JP2004245832A - Multiple beam scanning color inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a multiple beam scanning color inspection device which can acquire a three-dimensional color image, and the beam scanning device performs a scan deflecting the beam from a light emitting element by a rotating polygon mirror, and reads information on a light beam irradiated object. <P>SOLUTION: The multiple beam scanning color inspection device comprises: a multiple beam light source unit; a first polygon mirror by which a luminous flux emitted from the multiple beam light source unit is deflected; a second polygon mirror by which the luminous flux passing through a fθlens optical system is deflected into an orthogonal direction; a light receiving means receiving reflected light from the surface of the object which is located in a space scanned by the first and second polygon mirrors and detecting a light intensity of the luminous flux; a position detection means which detects the position of the object. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

  According to the present invention, binary scanning is performed by dually deflecting a beam from a light emitting element by two rotating polygon mirrors, and information of a beam reflected by the irradiated object is read by reading the information of the beam reflected by the irradiated object. The present invention relates to a multi-beam scanning device that measures two-dimensional color image information.

  Conventionally, a beam scanning device having a light-emitting element, a polygon mirror, and a light-receiving element, such as those disclosed in Patent Literature 1 and Patent Literature 2, has been used. Such a beam scanning device scans an original or the like by deflecting a beam from a light-emitting element with a rotating polygon mirror, and detects reflected light from the light-receiving element, thereby forming an image formed on the original or the like. What you read.

  In such a beam scanning device, a main scan is performed by a polygon mirror, and a document or the like is moved in a sub-scanning direction to perform a sub-scan, and an image formed on the document or the like is acquired as a two-dimensional image. is there.

In recent years, an inspection apparatus capable of acquiring not only two-dimensional image information such as an image formed on a document but also a three-dimensional image has been desired. However, as described above, the conventional beam scanning device provides a function of only acquiring an image formed on a document or the like as a two-dimensional image.
JP-A-1-105271 JP-A-6-98105

  In view of the above problems, an object of the present invention is to provide a multi-beam scanning color inspection apparatus capable of acquiring three-dimensional color image information.

  In order to achieve the above object, a multi-beam scanning color inspection apparatus according to the present invention includes a multi-beam light source unit that emits a plurality of light beams having different wavelengths, and a first light beam unit that deflects a light beam emitted from the multi-beam light source unit. Polygon mirror, an fθ lens optical system that scans the light beam deflected by the first polygon mirror at substantially constant speed, and a second polygon mirror that deflects the light beam that has passed through the fθ lens optical system in the orthogonal direction. And scanning by a second polygon mirror driven to deflect the beam by one line for each main scanning line by the first polygon mirror, and by the first polygon mirror and the second polygon mirror. Light receiving means for receiving the light beam reflected on the surface of the object disposed in the space, and detecting the intensity of the light beam; and a position on the surface of the object. And a calculating means for calculating color three-dimensional image information of the object using the detection result of the light receiving means and the detection result of the position detecting means.

  According to the multi-beam scanning color inspection apparatus of the present invention, a plurality of light beams having different wavelengths are deflected by the first and second polygon mirrors to perform main scanning and sub-scanning, so that color image information can be generated. Further, according to the multi-beam scanning color inspection apparatus of the present invention, the position of the surface of the object to be scanned is detected by the position detecting means. Therefore, with the multi-beam scanning color inspection apparatus of the present invention, it is possible to obtain color three-dimensional image information of an object arranged in a space scanned by the first polygon mirror and the second polygon mirror.

  Scanning is performed by direction detecting means for detecting the traveling direction of the light beam deflected by the first and second polygon mirrors, and distance measuring means for measuring the distance from the predetermined scanning position to the light beam incident position on the object. A configuration in which the position of the surface of the object to be performed may be detected. Preferably, the distance measuring means measures the distance to the object by converting the time difference between the time when the light flux is emitted from the light source and the time when the reflected light flux reflected on the object reaches the light receiving means.

  Further, the light receiving means may be an area sensor, and the multi-beam scanning color inspection apparatus may have a condensing lens for condensing a light beam reflected on the surface of the object at a predetermined scanning position on the area sensor.

