JP2004250782A - Heat treatment apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a heat treatment apparatus which is downsized by reducing the dimension of a heat treatment chamber in a radial direction, uniformly heats an article to be heat-treated by securing a smooth gas flow in the heat treatment chamber, and eliminates the need for a sophisticated fan by reducing a pressure loss of a gas for heating the article to be treated to cut down the costs of the apparatus and the operation. <P>SOLUTION: The heat treatment apparatus has a door 5 for carrying the article X to be treated into or out of the heat treatment chamber 2 or for checking it, wherein the above door 5 is provided with a fan 13 for cooling the article X to be treated. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

  The present invention relates to a heat treatment apparatus for performing a heat treatment on an object to be processed.

  One of the heat treatment apparatuses that perform so-called quenching or the like by heating and cooling a metal material to be processed is a multi-chamber heat treatment apparatus including a plurality of heat treatment chambers. And a cooling chamber for cooling the object to be processed. In general, as a method for cooling an object to be processed, an oil cooling method in which the object is cooled by immersing the object in cooling oil, and a high pressure method in which a cooling chamber is pressurized and then cooled by blowing a cooling gas onto the object to be cooled. There is a gas cooling method. According to the oil cooling method, the cooling oil adheres to the object to be processed after cooling, so that the cooling oil must be dropped by washing or the like. For this reason, the number of processing steps for the object to be processed increases, and problems such as an increase in size of the apparatus and an increase in cost arise.

Therefore, in recent years, a high-pressure gas cooling method has attracted attention. According to this high-pressure gas cooling method, the object to be processed can be cooled in a cooling time close to that of the oil cooling method, and since there is no adhesion of cooling oil, the cooled object to be processed can be immediately carried out of the apparatus. A cooling chamber for implementing this high-pressure gas cooling method is formed using a hollow cylindrical material so as to have a structure that can withstand high pressure, and is provided with a door for carrying in an object to be processed or the like. Then, a fan for circulating the cooling gas inside the cooling chamber and a heat exchanger for cooling the cooling gas are provided on the inner peripheral surface of the cooling chamber.
Japanese Patent No. 2731127 Yoshiyoshi Nakatani, "Heat Treatment (Vol.35 No.2) Latest Pressurized Cooling Vacuum Furnace", April 1995, pp. 124-128

  However, as described above, in the conventional multi-chamber heat treatment apparatus, the fan and the heat exchanger for circulating the cooling gas are installed on the inner peripheral surface of the cooling chamber, and the interference with the workpiece is prevented. To avoid this, it is necessary to increase the radial dimension of the cooling chamber, which results in an increase in the size of the device. In addition, since the fan and the like are installed on the inner peripheral surface of the cooling chamber, there are many restrictions on the gas flow path, the gas flow is likely to be uneven, and the cooling gas is used to uniformly cool the object to be processed. A problem that it is difficult to provide In addition to this, since the flow of the cooling gas is not smooth, the pressure loss of the cooling gas is increased, and there is a problem that a sufficient flow velocity cannot be given to the cooling gas without using a fan having a large output. For example, a technique of arranging a fan and a heat exchanger outside the cooling chamber and flowing cooling gas into the cooling chamber through a duct is also conceivable, but in this case, the duct also needs to be designed to withstand pressure similarly to the cooling chamber. Yes, disadvantageous in terms of cost and the like.

The present invention has been made in view of the above problems, and has the following objects.
(1) The size of the apparatus is reduced by reducing the radial dimension of the heat treatment chamber, and the object is uniformly heat-treated by ensuring a smooth flow of gas in the heat treatment chamber.
(2) A high-performance fan is not required by reducing the pressure loss of a gas for performing a heat treatment on an object to be processed, thereby reducing equipment costs and operation costs.

