROLYSOERER.
JPH0841671A (en) Electrolytical reduction of disulfide compound
WO2001092604A3 (en) Electrolysis cell for restoring the concentration of metal ions in processes of electroplating
JPH01297884A (en) Copper plating of printed board
KR200429316Y1 (en) The electrolysis trillion where the cathode protection net is composed
KR20220016914A (en) Electrode Assemblies for Electrochemical Treatment
JP3608880B2 (en) Method for reactivating active cathode and ion-exchange membrane electrolyzer with reactivated cathode
CN219099371U (en) Insoluble anode device for cylindrical pulse electroplating
JPH06192869A (en) Electrolytic cell
CA2510371A1 (en) Hydrogen generation system
CN217378064U (en) Electroplating device with deplating function
JP6750186B1 (en) Method for suppressing increase in zinc concentration of plating solution and method for producing zinc-based plated member
ES8707570A1 (en) Electrolytic galvanizing processes
KR940000606A (en) Cathode for electrolytic cell and manufacturing method thereof
JPH08269797A (en) Anode case
JPS6367558B2 (en)
JPH1136099A (en) Plating device and plating method thereby
JPH0853799A (en) Reducing method of concentration of metal in electroplating solution
JPH04284691A (en) Electrically plating method for printed circuit board

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050519

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20050520

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050715

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A681

Effective date: 20050715

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20060725

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060801

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060926

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20061025

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20061121

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20061201

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20061211

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070130

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070201

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 3928013

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110316

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120316

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130316

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130316

Year of fee payment: 6

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313115

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130316

Year of fee payment: 6

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130316

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130316

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140316

Year of fee payment: 7

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313115

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313115

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313117

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term