JP2004221436A - 露光装置 - Google Patents

露光装置 Download PDF

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Publication number
JP2004221436A
JP2004221436A JP2003008915A JP2003008915A JP2004221436A JP 2004221436 A JP2004221436 A JP 2004221436A JP 2003008915 A JP2003008915 A JP 2003008915A JP 2003008915 A JP2003008915 A JP 2003008915A JP 2004221436 A JP2004221436 A JP 2004221436A
Authority
JP
Japan
Prior art keywords
light beam
mask
optical system
exposure apparatus
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003008915A
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English (en)
Japanese (ja)
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JP2004221436A5 (enExample
Inventor
Yoshiji Nemoto
芳司 根本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2003008915A priority Critical patent/JP2004221436A/ja
Publication of JP2004221436A publication Critical patent/JP2004221436A/ja
Publication of JP2004221436A5 publication Critical patent/JP2004221436A5/ja
Pending legal-status Critical Current

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2003008915A 2003-01-16 2003-01-16 露光装置 Pending JP2004221436A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003008915A JP2004221436A (ja) 2003-01-16 2003-01-16 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003008915A JP2004221436A (ja) 2003-01-16 2003-01-16 露光装置

Publications (2)

Publication Number Publication Date
JP2004221436A true JP2004221436A (ja) 2004-08-05
JP2004221436A5 JP2004221436A5 (enExample) 2006-03-09

Family

ID=32898559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003008915A Pending JP2004221436A (ja) 2003-01-16 2003-01-16 露光装置

Country Status (1)

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JP (1) JP2004221436A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015179295A (ja) * 2009-08-07 2015-10-08 株式会社ニコン 露光装置及びデバイス製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015179295A (ja) * 2009-08-07 2015-10-08 株式会社ニコン 露光装置及びデバイス製造方法

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