JP5201127B2 - Heat treatment equipment - Google Patents

Description

  The present invention relates to a heat treatment apparatus for performing heat treatment on an object to be processed.

  One of heat treatment apparatuses that perform processing such as so-called quenching by heating and cooling a metal material that is an object to be processed is a multi-chamber heat treatment apparatus that includes a plurality of heat treatment chambers. And a cooling chamber for cooling the object to be processed. In general, as a method of cooling an object to be processed, an oil cooling method in which the object to be processed is cooled by immersing the object in cooling oil and a high pressure in which a cooling gas is sprayed on the object to be processed after being cooled and then cooled. There is a gas cooling method. According to the oil cooling method, after cooling, the cooling oil adheres to the object to be treated, so the cooling oil must be dropped by washing or the like. This increases the number of processing steps for the object to be processed, resulting in problems such as an increase in the size of the apparatus and an increase in cost.

Therefore, in recent years, high-pressure gas cooling methods have attracted attention. According to this high-pressure gas cooling method, it is possible to cool the object to be processed in a cooling time close to that of the oil cooling method, and there is no adhesion of cooling oil, so that the cooled object to be processed can be immediately carried out of the apparatus. A cooling chamber for carrying out this high-pressure gas cooling method is formed using a hollow cylindrical material in order to have a structure that can withstand high pressure, and is provided with a door for carrying an object to be processed. Then, a cooling gas is circulated in the inside of the cooling chamber, and a fan applied to the countermeasure and a heat exchanger for cooling the cooling gas are respectively installed on the inner peripheral surface of the cooling chamber.

Japanese Patent No. 2731127 Yoshiya Nakatani, “The latest heat treatment (Vol. 35, No. 2) pressure-cooled vacuum furnace”, April 1995, p.124-128

  However, as described above, in the conventional multi-chamber heat treatment apparatus, the fan and the heat exchanger for circulating the cooling gas are installed on the inner peripheral surface of the cooling chamber, and the interference with the object to be processed is avoided. In order to avoid this, it is necessary to increase the size of the cooling chamber in the radial direction, resulting in an increase in the size of the apparatus. In addition, since a fan or the like is installed on the inner peripheral surface of the cooling chamber, there are many restrictions on the gas flow path, the gas flow is likely to be uneven, and a flow that uniformly cools the workpiece is cooled. The problem that it is difficult to give to the problem arises. In addition, since the flow of the cooling gas is not smooth, the pressure loss of the cooling gas becomes large, and there is a problem that a sufficient flow rate cannot be given to the cooling gas without using a fan having a large output. For example, a technique of arranging a fan and a heat exchanger outside the cooling chamber and flowing cooling gas into the cooling chamber through the duct is also conceivable, but in this case, the duct needs to be designed to withstand pressure in the same manner as the cooling chamber. There are disadvantages in terms of cost.

The present invention has been made in view of the above-described problems, and has the following objects.
(1) The apparatus is miniaturized by reducing the radial dimension of the heat treatment chamber, and the object to be treated is uniformly heat treated by ensuring a smooth flow of gas in the heat treatment chamber.
(2) By reducing the pressure loss of the gas to be heat-treated on the workpiece, a high-performance fan is not required, and the apparatus cost and operation cost are reduced.

To achieve the above object, the present invention, as a first means, a heat treatment apparatus having a heat treatment chamber having performed and door to a heat treatment treatment object, the gas flow is given the flow to the gas A gas discharge that cools the workpiece by forming and blows the gas to the entire workpiece when the gas is supplied from the outside of the heat treatment chamber to the inside of the heat treatment chamber. A configuration including a branch pipe is employed.
As a second means, in the first means, the door, adopts a construction in which a door to be used in order to carry in or out the object to be treated to a heat treatment chamber.
As a third means, a configuration is adopted in which the first or second means includes a gas flow path forming device for circulating the gas flow formed by the fan through a predetermined path.
As a fourth means, in any one of the first to third means, heat exchange for exchanging heat between the gas supplied by the fan and the refrigerant guided from the outside of the heat treatment chamber to the inside of the heat treatment chamber. Adopting a configuration with a vessel.
As a fifth means, in the fourth means, the heat exchanger is installed between the object to be processed and the fan, and the gas flow is in the order of fan, object to be processed, heat exchanger or A configuration in which the fan, the heat exchanger, and the workpiece are circulated in this order is adopted.
As a sixth means, in any one of the first to fifth means, a configuration is adopted in which the door includes a slide device for approaching or separating from the heat treatment chamber .

