JP2004221465A5 - - Google Patents
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- JP2004221465A5 JP2004221465A5 JP2003009625A JP2003009625A JP2004221465A5 JP 2004221465 A5 JP2004221465 A5 JP 2004221465A5 JP 2003009625 A JP2003009625 A JP 2003009625A JP 2003009625 A JP2003009625 A JP 2003009625A JP 2004221465 A5 JP2004221465 A5 JP 2004221465A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003009625A JP2004221465A (ja) | 2003-01-17 | 2003-01-17 | レジストパターン形成方法およびレジストパターン形成用モールド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003009625A JP2004221465A (ja) | 2003-01-17 | 2003-01-17 | レジストパターン形成方法およびレジストパターン形成用モールド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004221465A JP2004221465A (ja) | 2004-08-05 |
| JP2004221465A5 true JP2004221465A5 (he) | 2005-12-08 |
Family
ID=32899069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003009625A Pending JP2004221465A (ja) | 2003-01-17 | 2003-01-17 | レジストパターン形成方法およびレジストパターン形成用モールド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004221465A (he) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4600109B2 (ja) * | 2005-03-23 | 2010-12-15 | Ｔｄｋ株式会社 | スタンパーの製造方法および情報記録媒体の製造方法 |
| US7762186B2 (en) | 2005-04-19 | 2010-07-27 | Asml Netherlands B.V. | Imprint lithography |
| KR101171190B1 (ko) | 2005-11-02 | 2012-08-06 | 삼성전자주식회사 | 표시장치의 제조방법과 이에 사용되는 몰드 |
| JP4861044B2 (ja) * | 2006-04-18 | 2012-01-25 | キヤノン株式会社 | 基板の加工方法、パターン領域を有する部材の製造方法 |
| JP2008142895A (ja) | 2006-12-05 | 2008-06-26 | Fujifilm Corp | モールド構造体 |
| EP1975704A3 (en) | 2007-03-30 | 2008-12-10 | Fujifilm Corporation | Mold structure, imprinting method using the same, magnetic recording medium and production method thereof |
| US20080248333A1 (en) | 2007-03-30 | 2008-10-09 | Fujifilm Corporation | Mold structure, imprinting method using the same, magnetic recording medium and production method thereof |
| JP2009070544A (ja) * | 2007-08-21 | 2009-04-02 | Fujifilm Corp | 磁気記録媒体の製造方法、及び磁気記録媒体 |
| JP4977121B2 (ja) | 2008-03-25 | 2012-07-18 | 富士フイルム株式会社 | インプリント用モールド構造体及びそれを用いたインプリント方法、並びに磁気記録媒体の製造方法 |
| JP2010160854A (ja) | 2009-01-08 | 2010-07-22 | Fujifilm Corp | Ｄｔｍ用モールド構造物、インプリント方法、並びにｄｔｍの製造方法及びｄｔｍ |
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2003
- 2003-01-17 JP JP2003009625A patent/JP2004221465A/ja active Pending