In order to achieve the above object, according to the present invention, as a first means, a heat treatment chamber for performing heat treatment on an object to be processed and having a door, wherein the door is provided with a fan for cooling the object to be processed. Is adopted.
As a second means, in the first means, a configuration is adopted in which the door is a door used for loading or unloading the workpiece into or out of the heat treatment chamber, or for inspecting the inside of the heat treatment chamber. I do.
As a third means, a configuration is adopted in which the first or second means includes a gas flow path forming device for circulating a gas flow formed by the fan through a predetermined path.
As a fourth means, in any one of the first to third means, a heat exchange for exchanging heat between the gas supplied by the fan and a refrigerant guided from the outside of the heat treatment chamber to the inside of the heat treatment chamber. A configuration that includes a vessel is adopted.
As a fifth means, in the fourth means, the heat exchanger is provided between the workpiece and the fan, and the gas flow is in the order of a fan, a workpiece, and a heat exchanger. A configuration is adopted in which circulation is performed in the order of a fan, a heat exchanger, and a processing object.
As a sixth means, in the fourth or fifth means, the gas inflow surface of the heat exchanger is provided with a gas dispersing portion for sending the gas to the heat exchanger in a state where the gas is dispersed. Is adopted.
As a seventh means, in any one of the first to sixth means, the door is provided with a slide device for moving closer to or away from the heat treatment chamber.
As an eighth means, in any one of the first to seventh means, when the gas is supplied from the outside of the heat treatment chamber to the inside of the heat treatment chamber, the gas is discharged through the gas discharge branch pipe. A configuration is adopted in which the entire processing object is sprayed.

  The object to be processed can be uniformly heat-treated. In addition, it is possible to reduce equipment costs and operation costs.

  Hereinafter, an embodiment of a heat treatment apparatus according to the present invention will be described with reference to the drawings. 1 and 2 are schematic views of the overall configuration of a heat treatment apparatus 1 according to the present embodiment. FIG. 1 is a longitudinal sectional view, and FIG. 2 is a transverse sectional view. As shown in these drawings, the present heat treatment apparatus 1 is a multi-chamber heat treatment apparatus including a cooling chamber (heat treatment chamber) 2 for cooling the object X and a heating chamber 3 for heating the object X. In addition, an intermediate chamber 4 is provided between the cooling chamber 2 and the heating chamber 3. When the door 5 is closed, the heat treatment apparatus 1 is in a closed state in which the inner space is shut off from the outside.

  FIG. 3A is an enlarged view of the cooling chamber 2, and FIG. 3B is a view taken along the line AA of FIG. The cooling chamber 2 is formed in a substantially cylindrical shape so as to withstand the pressure when the inside of the cooling chamber 2 is in a pressurized state, and the posture is set such that the central axis of the cylindrical shape is horizontal. Have been. On the side surface (cylindrical bottom surface) of the cooling chamber 2, a clutch-type door 5 is installed on one side (the right side in FIGS. 1 and 2), and the other side (the left side in FIGS. 1 and 2). A clamp-type vacuum shield door (intermediate door) 8 is installed at the bottom. Inside the cooling chamber 2, a substantially rectangular parallelepiped air passage chamber 6 long in the center axis direction of the cooling chamber 2 is installed, and a gas flow guide plate 7 a is provided above the air passage chamber 6. A gas flow guide plate 7b is provided below the gas flow guide plate 7b. Then, as shown in FIG. 3B, the outside of the air passage chamber 6 is vertically divided into two by a partition plate 33.

  Side portions 6a and 6b corresponding to the longitudinal direction of the air passage chamber 6 are formed to be detachable from the main body of the air passage chamber 6, the side portion 6a is fixed to the door 5, and the side portion 6b is a vacuum shield. It is fixed to the door 8. When the door 5 and the vacuum shield door 8 are closed, the inside of the air passage chamber 6 becomes a closed space. Grid-shaped rectifying plates 9a and 9b for rectifying and passing the cooling gas Y are formed on the upper wall portion and the lower wall portion of the air passage chamber 6. In addition, a mounting table 10 for mounting the workpiece X is installed inside the air passage chamber 6. The mounting table 10 is formed, for example, in a frame shape so that the cooling gas Y can pass therethrough, and has a free roller 11 for satisfactorily transferring the workpiece X.