  Further, the multi-beam scanning color inspection apparatus has a beam splitter disposed in an optical path between the multi-beam light source unit and the first polygon mirror, and a reflected light beam reflected on the surface of the object at a predetermined scanning position is A configuration may be adopted in which the light passes through the second polygon mirror, the fθ lens optical system, and the first polygon mirror again, enters the beam splitter, is deflected by the beam splitter, and enters the light receiving unit. Preferably, the fθ lens optical system has an fθ lens that is an eccentric optical lens, and prevents a light beam reflected on the fθ lens optical system from being incident on the light receiving unit.

  The multi-beam scanning color inspection apparatus may be configured to convert a reflected light beam from a predetermined scanning position reflected on the surface of the object from a predetermined position to a reflection surface on which a light beam passing through the fθ lens optical system is incident. It may be configured to have a mirror means for making the light reflected on the second reflection surface of the polygon mirror and a condenser lens for condensing the light beam reflected on the second reflection surface on the light receiving means.

  With such a configuration, the light beam reflected by the second reflection surface becomes a light beam that is displaced only in the main scanning direction regardless of the phase of the second polygon mirror. By passing this light beam through a condenser lens, the light beam becomes a light beam that scans on a certain straight line. Therefore, the light receiving means may be a line sensor fixed at a predetermined position, and a low-cost multi-beam scanning color inspection apparatus is realized.

  As described above, according to the present invention, a multi-beam scanning color inspection apparatus capable of acquiring three-dimensional color image information is realized.

  The configuration of the multi-beam scanning color inspection apparatus according to the first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a top view of a multi-beam scanning color inspection apparatus 101 of the present embodiment. FIG. 2 is a side view of the multi-beam scanning color inspection apparatus 101 of the present embodiment, in which FIG. 1 is projected from the direction of arrow A. The multi-beam scanning color inspection apparatus 101 of the present embodiment includes a light source unit 110, a horizontal scanning unit 130, an fθ lens 150, a vertical scanning unit 160, a light receiving unit 180, a concave reflecting mirror 190, and a horizontal synchronization sensor 191. And

  The light source unit 110 has a multi-beam laser array 111. The multi-beam laser array 111 has a blue laser light source LDB, a green laser light source LDG, and a red laser light source LDR. The blue laser light source LDB, the green laser light source LDG, and the red laser light source LDR are arranged on a horizontal plane in this order, and emit blue, green, and red laser light in pulses. Laser beams emitted from the blue laser light source LDB, the green laser light source LDG, and the red laser light source LDR are incident on collimator lenses CLB, CLG, and CLR, respectively, and are converted into parallel light.

  Next, these laser beams enter the prism unit 112. The prism unit 112 deflects each of the laser beams such that the laser beams are parallel and close to each other on the same horizontal plane.

  The detailed mechanism of the prism unit 112 will be described below. FIG. 3 is an enlarged view of the light source unit 110 of the present embodiment. The prism unit 112 includes first, second, and third prisms 112a, 112b, and 112c on which blue, green, and red laser beams BB, BG, and BR are incident, respectively. The second prism 112b is disposed between the first and third prisms 112a and 112c, and has one of two opposing side surfaces of the first prism 112a and the other of the third prism 112c. It is attached to each side.

  On the surface F1 to which the first and second prisms 112a and 112b are attached, a first reflection film 112d for mirror-reflecting an incident light beam is provided. Also, a second reflection film 112e similar to the first reflection film 112d is provided on the surface F2 to which the second and third prisms 112b and 112c are attached.

  Further, of the surfaces of the first and third prisms 112a and 112c, which are opposite to the surface bonded to the second prism 112b, the laser light BB and BR are reflected on the side surfaces, respectively. The third and fourth reflection films 112f and 112g are provided. In addition, as the above-mentioned four reflection films, for example, a metal thin film can be used.

  The second prism 112b has a trapezoidal cross-sectional shape, and has a bottom surface 112h parallel to each other and an upper surface 112i narrower than the bottom surface. The second prism 112b is disposed on the optical path of the green laser light BG such that the bottom surface 112f is located on the green laser light source LDG side and the upper surface 112i is located on the horizontal scanning unit 130 side. For this reason, the green laser beam BG enters the second prism 112b from its bottom surface 112h and exits from its top surface 112i toward the horizontal scanning unit 130.

  Since the first and second reflection films 112d and 112e are arranged on the side surfaces of the second prism 112b having the above-described shape, the width of the upper surface of the second prism 112b is provided between the reflection films. There is a gap S1 substantially equal to. The upper surface 112i of the second prism 112b is narrower than the beam width of the green laser beam BG. Therefore, the gap S1 between the first and second reflection films 112d and 112e is also smaller than the beam width of the green laser light BG.

