JP2004263269A - Method of producing fine surface molding - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of easily and inexpensively producing a fine surface molding high in surface quality by fabricating a molding die by using electroforming with a fine surface shape as a master. <P>SOLUTION: In the method of producing a fine surface molding where a fine surface shape is formed on the surface of a substrate or on the surface of a layer for shape molding applied to the surface of the substrate, electroforming is performed to the surface of the substrate or the surface of the layer for shape molding applied to the surface of the substrate on which the fine surface shape is formed to form an electroformed layer, and a die is prepared by using the electroformed layer, so that a product is produced by using the die, a stage wherein a liquid photoresist 15 is thinly and uniformly stuck to the surface of the surface of the substrate 10 or the surface of the layer 11 for shape molding applied to the surface of the substrate on which the fine surface shape is formed, and a stage wherein the photoresist 15 is heated and hardened are contained. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method of manufacturing a fine surface model, and more particularly to a method of manufacturing a micro surface model by manufacturing a metal mold using electroforming to manufacture a fine surface model.
[0002]
[Prior art]
In recent years, a shaped article having a fine surface typified by a light guide plate or the like for a liquid crystal display backlight has become an important component, and its development has been actively pursued.
Conventionally, light guide plates for liquid crystal display backlights have been manufactured by processing the fine surface shape on the metal core of the mold itself using an ultra-precision processing machine with a single-crystal diamond tool, In general, a surface shape is processed, electroforming is performed on the processed surface, and a mold for injection molding is manufactured using the electroformed layer, and a product is generally obtained by injection molding.
Recently, a fine surface shape of the light guide plate has been proposed which is difficult to machine by machining. In order to respond to these demands, as a method other than machining, a fine surface shape is processed using lithography technology, electroforming is performed on the processed surface, and a mold for injection molding is manufactured using the electroformed layer. The technology for obtaining products by injection molding is also evolving.
FIG. 4 shows an outline of a general process of manufacturing a mold using electroforming using such a fine surface shape as a master.
FIG. 4A shows that the shape forming layer 11 is present on the surface of the substrate 10.
(B) shows a state in which the shape forming layer 11 is a photoresist and a fine surface shape is formed by a lithography technique of exposing and developing through a pattern mask or a gray scale mask or the like.
(C) shows a state in which a conductive film is adhered to the surface of the shaping layer 11 on which the fine surface shape is formed, and electroforming is performed to form an electroformed layer 12.
(D) shows that only the electroformed layer 12 is taken out and made into a mold.
[0003]
However, when machining without using an expensive ultra-precision processing machine with a single-crystal diamond tool, or when machining a fine surface shape by lithography technology, the level of surface accuracy required for the surface of the optical component is reduced. There is a problem that it is very difficult to obtain.
Although the light guide plate has been described as an example, other micro optical components and the like basically have similar problems.
Therefore, in the case of machining, an expensive ultra-precision machine having a single crystal diamond bite is used, or when processing a fine surface shape by lithography technology, a heat treatment process is mainly used. Improves surface roughness.
As a method of improving the surface roughness by a heat treatment process in the lithography technique, as shown in FIG. It has been practiced to melt the surface of the photoresist of the shape forming layer 11 to reduce the roughness by surface tension, and to cool and re-solidify to obtain a smooth surface (for example, see Patent Document 1). .
[0004]
[Patent Document 1]
JP-A-2002-122998 (page 5, FIG. 5)
[0005]
[Problems to be solved by the invention]
However, in order to obtain good surface quality required for optical components and the like, in the case of machining, there is a problem that it is necessary to use an expensive ultra-precision processing machine or the like having a single crystal diamond tool, In the case of lithography technology, methods such as improving the surface roughness by a photoresist heat treatment process are used, but this heat treatment process is sensitive to the relationship of surface roughness, temperature, positional relationship with heat source, retention time, etc. There is a problem that requires experience and detailed experiments.
[0006]
The present invention has been made in view of the above problems, and relates to a method of processing a fine surface shape using lithography technology or machining, and improving the surface quality of the processed fine surface shape. Providing an easy and inexpensive method for manufacturing a fine surface model by manufacturing a mold using electroforming with the fine surface shape of improved quality as a master and manufacturing a fine surface model with good surface quality. Aim.
[0007]
[Means for Solving the Problems]
In order to achieve the above-mentioned object, the present invention forms a fine surface shape on a surface of a substrate or a surface of a shape forming layer added on the surface of the substrate, and forms a fine surface shape on the substrate. Forming an electroformed layer by performing electroforming on the surface of the shape forming layer added on the surface or the surface of the substrate, manufacturing a mold using the electroformed layer, and manufacturing a product using the mold In the method for producing a fine surface molded article,
A step of thinly and evenly applying a liquid photoresist to the surface of the substrate on which the fine surface shape is formed or the surface of the shape forming layer added on the surface of the substrate, and a step of heating and curing the photoresist. It is characterized by having.