  It becomes possible to heat-treat a to-be-processed object uniformly. Moreover, it becomes possible to reduce apparatus cost and operation cost.

It is the schematic of the longitudinal cross-section of the heat processing apparatus 1 which concerns on one Embodiment of this invention. It is the schematic of the cross section of the heat processing apparatus 1 which concerns on one Embodiment of this invention. (A) is an enlarged view of the cooling chamber 2 which concerns on one Embodiment of this invention, (b) is an AA arrow line view of (a). It is an enlarged view of the heat exchanger 12 periphery which concerns on one Embodiment of this invention. Is a diagram schematically showing the whole of the heat treatment device 1 20 having a plurality of heat treatment chambers. It is a cross-sectional view of the heat treatment apparatus which has a different form from the heat processing apparatus shown in FIG.

  Hereinafter, an embodiment of a heat treatment apparatus according to the present invention will be described with reference to the drawings. 1 and 2 are schematic views of the overall configuration of a heat treatment apparatus 1 according to the present embodiment. FIG. 1 is a longitudinal sectional view, and FIG. 2 is a transverse sectional view. As shown in these drawings, the heat treatment apparatus 1 is a multi-chamber heat treatment apparatus including a cooling chamber (heat treatment chamber) 2 for cooling the workpiece X and a heating chamber 3 for heating the workpiece X. In addition, an intermediate chamber 4 is provided between the cooling chamber 2 and the heating chamber 3. When the door 5 is closed, the heat treatment apparatus 1 is in a sealed state in which the inner space is blocked from the outside.

  (A) of FIG. 3 is an enlarged view of the cooling chamber 2, and (b) is an AA arrow view of (a). The cooling chamber 2 is formed in a substantially cylindrical shape so that it can withstand the pressure when the inside of the cooling chamber 2 is in a pressurized state, and the posture is set so that the central axis of the cylindrical shape is horizontal. Has been. A clutch-type door 5 is installed on one side (the right side in FIGS. 1 and 2) on the side surface (cylindrical bottom surface) of the cooling chamber 2, and the other side (the left side in FIGS. 1 and 2). A clamp-type vacuum shield door (intermediate door) 8 is installed in the door. Inside the cooling chamber 2, a substantially rectangular parallelepiped air passage chamber 6 that is long in the direction of the central axis of the cooling chamber 2 is installed. A gas flow guide plate 7 a is disposed above the air passage chamber 6. A gas flow guide plate 7b is installed below the gas flow guide plate 7b. And as shown in FIG.3 (b), the outer side of the air channel chamber 6 is divided into 2 up and down by the partition plate 33. As shown in FIG.

  Side portions 6a and 6b corresponding to the longitudinal direction of the air passage chamber 6 are formed to be detachable from the main body of the air passage chamber 6, the side portion 6a is fixed to the door 5, and the side portion 6b is a vacuum shield. It is fixed to the door 8. When the door 5 and the vacuum shield door 8 are closed, the interior of the air passage chamber 6 becomes a closed space. On the upper wall portion and the lower wall portion of the air passage chamber 6, lattice-like rectifying plates 9a and 9b that rectify and pass the cooling gas Y are formed. In addition to this, a mounting table 10 for mounting the workpiece X is installed inside the air passage chamber 6. The mounting table 10 is formed, for example, in a frame shape so that the cooling gas Y can pass therethrough, and a free roller 11 for favorably transferring the workpiece X is installed.