  In the present embodiment, the prism unit 112 is arranged such that the principal ray of the green laser light BG passes through substantially the center of the upper surface 112i of the second prism 112b. For this reason, the outer edge of the light beam of the green laser light BG is irradiated on the first reflection film 112d and the second reflection film 112e. The luminous flux applied to the first and second reflection films 112d and 112e is reflected in a direction different from the direction in which the horizontal scanning unit 130 exists. Therefore, the green laser light BG passes through the prism unit 112, and its beam width is limited to the gap S1 between the first and second reflection films 112d and 112e.

  The blue laser light BB enters the first prism 112a from the front surface 112j, and is reflected by the third reflection film 112f toward the first reflection film 112d. Further, the blue laser light BB is reflected by the first reflection film 112d, and emitted from the rear surface 112k of the first prism 112a toward the horizontal scanning unit 130.

  The third reflection film 112f reflects the blue laser light BB at such an angle that the blue laser light BB is also irradiated to the end of the first reflection film 112d on the polygon mirror 131 side. Thereby, the blue laser light BB reflected by the first reflection film 112d is located at a position very close to the position where the green laser light BG is emitted from the prism unit 112, or at a position adjacent to the green laser light BG without any gap. The light is emitted from the prism unit 112. Therefore, in the multi-beam inspection apparatus 101, the opening angle θ between the blue laser light BB and the green laser light BG in the direction in which the polygon mirror 131 (FIG. 1) of the horizontal scanning unit 130 rotates is extremely small.

  The red laser beam BR enters the third prism 112c from the front surface 112l, and is reflected by the fourth reflection film 112g toward the second reflection film 112e. Further, the red laser beam BR is reflected by the second reflection film 112e, and is emitted from the rear surface 112m of the third prism 112c toward the horizontal scanning unit 130. Also in the case of the red laser light BR, the fourth reflection film 112g reflects the red laser light BR at such an angle that the red laser light BR is also irradiated to the end of the second reflection film 112e on the polygon mirror 131 side. Let it. Therefore, the opening angle θ between the red laser light BR and the green laser light B in the direction in which the polygon mirror 131 of the horizontal scanning unit 130 rotates is extremely small.

  As described above, according to the prism unit 112 of the present embodiment, the blue, green, and red laser beams are emitted so as to be parallel and close to each other on the same horizontal plane.

  The laser light emitted from the prism unit 112 travels in the horizontal direction, passes through the cylindrical lens 113 and the slit 114, and travels to the horizontal scanning unit. The cylindrical lens 113 has such a power that each laser beam converges only in the vertical direction in the vicinity of the reflection surface 131a of the polygon mirror 131. Further, the slit 114 is a slit that determines the cross-sectional shape of the effective light flux of each laser light by passing the blue laser light, the green laser light, and the red laser light. In the present embodiment, the slit 114 makes the beam widths of the blue laser light and the red laser light substantially the same as the green laser light.

  The horizontal scanning unit 130 has a horizontal deflecting polygon mirror 131 and a horizontal deflecting polygon motor 132 for driving the horizontal deflecting polygon mirror 131 to rotate. The laser light is incident on the reflection surface 131a of the horizontal deflection polygon mirror 131. The horizontal deflection polygon mirror 131 is arranged so that its rotation axis 131b is vertical, and the reflection surface 131a of the horizontal deflection polygon mirror 131 is perpendicular to the horizontal plane when the primary scan is horizontal. Therefore, the laser beams incident on the reflecting surfaces of the horizontal deflection polygon mirror 131 are deflected by the reflecting surfaces 131a, respectively, and travel horizontally while keeping the laser beams parallel and close to each other. The horizontal deflecting polygon motor 132 is configured to drive the horizontal deflecting polygon mirror 131 to rotate at a constant speed around the rotation axis 131b. The laser beam incident on the reflection surface 131a of the horizontal deflecting polygon mirror 131 is scanned in the horizontal direction at a constant period. Is emitted from the reflection surface 131a such that

  The laser light emitted from the reflection surface 131a of the horizontal deflection polygon mirror 131 passes through the fθ lens 150, and then enters the vertical scanning unit 160.

