JP2004214350A - Substrate processing system, substrate processing device, and managing method of substrate processing system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate processing system easy in handling, a substrate processing device, and the managing method of the substrate processing system by managing the substrate processing device, so as to be easily understood by a user when the arranging conditions of the substrate processing units are different in respective substrate processing devices. <P>SOLUTION: When the substrate processing system is equipped with a plurality of substrate processing devices 100, 200, in which a plurality of spaces capable of installing the substrate processing unit are provided, and the spatial layouts of a plurality of spaces are same but the actual arranging conditions of the substrate processing units in the plurality of spaces are different; the plurality of substrate processing devices 100, 200 are managed based on a layout number, allotted to the plurality of spaces with a common rule with respect to the plurality of substrate processing devices 100, 200 to discriminate the plurality of spaces mutually. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a technique for managing a substrate processing apparatus in a substrate processing system having a plurality of substrate processing apparatuses.
[0002]
[Prior art]
A substrate processing system for processing a substrate such as a semiconductor wafer includes a plurality of substrate processing apparatuses. Each of the substrate processing apparatuses includes a plurality of substrate processing apparatuses that perform resist coating, substrate cleaning, heat treatment, and the like. It has a unit. In each substrate processing apparatus, a processing recipe that defines transfer order information indicating an order in which substrates are transferred to each substrate processing unit and processing condition information indicating processing conditions in each substrate processing unit is used. The transfer order information uses a unique unit number artificially assigned to each substrate processing unit of each substrate processing apparatus in order to identify each substrate processing unit (for example, Patent Document 1). .
[0003]
By the way, in such a substrate processing system, there is a system in which a processing recipe is copied and used between the respective substrate processing apparatuses. In some cases, the arrangement status such as the number and arrangement of the substrate processing units is different between the respective substrate processing apparatuses of the substrate processing system. In such a case, a technique that can copy a processing recipe has been proposed. (For example, Patent Document 2).
[0004]
Prior art documents relating to such a technique include the following.
[0005]
[Patent Document 1]
JP-A-11-135395
[Patent Document 2]
JP-A-11-135394
[0006]
[Problems to be solved by the invention]
However, the unit number described above is a unit number unique to each substrate processing apparatus. If the arrangement state of the substrate processing units differs between the substrate processing apparatuses, different unit numbers are assigned to the same space between the substrate processing apparatuses. Will be attached. In such a situation, if a substrate processing apparatus is managed by a unit number, when an abnormality occurs in a certain substrate processing unit, a place where maintenance is to be performed must be specified based on a different unit number among the substrate processing apparatuses. It takes time to identify the location and is a source of error.
[0007]
SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems, and when the arrangement state of the substrate processing units is different between the respective substrate processing apparatuses, the substrate processing apparatus can be easily handled by managing the substrate processing apparatuses in a manner easy for a user to understand. It is an object to provide a system, a substrate processing apparatus, and a method for managing a substrate processing system.
[0008]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, the invention according to claim 1 includes a plurality of substrate processing apparatuses provided with a plurality of places where a substrate processing unit can be installed, and a spatial layout of the plurality of places where the installation space can be installed. Is the same among the plurality of substrate processing apparatuses, while the actual arrangement state of the substrate processing unit in the plurality of installable spaces differs at least in part between the plurality of substrate processing apparatuses. A storage unit for storing identification information between the plurality of installable spaces, and at least one substrate among the plurality of substrate processing apparatuses, based on the identification information stored in the storage unit. Management means for managing the processing apparatus, wherein the assignment of the identification information to the plurality of installable spaces is common to the plurality of substrate processing apparatuses. Characterized in that it is made in Lumpur.
[0009]
The invention according to claim 2 is the substrate processing system according to claim 1, wherein the management unit is configured to control the plurality of substrate processing apparatuses based on the identification information stored in the storage unit. It is characterized by managing information on maintenance for at least one substrate processing apparatus.
[0010]
According to a third aspect of the present invention, there is provided a substrate processing apparatus usable in the substrate processing system according to the first aspect, wherein the substrate processing apparatus is disposed in a plurality of installable spaces in its own substrate processing apparatus. An identification information storage unit that is assigned to the plurality of installable spaces independently of a unit and stores first identification information for mutually identifying the plurality of installable spaces; and an identification information storage unit. Self-device management means for managing its own substrate processing apparatus based on the stored first identification information.
[0011]
According to a fourth aspect of the present invention, in the substrate processing apparatus according to the third aspect, the identification information storage unit stores the first identification information and any one of the substrate processing units in the own substrate processing apparatus. Assigned irrespective of whether they are arranged in an installable space, and storing second identification information for mutually identifying a plurality of substrate processing units in their own substrate processing apparatus in association with each other, Wherein the means manages its own substrate processing apparatus based on the first and second identification information stored in the identification information storage means.
[0012]
Further, the invention according to claim 5 includes a plurality of substrate processing apparatuses provided with a plurality of substrate processing units in which installable spaces are provided, and the spatial layout of the plurality of installable spaces is such that the plurality of substrate processing units are provided. A method of managing a substrate processing system, wherein the same arrangement between the apparatuses, the actual arrangement of the substrate processing unit in the plurality of installable spaces is different at least in part between the plurality of substrate processing apparatuses, A first step of storing identification information of the installable spaces at the plurality of locations attached by a common rule with respect to the plurality of substrate processing apparatuses, and the plurality of the plurality of substrate processing apparatuses, based on the identification information stored in the storage unit. A second step of managing at least one substrate processing apparatus among the one substrate processing apparatuses.
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0014]
<1. Overview of Substrate Processing System>
FIG. 1 is a conceptual diagram illustrating a configuration of a substrate processing system 1 according to an embodiment of the present invention. As shown in FIG. 1, the substrate processing system 1 includes a host computer 500, a plurality of substrate processing apparatuses 100 and 200, and a plurality of exposure apparatuses 150 and 250.