  Further, inside the air passage chamber 6, there is a gas discharge branch pipe 30 whose shape is set so that the cooling gas Y supplied from the outside of the cooling chamber 2 is blown over the entire workpiece X. It is installed to surround. Specifically, four gas discharge branch pipes 30 are arranged in the longitudinal direction of the air passage chamber 6. The gas discharge branch pipe 30 is formed with a plurality of gas discharge ports through which the cooling gas Y is discharged toward the workpiece X, and is connected to the header pipe 34. In the gas discharge branch pipe 30, the cooling gas Y is supplied to the gas discharge branch pipe 30 through the header pipe 34. The cooling chamber 2 configured in this manner is a sealed space that is blocked from the outside when the door 5 and the vacuum shield door 8 are closed.

As shown in the drawing, the door 5 which is a characteristic part of the heat treatment apparatus 1 is hollow and has a heat exchanger 12, a cooling fan 13, and dampers 14a and 14b (gas flow path formation). Device). Outside of the heat exchanger 12 is likewise partition plate and the cooling chamber 2 are divided into two upper and lower (not shown), a substantially rectangular-shaped heat exchanger price for storing heat exchanger 12 by the partition plate A storage room 15 is supported substantially at the center inside the door 5.

  The above-described side surface portion 6 a of the air passage chamber 6 is fixed to one side surface portion of the heat exchanger storage chamber 15. Further, as shown in FIG. 4, gas passage ports 15 a to 15 c through which the cooling gas Y passes are formed in the other side surface portion, upper wall portion, and lower wall portion of the heat exchanger storage chamber 15. ing. The heat exchanger 12 cools the cooling gas Y by exchanging heat between the water and the cooling gas Y, and is installed so as to be stored in the heat exchanger storage chamber 15.

  A gas dispersion unit 16 is disposed between the heat exchanger 12 and the heat exchanger storage chamber 15 so as to surround the heat exchanger 12. This gas dispersion part 16 disperses the cooling gas Y that has flowed into the heat exchanger storage chamber 15 from the gas passage port 15b or the gas passage hole 15c and flows it into the gas dispersion part 16, for example, It is comprised with the punching metal etc. which formed the several hole in the metal material.

  The cooling fan 13 is for giving a flow to the cooling gas Y that has passed through the gas passage port 15a from the heat exchanger 12, and between the heat exchanger 12 and the inner peripheral surface of the door 5, that is, a cooling chamber. It arrange | positions so that it may space apart in the horizontal direction from the side surface of the to-be-processed object X mounted in 2. FIG. The cooling fan 13 is driven by a cooling fan motor 17 (see FIGS. 1 and 2) installed so as to protrude from the door 5.

  The dampers 14a and 14b determine the direction of gas flow by the cooling fan 13. The damper 14a is installed corresponding to the gas passage 15b and the gas passage 5a, and selectively closes the gas passage 5a (see FIG. 3) or the gas passage 15b formed above the heat exchanger storage chamber 15. To do. On the other hand, the damper 14b is installed corresponding to the gas passage port 15c and the gas passage port 5b, and selectively selects the gas passage port 5b (see FIG. 3) or the gas passage port 15c formed below the heat exchanger storage chamber 15. It will be closed.

  According to such a configuration, when the damper 14a closes the gas passage port 15b and the damper 14b closes the gas passage port 5b, the cooling gas Y is supplied to the cooling fan 13 → the gas passage port 5a → the gas. The flow flows in the order of flow guide plate 7a → rectifying plate 9a → processing object X → rectifying plate 9b → gas flow guiding plate 7b → gas passage port 15c → heat exchanger 12 → gas passage port 15a → cooling fan 13. When the damper 14a closes the gas passage port 5a and the damper 14b closes the gas passage port 15c, the cooling gas Y is supplied from the cooling fan 13 → the gas passage port 5b → the gas flow guide plate 7b → rectified. It flows in the order of plate 9b → processing object X → rectifying plate 9a → gas flow guide plate 7a → gas passage port 15b → heat exchanger 12 → gas passage port 15a → cooling fan 13. That is, a predetermined gas flow is formed by selectively closing the gas passage openings 15b, 15c, 5a, 5b by the dampers 14a, 14b.

