JP2003022188A - Substrate processing system, method for managing substrate processor, substrate processor, program, and recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate processing system capable of previously preventing the generation of a fault due to mismatching between individual software modules when a software module is installed in a substrate processor. SOLUTION: When a software module 128 is installed in a system control part 100 or a unit control part 115 of a substrate processor 1, the version information of software modules 128 respectively installed in the system control part 100 and the unit control part 115 is stored to construct a version management table 241. A consistency checking part 235 checks the consistency of individual software modules from the table 241 while referring to a check table 242 registering the version information of the software modules 128 having mutual consistency.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate processing apparatus for performing a predetermined process on a semiconductor substrate, a glass substrate for a liquid crystal display device, a glass substrate for a photomask, a substrate for an optical disk, etc. The present invention relates to a network communication technology in which a computer and a computer are connected via a network.

[0002]

2. Description of the Related Art Products such as semiconductors and liquid crystal displays are manufactured by subjecting a substrate to a series of treatments such as cleaning, resist coating, exposure, development, etching, interlayer insulating film formation, and heat treatment. . Conventionally, these various processes have been performed in a substrate processing apparatus incorporating a resist coating processing unit, a development processing unit and the like.
A transfer robot provided in the substrate processing apparatus sequentially transfers the substrate to each processing unit, whereby a series of processing is performed on the substrate.

Such substrate processing is automatically controlled. Generally, the substrate processing apparatus includes a system controller for controlling the entire apparatus and a unit controller for individually controlling each processing unit. The control software installed in the substrate processing apparatus is composed of software modules installed in each of the system control unit and the unit control unit. That is, a system control system that controls the entire apparatus is constructed by the software modules installed in the system control unit, and a unit control system that individually controls each processing unit is constructed by the software modules installed in each unit control unit. It has been done.

Each of the software modules installed in the system control unit and the unit control unit has its own version. Then, each software module is systematically upgraded. Also, in the factory where the substrate processing equipment is installed,
For the convenience of support, the version of a specific software module may be temporarily changed.

[0005]

What is important when performing such a version change of software modules is to maintain consistency among all software modules installed in one substrate processing apparatus. . If the consistency between the software modules is not maintained, the substrate processing apparatus may malfunction or stop due to a trouble in the control system. Therefore, when the software module is planned to be upgraded, it is planned to maintain the consistency among the software modules.

However, an erroneous version of the software module may be installed due to a mistake in the installation operation when upgrading the version of the software module. Further, when the version of a specific software module is temporarily changed at the support site, the module configuration may be different from the planned module configuration. In these cases, the consistency among the software modules may not always be maintained, and there is a problem that a device failure such as a malfunction or a stop occurs.

Further, when a failure occurs in the substrate processing apparatus, unless the version information of the software module mounted on the apparatus is promptly and accurately grasped, it takes a long time to analyze the cause of the failure. There was also a problem.

The present invention has been made in view of the above problems, and is a technique capable of preventing a failure due to a mismatch between software modules when the software modules are installed in the substrate processing apparatus. The purpose is to provide.

Another object of the present invention is to provide a technique capable of quickly and accurately grasping version information of software modules installed in a substrate processing apparatus.

[0010]

In order to solve the above-mentioned problems, the invention according to claim 1 provides a processing unit for performing a predetermined processing on a substrate, a system control unit for controlling the entire apparatus, and the processing unit separately. In a substrate processing system in which a substrate processing apparatus including a unit control unit for controlling and a computer are connected via a network, when a software module is installed in the system control unit or the unit control unit, at that time, The system control unit and the unit control unit are provided with a consistency confirmation means for confirming the consistency of the software modules installed in each.

According to a second aspect of the present invention, in the substrate processing system according to the first aspect of the present invention, when a software module is installed in the system control section or the unit control section in the consistency confirmation means,
At that time, the consistency is confirmed based on the version information of the software modules installed in each of the system control unit and the unit control unit.

According to a third aspect of the present invention, in the substrate processing system according to the second aspect of the present invention, when a software module is installed in the system control unit or the unit control unit, the system control unit at that time. And version information storage means for storing version information of the software modules installed in each of the unit control units.

According to a fourth aspect of the invention, in the substrate processing system according to the third aspect of the invention, there is further provided a table holding means for holding a consistency confirmation table in which version information of software modules having mutual compatibility is registered. In the consistency check means, all the version information of the software modules installed in the system control section and the unit control section stored in the version information storage section are all registered in the consistency check table. If yes, it means that there is consistency, and in other cases, there is no consistency.

According to a fifth aspect of the invention, in the substrate processing system according to the fourth aspect of the invention, when the matching confirmation means determines that there is no matching, a mismatch notification is sent to the computer via the network. A notification means is further provided.