  The vertical scanning unit 160 has a vertical deflection polygon mirror 161, a vertical deflection polygon motor 162 for driving the vertical deflection polygon mirror 161 to rotate, and a mirror 163. The laser light is incident on the reflection surface 161a of the vertical deflection polygon mirror 161. The vertical deflection polygon mirror 161 is arranged so that its rotation axis 161b is in the horizontal direction. Therefore, the laser light incident on the reflection surface 161a of the vertical deflection polygon mirror 161 is deflected upward by the reflection surface 161a, and is incident on the mirror 163 while keeping the respective laser light parallel and close to each other (FIG. 2). The laser light incident on the mirror 163 is further deflected by the mirror 163. The vertical deflection polygon motor 162 is configured to drive the vertical deflection polygon mirror 161 to rotate at a constant speed around the rotation axis 161b. The laser light incident on the reflection surface 161a and the mirror 163 of the vertical deflection polygon mirror 161 is periodically emitted. The light is emitted from the reflecting surface 161a so that the vertical scanning is performed.

  In the multi-beam scanning color inspection apparatus 101 having the above-described configuration, one vertical scanning (sub-scanning) is performed by setting the cycle in which the vertical scanning is performed to be an integral multiple of the cycle in which the horizontal scanning is performed. During this operation, horizontal scanning (main scanning) is performed a plurality of times. That is, the multi-beam scanning color inspection apparatus 101 scans an area (scanning area) defined by the deflectable angle by the horizontal deflection polygon mirror 131 and the deflectable angle by the vertical deflection polygon mirror 161 and the mirror 163.

  If there is an object in this scanning area, the laser light is reflected on the surface of the object, and the reflected light is received by the light receiving unit 180. The light receiving unit 180 has a photo sensor 181 and a condenser lens 182. The laser beam reflected on the surface of the object enters the condenser lens 182, is then condensed by the condenser lens 182, and enters the photosensor 181.

  The photo sensor 181 can detect light of three colors, red, blue, and yellow, and detects the intensity of each of the red, green, and blue laser light incident on the photo sensor 181. Therefore, from the detection result of the photo sensor 181, it is possible to calculate what color of the object surface is present.

  Further, as shown in FIGS. 1 and 2, the concave reflecting mirror 190 is disposed at an end of the scanning area. The concave reflecting mirror 190 is disposed in the vertical direction, and reflects the laser light incident on the concave reflecting mirror 190 and makes the laser light incident on the horizontal synchronization sensor 191. The horizontal synchronization sensor 191 can detect whether reflected light from the concave reflecting mirror 190 has entered the horizontal synchronization sensor 191. In the present embodiment, when the laser beam is deflected most downward in FIG. 1, the laser beam is reflected on the concave reflecting mirror 190 and is incident on the horizontal synchronization sensor 191. The detection result of the horizontal synchronization sensor 191 is used as a horizontal synchronization signal. That is, the horizontal component in the emission direction of the laser light can be detected from the elapsed time from the time when the laser light is incident on the horizontal synchronization sensor 191. Further, for example, another photodetector can be arranged at the upper end of the concave reflecting mirror 190, and the detection result of this photodetector can be used as a vertical synchronization signal. Using this vertical synchronization signal, a vertical component in the emission direction of the laser light can be detected. Therefore, the emission angle and position of the laser beam can be detected using the horizontal synchronization signal and the vertical synchronization signal.

  Also, the difference between the time of the pulse waveform in which a certain pulse of the laser light is output from the laser light source and the pulse waveform delay time in which the return light of this pulse is detected by the photo sensor 181 is determined by the photo sensor 181 from the laser light source via the object surface. Is calculated. In the present embodiment, the distance from the laser light source to the photosensor 181 is sufficiently shorter than the distance from the laser light source to the object, so that half of the calculated distance can be regarded as equivalent to the distance from the laser light source to the object surface. Alternatively, the used optical path length from the laser light source to the photosensor 181 can be calculated, and this used optical path length is subtracted from the distance from the laser light source to the photosensor 181 via the object surface as a correction value, and the distance from the laser light source to the object surface is calculated. A configuration in which the distance is accurately obtained may be adopted.

  As described above, the color of the object surface, the emission scanning angle direction of the laser light, and the distance from the laser light source to the object surface are calculated. Therefore, according to the present embodiment, the position and color of the surface of the object in the scanning area can be determined, and three-dimensional image information of the object can be obtained.