  The door 5 is supported by a support leg 28, and the support leg 28 is fixed to a slide device 29 installed on the ground. When the slide device 29 is driven, the door 5 approaches or separates in the horizontal direction with respect to the cooling chamber 2 as illustrated. By employing such a slide device 29, the door 5 can be easily opened and closed. Note that the mechanism for easily opening and closing the door 5 is not limited to the slide device 29, and may be, for example, a hinge device or the like.

  Returning to the description of FIG. 1 and FIG. 2 again, the heating chamber 3 is formed in a substantially cylindrical shape like the cooling chamber 2, and is disposed opposite to the cooling chamber 2 as shown in the figure. In addition, in the inside of the transfer rod storage chamber 18 connected to the heating chamber 3, the workpiece X is transferred by transferring the tray T on which the workpiece X is placed in the heat treatment apparatus 1. A conveying rod 19 is installed.

Inside the heating chamber 3, a heat insulating chamber 20 having a substantially rectangular shape is installed. A heat insulating door 21 is installed on the side surface portion 20a on one side (the side facing the cooling chamber 2) of the heat insulating chamber 20, and the side surface portion 20b on the other side is for a conveying rod serving as an entrance / exit of the conveying rod 19. A door 22 is installed. Opening and closing of the transport bar door 22 is regulated by an elevating part 35 installed so as to protrude from the outer wall of the heating chamber 3. The transport bar door 22 is also heat-insulated similarly to the heat-insulating door 21. Inside the heat insulation chamber 20, a placing table 23 for placing the workpiece X is installed. The mounting table 23 is formed, for example, in a frame shape so that the workpiece X is uniformly heated, and a free roller 24 is provided for favorably transferring the workpiece X. In addition, the mounting table 23 installed in the heat insulation chamber 20 and the mounting table 10 installed in the air channel chamber 6 are arranged at the same height. A plurality of heaters 25 for heating the workpiece X are installed inside the heat insulation chamber 20.

The intermediate chamber 4 is set in a hollow, substantially rectangular shape, and is disposed between the cooling chamber 2 and the heating chamber 3. In the upper part, a vacuum shield door elevating part 26 for elevating the vacuum shield door 8 and a heat insulating door elevating part 27 for elevating the heat insulating door 21 are installed.

A pressurized gas supply device 31 and a decompression device 32 are installed outside the cooling chamber 2, the heating chamber 3, and the intermediate chamber 4. The pressurized gas supply device 31 supplies the cooling gas Y into the cooling chamber 2 via the header pipe 34 and the gas discharge branch pipe 30. The decompression device 32 is for evacuating the inside of the heat treatment chamber, and is connected to the cooling chamber 2 and the intermediate chamber 4 respectively.

  Next, the operation of the heat treatment apparatus according to the present invention configured as described above will be described.

First, the workpiece X placed on the tray T is placed on the placing table 10 inside the air passage chamber 6 in a state where the door 5 is separated from the cooling chamber 2 by the slide device 29. Then, the door 5 is brought into contact with the cooling chamber 2 by the slide device 29, and the cooling chamber 2 is sealed. The cooling chamber 2, the heating chamber 3, and the intermediate chamber 4 are evacuated by driving the decompression device 32. Then, the lifting / lowering unit 35 , the vacuum shield door lifting / lowering unit 26, and the heat insulating door lifting / lowering unit 27 are driven to open the transport bar door 22, the vacuum shield door 8, and the heat insulating door 21.