Further, the invention according to claim 6 is provided with a processing unit for performing a predetermined processing on the substrate, a system control unit for controlling the entire apparatus, and a unit control unit for individually controlling the processing unit. In a substrate processing system in which a processing device and a computer are connected via a network, version information storage means for storing version information of software modules installed in the system control unit and the unit control unit, and the version information storage unit. An information storage server having a version information disclosure unit that enables the computer to view the version information stored in the computer via the network.

According to a seventh aspect of the present invention, in the substrate processing system according to the sixth aspect, when a software module is installed in the system control section or the unit control section,
At that time, version information of the software modules installed in the system control unit and the unit control unit is sent to the information storage server, and the sent version information is sent to the version information storage means. It is accumulating.

According to an eighth aspect of the present invention, in the substrate processing system according to the seventh aspect, when a software module is installed in the system control unit or the unit control unit in the information storage server,
Software installed in each of the system control unit and the unit control unit by referring to the version information of the software modules installed in the system control unit and the unit control unit stored in the version information storage unit It further comprises a consistency confirmation means for confirming the consistency of the modules.

According to a ninth aspect of the present invention, in the substrate processing system according to the eighth aspect of the invention, the information storage server holds a consistency confirmation table in which version information of software modules having mutual compatibility is registered. Further comprising table holding means for storing the version information of the software modules installed in each of the system control section and the unit control section stored in the version information storage section in the consistency check section. If it is registered in the consistency confirmation table, it means that there is consistency, and otherwise, it means that there is no consistency.

According to a tenth aspect of the invention, in the substrate processing system according to the eighth aspect of the invention, a table holding a consistency confirmation table in which version information of mutually compatible software modules is registered in the computer. A holding unit is further provided, and is installed in each of the system control unit and the unit control unit stored in the version information storage unit while making the consistency confirmation unit refer to the consistency confirmation table via a network. If all the version information of the software modules being registered are registered in the consistency confirmation table, it is determined that there is consistency, and otherwise, there is no consistency.

According to the invention of claim 11, in the substrate processing system according to the invention of claim 9 or 10, the information storage server is configured to connect the network when the consistency check means indicates no consistency. It further comprises a notification means for notifying the computer via the inconsistency.

The invention according to claim 12 further comprises a processing unit for performing a predetermined processing on the substrate, a system control unit for controlling the entire apparatus, and a unit control unit for individually controlling the processing unit. In a substrate processing apparatus management method for managing a processing apparatus, when a software module is installed in the system control section or the unit control section, it is installed in each of the system control section and the unit control section at that time. It has a step of confirming the consistency of the software module.

According to a thirteenth aspect of the present invention, in the substrate processing apparatus management method according to the twelfth aspect of the invention, the confirmation of the consistency is performed by software installed in each of the system control unit and the unit control unit. It is done based on the version information of the module.

Further, the invention according to claim 14 is provided with a processing unit for performing a predetermined processing on the substrate, a system control unit for controlling the entire apparatus, and a unit control unit for individually controlling the processing unit. In the processing device, when a software module is installed in the system control unit or the unit control unit, the consistency of the software modules installed in the system control unit and the unit control unit at that time is confirmed. Equipped with a consistency confirmation means.

According to a fifteenth aspect of the present invention, in the substrate processing apparatus according to the fourteenth aspect, when a software module is installed in the system control section or the unit control section in the consistency confirmation means,
At that time, the consistency is confirmed based on the version information of the software modules installed in each of the system control unit and the unit control unit.

According to a sixteenth aspect of the present invention, in the substrate processing apparatus according to the fifteenth aspect of the present invention, when a software module is installed in the system control unit or the unit control unit, the system control unit is activated at that time. And version information storage means for storing version information of the software modules installed in each of the unit control units.

According to a seventeenth aspect of the present invention, in the substrate processing apparatus according to the sixteenth aspect of the present invention, there is further provided a table holding means for holding a consistency confirmation table in which version information of software modules having mutual compatibility is registered. In the consistency check means, all the version information of the software modules installed in the system control section and the unit control section stored in the version information storage section are all registered in the consistency check table. If yes, it means that there is consistency, and in other cases, there is no consistency.

Further, the invention of claim 18 includes a processing unit for performing a predetermined processing on the substrate, a system control unit for controlling the entire apparatus, and a unit control unit for individually controlling the processing unit. In the processing device, when a software module is installed in the system controller or the unit controller in the system controller, the version of the software module installed in the system controller and the unit controller at that time Sending information.

The invention according to claim 19 is executed by a computer provided in the substrate processing apparatus,
The substrate processing apparatus is a program which operates as the substrate processing apparatus according to any one of claims 14 to 18.

