KR100537722B1 - Method and device for ultraviolet continuous curing method for fabrication of micro patterns using drum-type stamper - Google Patents

Abstract

The present invention relates to an apparatus and method for continuously forming a microstructure using an ultraviolet curing system among various methods for forming a microstructure and a method of manufacturing a stamper thereof.

Method for forming a micro-shaped structure according to the present invention, to produce a drum-type stamper for the ultraviolet continuous curing molding step of producing a mother of the drum-type stamper, to produce a drum-type stamper using the mother made in the process Step, building an ultraviolet continuous curing system using the drum-type stamper produced by the process, the rigid substrate or film type between the roller using the drum-type stamper and the transfer roller of the ultraviolet continuous curing system constructed from the step And a UV continuous curing molding step of allowing a substrate to pass through and irradiating ultraviolet rays while the drum-type stamper is in contact with the photopolymer to continuously form a large area microstructure on a rigid substrate or a film-type substrate. It is done. In addition, a method for manufacturing a stamper for use in the UV continuous curing method for the continuous shaping of the microstructure, the step of manufacturing a flexible flexible mother, bonding the flexible mother having the micro-shaped to the cylindrical holder, the mother It characterized by a method of manufacturing a stamper for continuous molding of a fine shape, characterized in that the pre-plating to form a part or all of the drum-shaped stamper. In addition, the stamper for forming the micro-shaped structure is made of a drum type, there is a drum-type stamper supporting structure inside the outer wall structure of the drum-shaped stamper, the inner space is electroplated, spray molding, adhesive polymer Characterized by filling with filling. According to the present invention as described above it is possible to continuously form a large area of the structure, it is possible to continuously form a high quality, high precision, low cost.

Description

Method and device for ultraviolet continuous curing method for fabrication of micro patterns using drum-type stamper}

      BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a continuous forming apparatus and method for forming a microstructure using an ultraviolet curing system, and a method for manufacturing a stamper, among various methods for forming a microstructure. As a process using a photopolymer to form a low temperature process at room temperature is possible to be very suitable for molding a very small shape, there is an advantage that has a high thermal stability and high optical properties compared to other polymer molded products.

delete

In addition, the UV curable molding method has the advantage of forming a fine shape on a glass substrate or an information electronic device as well as a simple polymer product. Conventional UV curing method uses a planar stamper made of silicon or metal, and after coating viscous photopolymer on the substrate, put a stamper with fine shape on it and irradiate it with UV light to cure the photopolymer. Was used.

Existing UV molding process shows considerably superior product formability compared to other processes in forming micro-optical parts and micro shapes in the area of silicon wafer level, but display parts, riblet film, projection screen, etc., which are rapidly increasing in demand recently It is difficult to apply to parts requiring the same large area fine shape.

This is because a large area stamper is required when molding a large-area product by the conventional method, and an enlargement of an exposure system and other auxiliary equipment is required.

In addition, the conventional one-time UV-curable molding method has a fatal defect in mass productivity because the production cycle is longer than that of continuous molding.

On the other hand, as mentioned above, until now, all micro-machining including large-area parts have been manufactured at high cost depending on expensive equipment and small quantity production. In particular, in the case of a large shape microstructure, there is almost no manufacturing method for increasing productivity and mass productivity.

It is therefore an object of the present invention to provide a novel micromolding apparatus and method capable of continuously molding large areas of microshape on glass and plastic substrates.

It is yet another object of the present invention to provide a new method of continuously forming fine structures of good quality on a large or glass substrate.

It is still another object of the present invention to provide a micro-machining method which can form micro-structures with high precision on a glass substrate having thermal stability in forming microstructures, and thus can be usefully applied to manufacturing flat displays. will be.

It is a further object of the present invention to provide a stamper suitable for producing microstructures.