  In the present embodiment, the intensity of the laser light reflected on the surface of the object and the predetermined position (such as a laser light source) of the object are measured using a photosensor 181 which is an area sensor capable of detecting the incident position of the laser light, such as a color CCD. The distance to the surface is calculated. However, the present invention is not limited to the above configuration, and other configurations capable of detecting the intensity of the laser beam reflected on the object surface and the position of the object surface are possible. A second embodiment and a third embodiment of the present invention described below show the configuration of a multi-beam scanning color inspection apparatus having such another configuration.

  Hereinafter, a control method of the multi-beam scanning color inspection apparatus 101 of the present embodiment will be described. FIG. 8 is a block diagram of the control unit 102 of the multi-beam scanning color inspection apparatus 101 of the present embodiment.

  The control unit 102 of the inspection apparatus 101 has a CPU 10 connected to a RAM 11, a ROM 12, and an EEPROM 13. The control of the inspection apparatus 101 is performed by the CPU 10 executing a program stored in the ROM 12. The RAM 11 is used as a work area of the CPU 10 and a temporary storage of a processing result of the CPU 10. Various parameters set by the user of the inspection apparatus 101 are stored in the EEPROM 13.

  The CPU 10 controls the motor drivers 15 and 16 that generate drive pulses for the horizontal deflection polygon motor 132 and the vertical deflection polygon motor 162 to rotate and drive the horizontal deflection polygon mirror 131 and the vertical deflection polygon mirror 161.

  The outputs of the horizontal synchronization sensor 191, the vertical synchronization sensor 491, and the timer 14 are input to the CPU 10. The CPU 10 uses the timer 14 to output the horizontal synchronization pulse output interval by the horizontal synchronization sensor 191, the vertical synchronization pulse output interval by the vertical synchronization sensor 491, the elapsed time since the last detection of the horizontal synchronization pulse, and finally the vertical synchronization pulse. Measure the time elapsed since the detection.

  Further, the CPU 10 controls a pulse driver 19 that generates a driving pulse for the laser light source unit 110. The output of the light receiving unit 180 is input to the CPU 10. The CPU 10 uses the timer 14 to determine the output time of the pulse from the laser light source (that is, the time when the pulse was output from the pulse driver 19) and the time when the return light of this pulse was detected by the photosensor 181 of the light receiving unit 180. The difference, that is, the above-described pulse waveform delay time is measured.

  Further, the CPU 10 detects the color of the object on which the pulse is reflected, from the output of the light receiving unit 180.

  Using these measured values, the CPU 10 calculates the color of the surface of the object, the scanning angle direction of the laser light, and the distance from the laser light source to the surface of the object.

  By performing the above processing for each pulse, three-dimensional image information of the object can be obtained.

  The CPU 10 can display the obtained three-dimensional image information on the display 20 or transfer it to a storage device or the like connected via the I / O interface 17. Further, the control unit 102 can be connected to a predetermined network via the communication unit 18, and the CPU 10 transmits the obtained three-dimensional image information to a host connected to the predetermined network, and / or the inspection apparatus. A control command for controlling 101 is received from this host.

  FIG. 4 is a top view of a multi-beam scanning color inspection apparatus 201 according to the second embodiment of the present invention. FIG. 5 is a side view of the multi-beam scanning color inspection apparatus 201 of the present embodiment, in which FIG. 4 is projected from the direction of arrow A. Note that the configurations of the light source unit 110, the horizontal scanning unit 130, the vertical scanning unit 160, the concave reflecting mirror 190, and the horizontal synchronization sensor 191 in the present embodiment are the same as those in the first embodiment of the present invention. Description is omitted.

  In this embodiment, a beam splitter 282 arranged in the optical path between the light source unit 110 and the horizontal scanning unit 130, and photo sensors 281R, 281G, and 281B are used instead of the light receiving unit 180 in the first embodiment of the present invention. Is used.

  As shown in FIG. 4, the light is reflected by the surface of an object arranged in a scanning area defined by the deflectable angle by the horizontal deflecting polygon mirror 131 and the deflectable angle by the vertical deflecting polygon mirror 161 and the mirror 163. The laser light returning to the beam splitter 282 is bent by the beam splitter 282.