Here, the workpiece T is transferred from the mounting table 10 inside the air passage chamber 6 onto the mounting table 23 inside the heat insulation chamber 20 by pulling the tray T engaged with the tip of the transport rod 19. The Then, the conveying rod door 22 and the heat insulating door 21 is closed by driving the elevating unit 35 and the thermal insulation door for elevator unit 27 again. In this state, the workpiece X is heated by the heater 25. When the heating of the workpiece X is completed, the transport rod door 22 and the heat insulating door 21 are opened, and the workpiece X is transferred again to the mounting table 10 inside the air passage chamber 6 by the transport rod 19. And if the to-be-processed object X is transferred to the mounting base 10 of the air channel chamber 6, the vacuum shield door 8 will be sealed.

  Then, as shown in FIG. 3B, the cooling gas Y pressurized from the pressurized gas supply device 31 is supplied to the gas discharge branch pipe 30 via the header pipe 34, and further from the gas discharge branch pipe 30. The whole object to be processed X is sprayed uniformly through the gas discharge port. Therefore, the cooling gas Y supplied from the pressurized gas supply device 31 is not just supplied to the cooling chamber 2 but is sprayed on the entire workpiece X, so that the workpiece X is made uniform. To be cooled. That is, the cooling gas Y can be used effectively. Thus, by supplying the cooling gas Y from the pressurized gas supply device 31 to the cooling chamber 2, the inside of the cooling chamber 2 is pressurized to, for example, 900 kPa to 5 MPa.

Then, by changing the gas passage ports 15b, 15c, 5a, 5b that the dampers 14a, 14b close every predetermined time, the direction in which the cooling gas Y flows is changed to uniformly cool the workpiece X. Here, when the damper 14a closes the gas passage port 15b and the damper 14b closes the gas passage port 5b , the cooling gas Y is given a flow by the cooling fan 13, and the gas passage port 5a (FIG. 3 ( a), and flows toward the gas flow guide plate 7a. Then, the cooling gas Y is gently converted into a flow from the upper side to the lower side by the gas flow guide plate 7a, and then is uniformly flowed by the rectifying plate 9a and goes to the workpiece X.

The cooling gas Y that has been evenly flowed by the rectifying plate 9a is uniformly applied to the workpiece X from above to uniformly cool the upper portion of the workpiece X, and further passes through the mounting table 10 and the rectifying plate 9b to form a gas. Head to the flow guide plate 7b. Then, the cooling gas Y is gradually converted into a horizontal flow by the gas flow guide plate 7b, passes through the gas passage port 15c, and travels toward the heat exchanger 12. Then it cooled gas Y passes through the gas passage openings 15a from being cooled by the heat exchanger 12, again, given the flow by the cooling fan 13. The heat exchanger 12 is surrounded by the gas dispersion unit 16. For this reason, pressure loss occurs in the flow of the cooling gas Y, and the cooling gas Y reaches the entire heat exchanger 12, so that the cooling gas Y can be efficiently cooled by the heat exchanger 12.

  On the other hand, when the damper 14a closes the gas passage 5a and the damper 14b closes the gas passage 15c, the cooling gas Y is given a flow by the cooling fan 13 and passes through the gas passage 5b. It flows toward the flow guide plate 7b. Then, the cooling gas Y is gently converted into a flow from the lower side to the upper side by the gas flow guide plate 7b, and thereafter, the cooling gas Y is evenly flowed by the rectifying plate 9b and goes to the workpiece X.

The cooling gas Y that has been evenly flowed by the rectifying plate 9b passes through the mounting table 10 and is uniformly applied to the workpiece X from below to uniformly cool the lower portion of the workpiece X, and further passes through the rectifying plate 9a. Then, it goes to the gas flow guide plate 7a. Then, the cooling gas Y is gently converted into a horizontal flow by the gas flow guide plate 7a, passes through the gas passage port 15b, and travels toward the heat exchanger 12. Then it cooled gas Y passes through the gas passage openings 15a from being cooled by the heat exchanger 12, again, given the flow by the cooling fan 13.

