JP2004266221A5 - - Google Patents

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Publication number
JP2004266221A5
JP2004266221A5 JP2003057417A JP2003057417A JP2004266221A5 JP 2004266221 A5 JP2004266221 A5 JP 2004266221A5 JP 2003057417 A JP2003057417 A JP 2003057417A JP 2003057417 A JP2003057417 A JP 2003057417A JP 2004266221 A5 JP2004266221 A5 JP 2004266221A5
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JP
Japan
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Application number
JP2003057417A
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JP2004266221A (ja
JP4383071B2 (ja
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Priority to JP2003057417A priority Critical patent/JP4383071B2/ja
Priority claimed from JP2003057417A external-priority patent/JP4383071B2/ja
Publication of JP2004266221A publication Critical patent/JP2004266221A/ja
Publication of JP2004266221A5 publication Critical patent/JP2004266221A5/ja
Application granted granted Critical
Publication of JP4383071B2 publication Critical patent/JP4383071B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2003057417A 2003-03-04 2003-03-04 ウエハ収納カセットの検査装置及び方法 Expired - Lifetime JP4383071B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003057417A JP4383071B2 (ja) 2003-03-04 2003-03-04 ウエハ収納カセットの検査装置及び方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003057417A JP4383071B2 (ja) 2003-03-04 2003-03-04 ウエハ収納カセットの検査装置及び方法

Publications (3)

Publication Number Publication Date
JP2004266221A JP2004266221A (ja) 2004-09-24
JP2004266221A5 true JP2004266221A5 (ja) 2006-04-20
JP4383071B2 JP4383071B2 (ja) 2009-12-16

Family

ID=33120854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003057417A Expired - Lifetime JP4383071B2 (ja) 2003-03-04 2003-03-04 ウエハ収納カセットの検査装置及び方法

Country Status (1)

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JP (1) JP4383071B2 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008069191A1 (ja) * 2006-12-07 2008-06-12 Shibaura Mechatronics Corporation ウエーハ収納カセット検査装置及び方法
KR101445911B1 (ko) 2009-04-13 2014-09-29 히라따기꼬오 가부시키가이샤 기판캐리어 측정 지그, 충돌방지 지그 및 그것을 이용한 충돌방지 방법
JP6124405B2 (ja) * 2013-06-25 2017-05-10 芝浦メカトロニクス株式会社 ウェーハ収納カセットの検査装置及び検査方法
JP5997390B2 (ja) * 2013-09-11 2016-09-28 平田機工株式会社 検査方法及び検査装置
CN107408520B (zh) * 2015-03-03 2022-02-25 卢茨·瑞布斯道克 检查系统
EP3413340B1 (en) * 2017-06-08 2021-11-17 Brooks Automation (Germany) GmbH Method for inspecting a container and inspection system
EP3413339B1 (en) * 2017-06-08 2023-05-24 Brooks Automation (Germany) GmbH Inspection system and method of inspection for substrate containers
TWI771753B (zh) * 2020-09-14 2022-07-21 鴻績工業股份有限公司 晶圓盒檢測裝置及晶圓盒檢測方法
JP7218340B2 (ja) 2020-11-18 2023-02-06 信越半導体株式会社 検査装置及び検査方法
CN114400190B (zh) * 2022-03-25 2022-06-10 南京伟测半导体科技有限公司 一种全方位检测晶舟盒内晶圆的装置

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