[0015]
The host computer 500 is configured separately from the substrate processing apparatuses 100 and 200 and the exposure apparatuses 150 and 250, and is a LAN (local area network) that is a communication path with the substrate processing apparatuses 100 and 200 and the exposure apparatuses 150 and 250. ) 600. Therefore, in the substrate processing system 1, the host computer 500, each of the substrate processing apparatuses 100 and 200, and each of the exposure apparatuses 150 and 250 can mutually transmit and receive various data.
[0016]
FIG. 2 is a block diagram schematically illustrating a functional configuration of the substrate processing system 1. In the following, description will be made focusing on the substrate processing apparatuses 100 and 200, and therefore, description of the exposure apparatuses 150 and 250 is omitted in FIG.
[0017]
The host computer 500 includes an information processing unit 510 as a computer main body, an operation unit 520, and a display unit 530 as an output unit. The host computer 500 is provided for controlling the substrate processing system 1 overall.
[0018]
The information processing unit 510 includes a control unit 511 mainly configured by a CPU, a storage unit 512 for storing various programs and data, and a mounting unit 513 capable of mounting a storage medium such as the optical disk 91 and the memory card 92. It is configured with. The control unit 511 realizes a function for controlling the substrate processing system 1 by reading programs stored in the storage unit 512 and the storage media 91 and 92. The storage unit 512 also stores data indicating a procedure of substrate processing in the substrate processing apparatuses 100 and 200 (hereinafter, referred to as “processing recipe”).
[0019]
Each of the substrate processing apparatuses 100 and 200 includes control units CR1 and CR2, respectively, and exchanges various data between the control unit 511 of the host computer 500 and the control units CR1 and CR2 via the LAN 600.
[0020]
<2. Overview of substrate processing equipment>
3 and 4 are perspective views showing examples of the substrate processing apparatus 100 and the substrate processing apparatus 200, respectively. Since the substrate processing apparatus 100 and the substrate processing apparatus 200 have substantially the same configuration, similar portions are denoted by the same reference numerals, and redundant description will be omitted.
[0021]
The substrate processing apparatus 100 shown in FIG. 3 and the substrate processing apparatus 200 shown in FIG. 4 will be described below.
[0022]
The substrate processing apparatuses 100 and 200 include a plurality of substrates for performing a series of processing (in this embodiment, coating processing, developing processing, heating processing, cooling processing, and the like) on a semiconductor wafer (hereinafter, referred to as “substrate”) W. It has a processing unit.
[0023]
As shown in FIG. 3, in the substrate processing apparatus 100, a first substrate processing unit region G1 is provided on the front surface, and a second substrate processing unit region G2 is provided on the rear side opposite to the first substrate processing unit region G1. . An indexer ID, which is a unit for carrying out the substrate W from the cassette 20 storing a large number of substrates W and loading the substrate W into the cassette 20, is provided at an end portion (the left rear side in the figure) of the substrate processing apparatus 100. Is provided. Further, a transfer area C extending along the first substrate processing unit area G1 is provided in a space between the first substrate processing unit area G1 and the second substrate processing unit area G2. A transport robot TR, which is a unit for transporting the substrate W, is movably arranged.
[0024]
As shown in FIG. 4, the substrate processing apparatus 200 also has a first substrate processing unit area G1, a second substrate processing unit area G2, an indexer ID, and a transfer robot, similarly to the substrate processing apparatus 100 shown in FIG. TR is provided.
[0025]
In the substrate processing apparatuses 100 and 200, a plurality of substrate processing units for processing the substrate W can be installed in the first substrate processing unit area G1 and the second substrate processing unit area G2. Specifically, the first substrate processing unit area G1 is provided with a space in which substrate processing units such as a spin coater and a spin developer can be installed, and the second substrate processing unit area G2 is provided with a hot plate, a cool plate, and a close plate. A space is provided where a substrate processing unit such as a reinforcement unit can be installed. Whether or not each substrate processing unit is installed in a space where each substrate processing unit can be installed can be arbitrarily selected by a user.
[0026]
That is, the substrate processing apparatuses 100 and 200 are provided with a plurality of spaces (hereinafter, referred to as “installable spaces”) in each of which a substrate processing unit for processing the substrate W can be installed. Between the apparatus 100 and the substrate processing apparatus 200, the spatial layout of a plurality of installable spaces is the same. In other words, the substrate processing apparatuses 100 and 200 are the same type of substrate processing apparatus (hereinafter, referred to as “the same type of substrate processing apparatus”) in which the spatial layout of the installable spaces at a plurality of locations is the same. I have.
[0027]
Therefore, each of the substrate processing apparatuses 100 and 200 has a similar structure such as a frame so that a plurality of substrate processing units for processing the substrate W can be arranged in the same predetermined space. .
[0028]
The indexer ID includes a transfer robot 40 that carries out and carries in the substrate W from the cassette 20. Specifically, the transfer robot 40 takes out the substrate W from the cassette 20 and transfers the substrate W to the transfer robot TR, or receives the substrate W on which a series of processing has been performed from the transfer robot TR. Work to return to.
[0029]
The transfer robot TR includes a moving body 11 having a gripper 10 having two arms for supporting the substrate W (only one arm is visible in the drawing). Then, the transfer robot TR transfers the substrate W between the substrate processing units provided in the first substrate processing unit area G1 and the second substrate processing unit area G2. That is, a series of processes are performed by transporting the substrate W to each substrate processing unit in a predetermined order by the transport robot TR.
[0030]
Next, the first and second substrate processing unit areas G1, G2 will be described.
[0031]
In the substrate processing apparatus 100 shown in FIG. 3, the first substrate processing unit area G1 includes a spin coater SC for performing a resist coating process and the like and a spin developer SD for performing a developing process. In the substrate processing apparatus 200 shown in FIG. 4, the first substrate processing unit area G1 includes the spin coater SC, but does not include the spin developer SD. That is, in the substrate processing apparatus 200, there is an empty installable space EM (hereinafter, referred to as “empty installable space”) EM in which the spin developer SD is not provided. Therefore, the arrangement of the substrate processing units in a plurality of installable spaces differs between the substrate processing apparatus 100 and the substrate processing apparatus 200. That is, the actual arrangement of the substrate processing units in a plurality of installable spaces is partially different.