A feature of the present invention for achieving this object is a method of manufacturing a drum-type stamper for producing a drum-shaped stamper for the continuous molding of the micro-structure including a large-area micro-structure, to produce a mother of the drum-shaped stamper And a step of joining the mother to the inner circumferential surface of the cylindrical holder, and forming the drum-type stamper by pre-plating the inner circumferential surface of the mother. Another feature of the present invention is a microstructure continuous forming apparatus for continuous molding of microstructures including large area microstructures, comprising: a drum-type stamper stamper and a photopolymer between the substrate to face the drum-type stamper; And a supply means for supplying and irradiating means for irradiating ultraviolet rays to the photopolymer stamped by the drum-type stamper. Another feature of the present invention is a method for continuous molding of microstructures for continuous molding of microstructures including large-area microstructures, the production of a drum-type stamper, and supplying a photopolymer to be in contact with the outer circumference of the drum-type stamper. By stamping the polymer to be contacted by contact with the drum-type stamper, and irradiating and curing the stamped photopolymer with ultraviolet rays, thereby transferring the micro-shape to the outer periphery of the drum-shaped stamper, thereby continuously constructing the structure having the micro-shape. It is characterized by the continuous molding method of the microstructures to be molded. In the case of forming the microstructures by using the UV continuous curing method and the drum stamper, the fine structures can be formed. Large area of glass substrate or plastic It becomes possible to mold on a film substrate. In particular, such a microstructure structure processing process can be very useful in the field of flat panel display because it can form a large precision microstructure on a glass substrate having a high thermal stability, and also the adhesive type formed microstructure In the case of using a film, it is also possible to manufacture a product that requires a large area of fine shape on an opaque substrate.

delete

delete

delete

delete

delete

delete

delete

delete

delete

delete

delete

delete

delete

delete

Hereinafter, an embodiment of the present invention will be described with reference to FIGS. 1 to 13. In the continuous molding method of the micro-shape proposed in the present invention, ultraviolet continuous curing method is applied. In addition, a cylindrical stamper is manufactured in order to implement the ultraviolet continuous curing method, and the manufactured cylindrical stamper is implemented by applying the ultraviolet continuous curing method.

Therefore, in the continuous molding method of the microstructure according to the present invention, the step of manufacturing the mother of the drum-type stamper to manufacture the drum-type stamper for UV continuous curing molding, the drum-type stamper using the mother produced from the step Manufacturing a step, constructing an ultraviolet continuous curing system using the drum-type stamper produced by the step, using a drum-type stamper and a transfer roller of the ultraviolet continuous curing system constructed from the step, between the rollers and the rigid substrate Or ultraviolet continuous curing molding step of passing a film substrate and continuously forming a large area microstructure on a rigid substrate or a film substrate by irradiating ultraviolet rays while the drum type stamper is in contact with the photopolymer. do.

The stamper manufacturing method according to the present invention comprises the steps of: manufacturing a flexible mother of fine shape, bonding the flexible mother having the micro shape to a cylindrical holder, electroplating the mother part or all of the drum-shaped stamper It may be made of a molding step.

In the manufacture of the drum-type stamper, optionally, a flexible mother having a fine shape can be bonded to the cylindrical holder and pre-plated to manufacture part or all of the drum-type stamper.

Further, in the manufacture of the drum-type stamper, optionally, the drum-type stamper supporting structure is placed in the outer wall structure of the drum-type stamper, and the inner space is electroplated, spray-molded, adhesive polymer filling method, or the like. The standard can be filled and produced in a modified way.

Further, in the production of drum-shaped stampers, it is optionally possible to form photoresist microstructures using photolithography or hologram recording on a rubber substrate for the production of highly flexible rubber-based mothers.

In addition, in the manufacture of a drum-type stamper, optionally, to produce a highly flexible mother, a silicon or metal master having a fine shape may be manufactured and manufactured by silicon rubber molding.

In addition, in the manufacture of the drum-type stamper, optionally, by producing a metal thin plate by electroplating on the mother formed fine shape, it can be attached to the drum-shaped structure to produce a drum-type stamper.

In addition, in the manufacture of the drum-type stamper, optionally, the micro-shape may be directly formed on the drum-like structure by precision machining.

Optionally, by using the method for forming a microstructure according to the present invention and a drum stamper therefor, a microstructure may be formed on a polymer film and attached to a glass or opaque substrate to form a substrate on which the microstructure is formed. Can be.

As described above, the method of forming the microstructure according to the present invention is based on the application of the ultraviolet continuous curing method. In the case of the UV continuous curing method, depending on the characteristics of the final molded product, a method of continuously forming a micro shape on a rigid material such as glass and a method of continuously forming a micro shape on a highly flexible material such as a polymer film There is this.

For the UV continuous curing method for the micro-molding of the structure, the three steps of manufacturing the mother for the production of a drum-type stamper, the production of the drum-type stamper, and the production of the UV-based continuous curing system using the drum-type stamper are performed.

