JP2004247484A5 - - Google Patents
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- Publication number
- JP2004247484A5 JP2004247484A5 JP2003035271A JP2003035271A JP2004247484A5 JP 2004247484 A5 JP2004247484 A5 JP 2004247484A5 JP 2003035271 A JP2003035271 A JP 2003035271A JP 2003035271 A JP2003035271 A JP 2003035271A JP 2004247484 A5 JP2004247484 A5 JP 2004247484A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003035271A JP2004247484A (ja) | 2003-02-13 | 2003-02-13 | ミラー保持装置、露光装置及びデバイス製造方法 |
| US10/778,810 US6982841B2 (en) | 2003-02-13 | 2004-02-13 | Mirror holding mechanism in exposure apparatus, and device manufacturing method |
| US11/282,620 US20060072219A1 (en) | 2003-02-13 | 2005-11-21 | Mirror holding mechanism in exposure apparatus, and device manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003035271A JP2004247484A (ja) | 2003-02-13 | 2003-02-13 | ミラー保持装置、露光装置及びデバイス製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004247484A JP2004247484A (ja) | 2004-09-02 |
| JP2004247484A5 true JP2004247484A5 (ja) | 2006-11-09 |
Family
ID=33020746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003035271A Pending JP2004247484A (ja) | 2003-02-13 | 2003-02-13 | ミラー保持装置、露光装置及びデバイス製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (2) | US6982841B2 (ja) |
| JP (1) | JP2004247484A (ja) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004247484A (ja) * | 2003-02-13 | 2004-09-02 | Canon Inc | ミラー保持装置、露光装置及びデバイス製造方法 |
| GB2414858A (en) * | 2004-06-03 | 2005-12-07 | Nanobeam Ltd | A workpiece or specimen support assembly for a charged particle beam system |
| JP2006100315A (ja) * | 2004-09-28 | 2006-04-13 | Canon Inc | 保持機構、光学装置、及びデバイス製造方法 |
| US7307688B2 (en) * | 2004-11-19 | 2007-12-11 | Asml Netherlands B.V. | Clamping device for optical elements, lithographic apparatus with optical elements in a clamping device, and method for manufacturing such apparatus |
| JP4609117B2 (ja) * | 2005-03-04 | 2011-01-12 | パナソニック株式会社 | 光学装置のミラー保持具及びミラー保持構造 |
| US20080219756A1 (en) * | 2007-02-28 | 2008-09-11 | Selex Sensors & Airborne Systems Limited, Basildon | Kinematic ball screw adjusters |
| GB2447239A (en) * | 2007-02-28 | 2008-09-10 | Selex Sensors & Airborne Sys | Kinematic mounting apparatus |
| JP5264112B2 (ja) * | 2007-07-11 | 2013-08-14 | キヤノン株式会社 | 露光装置 |
| JP5506473B2 (ja) | 2010-03-12 | 2014-05-28 | キヤノン株式会社 | 保持装置、光学装置及び望遠鏡 |
| JP5535108B2 (ja) | 2011-02-18 | 2014-07-02 | ギガフォトン株式会社 | 極端紫外光源装置 |
| DE102011086345A1 (de) | 2011-11-15 | 2013-05-16 | Carl Zeiss Smt Gmbh | Spiegel |
| JP5888822B2 (ja) * | 2014-06-24 | 2016-03-22 | 大学共同利用機関法人自然科学研究機構 | キネマティック支持機構 |
| US10914916B2 (en) * | 2017-03-07 | 2021-02-09 | Onto Innovation Inc. | Non-adhesive mounting assembly for a tall Rochon polarizer |
| CN113341532B (zh) * | 2021-06-30 | 2022-05-17 | 中国科学院长春光学精密机械与物理研究所 | 高精度、高稳定性、紧凑的望远镜三镜俯仰调整机构 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002048962A (ja) * | 2000-06-17 | 2002-02-15 | Carl-Zeiss-Stiftung Trading As Carl Zeiss | 光学素子装着装置 |
| JP3689340B2 (ja) * | 2001-02-09 | 2005-08-31 | ペンタックス株式会社 | バリフォーカルレンズ鏡筒 |
| JP2004247484A (ja) * | 2003-02-13 | 2004-09-02 | Canon Inc | ミラー保持装置、露光装置及びデバイス製造方法 |
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2003
- 2003-02-13 JP JP2003035271A patent/JP2004247484A/ja active Pending
-
2004
- 2004-02-13 US US10/778,810 patent/US6982841B2/en not_active Expired - Fee Related
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2005
- 2005-11-21 US US11/282,620 patent/US20060072219A1/en not_active Abandoned