[0032]
Further, in the second substrate processing unit area G2, the substrate processing apparatuses 100 and 200 shown in FIGS. 3 and 4 both perform hot plates HP1 to HP4 for performing various heat treatments, cool plates CP1 and CP2, and an adhesion strengthening unit AH1. , AH2.
[0033]
Although not shown in FIGS. 3 and 4, an interface for transferring the substrate W between the exposure apparatuses 150 and 250 is provided at the end opposite to the indexer ID (on the right side in the drawing). A unit is provided. The transfer of the substrate W between the substrate processing apparatuses 100 and 200 and the exposure apparatuses 150 and 250 according to the present embodiment is performed by cooperation of a transfer robot (not shown) and a transfer robot TR provided in the interface unit. Is done.
[0034]
In FIGS. 3 and 4, numbers U1 to U12 and numbers L1 to L12 shown in parentheses after the reference numbers of the respective substrate processing units indicate a unit number (unit number) and a layout number (layout number), respectively. Here, when the unit numbers are 1, 2, 3,..., They are indicated as U1, U2, U3,. , L2, L3,... These numbers are used by the host computer 500 and the control units CR1 and CR2 of the substrate processing apparatuses 100 and 200 to manage the respective substrate processing apparatuses 100 and 200. The management of each of the substrate processing apparatuses 100 and 200 using these numbers will be described later in detail, and first, what the unit numbers and layout numbers here are will be described.
[0035]
The unit number is generally a type of information for identifying a substrate processing unit assigned according to a rule determined for each substrate processing apparatus. That is, the unit number is information for mutually identifying a plurality of substrate processing units in the substrate processing apparatus. For example, when the substrate processing apparatus is viewed from the front, unit numbers are assigned in order from a small number to a large number sequentially from the left, from the near side, and from the bottom.
[0036]
FIGS. 5A and 5B show a unit number (indicated as “unit No.” in the figures) and a layout number (“layout No.” in the figures) in the substrate processing apparatus 100 and the substrate processing apparatus 200. FIG.
[0037]
As shown in FIG. 5A, for example, in the substrate processing apparatus 100 shown in FIG. 3, the indexer ID, the transfer robot TR, the spin coater SC, the spin developer SD, the cool plate CP1, the hot plate HP1, the hot plate HP2, and the cool plate Unit numbers U1 to U12 are assigned in order of CP2, hot plate HP3, hot plate HP4, adhesion strengthening unit AH1, and adhesion strengthening unit AH2.
[0038]
Further, as shown in FIG. 5B, for example, in the substrate processing apparatus 200 shown in FIG. 4, the indexer ID, the transfer robot TR, the spin coater SC, the cool plate CP1, the hot plate HP1, the hot plate HP2, the cool plate CP2, Unit numbers U1 to U11 are assigned to the hot plate HP3, the hot plate HP4, the adhesion enhancement unit AH1, and the adhesion enhancement unit AH2, respectively.
[0039]
Then, here, as shown in FIG. 5, when the substrate processing apparatus 100 shown in FIG. 3 is compared with the substrate processing apparatus 200 shown in FIG. The unit numbers are shifted one by one, and different unit numbers are assigned to the same space between the substrate processing apparatus 100 and the substrate processing apparatus 200. That is, the unit number is a number unique to each substrate processing apparatus. If the arrangement state of the substrate processing units differs between the substrate processing apparatuses, different unit numbers are assigned to the same space between the substrate processing apparatuses. It will be. That is, in the substrate processing apparatuses 100 and 200, a unit number is assigned irrespective of which installable space each substrate processing unit is arranged.
[0040]
On the other hand, the layout number relates to a characteristic portion of the present invention, and is information (first identification information) for mutually identifying the space in which the substrate processing units can be installed in the substrate processing apparatuses 100 and 200. In the substrate processing apparatuses 100 and 200, layout numbers are assigned to a plurality of installable spaces according to a common rule.
[0041]
On the other hand, as shown in FIG. 5A, for example, in the substrate processing apparatus 100 shown in FIG. 3, the indexer ID, the transfer robot TR, the spin coater SC, the spin developer SD, the cool plate CP1, the hot plate HP1, the hot plate HP2, Layout numbers L1 to L12 are assigned to the cool plate CP2, the hot plate HP3, the hot plate HP4, the adhesion strengthening unit AH1, and the adhesion reinforcement unit AH2, respectively, in this order.
[0042]
Further, as shown in FIG. 5B, in the substrate processing apparatus 200 shown in FIG. 4, the indexer ID, the transfer robot TR, the spin coater SC, the empty installable space EM, the cool plate CP1, the hot plate HP1, the hot plate HP2, Layout numbers L1 to L12 are assigned to the cool plate CP2, the hot plate HP3, the hot plate HP4, the adhesion strengthening unit AH1, and the adhesion reinforcement unit AH2, respectively, in this order.
[0043]
In other words, in these, irrespective of the type of the unit that each substrate processing unit is, regardless of the type of the unit, the layout is determined depending on which space in the apparatus is actually installed. A numbering rule that uses a position in a layout as an index, that is, a number is assigned, is applied. In other words, in the substrate processing apparatuses 100 and 200, the layout numbers are assigned to a plurality of installable spaces irrespective of the substrate processing units actually arranged in the plurality of installable spaces.
[0044]
Here, as shown in FIG. 5, when the substrate processing apparatus 100 shown in FIG. 3 is compared with the substrate processing apparatus 200 shown in FIG. 4, an installable space where no spin developer SD is provided (an empty installable space) Since EM) is also assigned a layout number (L4), the same space is assigned the same layout number to substrate processing apparatuses 100 and 200, which are the same type of substrate processing apparatus. That is, the layout number functions as information for identifying a plurality of installable spaces by a common rule when a plurality of the same type of substrate processing apparatuses 100 and 200 exist.