  Further, a gas discharge branch pipe 30 shaped so that a cooling gas Y supplied from the outside of the cooling chamber 2 is blown onto the entire processing object X is provided inside the air passage chamber 6. It is installed to surround. Specifically, four gas discharge branch pipes 30 are respectively arranged in the longitudinal direction of the air passage chamber 6. The gas discharge branch pipe 30 is formed with a plurality of gas discharge ports for discharging the cooling gas Y toward the workpiece X, and is connected to the header pipe 34, respectively. The cooling gas Y is supplied to the gas discharge branch pipe 30 via the header pipe 34. When the door 5 and the vacuum shield door 8 are closed, the cooling chamber 2 configured as described above becomes a closed space that is isolated from the outside.

  The door 5, which is a characteristic part of the present heat treatment apparatus 1, is formed in a hollow shape as shown in the drawing, and has therein a heat exchanger 12, a cooling fan 13, and dampers 14a, 14b (for forming gas passages). Device). The outside of the heat exchanger 12 is divided into upper and lower parts by a partition plate (not shown) like the cooling chamber 2, and the partition plate (not shown) stores the heat exchanger 12 in a substantially rectangular parallelepiped heat exchanger housing. A chamber 15 is supported at substantially the center inside the door 5.

  The above-described side surface portion 6 a of the air passage chamber 6 is fixed to one side surface portion of the heat exchanger storage chamber 15. Further, as shown in FIG. 4, gas passage ports 15a to 15c through which the cooling gas Y passes are formed on the other side surface, upper wall, and lower wall of the heat exchanger storage chamber 15, respectively. ing. The heat exchanger 12 cools the cooling gas Y by exchanging heat with water and the cooling gas Y, and is installed so as to be stored inside the heat exchanger storage room 15.

  A gas dispersion section 16 is arranged between the heat exchanger 12 and the heat exchanger storage chamber 15 so as to surround the heat exchanger 12. The gas dispersion unit 16 is for dispersing the cooling gas Y flowing into the heat exchanger storage chamber 15 from the gas passage 15b or the gas passage 15c and flowing the cooling gas Y into the gas dispersion unit 16. It is composed of a punching metal or the like in which a plurality of holes are formed in a metal material.

  The cooling fan 13 is for giving a flow from the heat exchanger 12 to the cooling gas Y that has passed through the gas passage 15a, and between the heat exchanger 12 and the inner peripheral surface of the door 5, that is, the cooling chamber. 2 is disposed so as to be horizontally separated from the side surface of the workpiece X placed on the workpiece 2. The cooling fan 13 is driven by a cooling fan motor 17 (see FIGS. 1 and 2) installed so as to protrude from the door 5.

  The dampers 14a and 14b determine the direction of the gas flow by the cooling fan 13. The damper 14a is installed corresponding to the gas passage 15b and the gas passage 5a, and selectively closes the gas passage 5a (see FIG. 3) or the gas passage 15b formed above the heat exchanger storage chamber 15. Is what you do. On the other hand, the damper 14b is installed in correspondence with the gas passage 15c and the gas passage 5b, and selectively connects the gas passage 5b (see FIG. 3) or the gas passage 15c formed below the heat exchanger storage chamber 15. Is to be closed.

  According to such a configuration, when the damper 14a closes the gas passage 15b and the damper 14b closes the gas passage 5b, the cooling gas Y flows from the cooling fan 13 to the gas passage 5a to the gas. Flow guide plate 7a → rectifying plate 9a → substrate X → rectifying plate 9b → gas flow guiding plate 7b → gas passage 15c → heat exchanger 12 → gas passage 15a → cooling fan 13. When the damper 14a closes the gas passage 5a and the damper 14b closes the gas passage 15c, the cooling gas Y flows from the cooling fan 13 → the gas passage 5b → the gas flow guide plate 7b → rectification. It flows in the order of the plate 9b → the object X → the straightening plate 9a → the gas flow guide plate 7a → the gas passage 15b → the heat exchanger 12 → the gas passage 15a → the cooling fan 13. That is, a predetermined gas flow is formed by selectively closing the gas passage ports 15b, 15c, 5a, 5b by the dampers 14a, 14b.