  When the workpiece X is cooled to a predetermined temperature, the door 5 is detached from the cooling chamber 2 and the workpiece X is carried out to the outside.

  As described above, according to the heat treatment apparatus 1, the cooling fan 13 is installed on the door 5. For this reason, since the diameter of the cooling chamber 2 can be made small, it becomes possible to cool the to-be-processed object X uniformly. Further, since the flow of the cooling gas Y is gently converted by the gas flow guide plates 7a and 7b, the pressure loss is suppressed, and as a result, the cooling fan 13 with a small output can be used, so that the cost can be reduced. It becomes.

Figure 5 is a diagram schematically showing the whole of the heat treatment device 1 20 further comprising a plurality of heat treatment chambers. FIG 5 in the heat treatment apparatus 1 20 shown, in addition to the cooling chamber 2 above, includes a plurality of carburizing chamber 1 21-1 24 and preparation chamber 1 29 to perform the carburizing treatment with respect to the object to be treated X these carburizing chamber 1 21-1 24, the cooling chamber 2 and the preparatory chamber 1 29 is connected respectively to the transfer chamber 1 27. The transfer chamber 1 27, a mechanism for transporting an object to be processed X (not shown) is provided in each room. Then, in the heat treatment device 1 20 shown in Figure 5, the door 1 28 for unloading an object to be processed X processing object X from the loading or heat treatment apparatus 1 20 is installed in the heat treatment apparatus 1 20. Further, the cooling chamber 2, inspection doors 1 26 used in the case of the cooling chamber 2 inside the inspection is provided on the end portion of the transfer chamber 1 27 and the opposite side, the vacuum shield the transfer chamber 1 27 side An intermediate chamber 4 having a door 8 (see FIG. 1) is provided. The cooling fan 13 or the like (see FIG. 1) is installed in the inspection door 1 26. Thus, even if the inspection door 1 26 provided at the end of the cooling chamber 2 is not a door used for loading and unloading the object to be treated X into the cooling chamber 2, inspection door by installing the cooling fan 13 or the like 1 26, the heat treatment apparatus 1 20 shown in FIG. 5, the same effect as the heat treatment apparatus 1 shown in FIGS.

  In addition, since a high-pressure chamber such as the cooling chamber 2 shown in the present embodiment is required to be periodically inspected, a door for carrying in / out the workpiece X is not installed in the cooling chamber. Even if it exists, the case where the door for inspection is installed is common. Therefore, by installing the cooling fan 13 or the like on such a door for inspection, the size of the cooling chamber can be reduced, thereby reducing the size of the device and smoothing the gas flow in the cooling chamber. By ensuring this, the workpiece X can be uniformly heat-treated. Further, by reducing the pressure loss of the gas for subjecting the workpiece X to the cooling process, a high-performance fan is unnecessary, and the apparatus cost and the operating cost can be reduced.

Also, instead of a door for loading and unloading an object to be processed X, in the form of a heat treatment apparatus door for inspection is placed in the cooling chamber, in addition to the heat treatment apparatus 1 20 shown in FIG. 5, for example, There is a multi-chamber heat treatment apparatus in which a cooling chamber, a plurality of heating chambers, a preparation chamber, and the like are disposed surrounding an oil tank in which cooling oil for cooling the workpiece X is cooled. Further, in a straight heat treatment apparatus in which a preparation chamber, a plurality of heating chambers, and a cooling chamber are arranged in series, an inspection door is installed in the cooling chamber.
FIG. 6 is a cross-sectional view of a heat treatment apparatus in which an inspection door is installed in a cooling chamber and has a different form from the heat treatment apparatus shown in FIG. As shown in this figure, the present heat treatment apparatus has a heating chamber outlet door 40 and a furnace disposed opposite to the heating chamber outlet door 40 in an intermediate chamber 4 between the heating chamber 3 and the cooling chamber 2. The outer extraction door 41 is provided, and the cooling chamber intermediate door 42 is provided on the other wall surface (the right side surface of the drawing) of the intermediate chamber 4. In the case of such a heat treatment apparatus, first, the workpiece X processed in the heating chamber 3 is transferred to the cooling chamber 2 via the intermediate chamber 4, and returned to the intermediate chamber 4 after the cooling of the workpiece X is completed. It may be extracted outside the furnace. Even in this case, the door 130 installed in the cooling chamber 2 is used not for the purpose of carrying in and extracting the workpiece X but for checking the inside of the cooling chamber 2. Therefore, also in the heat treatment apparatus shown in FIG. 6, by installing the cooling fan 13 or the like on the door 130 , the same effect as the heat treatment apparatus 1 shown in FIGS.