[0008]
According to the present invention, a substrate on which a fine surface shape is formed by processing a fine surface shape using a machining process, a lithography technique, or the like on a surface of a substrate or a surface of a shape forming layer added on the surface of the substrate The liquid photoresist is thinly and evenly applied to the surface of the surface or the surface of the shape forming layer added on the surface of the substrate, and then heated and cured, so that the surface roughness can be maintained while maintaining the original shape. Only can be improved. Accordingly, a mold is manufactured using electroforming with the fine surface shape having the improved surface quality as a master, and a fine surface molded product having a good surface quality is produced. Therefore, an easy and inexpensive method for producing a fine surface molded product is provided. can do.
[0009]
Further, the substrate is made of a metal, glass, ceramic or plastic material.
[0010]
According to the method of the present invention, since the substrate is a metal, glass, ceramic or plastic material, it has a certain rigidity required for the substrate, and can be processed by machining such as cutting or grinding. . Then, since the liquid photoresist is thinly and uniformly attached to the processed surface and then cured by heating, only the surface roughness can be improved while maintaining the original shape. Accordingly, a mold is manufactured using electroforming with the fine surface shape having the improved surface quality as a master, and a fine surface molded product having a good surface quality is produced. Therefore, an easy and inexpensive method for producing a fine surface molded product is provided. can do.
[0011]
Further, the shape modeling layer added on the surface of the substrate is a photoresist or a photocurable resin for stereolithography.
[0012]
According to the method of the present invention, the shape shaping layer applied on the surface of the substrate is a photoresist or a photocurable resin for stereolithography. In the case of a photoresist, a fine surface shape can be formed on the shape modeling layer added on the surface of the substrate by exposing and developing through a pattern mask or a gray scale mask.
In the case of a photocurable resin for stereolithography, by controlling and irradiating light so as to have a predetermined shape, a fine surface shape is formed on the shape modeling layer added on the surface of the substrate. can do. Then, since a liquid photoresist is thinly and uniformly attached to the surface on which the fine surface shape is formed, and then cured by heating, only the surface roughness can be improved while maintaining the original shape. Accordingly, a mold is manufactured using electroforming with the fine surface shape having the improved surface quality as a master, and a fine surface molded product having a good surface quality is produced. Therefore, an easy and inexpensive method for producing a fine surface molded product is provided. can do.
[0013]
In addition, a flow-out preventing member is attached to the outer peripheral portion of the substrate on which the fine surface shape is formed or the shape forming layer added on the surface of the substrate, and is attached to the surface of the substrate having the fine surface shape or the surface of the substrate. Applying a liquid photoresist to be applied to the surface of the shaped layer for forming a shape higher than the maximum height of the fine surface shape, removing air bubbles from the photoresist, and attaching the photoresist thinly and uniformly. And removing the excess photoresist using a spin coater that rotates at a high speed.
[0014]
According to the method of the present invention, a flow-out preventing member is attached to an outer peripheral portion of a substrate on which a fine surface shape is formed or a layer for forming a shape added to the surface of the substrate, and a liquid photoresist is coated with the fine surface shape. Apply higher than the maximum height, fully wet the entire surface of the fine surface shape, sufficiently remove bubbles that easily accumulate in the fine surface shape portion, remove the flow prevention member, and use the spin coater that rotates at high speed to centrifugal force As a result, the excess photoresist is removed, so that the photoresist can be thinly and uniformly attached without bubbles. At this time, it is particularly effective when the aspect ratio of the fine surface shape is low and the shape is smooth.
[0015]
Also, the step of removing the excess photoresist using the spin coater includes attaching the back surface of the substrate to a substrate mounting portion of the spin coater, disposing the spin coater so that the substrate is on the lower side, and performing spin coating. Is performed.
[0016]
According to the method of the present invention, such that the liquid photoresist is dripped by gravity from the surface of the substrate on which the fine surface shape is formed or the surface of the shape modeling layer added on the surface of the substrate, Since the back surface of the substrate is attached to the substrate attachment portion of the spin coater upside down, excess photoresist flows out from the back side of the surface with the fine surface shape to the surface portion. Therefore, if spin coating is performed in this state, excess photoresist can be easily removed.
[0017]
In addition, the liquid photoresist applied to the surface of the substrate on which the fine surface shape is formed or the surface of the shape forming layer added on the surface of the substrate is a photoresist for a thin film having high fluidity. Features.
[0018]
According to the method of the present invention, in order to thinly and uniformly adhere a liquid photoresist on the surface of the substrate on which the fine surface shape is formed or on the surface of the shape forming layer added on the surface of the substrate, The resist used is a photoresist for thin films with high fluidity, so it is easy to sufficiently remove bubbles and the like in fine surface features, and it is possible to easily remove excess photoresist by centrifugal force using a spin coater. Thus, the photoresist can be thinly and uniformly attached without bubbles. At this time, it is particularly effective when the aspect ratio of the fine surface shape is low and the shape is smooth.