  The door 5 is supported by support legs 28, and the support legs 28 are fixed to a slide device 29 installed on the ground. When the slide device 29 is driven, the door 5 approaches or separates from the cooling chamber 2 in the horizontal direction as illustrated. By adopting such a slide device 29, the door 5 can be easily opened and closed. The mechanism for easily opening and closing the door 5 is not limited to the slide device 29 but may be, for example, a hinge device.

  Returning to the description of FIGS. 1 and 2, the heating chamber 3 is set to have a substantially cylindrical shape similarly to the cooling chamber 2, and is arranged to face the cooling chamber 2 as illustrated. In addition, the processing object X is transferred by transferring the tray T on which the processing object X is placed inside the heat treatment apparatus 1 into the transfer rod storage chamber 18 connected to the heating chamber 3. Rod 19 is provided.

  Inside the heating chamber 3, a heat insulating chamber 20 having a substantially rectangular shape is provided. A heat insulating door 21 is provided on a side surface 20a on one side (a side facing the cooling chamber 2) of the heat insulating chamber 20, and a transfer rod 19 serving as an entrance and exit of the transfer rod 19 is provided on the other side surface 20b. A door 22 is provided. The opening and closing of the transport rod door 22 is regulated by an elevating unit 26 installed so as to protrude from the outer wall of the heating chamber 3. The transfer rod door 22 is also heat-insulated in the same manner as the heat-insulating door 21. A mounting table 23 for mounting the workpiece X is installed inside the heat insulating chamber 20. The mounting table 23 is formed, for example, in a frame shape so that the processing target X is uniformly heated, and is provided with a free roller 24 for favorably transferring the processing target X. The mounting table 23 installed in the heat insulation chamber 20 and the mounting table 10 installed in the air path chamber 6 are arranged at the same height. Further, a plurality of heaters 25 for heating the workpiece X are provided inside the heat insulating chamber 20.

  The intermediate chamber 4 has a hollow substantially square shape and is arranged between the cooling chamber 2 and the heating chamber 3. At the upper part thereof, a shield door elevating unit 26 for elevating and lowering the vacuum shield door 8 and a heat insulating door elevating unit 27 for elevating and lowering the heat insulating door 21 are provided.

  Further, outside the cooling chamber 2, the heating chamber 3, and the intermediate chamber 4, a pressurized gas supply device 31 and a decompression device 32 are provided. The pressurized gas supply device 31 supplies the cooling gas Y to the inside of the cooling chamber 2 via the header tube 30. Further, the decompression device 32 serves to evacuate the inside of the heat treatment chamber, and is connected to the cooling chamber 2 and the intermediate chamber 4 respectively.

  Next, the operation of the heat treatment apparatus thus configured according to the present invention will be described.

  First, in a state where the door 5 is separated from the cooling chamber 2 by the slide device 29, the processing target X placed on the tray T is placed on the placing table 10 inside the air path chamber 6. Then, the door 5 is brought into contact with the cooling chamber 2 by the slide device 29, and the cooling chamber 2 is sealed. Then, the cooling chamber 2, the heating chamber 3, and the intermediate chamber 4 are evacuated by driving the pressure reducing device 32. The transport rod door 22, the vacuum shield door 8, and the heat insulating door 21 are opened by driving the elevating unit 26, the elevating unit 26 for the vacuum shield door, and the elevating unit 27 for the heat insulating door.

  Here, the workpiece X is transferred from the mounting table 10 inside the air passage chamber 6 to the mounting table 23 inside the heat insulating chamber 20 by the tray T being engaged with the tip of the transport rod 19 and being pulled. You. Then, the elevating unit 26 and the insulated door elevating unit 27 are driven again to close the transport rod door 22 and the insulated door 21. Then, in this state, the processing target X is heated by the heater 25. When the heating of the processing object X is completed, the transport rod door 22 and the heat insulating door 21 are opened, and the processing object X is transferred to the mounting table 10 inside the air path chamber 6 by the transport rod 19 again. Then, when the workpiece X is transferred to the mounting table 10 in the air passage chamber 6, the vacuum shield door 8 is closed.