[0045]
As shown in FIGS. 3 and 4, an operation unit OP, a display unit DP, and a speaker SP are provided on the front side of the installable space where the indexer IDs of the substrate processing apparatuses 100 and 200 are provided. The operation unit OP functions as a part for inputting settings of various processes in the substrate processing apparatuses 100 and 200. The display unit DP displays various information related to information (hereinafter, referred to as “processing recipe”) indicating a flow of substrate processing in the substrate processing apparatuses 100 and 200, and displays information related to maintenance such as warnings and information indicating abnormalities in each unit. Functions as a display part. The speaker SP functions as a part that outputs a warning sound, a sound, or the like for warning the occurrence of an abnormality.
[0046]
Further, as shown in FIGS. 3 and 4, a control unit CR1 and a control unit CR2 are provided below the installable spaces where the indexer IDs of the substrate processing apparatuses 100 and 200 are provided. .
[0047]
<3. Functional configuration of substrate processing equipment>
6 and 7 are block diagrams showing the internal configurations of the substrate processing apparatus 100 and the substrate processing apparatus 200, respectively. In FIGS. 6 and 7, the same portions are denoted by the same reference numerals, and overlapping description will be omitted. Each substrate processing unit is given unit numbers U1 to U12 and layout numbers L1 to L12.
[0048]
As shown in FIG. 6, the substrate processing apparatus 100 mainly includes a control unit CR1, a storage unit 130, a display unit DP, a speaker SP, an operation unit OP, a mounting unit 160, and each substrate processing unit (ID, TR, SC). , SD, CP1, HP1, HP2, CP2, HP3, HP4, AH1, AH2). As shown in FIG. 7, the substrate processing apparatus 200 mainly includes a control unit CR2, a storage unit 130, a display unit DP, a speaker SP, an operation unit OP, a mounting unit 160, and each of the substrate processing units (ID, TR). , SC, CP1, HP1, HP2, CP2, HP3, HP4, AH1, AH2).
[0049]
The control units CR1 and CR2 are mainly composed of a CPU. The programs and the like stored in the storage unit 130 and the storage media 191 and 192 are read by the CPUs of the control units CR1 and CR2, so that the control units CR1 and CR2 operate in the control units CR1 and CR2. Various functions such as various controls are realized. The control units CR1 and CR2 are connected to the respective units in the substrate processing apparatuses 100 and 200 so as to be able to exchange data, and control the respective units in the substrate processing apparatuses 100 and 200 respectively.
[0050]
The storage unit 130 is a storage medium for storing various data, programs, and the like, and includes, for example, a nonvolatile storage medium such as a hard disk. The storage unit 130 also stores data indicating a processing recipe in the substrate processing apparatuses 100 and 200.
[0051]
The operation unit OP is a unit for inputting settings of various processes in the substrate processing apparatuses 100 and 200, and includes, for example, a liquid crystal touch panel and various buttons.
[0052]
The display unit DP is a part that displays various information related to a processing recipe indicating a flow of substrate processing in the substrate processing apparatuses 100 and 200, and displays information related to maintenance such as warnings and information indicating abnormalities of each unit. It is configured with a display and the like.
[0053]
The speaker SP is a portion that outputs a warning sound or a sound for warning an operator or the like of the occurrence of an abnormality in the substrate processing apparatuses 100 and 200, and includes a generally known speaker and the like.
[0054]
The mounting section 160 is a portion where a storage medium such as the optical disk 191 and the memory card 192 can be mounted.
[0055]
The substrate processing in each of the substrate processing units (ID, TR, SC, SD, CP1, HP1, HP2, CP2, HP3, HP4, AH1, and AH2) has been described above. Under the control, the operation of each substrate processing unit (ID, TR, SC, SD, CP1, HP1, HP2, CP2, HP3, HP4, AH1, AH2) is controlled.
[0056]
Although not shown, each of the substrate processing units (ID, TR, SC, SD, CP1, HP1, HP2, CP2, HP3, HP4, AH1, and AH2) includes a driving portion such as a motor and various other components. A sensor and the like are provided. For example, the cool plates CP1 and CP2, the hot plates HP1 to HP4, and the adhesion strengthening units AH1 and AH2 are provided with sensors such as thermometers. Further, the spin coater SC and the spin developer SD are provided with a sensor for measuring the number of rotations of the motor, a sensor for measuring the discharge amount of the resist and the chemical solution, and the like. Further, the indexer ID includes, for example, an encoder that detects the drive angle of the transfer robot 40, and the transfer robot TR also includes an encoder that detects the drive angle of the transfer robot TR.
[0057]
Each sensor provided in each of the above-described substrate processing units (ID, TR, SC, SD, CP1, HP1, HP2, CP2, HP3, HP4, AH1, AH2) has various measurement values in the control units CR1, CR2. Send Then, the control units CR1 and CR2 manage using a layout number as to which sensor processing input or the like is input from which substrate processing unit.
[0058]
The storage unit 130 stores which sensor is provided in which substrate processing unit, that is, a database (hereinafter, referred to as “database DB1”) that associates each sensor with each substrate processing unit. In the database DB1, each substrate processing unit is represented using the category of the substrate processing unit and the layout number. That is, the storage unit 130 stores a database DB1 that associates a layout number as first identification information with each sensor in order to identify a plurality of installable spaces of the substrate processing apparatuses 100 and 200.
[0059]
Here, the category of the substrate processing unit is, for example, ID, HP, CP, SC, SD, AH, etc. for the indexer, hot plate, cool plate, spin coater, spin developer, and adhesion strengthening unit, respectively. It will be.
[0060]
Further, when various measurement values and the like are input from each sensor provided in each substrate processing unit, the control units CR1 and CR2 are given a category of the substrate processing unit and a layout number based on the database DB1. It can be recognized whether the input is from the substrate processing unit.