In addition, this invention is not limited to the said embodiment, For example, the following modifications can be considered.
(1) In the said embodiment, the cooling gas Y was applied to the to-be-processed object X from the up-down direction. However, the cooling gas Y may be applied to the workpiece X from the left and right directions by rotating the configuration of the cooling chamber 2 and the door 5 in the above-described embodiment by 90 ° with respect to each central axis. . Moreover, you may employ | adopt the structure which selectively applies the cooling gas Y with respect to the to-be-processed object X from the up-down and left-right directions by these combination.

(2) In the above embodiment, the heat treatment apparatus 1 includes two heat treatment chambers, the cooling chamber 2 and the heating chamber 3. However, the present invention is not limited to this, and a plurality of heat treatment chambers may be further provided. The present invention can also be applied to a single-chamber heat treatment apparatus that performs heating and cooling by one heat treatment chamber.

(3) In the above embodiment, when the slide device 29 is driven, the door 5 approaches or separates from the cooling chamber 2 in the horizontal direction. However, the present invention is not limited to this, and for example, a slide device may be installed that moves the door 5 in the vertical direction so as to approach or separate from the cooling chamber 2.

(4) In the above embodiment, the cooling gas Y was circulated in the order of the cooling fan 13, the workpiece X, and the heat exchanger 12. However, the cooling fan 13, the heat exchanger 12, and the workpiece X may be circulated in this order. In this case, for example, the cooling fan 13 is installed so that the cooling gas Y can flow in the opposite direction to the above embodiment, and the cooling gas Y sent from the cooling fan 13 is dispersed and flows into the heat exchanger 12. The gas dispersion portion 16 may be formed as described.

1, 1 20 ... Heat treatment equipment 2 ... Cooling room (heat treatment room)
3 ... Heating room 5 ... Door 12 ... Heat exchanger 13 ... Cooling fan (fan)
14a, 14b …… Damper 29 …… Slide device 30 …… Gas discharge branch pipe X …… Workpiece Y …… Cooling gas (gas)

Claims (6)

A heat treatment apparatus comprising a heat treatment chamber for performing heat treatment on a workpiece and having a door,
A fan provided on the door while cooling the workpiece by applying a flow to the gas to form a gas flow;
And a gas discharge branch pipe that blows the gas over the entire workpiece when the gas is supplied from the outside of the heat treatment chamber to the inside of the heat treatment chamber. The door, a heat treatment apparatus according to claim 1, wherein the a door to be used in order to carry in or out the object to be treated to a heat treatment chamber. The heat treatment apparatus according to claim 1, further comprising a gas flow path forming device for circulating a gas flow formed by the fan through a predetermined path. The heat exchanger which heat-exchanges the gas given the flow by the said fan and the refrigerant | coolant guide | induced to the inside of a heat processing chamber from the outside of the said heat processing chamber is provided. Heat treatment equipment. The heat exchanger is installed between the object to be processed and the fan, and the gas flow is circulated in the order of fan, object to be processed, heat exchanger or fan, heat exchanger, object to be processed. The heat treatment apparatus according to claim 4. The heat treatment apparatus according to claim 1, wherein the door includes a slide device for approaching or separating from the heat treatment chamber.

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