  Then, as shown in FIG. 3 (b), the cooling gas Y pressurized from the pressurized gas supply device 31 is supplied to the gas discharge branch pipe 30 via the header pipe 34, and further, from the gas discharge branch pipe 30. It is sprayed uniformly over the entire processing object X through the gas discharge port. Therefore, the cooling gas Y supplied from the pressurized gas supply device 31 is not simply supplied to the cooling chamber 2 but is sprayed on the entire processing object X, thereby uniformly processing the processing object X. Cooled. That is, the cooling gas Y can be effectively used. By supplying the cooling gas Y to the cooling chamber 2 from the pressurized gas supply device 31 in this manner, the inside of the cooling chamber 2 is pressurized to, for example, 900 kPa to 5 MPa.

  The direction of flow of the cooling gas Y is changed by changing the gas passage ports 15b, 15c, 5a, 5b which are closed every predetermined time by the dampers 14a, 14b, thereby uniformly cooling the workpiece X. Here, when the damper 14a closes the gas passage 15b and the damper 14b closes the gas passage 5b, the cooling gas Y is given a flow by the cooling fan 13 as shown in FIG. The gas flows toward the gas flow guide plate 7a through the passage opening 5a. Then, the cooling gas Y is gently converted by the gas flow guide plate 7a into a downward flow from above, and is then made uniform by the rectifying plate 9a to move toward the workpiece X.

  The cooling gas Y evenly flown by the rectifying plate 9a uniformly cools the upper portion of the processing object X by uniformly hitting the processing object X from above, and further passes through the loading table 10 and the rectifying plate 9b to generate gas. Head to the flow guide plate 7b. Then, the cooling gas Y is gently converted into a horizontal flow by the gas flow guide plate 7b, and passes through the gas passage 15c toward the heat exchanger 12. Thereafter, the cooling gas Y is cooled by the heat exchanger 12, passes through the gas passage 15a, and is given a flow again by the cooling fan 13. Note that the heat exchanger 12 is surrounded by the gas dispersion unit 16. For this reason, a pressure loss occurs in the flow of the cooling gas Y, and the cooling gas Y spreads over the entire heat exchanger 12, so that the cooling gas Y can be efficiently cooled by the heat exchanger 12.

  On the other hand, when the damper 14a closes the gas passage 5a and the damper 14b closes the gas passage 15c, the cooling gas Y is given a flow by the cooling fan 13 and passes through the gas passage 5b. It flows toward the flow guide plate 7b. Then, the cooling gas Y is gently converted by the gas flow guide plate 7b into a flow that flows upward from below, and is then made uniform by the rectifying plate 9b to travel toward the workpiece X.

  The cooling gas Y evenly flown by the rectifying plate 9b passes through the mounting table 10 and evenly hits the object X from below, thereby uniformly cooling the lower part of the object X and further passing through the rectifying plate 9a. To the gas flow guide plate 7a. Then, the cooling gas Y is gently converted into a horizontal flow by the gas flow guide plate 7a, and passes through the gas passage 15b toward the heat exchanger 12. Thereafter, the cooling gas Y is cooled by the heat exchanger 12, passes through the gas passage 15a, and is given a flow again by the cooling fan 13.

  When the object X is cooled to a predetermined temperature, the door 5 is detached from the cooling chamber 2 and the object X is carried out.

  Thus, according to the present heat treatment apparatus 1, the cooling fan 13 is provided on the door 5. For this reason, the diameter of the cooling chamber 2 can be reduced, so that the workpiece X can be uniformly cooled. Further, since the flow of the cooling gas Y is gently converted by the gas flow guide plates 7a and 7b, the pressure loss is suppressed, and as a result, the cooling fan 13 having a small output can be used, so that the cost can be reduced. It becomes.