The production of the drum-type stamper is made of a rubber material with high flexibility and fixed to the cylindrical holder, and then manufactured by electroplating, etc. In addition, a metal sheet is manufactured and attached to the outer wall of the drum-type structure to make the drum It is divided into a method of manufacturing a stamper and a method of manufacturing a drum stamper by directly machining a drum-type structure.

Referring to the configuration and effect of the present invention in more detail with reference to the drawings as follows.

FIG. 1 is a flowchart of manufacturing two types of UV-curable moldings by manufacturing a rubber-based mother with high flexibility and using the same to manufacture a drum mold.

In other words, by using a stamper manufactured on the basis of a flexible mother, the micro shapes are continuously formed on a rigid material such as glass according to the characteristics of the final molded product, and the micro shapes are continuously formed on a highly flexible material such as a polymer film. It is the ultraviolet continuous curing molding process drawing at the time of shaping | molding.

Here, the flexible rubber-based mother is a method of coating a photoresist on a rubber substrate and patterning it through photolithography and holography, or by molding a master made of a silicon rubber-based material through a machining and silicon process. Is produced.

In order to manufacture the drum-type stamper, a seed layer for electroplating is deposited on the manufactured rubber-based mother, and the electroplating is performed by attaching to a cylindrical structure. When the electroplating is carried out to some extent and formed on the outer wall surface of the drum mold, the drum stamper is completed by methods such as electroplating, spray molding, and adhesive polymer filling. The finished stamper can be applied to both the above-described UV continuous curing method for rigid substrates and UV continuous curing method for film substrates, thereby enabling large-scale mass production of fine shapes.

2 is a flowchart of attaching a thin metal plate to a drum to produce a drum-type stamper, and performing UV continuous curing molding using the same. A metal layer is fabricated by depositing a base layer on a silicon mother substrate having a micro pattern fabricated using various semiconductor processes including a photo process and an etching process and electroplating it. Thereafter, the metal thin plate is adhered to the surface of the drum-like structure to complete a drum-type stamper, and UV curing is performed using the same.

Figure 3 is a flow chart of the ultraviolet continuous curing method using a drum-type stamper manufactured by machining.

FIG. 4 schematically shows a method of manufacturing a photoresist 2 pattern on a rubber substrate 1 in a method of manufacturing a flexible rubber-based mother. In this method, first, the photoresist 2 is spin-coated and laminated on the rubber substrate 1 to a desired thickness. In this case, the thickness to be laminated is determined by the viscosity of the photoresist 2 and the rotation speed of the spin coating. Thereafter, the structure of the coated photoresist 2 is modified by using photolithography 3 or holographic lithography 4, and then a rubber-based mother 5 having the same shape as the final product is manufactured through a developing process. This method has a merit that it is possible to quickly and uniformly produce a pattern such as a simple lattice pattern in a large area, but has a disadvantage in that the shape of the pattern cannot be varied.

Figure 5 schematically shows a method of manufacturing a rubber-based mother (5) using a silicon rubber molding method of manufacturing a flexible rubber-based mother method. First, a master 6 having a shape opposite to a pattern to be finally formed on a silicon wafer or a metal material is manufactured through a semiconductor process such as a general photo process, an etching process, or a precision machining process. Thereafter, the manufactured master 6 is molded using a silicone rubber-based material 7 such as polydimethysiloxane (PDMS) to finally manufacture a rubber-based mother 5 having high flexibility. This method is costly and time-consuming because it is a process of making a pattern on a silicon or metal material through a conventional silicon process manufacturing method or precision machining, and transferring the pattern back to a silicon rubber-based material to produce a mother. There are advantages to producing patterns of various shapes.

6 schematically shows a method of manufacturing a drum-type stamper using a highly flexible rubber-based mother 5 fabricated using the method. First, a seed layer 8 is formed on the rubber-based mother 5 as a preliminary process for electroplating. At this time, the base layer 8 is laminated in a thin film using electroless plating, sputtering or evaporation. If a mother using a material such as PDMS is used, since the surface energy is low and the adhesion of the base layer may be low, a pre-process such as corona discharge may be used to increase the adhesion of the surface (PDMS) in advance. Also in the case of the mother of other materials can be used a pre-process for improving the adhesion. Thereafter, the rubber-based mother 9 having the base layer deposited by the above process is rolled and fixed in a hollow cylindrical holder 10 so that the fine pattern portion of the mother 9 may come inward. Subsequently, when the electroplating is performed, the metal layer 11 grows from the base layer, and when a predetermined time elapses, an outer wall surface of the drum type stamper is formed. At this time, the material of the electroplating may be an alloy of various materials, but mainly nickel is used.