  The red laser light, the green laser light, and the blue laser light bent by the beam splitter 282 are incident on photo sensors 281R, 281G, and 281B, respectively. Also in the present embodiment, the photosensor 281R from the laser light sources LDR, LDG, and LDB passes through the object surface based on the difference between the time of the pulse waveform from which a certain pulse of the laser light is emitted and the delay time of the pulse waveform when the pulse returns to the photodetector. , 281G and 281B are calculated. Further, the emission direction of the laser light can be calculated by the same method as in the first embodiment of the present invention. The photosensors 281R, 281G, and 281B can detect the intensity of the laser light incident thereon, and therefore can calculate the color of the object surface from the intensity information of the laser light.

  As described above, also in the present embodiment, since the position and color of the surface of the object in the scanning area can be determined, three-dimensional color image information of the object can be obtained.

  In the present embodiment, the fθ lens 250 is an eccentric optical lens, and the laser light reflected near the extreme surface of the fθ lens 250 returns to the beam splitter 282 and does not enter the photosensors 281R, 281G, and 281B. Is configured.

  FIG. 6 is a top view of a multi-beam scanning color inspection apparatus 301 according to the third embodiment of the present invention. FIG. 7 is a side view of the multi-beam scanning color inspection apparatus 301 of the present embodiment, in which FIG. 6 is projected from the direction of arrow A. Note that the configurations of the light source unit 110, the horizontal scanning unit 130, the fθ lens 150, the vertical scanning unit 160, the concave reflecting mirror 190, and the horizontal synchronization sensor 191 in the present embodiment are the same as those in the first embodiment of the present invention. Therefore, the description is omitted.

  In this embodiment, a light receiving unit 380 including a photo sensor 381, a condenser lens 382, and a mirror 383 is used instead of the light receiving unit 180 in the first embodiment of the present invention.

  As shown in FIG. 7, in the present embodiment, the laser light reflected on the surface of the object placed in the operation area enters a mirror 383, and is deflected by the mirror 383 in a direction toward the vertical deflection polygon mirror 161. Is done. The laser light incident on the vertical deflection polygon mirror 161 is reflected on the vertical deflection polygon mirror 161 and travels to the condenser lens 382. The condenser lens 382 condenses the incident laser light on the photo sensor 381. In the present embodiment, the laser light reflected on the surface of the object placed in the operation area is deflected again by the vertical deflection polygon mirror 161 to become a light beam displaced only in the main scanning direction. By passing this light beam through the condenser lens 382, this light beam becomes a light beam that scans on a certain straight line. In the present embodiment, the photo sensor 381 is a line sensor having a light receiving portion formed on the straight line, and detects the intensity and time of each of the red, green, and blue laser beams incident on the photo sensor 381.

  Also in the present embodiment, the difference between the time of the pulse waveform from which a certain pulse of the laser light is emitted and the delay time of the pulse waveform when the pulse returns to the photosensor 381 is obtained from the laser light sources LDR, LDG, and LDB via the object surface. The distance to 381 is calculated. Further, it is possible to calculate the predetermined angle direction of the emission of the laser light by the same method as in the first embodiment of the present invention. Further, in the present embodiment, the photosensor 381, the condenser lens 382, and the mirror 383 may be arranged so that the light beam always enters one point on the light receiving portion of the line sensor, and an expensive area sensor is not required. . Therefore, according to the multi-beam scanning color inspection apparatus 301 of the present embodiment, an inspection apparatus that is lower in cost than the multi-beam scanning color inspection apparatus 101 of the first embodiment of the present invention can be realized.

  As described above, also in the present embodiment, since the position and color of the surface of the object in the scanning area can be determined, three-dimensional color image information of the object can be obtained.

It is a top view of the multi-beam inspection device of a 1st embodiment of the present invention. FIG. 2 is a side view of the multi-beam inspection apparatus according to the first embodiment of the present invention, in which FIG. 1 is projected from the direction of arrow A. FIG. 2 is an enlarged view of the light source unit according to the first embodiment of the present invention. It is a top view of the multi-beam inspection device of a 2nd embodiment of the present invention. FIG. 5 is a side view of the multi-beam inspection device according to the second embodiment of the present invention, in which FIG. 4 is projected from the direction of arrow A. It is a top view of the multi-beam inspection device of a 3rd embodiment of the present invention. FIG. 7 is a side view of a multi-beam inspection device according to a third embodiment of the present invention, in which FIG. 6 is projected from the direction of arrow A. It is a block diagram of a multi-beam inspection device of a 1st embodiment of the present invention.