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of the method for producing a fine surface model according to the present invention will be described in detail with reference to the drawings.
[0020]
(1st Embodiment)
FIG. 1 is a diagram illustrating a method of manufacturing a fine surface model according to the first embodiment of the present invention.
With reference to FIG. 1, a method for manufacturing a fine surface model according to the first embodiment of the present invention will be described.
[0021]
The substrate 10 shown in FIG. 1A is, for example, a flat glass plate. The shape forming layer 11 is, for example, a photoresist, and is exposed to light through a pattern mask or a gray scale mask and developed to form a fine surface shape, and is fixed to the substrate 10.
A liquid photoresist 15 for a thin film having high fluidity is applied on the surface of the shape forming layer 11 on which the fine surface shape is formed.
[0022]
At this time, a flow-out prevention member 16 is attached to the outer periphery of the substrate 10 and the shape modeling layer 11, and the liquid photoresist 15 is applied so as not to flow out to be higher than the maximum height of the fine surface shape. Thoroughly wet the entire surface.
[0023]
The defoaming device 30 shown in FIG. 1A includes a vacuum container section 33, a vacuum pump section 31, and a suction pipe section 32. The vacuum pump section 31 uses the vacuum container section 33 via the suction pipe section 32. The air inside is suctioned to increase the degree of vacuum, and bubbles and the like that easily accumulate in the fine surface shape portion on the surface of the shaping layer 11 are sufficiently degassed from the liquid photoresist 15 previously applied.
[0024]
Next, the flow preventing member 16 is removed, and the shape forming layer 11 with the photoresist 15 applied thereto is fixed to the substrate mounting portion 41 of the spin coater 40 which can rotate at high speed as shown in FIG. The excess liquid photoresist 15 is removed by centrifugal force by mounting the substrate 10 and rotating at high speed, and the photoresist 15 is thinly and uniformly attached without bubbles.
[0025]
After that, the substrate 10 on which the shape forming layer 11 with the photoresist 15 thinly and uniformly adhered is placed on a hot plate 50 shown in FIG. 1C and is cured by heating. Alternatively, the substrate 10 on which the shape forming layer 11 in the state where the photoresist 15 is thinly and uniformly adhered may be heated and cured in an oven (not shown) or the like.
[0026]
According to the present embodiment, the liquid photoresist 15 is thinly and uniformly adhered to the surface on which the fine surface shape is formed, and then cured by heating. Therefore, as shown in FIG. Only the surface roughness can be improved while preserving.
[0027]
Accordingly, a mold is manufactured using electroforming with the fine surface shape having the improved surface quality as a master, and a fine surface molded product having a good surface quality is produced. Therefore, an easy and inexpensive method for producing a fine surface molded product is provided. can do.
[0028]
In this embodiment, the case where the substrate 10 is made of glass has been described, but the substrate 10 may be made of metal, ceramic, plastic or the like.
Similarly, the case where the shape modeling layer 11 is a photoresist has been described, but the shape modeling layer 11 may be a photocurable resin for optical modeling. In this case, a fine surface shape is formed on the shape forming layer 11 added on the surface of the substrate 10 by controlling and irradiating light so as to have a predetermined shape.
[0029]
(Second embodiment)
Next, a second embodiment of the present invention will be described with reference to FIG.
Further, the same portions and the same members as those of the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.
In this embodiment, a case where a fine surface shape is directly formed on the surface of the substrate 10 as shown in FIG. 2 will be described.
The substrate 10 is, for example, a metal. The substrate 10 has a certain rigidity required, and the substrate 10 can be directly processed into a fine surface shape by machining such as cutting or grinding.
[0030]
According to the present embodiment, the liquid photoresist 15 is thinly and uniformly adhered to the surface of the substrate 10 on which the fine surface shape is formed by using the method described in the first embodiment, and then is cured by heating. In addition, it is possible to improve only the surface roughness while keeping the original shape.
[0031]
Accordingly, a mold is manufactured using electroforming with the fine surface shape having the improved surface quality as a master, and a fine surface molded product having a good surface quality is produced. Therefore, an easy and inexpensive method for producing a fine surface molded product is provided. can do.
[0032]
In this embodiment, the case where the substrate 10 is made of metal has been described, but it may be made of glass, ceramics or plastic material. These materials can be directly processed into a fine surface shape on the substrate 10 by machining such as cutting or grinding, as in the case of metal.
[0033]
(Third embodiment)
Next, a third embodiment of the present invention will be described with reference to FIG.
Further, the same portions and the same members as those of the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.