[0061]
In the control units CR1 and CR2, for example, what kind of values of the various measurement values input from each sensor are, what kind of abnormality is occurring, and what kind of value is what kind of value. It is also possible to recognize whether a type of abnormality has occurred. The generation of the abnormality and the recognition of the type of the abnormality can be realized by, for example, operating the control units CR1 and CR2 based on various programs and data stored in the storage unit 130.
[0062]
When the control units CR1 and CR2 recognize the occurrence of the abnormality and the type of the abnormality in the substrate processing unit, the control unit CR1 displays a warning screen on the display unit DP and issues a warning from the speaker SP to notify the operator or the like of the occurrence of the abnormality. Control is performed so as to output a sound or a sound adapted to an abnormal situation.
[0063]
For example, when the control unit CR1 recognizes that the temperature of the hot plate HP1 is higher than the set temperature range based on the temperature input from the thermometer of the hot plate HP1, the board having the layout number L6 and the category HP is used. The processing unit can recognize that the temperature is excessively high. FIG. 8 is a diagram exemplifying a warning screen for notifying the abnormality displayed on the display unit DP at this time. As shown in FIG. 8, the warning screen includes, for example, in order from the top, a display LD of a layout number, a display of a category of a unit in which an abnormality has occurred (“hot plate (HP)” in the figure) UD, and a display of an abnormality. The display of the content (“excessive temperature increase” in the figure) TD is shown.
[0064]
As described above, the control units CR1 and CR2 manage the substrate processing apparatuses 100 and 200, respectively, based on the database DB1 in the storage unit 130. In other words, based on the layout number as the first identification information stored in the database DB1 stored in the storage unit 130, the control units CR1 and CR2 transmit information on maintenance such as abnormalities of the substrate processing apparatuses 100 and 200, respectively. Function as a means of managing
[0065]
Conventionally, when a substrate processing apparatus is managed by the above-described unit number, when an abnormality occurs in a certain substrate processing unit, a location where maintenance is to be performed based on a different unit number between the respective substrate processing apparatuses. It took time to identify the location, and it was a source of mistakes in identifying the location.
[0066]
In the present embodiment, assuming that a place is specified by a unit number, for example, when an abnormality occurs in the hot plate HP1, in the substrate processing apparatus 100, the unit number of the abnormal substrate processing unit becomes U6. In the substrate processing apparatus 200, the unit number of the abnormal substrate processing unit is U5. Therefore, by assigning different unit numbers to the same place in each substrate processing apparatus, it takes time to specify a place where maintenance is to be performed. In particular, when the number of substrate processing units provided in the substrate processing apparatus is very large, confusion is particularly caused, and the problem that it takes a long time to specify a place becomes remarkable.
[0067]
However, in the present embodiment, information related to maintenance such as abnormalities of the substrate processing apparatuses 100 and 200 is managed by the layout number. In the same type of substrate processing apparatuses 100 and 200, the same layout number is assigned to the same installable space. For this reason, for example, if an abnormality occurs in the hot plate HP1, in the substrate processing apparatus 100, the layout number of the substrate processing unit in which the abnormality has occurred is L6, and in the substrate processing apparatus 200, the layout number of the substrate processing unit in which the abnormality has occurred is also determined. The layout number is L6.
[0068]
Then, for example, a warning screen indicating information relating to the abnormality is displayed on the display unit DP, and the warning screen indicates which layout number of the substrate processing unit has caused the abnormality, so that the operator can easily determine where the abnormality has occurred. It can be grasped whether it has occurred. That is, it is possible to easily grasp a place requiring maintenance.
[0069]
Further, in the method of specifying a substrate processing unit by a unit number, even in the same type of substrate processing apparatus, if the arrangement status of the substrate processing units is different, the substrate processing apparatuses are different even in the same place. Since the unit number is assigned, every time the arrangement state of the substrate processing unit changes, it is necessary to recreate a design drawing or the like for each substrate processing apparatus, which requires a great deal of labor. In addition, it was difficult to identify the unit number of the substrate processing unit to be installed in which space during wiring, piping, and assembling unless the design drawings were recreated reliably. However, it has been difficult to specify the connection position and the assembly position of the wiring and piping.
[0070]
In such a situation, by specifying the installable space for installing the substrate processing unit by the layout number, if the same type of substrate processing apparatus is used, a different layout number is assigned to the same place in each substrate processing apparatus. Is not added, even if the arrangement state of the substrate processing unit changes, it is not necessary to largely change the design drawing. Furthermore, at the time of wiring, piping and assembly, it is possible to easily specify which substrate processing unit is to be installed in which installation space by using a layout number, so that the connection position and assembly position of wiring and piping can be easily determined. Can be identified.
[0071]
Also, by specifying the installable space for installing the substrate processing unit by the layout number, the connection position of the wiring and piping can be specified by the identification information including the layout number and the like. For example, a predetermined layout number can be assigned to the above. As a result, for the same type of substrate processing equipment, it is possible to use wiring cables and piping with the same layout number. You can also keep. In this way, by preparing the inventory of wiring cables and pipes in advance, the wiring cables and pipes are already completed at the time of ordering, so even if the deadline from the receipt of the order to the delivery of the substrate processing equipment is short, it can be easily done. It is possible to respond.
[0072]
<4. About processing recipe>
9 and 10 are diagrams for explaining the structure of data indicating the processing recipe for the substrate processing apparatuses 100 and 200 stored in the storage unit 512 and the storage unit 130. The processing recipe has flow recipe data 70 shown in FIG. 9 and processing data libraries 71 to 75 shown in FIG.
[0073]
The processing data libraries 71 to 75 illustrated in FIG. 10 store data (unit processing data) indicating processing conditions for each category of the substrate processing unit. In the present embodiment, five processing data libraries 71 to 75 corresponding to the five categories SC, SD, HP, CP, and AH of the substrate processing apparatuses 100 and 200 are prepared. Hereinafter, the processing data libraries 71 to 75 will be referred to as “SC library 71”, “SD library 72”, “HP library 73”, “CP library 74”, and “AH library 75”, respectively. .