  FIG. 5 is a diagram schematically showing the entire heat treatment apparatus 20 having a plurality of heat treatment chambers. The heat treatment apparatus 20 shown in FIG. 5 includes, in addition to the cooling chamber 2 described above, a plurality of carburizing chambers 21 to 24 for performing a carburizing process on the workpiece X and a preparation chamber 29. The processing chambers 21 to 24, the cooling chamber 2 and the preparation chamber 29 are connected to the transfer chamber 27, respectively. The transfer chamber 27 is provided with a mechanism (not shown) for transferring the workpiece X to each chamber. In the heat treatment apparatus 20 shown in FIG. 5, a door 28 for loading the treatment object X into the heat treatment apparatus 20 or carrying out the treatment object X from the heat treatment apparatus 20 is provided. Further, in the cooling chamber 2, an inspection door 26 used for inspection of the inside of the cooling chamber 2 is provided at an end opposite to the transfer chamber 27, and the vacuum shield door 8 ( (See FIG. 1). The cooling fan 13 and the like (see FIG. 1) are installed on the inspection door 26. As described above, even when the door 26 provided at the end of the cooling chamber 2 is not a door used to carry in / out the workpiece X into / from the cooling chamber 2, the inspection door 26 is cooled. By providing the fan 13 and the like, the heat treatment apparatus 20 shown in FIG. 5 has the same effect as the heat treatment apparatus 1 shown in FIGS.

  In the high-pressure chamber such as the cooling chamber 2 shown in the present embodiment, a periodic check is required, so that a door for loading / unloading the workpiece X in the cooling chamber is not provided. Even if there is, a door for inspection is generally installed. Therefore, by installing the cooling fan 13 or the like on such an inspection door, the size of the cooling chamber can be reduced by reducing the radial dimension of the cooling chamber, and the smooth flow of gas in the cooling chamber can be realized. Can be uniformly heat-treated. Further, by reducing the pressure loss of the gas for performing the cooling process on the workpiece X, a high-performance fan is not required, and the apparatus cost and the operating cost can be reduced.

In addition to the heat treatment apparatus 20 shown in FIG. 5, for example, the form of the heat treatment apparatus in which the inspection door is installed in the cooling chamber instead of the door for carrying in / out the workpiece X is, for example, There is a multi-chamber type heat treatment apparatus or the like in which a cooling chamber, a plurality of heating chambers, a preparation chamber, and the like are arranged around an oil tank in which a cooling oil for oil-cooling the processing object X is stored. Also, in a straight type heat treatment apparatus in which a preparation room, a plurality of heating rooms, and a cooling room are arranged in series, an inspection door is provided in the cooling room.
FIG. 6 is a cross-sectional view of a heat treatment apparatus in which an inspection door is provided in a cooling chamber and has a form different from that of the heat treatment apparatus shown in FIG. As shown in this figure, the present heat treatment apparatus includes a heating chamber exit door 40 and a furnace disposed opposite to the heating chamber exit door 40 in an intermediate chamber 4 between the heating chamber 3 and the cooling chamber 2. And an external extraction door 41, and a cooling chamber intermediate door 42 on the other wall surface (the surface on the right side of the drawing) of the intermediate chamber 4. In the case of such a heat treatment apparatus, first, the workpiece X processed in the heating chamber 3 is transported to the cooling chamber 2 via the intermediate chamber 4 and returned to the intermediate chamber 4 after the cooling of the workpiece X is completed. May be extracted outside the furnace. Also in this case, the door 26 installed in the cooling chamber 2 is used not for the purpose of carrying in and extracting the workpiece X but for checking the inside of the cooling chamber 2. Therefore, also in the heat treatment apparatus shown in FIG. 6, by installing the cooling fan 13 and the like on the door 26, the same effect as the heat treatment apparatus 1 shown in FIGS.

