JP2004266871A - 振動片、振動子、発振器及び電子機器 - Google Patents
振動片、振動子、発振器及び電子機器 Download PDFInfo
- Publication number
- JP2004266871A JP2004266871A JP2004182628A JP2004182628A JP2004266871A JP 2004266871 A JP2004266871 A JP 2004266871A JP 2004182628 A JP2004182628 A JP 2004182628A JP 2004182628 A JP2004182628 A JP 2004182628A JP 2004266871 A JP2004266871 A JP 2004266871A
- Authority
- JP
- Japan
- Prior art keywords
- vibrating
- base
- arm
- vibrating reed
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000014676 Phragmites communis Nutrition 0.000 title claims abstract description 83
- 239000010453 quartz Substances 0.000 claims description 55
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 55
- 238000010586 diagram Methods 0.000 abstract description 12
- 230000000087 stabilizing effect Effects 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 29
- 229920002120 photoresistant polymer Polymers 0.000 description 26
- 239000000919 ceramic Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000002265 prevention Effects 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000007789 sealing Methods 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 125000002066 L-histidyl group Chemical group [H]N1C([H])=NC(C([H])([H])[C@](C(=O)[*])([H])N([H])[H])=C1[H] 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004182628A JP2004266871A (ja) | 2000-12-25 | 2004-06-21 | 振動片、振動子、発振器及び電子機器 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000392934 | 2000-12-25 | ||
| JP2004182628A JP2004266871A (ja) | 2000-12-25 | 2004-06-21 | 振動片、振動子、発振器及び電子機器 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001392904A Division JP2002261575A (ja) | 2000-12-25 | 2001-12-25 | 振動片、振動子、発振器及び電子機器 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007230744A Division JP2008029030A (ja) | 2000-12-25 | 2007-09-05 | 振動子、発振器及び電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004266871A true JP2004266871A (ja) | 2004-09-24 |
| JP2004266871A5 JP2004266871A5 (enrdf_load_stackoverflow) | 2005-07-07 |
Family
ID=33133401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004182628A Pending JP2004266871A (ja) | 2000-12-25 | 2004-06-21 | 振動片、振動子、発振器及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004266871A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2012427A2 (en) | 2007-07-02 | 2009-01-07 | Nihon Dempa Kogyo Co., Ltd. | Piezoelectric vibrating pieces and piezoelectric devices |
| US9413332B2 (en) | 2013-07-18 | 2016-08-09 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic device, and moving object |
-
2004
- 2004-06-21 JP JP2004182628A patent/JP2004266871A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2012427A2 (en) | 2007-07-02 | 2009-01-07 | Nihon Dempa Kogyo Co., Ltd. | Piezoelectric vibrating pieces and piezoelectric devices |
| EP2012427A3 (en) * | 2007-07-02 | 2009-09-16 | Nihon Dempa Kogyo Co., Ltd. | Piezoelectric vibrating pieces and piezoelectric devices |
| US7902729B2 (en) | 2007-07-02 | 2011-03-08 | Nihon Dempa Kogyo Co., Ltd. | Piezoelectric vibrating pieces and piezoelectric devices |
| US9413332B2 (en) | 2013-07-18 | 2016-08-09 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic device, and moving object |
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Legal Events
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| A521 | Written amendment |
Effective date: 20041227 Free format text: JAPANESE INTERMEDIATE CODE: A523 |
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| A521 | Written amendment |
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