The inner body of the outer wall surface of the drum-shaped stamper produced by the above process is manufactured by three methods independently or through their synthesis method.

7 is a diagram illustrating a method of manufacturing a drum-type stamper by continuously performing electroplating after placing a support shaft structure 12 used to support a drum later in the center of the cylindrical holder 10. The process is most ideal as a process in which the body of the drum-type stamper is made of the same metal layer 11 through electroplating, but the growth rate of the metal layer 11 using electroplating is very low compared to other methods. There is a disadvantage that the stamping time is increased.

FIG. 8 is a spray casting method of space between the outer wall surface of the manufactured drum-type stamper and the shaft structure 12 after placing the supporting shaft structure 12 used to support the drum later in the center of the cylindrical holder 10. It is a schematic method of filling using the metal layer 14 produced through. Through the above process, it is possible to produce a metal drum-type stamper 13 at a relatively high speed.

9 is a diagram illustrating a method of filling the space between the outer wall surface of the manufactured stamper and the shaft structure 12 using the adhesive polymer 15. When using the above process it is possible to manufacture the drum-shaped stamper 13 at a very high speed.

FIG. 10 is a diagram illustrating a method of manufacturing a drum-shaped stamper 13 by manufacturing a metal thin plate 17. The metal layer 11 is manufactured by depositing the base layer 8 on the silicon mother 16 having the microstructure manufactured through the semiconductor process and pre-plating it.

       After the post-treatment of the produced metal layer to produce a metal thin plate 17 having a fine pattern. In this case, as the post-treatment method, a conventional mechanical polishing method and a chemical mechanical polishing method may be used. The drum-shaped stamper 13 may be manufactured by uniformly attaching the produced metal thin plate 17 to the drum-shaped structure 18 having no shape using an adhesive 19. At this time, a technique for attaching the metal thin plate 15 uniformly on all surfaces is required.

As described above, the method of manufacturing the drum-shaped stamper described with reference to FIGS. 7 to 10 uses a method of transferring or bonding the fine shape formed on the planar substrate to the cylindrical structure.

       Therefore, in the process of transferring or joining the pattern to the cylindrical structure, the connection of the three parts may not be smooth. For this, the optimal initial mother size and the diameter of the drum stamper should be determined according to the shape and spacing of the initial pattern.

       On the other hand, in addition to the manufacturing method of the drum-type stamper described above, it is possible to manufacture the drum-type stamper by performing precision machining, including diamond patterning, on the drum-type structure having no micro-shape.

       In addition, the produced drum-type stamper may be additionally subjected to a surface treatment process using a release agent to improve the releasability during the subsequent continuous curing process.

FIG. 11 is an explanatory diagram schematically showing a process of forming a photopolymer fine shape on a high rigid substrate such as glass using a drum-type stamper manufactured by the above methods. As shown in the figure, the drum-type stamper 13 manufactured above is mounted on the upper portion, and the small rollers 20 for conveyance and support are mounted on the lower portion thereof. ) To pass. The liquid photopolymer 23 is applied onto the substrate 21 by the material supply device 22 before the substrate is in contact with the drum-shaped stamper.

        When the substrate 21 and the photopolymer 23 pass under the drum-type stamper 13, the photopolymer 23 transfers the micro-shape of the drum-type stamper 13, and at the same time, the ultraviolet rays 24 irradiated from below. ). In the ultraviolet curing molding method, since a substantial level of curing is achieved when the material is exposed to ultraviolet rays, a blocking mask 25 is provided to prevent ultraviolet rays from reaching the photopolymer that is not in contact with the drum-type stamper 13. The liquid photopolymer 23 starts to solidify from the moment it comes into contact with the electroplated drum-type stamper 13, and after the solidification is completed to some extent, is released from the stamper 13, and then completely cured by exposure to ultraviolet rays 24 continued. (26) become.

         At this time, the rollers 20 for transporting and supporting the substrate should be made of a transparent material so that ultraviolet rays can be transmitted to cure the photopolymer. Finally, the produced substrate is cut into a desired shape through a cutting operation.

        The UV continuous molding method for rigid substrates can be used to form a film product by using a method of placing a film substrate on a glass substrate as well as molding a rigid product such as glass and a thick plastic substrate.