In this embodiment, the top and bottom of the spin coater 40 are installed upside down as shown in FIG.
The liquid photoresist 15 applied to the surface of the substrate 10 on which the fine surface shape is formed by the method described in the first embodiment or the surface of the shape forming layer 11 added on the surface of the substrate 10 After defoaming, the photoresist 15 in a liquid state is caused to fall down by gravity from the surface of the substrate 10 on which the fine surface shape is formed or the surface of the shape forming layer 11 added on the surface of the substrate 10. Next, the back surface of the substrate 10 is mounted on the substrate mounting portion 41 of the spin coater 40 with the top and bottom reversed.
[0034]
For this reason, the excess photoresist 15 flows out to the surface portion from the surface of the substrate 10 on which the fine surface shape is formed or the back side of the surface of the shape forming layer 11 added on the surface of the substrate 10.
[0035]
According to the present embodiment, since the spin coating is performed in this state, the excess photoresist 15 can be easily removed.
In this embodiment, the spin coater 40 is installed upside down. However, the upside down of the spin coater 40 is not reversed. Good.
[0036]
Although the preferred embodiment of the present invention has been described, the present invention is not limited by the above description.
[0037]
【The invention's effect】
According to the present invention, a substrate on which a fine surface shape is formed after processing a fine surface shape using a machining process, a lithography technique, or the like on a surface of a substrate or a surface of a shape modeling layer added on the surface of the substrate The liquid photoresist is thinly and evenly applied to the surface of the surface or the surface of the shape forming layer added on the surface of the substrate, and then heated and cured, so that the surface roughness can be maintained while maintaining the original shape. Only can be improved. Accordingly, a mold is manufactured using electroforming with the fine surface shape having the improved surface quality as a master, and a fine surface molded product having a good surface quality is produced. Therefore, an easy and inexpensive method for producing a fine surface molded product is provided. can do.
[Brief description of the drawings]
FIG. 1 is a diagram related to a first embodiment of a method for manufacturing a fine surface model of the present invention.
FIG. 2 is a diagram illustrating a substrate and a shape modeling layer on a surface of the substrate according to a second embodiment of the method for manufacturing a fine surface model of the present invention.
FIG. 3 is a diagram illustrating a method for manufacturing a fine surface model according to a third embodiment of the method for manufacturing a fine surface model according to the present invention.
FIG. 4 is a view for explaining a general method of manufacturing a fine surface molded article in which a metal mold is manufactured using electroforming with a fine surface shape as a master.
FIG. 5 is a diagram illustrating a conventional method for improving the surface roughness of a photoresist having a fine surface shape.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Substrate 11 Shape forming layer 12 Electroforming layer 15 Photoresist 16 Outflow prevention member 20 Heat source 30 Defoaming device 31 Vacuum pump unit 32 Suction pipe unit 33 Vacuum container unit 40 Spin coater 41 Substrate mounting unit 50 Hot plate

Claims (6)

A fine surface shape is formed on the surface of the substrate or the surface of the shape modeling layer added on the surface of the substrate, and the fine surface shape is added on the surface of the substrate or the surface of the substrate on which the fine surface shape is formed. Electroforming is performed on the surface of the shape modeling layer to form an electroformed layer, a mold is manufactured using the electroformed layer, and a product is manufactured using the mold. In the method,
A step of thinly and uniformly attaching a liquid photoresist to the surface of the substrate on which the fine surface shape is formed or the surface of the shape forming layer added on the surface of the substrate, and heating the photoresist. And hardening by heating. The method according to claim 1, wherein the substrate is a metal, glass, ceramic, or plastic material. The method according to claim 1, wherein the shape forming layer added on the surface of the substrate is a photoresist or a photocurable resin for light forming. A flow-out preventing member is attached to an outer peripheral portion of the substrate on which the fine surface shape is formed or the shape modeling layer added on the surface of the substrate, and the surface of the substrate or the substrate on which the fine surface shape is formed A step of applying the liquid photoresist to be attached to the surface of the shape modeling layer added on the surface higher than the maximum height of the fine surface shape, and a step of defoaming bubbles from the photoresist, Removing the excess photoresist using a spin coater that rotates at a high speed so that the photoresist is applied thinly and uniformly. 4. The fine surface according to claim 1, wherein A method for manufacturing a molded article. The step of removing the excess photoresist using the spin coater includes attaching a back surface of the substrate to a substrate mounting portion of the spin coater, disposing a spin coater such that the substrate is on the lower side, and performing spin coating. The method for producing a fine surface modeled product according to claim 4, wherein: The liquid photoresist applied to the surface of the substrate on which the fine surface shape is formed or the surface of the shape forming layer added on the surface of the substrate is a photoresist for a thin film having a large fluidity. The method for producing a fine surface molded article according to any one of claims 1 to 5, wherein the method comprises:

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