[0074]
The SC library 71 has data indicating 99 processing conditions (for example, rotation speed, processing time, resist discharge amount, etc.) for the spin coater SC. The SD library 72 has data indicating 99 kinds of processing conditions (for example, rotation speed, processing time, chemical solution discharge amount, etc.) for the spin developer SD. The HP library 73, the CP library 74, and the AH library 75 indicate 99 processing conditions (plate temperature, processing conditions, and the like) for the hot plates HP1 to HP4, the cool plates CP1, CP2, and the adhesion strengthening units AH1, AH2, respectively. Has data.
[0075]
The flow recipe data 70 shown in FIG. 9 includes a flow number (indicated as “flow No.” in the figure), information for identifying a substrate processing unit (hereinafter, referred to as “processing unit information”), and processing data. No. (shown as “processing data No.” in the figure). Flow No. Indicates the order of transport of the substrates W in the substrate processing apparatuses 100 and 200. Further, the processing unit information includes information indicating the unit number of the substrate processing unit to which the substrate W is transferred and the category of the substrate processing unit.
[0076]
The processing data number indicates one processing data in the processing data libraries 71 to 75. For example, “SCL1” indicates first processing data of the SC library 71, and “HPL1” indicates first processing data of the HP library 73. In the flow recipe data 70, flow recipe data defining 99 different processing flows can be registered.
[0077]
When processing is performed according to the flow recipe data at the top of FIG. 9, the substrate W is transported in the order of the indexer ID, the hot plate HP, the cool plate CP, the spin coater SC, the hot plate HP, the cool plate CP, and the indexer ID. Is processed. When the flow number is 3 (third destination unit), the unit number is U5, which means the first cool plate CP1. The unit number at the flow number 4 is U3, which means the spin coater SC. The unit number is associated with a substrate processing unit for each of the substrate processing apparatuses 100 and 200, and is used when a processing recipe is copied between a plurality of substrate processing apparatuses 100 and 200.
[0078]
Note that the flow number and the processing unit information correspond to transfer order information indicating the order in which the substrate W is sequentially transferred to the plurality of substrate processing units. The processing data number and the processing data libraries 71 to 75 correspond to each substrate. This corresponds to processing condition information indicating processing conditions in the processing unit.
[0079]
In the present embodiment, under the control of the control units CR1 and CR2, a plurality of substrate processing apparatuses 100 and 200 can use a unit number by a known method as shown in Patent Literature 2 and use a unit number. The processing recipe is copied (hereinafter, referred to as “recipe copy”).
[0080]
FIG. 11 and FIG. 12 are diagrams for explaining the display of the flow recipe data before and after the recipe copy. 11 and 12 show an example in which a processing recipe used in the substrate processing apparatus 100 is copied to the substrate processing apparatus 200. Here, FIGS. 11A and 12A show flow recipe data of the substrate processing apparatus 100, and FIGS. 11B and 12B show flow recipe data of the substrate processing apparatus 200. Is shown. FIG. 11 illustrates processing unit information indicated by using a unit number, and FIG. 12 illustrates processing unit information indicated by using a layout number.
[0081]
As shown in FIG. 11A, the unit number of the processing unit information is indicated by U5 or more as shown in FIG. 11A, but after the copy, the unit number is displayed one smaller as shown in FIG. 11B. The Rukoto. Specifically, there is a difference in the unit number between the flow numbers 2, 3, 5, and 6 between FIGS. 11A and 11B. This is because the spin developer SD is installed in the substrate processing apparatus 100, but the spin developer SD is not installed in the substrate processing apparatus 200, as shown in FIG. , U4 and higher unit numbers are shifted one by one.
[0082]
Here, if the unit number is used for the processing unit information, at the time of recipe copying, flow recipe data as shown in FIG. 11A is displayed on the display unit DP of the substrate processing apparatus 100. Assuming that the flow recipe data as shown in FIG. 11B is displayed on the display unit DP of the substrate processing apparatus 200, the unit numbers of the processing unit information are different between the substrate processing apparatuses 100 and 200. The user feels that the flow recipe data has changed, which causes confusion.
[0083]
On the other hand, in the present embodiment, the unit numbers (second identification information) as shown in FIGS. 5A and 5B are stored in the storage units 130 of the substrate processing apparatuses 100 and 200, respectively. A database (hereinafter, referred to as “database DB2”) in which layout numbers correspond to each other is stored. Then, as shown in FIG. 12, when the flow recipe data is displayed on the display unit DP under the control of the control units CR1 and CR2, the processing unit information is changed from the unit number to the layout number based on the database DB2. Convert and display.
[0084]
That is, the recipe copy between the substrate processing apparatuses 100 and 200 is performed by a known method using a unit number shown in Patent Document 2. However, when the flow recipe data is displayed on the display unit DP of the substrate processing apparatuses 100 and 200, the flow recipe data is displayed using the layout numbers. In other words, in the substrate processing apparatuses 100 and 200, the processing recipe including the flow recipe data is managed based on the layout number.
[0085]
Further, here, in each of the substrate processing apparatuses 100 and 200, the control units CR1 and CR2 enable data management relating to a processing recipe such as a recipe copy to be performed based on the unit number. Display on the display unit DP is performed based on the layout number. That is, in each of the substrate processing apparatuses 100 and 200, the control units CR1 and CR2 also function as means for managing their own substrate processing apparatuses based on the unit number and the layout number stored in the storage unit 130.
[0086]
Therefore, as shown in FIG. 12, the same layout number is assigned to the substrate processing units installed in the same installable space between the substrate processing apparatuses 100 and 200 of the same type. Even if the layout status is different, for example, the layout number included in the processing unit information does not change before and after the recipe copy. As a result, the operator does not feel that the flow recipe data has changed, and does not cause confusion.
[0087]
Then, each of the substrate processing apparatuses 100 and 200 manages its own substrate processing apparatus based on the layout number and the unit number, thereby managing recipe copy and the like corresponding to the type of unit in the substrate processing apparatus. In addition, since both maintenance and processing recipe management corresponding to the space can be performed, handling of the substrate processing apparatus is facilitated.