        Here, the supply of material may be applied to the drum mold in addition to the method of directly applying to the substrate as shown in Figure 11, and in contrast to this process, the drum-type stamper is placed at the bottom and the system is passed so that the substrate passes from the top. It is also possible to design and fabricate a system that exposes ultraviolet light from the top to form microstructures at the bottom of the substrate.

        In the above process, the characteristics of the final molded product are influenced by the feed rate of the substrate, the pressure and gap between the drum-type stamper and the substrate, the intensity and irradiation amount of the ultraviolet rays, the supply of the material, and the like. Molding is possible.

12 is an explanatory diagram showing an ultraviolet continuous curing method applicable to forming a fine shape using a photopolymer on a film-like substrate having flexibility. In the explanatory drawing, the film-form substrate 27 is brought into contact with the drum-type stamper 13 by the film-drum contact roller 28 and the release roller 29 and is transported along the surface. An appropriate amount of liquid photopolymer 19 is applied onto the drum type stamper 13 through the material supply device 22, and the film type substrate 25 and the drum type stamper depend on the conveying direction of the drum type stamper 13. A photopolymer layer is formed between the 13 and exposed to the ultraviolet rays 24 while the photopolymer is transferred along the surface of the drum stamper 13 while transferring the fine shape of the drum stamper. Finally, the molded product is released from the drum stamper 13 by the film drum release roller 29. This process is a very suitable method for forming fine shapes on film-like substrates, and the characteristics of the molded article are determined by the amount of material supplied, the intensity and irradiation amount of ultraviolet rays, the pressure and gap between the roller and the drum-type stamper, and the tensile force applied to the substrate. Through this control, it is possible to continuously form microstructures of excellent characteristics.

Both of the above UV continuous curing method is a method for producing a fine shape on the substrate using a transparent glass substrate or a transparent polymer substrate. FIG. 13 shows a method of forming a photopolymer microshape 26 on the transparent adhesive polymer film 34 by the above-described methods to fabricate a product having a microshape on an opaque substrate 33. Schematic diagram showing how to attach to (35). The transparent adhesive polymer film 34 is composed of a polymer film layer 31, an adhesive layer 32, and a protective layer 33 that protects the adhesive 32. After the photopolymer fine shape 26 is formed, the protective layer By removing (33) and attaching it to the opaque substrate 35, a large area fine shape can be formed on the opaque substrate. This method can be used as a method of attaching the fine shape 26 fabricated on the adhesive polymer film 34 on the glass substrate 35 on the same principle. In addition, a method of forming a fine shape on a general polymer film, not an adhesive polymer film, and attaching the fine shape to an opaque substrate or a glass substrate using an adhesive may be used.

      According to the present invention as described above, large-area, large-scale, low-cost production is possible. In addition, the UV continuous curing method using the drum-type stamper proposed in the present invention can be the only method of continuously forming the photo polymer micro-shape on a transparent substrate using the drum-type stamper. This enables continuous molding of substrates with large area micro- shapes, enabling low-cost production of parts requiring large-scale micro shapes, such as flat panel display parts, projection screens, and riblet structures for drag reduction. .

        In particular, by enabling mass production of large-area microstructures having high thermal stability and optical properties on glass substrates, low-cost production of large flat-panel display parts is enabled.

1 is a flow chart of a UV continuous curing molding process using a drum-type stamper manufactured using a flexible rubber-based mother of the UV continuous curing method for mass production of a large shape according to the present invention

2 is a flow chart of a UV continuous curing molding process using a stamper manufactured by attaching a metal sheet having a micro shape to the surface of a drum-like structure of the UV continuous curing method for mass production of a large shape according to the present invention.

Figure 3 is a flow chart of the UV continuous curing molding process using a drum-type stamper produced directly using a conventional machining method of the UV continuous curing method for mass production of large shape according to the present invention

4 is a diagram schematically illustrating a process of manufacturing a mother having a fine shape by coating a photoresist on a rubber substrate and patterning the rubber based mother manufacturing method according to the present invention.

FIG. 5 is a diagram schematically illustrating a process of manufacturing a mother having a micro shape through silicon rubber molding in a flexible rubber-based mother manufacturing method according to the present invention.

6 is a diagram schematically illustrating a process of making a drum-shaped stamper outer wall surface of a predetermined thickness through electroplating after attaching a rubber-based mother having flexibility in the drum-type stamper forming method according to the present invention.

7 is a schematic view showing a method of manufacturing a final drum-type stamper by continuously pre-plating the outer wall surface of the drum-type stamper manufactured in FIG. 6 of the method of forming a drum-type stamper according to the present invention.