Explanation of reference numerals

10 CPU
11 RAM
12 ROM
13 EEPROM
14 timer 15, 16 motor driver 17 I / O interface 18 communication unit 19 pulse driver 20 display 101 multi-beam inspection device 102 control unit 110 light source unit 110 multi-beam laser array 130 horizontal scanning unit 131 horizontal deflection polygon mirror 131a reflection surface 131b rotation Axis 132 Horizontal deflection polygon motor 150 fθ lens 160 Vertical scanning unit 161 Vertical deflection polygon mirror 161a Reflection surface 161b Rotation axis 162 Vertical deflection polygon motor 163 Mirror 180 Light receiving unit 181 Photosensor 182 Condensing lens 190 Concave reflecting mirror 191 Horizontal synchronization sensor 201 Multi Beam inspection device 250 Eccentric optical lens 280 Light receiving unit 281R, G, B Photo sensor 282 Beam splitter 301 Multibeam inspection device 380 Light receiving unit 381 Photosensor 382 Condensing lens 383 Mirror LDR Red laser light source LDG Green laser light source LDB Blue laser light source

Claims (10)

A multi-beam light source unit that emits a plurality of light beams having different wavelengths,
A first polygon mirror for deflecting a light beam emitted from the multi-beam light source unit;
An fθ lens optical system that scans the light beam deflected by the first polygon mirror at a substantially constant speed;
A second polygon mirror for deflecting the light beam passing through the fθ lens optical system in a direction orthogonal to the first polygon mirror, the second polygon mirror being driven so as to deflect the beam by one line for each main scanning line by the first polygon mirror. A second polygon mirror,
Light receiving means for receiving the light beam reflected on the surface of an object arranged in a space scanned by the first polygon mirror and the second polygon mirror, and detecting the intensity of the light beam;
Position detection means for detecting the position of the surface of the object,
Calculating means for calculating color three-dimensional image information of the object using the detection result of the light receiving means and the detection result of the position detecting means;
Multi-beam scanning color inspection device having   2. The multi-beam scanning color inspection apparatus according to claim 1, wherein the multi-beam light source unit includes a laser light source that emits first, second, and third optical lasers having different wavelengths from each other.   The position detecting means includes a direction detecting means for detecting a traveling direction of a light beam deflected by the first and second polygon mirrors, and a distance measuring means for measuring a distance from a predetermined scanning position to a light beam reflecting position of the object. The multi-beam scanning color inspection apparatus according to claim 1 or 2, further comprising:   4. The distance measuring unit according to claim 3, wherein the distance measuring unit measures the distance from a time difference between a time when the light beam is emitted from the light source and a time when the light beam reaches the light receiving unit. Multi-beam scanning color inspection device.   2. The multi-beam scanning color inspection apparatus according to claim 1, wherein the light receiving unit is an area sensor, and the multi-beam scanning color inspection apparatus includes a condenser lens that condenses a light beam reflected on the surface of the object on the area sensor. A multi-beam scanning color inspection apparatus according to any one of claims 1 to 4. The multi-beam scanning color inspection device has a beam splitter disposed in an optical path between the multi-beam light source unit and the first polygon mirror,
A reflected light beam from a predetermined scanning position reflected on the surface of the object passes through the second polygon mirror, the fθ lens optical system, and the first polygon mirror again, enters the beam splitter, and The multi-beam scanning color inspection apparatus according to any one of claims 1 to 4, wherein the light is split by a splitter and incident on the light receiving unit.   The multi-beam scanning color inspection apparatus according to claim 6, wherein the light receiving means has a plurality of photodetectors corresponding to a plurality of light beams, respectively.   The multi-beam scanning color inspection apparatus according to claim 6, wherein the fθ lens optical system includes an fθ lens that is an eccentric optical lens. The multi-beam scanning color inspection apparatus may be configured to convert the reflected light beam reflected by the surface of the object into a surface different from the reflection surface on which the light beam that has passed through the fθ lens optical system is incident. Mirror means for folding back to two reflecting surfaces;
A condenser lens for condensing the reflected light beam reflected on the second reflection surface on a light receiving unit;
The multi-beam scanning color inspection apparatus according to any one of claims 1 to 4, further comprising: 10. The multi-beam scanning color inspection apparatus according to claim 9, wherein said light receiving means is a line sensor.

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