[0088]
As described above, the substrate processing system 1 according to the present embodiment includes a plurality of substrate processing apparatuses 100 and 200 provided with a plurality of installable spaces where the substrate processing units can be installed. The spatial layout of the installable spaces at a plurality of locations is the same between the plurality of substrate processing apparatuses 100 and 200, but the actual arrangement of the substrate processing units in the installable spaces at the plurality of locations is partially. different. Further, in order to mutually identify the plurality of installable spaces, layout numbers are assigned to the plurality of installable spaces by a common rule for the plurality of substrate processing apparatuses 100 and 200, and based on the layout numbers. And various managements such as maintenance of the substrate processing apparatuses 100 and 200 and information on processing recipes. With such a configuration, various managements and the like can be performed according to the space in the substrate processing apparatuses 100 and 200. Therefore, the arrangement state of the substrate processing units between the substrate processing apparatuses 100 and 200 can be reduced. Even in the case where they differ, the substrate processing apparatuses 100 and 200 are managed in a manner that is easy for the user to understand, such as displaying information about maintenance and information about processing recipes based on the layout number. As a result, maintenance of the apparatus can be easily performed, and the substrate processing system 1 that can be easily handled can be provided.
[0089]
<5. Modification>
The embodiments of the present invention have been described above, but the present invention is not limited to the above-described contents.
[0090]
For example, in the above-described embodiment, a layout number is assigned to an installable space for installing a substrate processing unit that directly performs processing on a substrate W. However, the present invention is not limited to this, and a cabinet for installing a chemical solution is provided. By assigning layout numbers to spaces in which units other than the unit that directly processes the substrate W, such as (hereinafter, referred to as “chemical solution cabinet”), information on maintenance of the chemical solution cabinet based on the layout number, etc. May be managed.
[0091]
With such a configuration, the substrate processing unit, that is, a chemical solution cabinet or the like that has been conventionally managed in association with the unit number is also associated with the space of the substrate processing apparatuses 100 and 200, and information on maintenance is provided. Can be managed. As a result, even when the arrangement state of the substrate processing units differs between the substrate processing apparatuses 100 and 200, it is possible to easily manage the location of the chemical solution cabinet requiring maintenance.
[0092]
In the above-described embodiment, the actual arrangement of the substrate processing units in a plurality of installable spaces differs between the substrate processing apparatus 100 and the substrate processing apparatus 200 depending on the presence or absence of the spin developer SD. However, the present invention is not limited to this. For example, the actual arrangement of the substrate processing units in a plurality of installable spaces may be different depending on the presence or absence of the hot plate HP1. That is, it is sufficient that the actual arrangement of the substrate processing units in the plurality of installable spaces is different at least in part between the plurality of substrate processing apparatuses.
[0093]
In the above-described embodiment, the control units CR1 and CR2 of the substrate processing apparatuses 100 and 200 manage information related to the maintenance of the substrate processing apparatuses 100 and 200, respectively, based on the database DB1 stored in the storage unit 130. However, the present invention is not limited to this. For example, various measurement values from the sensors of the respective substrate processing units are transmitted from the control units CR1 and CR2 via the LAN 600 to the host computer 500, and the storage unit 512 includes the database DB1. In this manner, the control unit 511 of the host computer 500 may manage the information regarding the maintenance of the substrate processing apparatuses 100 and 200 in the same manner as the control units CR1 and CR2. At this time, information related to maintenance may be displayed on the display unit 530 of the host computer 500.
[0094]
Since the host computer 500 can obtain various measurement values from each sensor via the LAN 600 from both the control units CR1 and CR2, either one or both of the substrate processing apparatuses 100 and 200 can be obtained. With regard to, information about maintenance may be managed and displayed based on the layout number.
[0095]
Therefore, when a plurality of substrate processing apparatuses 100 and 200 are collectively managed at one place, even if the substrate processing apparatuses of the same type have different unit arrangements between the substrate processing apparatuses, the same space is required. If information related to maintenance is managed using unit numbers that are different from each other, it is particularly likely to cause confusion when specifying a place where maintenance is to be performed. On the other hand, in the case of the same type of substrate processing apparatuses 100 and 200, even if the arrangement status of the units is different between the respective substrate processing apparatuses, the information relating to the maintenance is managed by the layout number in which the same number is assigned to the same space. Then, it is extremely easy to specify a place where maintenance is to be performed.
[0096]
In the above-described embodiment, the control units CR1 and CR2 of the substrate processing apparatuses 100 and 200 manage information on the processing recipes of the substrate processing apparatuses 100 and 200 based on the database DB2 stored in the storage unit 130. However, the present invention is not limited to this. For example, the database DB2 is stored in the storage unit 512 of the host computer 500, and the control unit 511 of the host computer 500 determines the processing recipe of the substrate processing apparatuses 100 and 200 based on the database DB2. The flow recipe data may be displayed on the display unit 530. At this time, the control unit 511 of the host computer 500 displays the flow recipe data on the display unit 530 based on the database DB2, that is, the layout number, for one or both of the substrate processing apparatuses 100 and 200. You may do it.
[0097]
Therefore, when a plurality of substrate processing apparatuses are collectively managed at one place, even if the same type of substrate processing apparatus is used, if the unit arrangement status differs between the substrate processing apparatuses, different numbers are assigned to the same space. If the information on the processing recipe is managed by the unit number appended with, it is easy to cause confusion that the flow recipe data has changed when copying the processing recipe. On the other hand, in the case of the same type of substrate processing apparatuses 100 and 200, even if the arrangement status of the units is different between the respective substrate processing apparatuses, the flow recipe data is assigned to the same space with the same layout number. Management and display do not cause operator confusion.