Note that the present invention is not limited to the above embodiment, and for example, the following modified examples can be considered.
(1) In the above embodiment, the cooling gas Y is applied to the workpiece X from above and below. However, the cooling gas Y may be applied to the workpiece X from the left and right directions by rotating the configuration of the cooling chamber 2 and the door 5 in the above embodiment by 90 ° with respect to each central axis. . In addition, a configuration in which the cooling gas Y is selectively applied to the workpiece X from the upper, lower, left, and right directions by a combination of these may be adopted.

(2) In the above embodiment, the present heat treatment apparatus 1 includes two heat treatment chambers of the cooling chamber 2 and the heating chamber 3. However, the present invention is not limited to this, and a plurality of heat treatment chambers may be further provided. The present invention can also be applied to a single-chamber heat treatment apparatus in which heating and cooling are performed by one heat treatment chamber.

(3) In the above-described embodiment, the door 5 is moved toward or away from the cooling chamber 2 in the horizontal direction by driving the slide device 29. However, the present invention is not limited to this, and for example, a sliding device that slides the door 5 up and down so as to approach or separate from the cooling chamber 2 may be installed.

(4) In the above embodiment, the cooling gas Y was circulated in the order of the cooling fan 13, the workpiece X, and the heat exchanger 12. However, the cooling fan 13, the heat exchanger 12, and the workpiece X may be circulated in this order. In this case, for example, the cooling fan 13 is installed so that the cooling gas Y can flow in the opposite direction to the above-described embodiment, and the cooling gas Y sent from the cooling fan 13 is dispersed and flows into the heat exchanger 12. What is necessary is just to form the gas dispersion part 16 so that it may be performed.

It is a schematic diagram of a longitudinal section of heat treatment equipment 1 concerning one embodiment of the present invention. It is a schematic diagram of a transverse section of heat treatment equipment 1 concerning one embodiment of the present invention. (A) is an enlarged view of the cooling chamber 2 according to one embodiment of the present invention, and (b) is a view taken along the line AA of (a). FIG. 2 is an enlarged view around a heat exchanger 12 according to an embodiment of the present invention. It is the figure which showed typically the whole heat processing apparatus 20 which has several heat processing chambers. FIG. 6 is a cross-sectional view of a heat treatment device having a form different from the heat treatment device shown in FIG. 5.

Explanation of reference numerals

1, 20 heat treatment equipment 2 cooling room (heat treatment room)
3 ... heating room 5 ... door 12 ... heat exchanger 13 ... cooling fan (fan)
14a, 14b Damper 29 Slide device 30 Gas discharge branch pipe X Workpiece Y Cooling gas (gas)

Claims (8)

A heat treatment chamber for performing heat treatment on the object to be processed and having a door,
A heat treatment apparatus, wherein a fan for cooling the workpiece is provided on the door. 2. The heat treatment apparatus according to claim 1, wherein the door is a door used to load or unload the workpiece into or out of the heat treatment chamber, or to inspect the inside of the heat treatment chamber. 3. The heat treatment apparatus according to claim 1, further comprising a gas flow path forming device for circulating a gas flow formed by the fan through a predetermined path. The heat exchanger according to any one of claims 1 to 3, further comprising: a heat exchanger that exchanges heat between the gas given by the fan and a refrigerant introduced into the heat treatment chamber from outside the heat treatment chamber. Heat treatment equipment. The heat exchanger is installed between the workpiece and the fan, and the gas flow is circulated in the order of a fan, a workpiece, and a heat exchanger or a fan, a heat exchanger, and a workpiece. The heat treatment apparatus according to claim 4, wherein the heat treatment is performed. The heat treatment apparatus according to claim 4, wherein a gas dispersion unit that sends the gas to the heat exchanger in a state where the gas is dispersed is provided on a gas inflow surface of the heat exchanger. The heat treatment apparatus according to any one of claims 1 to 6, wherein the door includes a slide device for moving closer to or away from the heat treatment chamber. The gas is blown onto the entire object through a gas discharge branch when the gas is supplied from outside the heat treatment chamber to the inside of the heat treatment chamber. A heat treatment apparatus according to any one of the above.

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