FIG. 8 is a diagram schematically showing a method of manufacturing a final drum stamper by applying a spray molding method to an outer wall surface of the drum stamper manufactured in FIG. 6 of a method of forming a drum stamper according to the present invention. FIG.

FIG. 9 is a diagram schematically illustrating a method of manufacturing a final drum stamper by filling an adhesive polymer on an outer wall surface of the drum stamper manufactured in FIG. 6 in a method of forming a drum stamper according to the present invention. FIG.

10 is a diagram schematically illustrating a method of manufacturing a drum stamper by fabricating a metal thin plate by electroplating on a silicon mother formed with a micro-shape in the drum-shaped stamper forming method according to the present invention and attaching it to the drum-shaped structure.

FIG. 11 is an explanatory view showing a step of forming a large area microstructure on a high rigid substrate in the ultraviolet continuous curing method according to the present invention; FIG.

12 is an explanatory view showing a step of forming a large shape microstructure on a highly flexible film-like substrate in the ultraviolet continuous curing method according to the present invention;

FIG. 13 is a diagram schematically illustrating a method of manufacturing a final product by attaching an adhesive film having a fine shape produced through the ultraviolet continuous curing method according to the present invention on an opaque substrate or a glass substrate.

* Description of the symbols for the main parts of the drawings *

1: rubber substrate 2: photoresist

3: photolithography 4: holographic lithography

5: Rubber-based mother 6: Master with micro geometry

7: Silicone rubber 8: Seed layer

9: base layer deposited rubber based mother 10: cylindrical holder

11: electroformed metal layer 12: shaft structure for supporting a drum-type stamper

13: drum-type stamper 14: spray-cast metal layer

15: adhesive polymer 16: silicon mother

17: pre-plated metal sheet 18: drum-like structure

19: adhesive 20: roller for conveyance and support

21: substrate such as glass 22: material supply device

23: liquid photopolymer 24: ultraviolet

25: UV protection mask 26: cured photopolymer

27: film-form substrate 28: film-drum contact roller

29: roller for film drum release 30: ultraviolet exposure equipment

31 polymer layer 32 adhesive layer

33: protective layer 34: adhesive polymer film

35: opaque substrate or glass

Claims (15)

delete A method of manufacturing a drum stamper for producing a drum stamper for continuous molding of a microstructure including a large-area microstructure, Manufacturing a mother of the drum-type stamper; Bonding the mother to the inner circumferential surface of the cylindrical holder; And forming the drum-type stamper by pre-plating the inner circumferential surface of the mother. The method of claim 2, The drum-type stamper is formed only by its outer wall by the electroplating, The inner space surrounded by the outer wall is a drum-type stamper manufacturing method, characterized in that formed through an additional filling process.       The method of claim 2, The additional filling process is a drum-type stamper manufacturing method, characterized in that carried out by any one method of electroplating, spray molding, adhesive polymer filling.       The method of claim 2, The mother is a drum-shaped stamper manufacturing method, characterized in that is produced by molding the photoresist microstructure using a photolithography or holographic lithography method on a rubber-based substrate, The method of claim 2, The mother is a drum-shaped stamper manufacturing method, characterized in that the production of a master having a fine shape, by using a silicone rubber molding using it. delete delete delete       A microstructure continuous molding apparatus for continuous molding of microstructures including large area microstructures,       A drum-type stamper, characterized in that the drum-type stamper is manufactured by the method of any one of claims 2 to 6,       Supply means for supplying a photopolymer between the substrate to face the drum-shaped stamper;        And a irradiation means for irradiating ultraviolet rays to the photopolymer stamped by the drum-type stamper.       The method of claim 10,      The microstructure is a microstructure structure continuous forming apparatus, characterized in that the flat display component, projection screen or riblet structure.       The method of claim 10, The substrate is a microstructure structure continuous molding apparatus, characterized in that the substrate of the glass-based material. delete delete       As a continuous process for forming microstructures for continuous molding of microstructures including large area microstructures,       A drum-type stamper is manufactured according to any one of claims 2 to 6,       Supplying a photo polymer to contact the outer periphery of the drum-type stamper, stamping the polymer to be contacted by contact with the drum-type stamper, and curing the stamped photo polymer by irradiating UV light to the outer shape of the drum-type stamper A continuous transfer method for forming a fine structure, characterized in that the transfer is carried out to continuously form a structure having a fine shape.