[0098]
【The invention's effect】
As described above, according to the first and second aspects of the present invention, there are provided a plurality of substrate processing apparatuses provided with a plurality of spaces in which substrate processing units can be installed, and the plurality of substrate processing apparatuses are provided between the plurality of substrate processing apparatuses. If the actual layout of the substrate processing units in the plurality of spaces is at least partially different while the spatial layout of the plurality of spaces is the same, a plurality of By managing at least one substrate processing apparatus among a plurality of substrate processing apparatuses based on information allocated to a plurality of spaces according to a common rule for the substrate processing apparatus, It is possible to perform various kinds of management in accordance with the requirements for substrate processing. By easily manage understand location to a user, it is possible to provide an easy substrate processing system of handling.
[0099]
In particular, according to the second aspect of the present invention, in order to mutually identify a plurality of spaces, a plurality of substrate processing apparatuses are determined based on information assigned to the plurality of spaces by a common rule. By managing the information related to the maintenance of the substrate, the information related to the maintenance can be managed in association with the space of the substrate processing apparatus. Maintenance and the like can be easily performed.
[0100]
According to the third and fourth aspects of the present invention, a plurality of spaces in which the substrate processing unit in the own substrate processing apparatus can be installed are divided into a plurality of spaces irrespective of the processing units actually arranged. By managing its own substrate processing apparatus based on information allocated to a plurality of spaces to identify each other, it is possible to perform various kinds of management corresponding to the space in the substrate processing apparatus. Therefore, by managing the substrate processing apparatus in a manner that is easy for the user to understand, handling of the substrate processing apparatus can be facilitated.
[0101]
In particular, according to the fourth aspect of the present invention, a plurality of spaces where the substrate processing units in the own substrate processing apparatus can be installed are mutually distinguished irrespective of the processing units actually arranged. Irrespective of the information allocated to the plurality of spaces and the space in which each substrate processing unit in the own substrate processing apparatus is arranged, the plurality of substrate processing units in the own substrate processing apparatus. By managing its own substrate processing equipment based on the information allocated to mutually identify the equipment, both management corresponding to the type of unit in the substrate processing equipment and management corresponding to the space are possible Therefore, the substrate processing apparatus can be easily handled.
[0102]
Further, according to the invention of claim 5, the same effect as that of claim 1 can be obtained.
[Brief description of the drawings]
FIG. 1 is a conceptual diagram illustrating a configuration of a substrate processing system according to an embodiment of the present invention.
FIG. 2 is a block diagram illustrating a functional configuration of the substrate processing system.
FIG. 3 is a perspective view illustrating an example of a substrate processing apparatus.
FIG. 4 is a perspective view illustrating an example of a substrate processing apparatus.
FIG. 5 is a diagram illustrating how unit numbers and layout numbers are assigned.
FIG. 6 is a block diagram illustrating an internal configuration of the substrate processing apparatus.
FIG. 7 is a block diagram illustrating an internal configuration of the substrate processing apparatus.
FIG. 8 is a diagram exemplifying a warning screen for warning a malfunction;
FIG. 9 is a diagram for explaining flow recipe data and unit processing data.
FIG. 10 is a diagram for explaining flow recipe data and unit processing data.
FIG. 11 is a diagram illustrating display of a flow recipe after recipe copying.
FIG. 12 is a diagram illustrating display of a flow recipe after recipe copying.
[Explanation of symbols]
1 Substrate processing system
100,200 substrate processing equipment
130, 512 storage unit (storage means, identification information storage means)
511 control unit (management means)
530, DP display
CR1, CR2 control unit (management means, self-device management means)
L1 to L12 Layout number (first identification information)
U1 to U12 Unit number (second identification information)

Claims (5)

The substrate processing unit has a plurality of substrate processing apparatuses in which installable spaces are provided at a plurality of locations, and the spatial layout of the installable spaces at the plurality of locations is the same among the plurality of substrate processing apparatuses, A substrate processing system in which actual arrangement states of the substrate processing units in a plurality of installable spaces are different at least in part between the plurality of substrate processing apparatuses,
Storage means for storing identification information of the plurality of installable spaces,
Management means for managing at least one substrate processing apparatus among the plurality of substrate processing apparatuses, based on the identification information stored in the storage means;
With
A substrate processing system, wherein the assignment of the identification information to the plurality of installable spaces is performed according to a common rule for the plurality of substrate processing apparatuses. The substrate processing system according to claim 1,
The management means,
A substrate processing system, wherein information related to maintenance of at least one of the plurality of substrate processing apparatuses is managed based on the identification information stored in the storage unit. A substrate processing apparatus that can be used for the substrate processing system according to claim 1,
The plurality of installable spaces are allocated to the plurality of installable spaces independently of the substrate processing units actually arranged in the plurality of installable spaces in the own substrate processing apparatus, and the plurality of installable spaces are mutually identified. Identification information storage means for storing first identification information;
A self-device management unit that manages its own substrate processing apparatus based on the first identification information stored in the identification information storage unit;
A substrate processing apparatus comprising: The substrate processing apparatus according to claim 3, wherein
The identification information storage means,
Said first identification information;
Second identification information assigned to each substrate processing unit in its own substrate processing apparatus irrespective of in which space the substrate processing unit is placed, and for mutually identifying a plurality of substrate processing units in its own substrate processing apparatus. When,
Are stored in association with each other,
The self-device management means,
A substrate processing apparatus that manages its own substrate processing apparatus based on the first and second identification information stored in the identification information storage unit. The substrate processing unit has a plurality of substrate processing apparatuses in which installable spaces are provided at a plurality of locations, and the spatial layout of the installable spaces at the plurality of locations is the same among the plurality of substrate processing apparatuses, A method for managing a substrate processing system in which actual arrangement states of substrate processing units in a plurality of installable spaces are different at least in part between the plurality of substrate processing apparatuses,
A first step of storing identification information of the plurality of installable spaces attached by a common rule for the plurality of substrate processing apparatuses;
A second step of managing at least one of the plurality of substrate processing apparatuses based on the identification information stored in the storage unit;
A method for managing a substrate processing system, comprising:

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