The invention of claim 20 is a computer-readable recording medium in which the program according to claim 19 is recorded.

[0030]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

<1. Overall System Configuration> First, an outline of the entire substrate processing system 10 according to the present invention will be described. FIG. 1 is a diagram showing a schematic configuration of a substrate processing system 10 according to the present invention. As shown in FIG. 1, the substrate processing system 10 includes a plurality of substrate processing apparatuses 1 and an information storage server 2 provided in a substrate processing factory 4, and a failure analysis person who analyzes a failure of the substrate processing apparatus 1. A support computer 3 provided in a support center 5 is connected via a network 6.

In the substrate processing system 10, the version information of the software module installed in the substrate processing apparatus 1 is stored in the information storage server 2, and the stored version information is supported via the network 6. It can be browsed on the computer 3.

In the substrate processing factory 4, the substrate processing apparatus 1
The information storage server 2 is a LAN (Local Area Network) 4
1 is connected. The LAN 41 is connected to a wide area network 61 such as the Internet via a connection device 42 having a function such as a router or a firewall. The support center 5 also has a LAN 51 to which the support computer 3 is connected,
The N51 is also connected to the wide area network 61 via a connection device 52 having functions such as a router and a firewall. As a result, various data communication can be performed among the substrate processing apparatus 1, the information storage server 2, and the support computer 3. LAN4 in this specification
1, 51 and the wide area network 61 are collectively referred to simply as the network 6.

In FIG. 1, the substrate processing factory 4 is provided with a plurality of substrate processing apparatuses 1, but the number of the substrate processing apparatuses 1 may be one. Although the computer 3 is provided, the number of the support computer 3 may be one.

<2. Substrate Processing Apparatus> Next, the substrate processing apparatus 1 arranged in the substrate processing factory 4 will be described. Figure 2
FIG. 3 is a schematic plan view of the substrate processing apparatus 1. The substrate processing apparatus 1 is an apparatus that performs a resist coating process, a developing process, and a heat treatment accompanying them on a substrate. The substrate processing apparatus 1 dispenses an unprocessed substrate from a carrier, receives a processed substrate and stores it in the carrier, and an indexer ID that rotates the substrate and drops a photoresist on the main surface of the substrate to apply a resist. The coating processing unit SC (so-called spin coater) that performs the developing process, the development processing unit SD (so-called spin developer) that performs the developing process by supplying the developing solution onto the exposed substrate, the indexer ID and the substrate between the processing units. And a transport robot TR for transporting. Further, a heat treatment unit (not shown) is arranged above the coating processing unit SC and the development processing unit SD with the fan filter unit interposed therebetween. As the heat treatment unit, a heating unit that performs heat treatment on the substrate (so-called hot plate)
And a cooling unit (so-called cool plate) for cooling the heated substrate to a constant temperature is provided.
In this specification, the coating processing unit SC, the development processing unit SD, and the thermal processing unit are collectively referred to as a processing unit 110 that performs a predetermined processing on a substrate.

FIG. 3 is a block diagram showing the configuration of the control system of the substrate processing apparatus 1. As shown in FIG. 3, the control system of the substrate processing apparatus 1 includes a system control unit 100 that controls the entire apparatus and a unit control unit 115 that individually controls a plurality of processing units 110.

The system control section 100 controls the entire apparatus in a centralized manner and comprises a microcomputer. Specifically, the CPU that is the main body
101, a ROM 102 that is a read-only memory that stores a basic program and the like, a RAM 103 that is a readable and writable memory that mainly serves as a work area for calculation, a storage unit 104 that includes a fixed disk that stores software modules, and the like. A communication unit 105 that performs data communication with an external device is provided, and each is connected by a bus line 190.

The communication unit 105 is connected to the network 6 via a network interface (not shown), whereby the substrate processing apparatus 1 sends and receives various data to and from the information storage server 2 and the support computer 3. Is possible. The communication method performed by the communication unit 105 via the network 6 may be wired or wireless.
In this embodiment, a wired communication method is adopted.

The bus line 190 has a system controller 1
00 and the plurality of processing units 110, a display unit 130 for displaying various kinds of information, and an operation unit 14 for receiving a recipe input and a command operation from an operator.
0, a recording medium 91 such as a magnetic disk or a magneto-optical disk
A reading device 150 and the like for reading various types of data are also electrically connected. As a result, under the control of the system control unit 100, data can be transferred between the respective units of the substrate processing apparatus 1 via the bus line 190.

The processing unit 110, together with the substrate processing unit 116, which is a mechanism for actually processing the substrate (for example, a mechanism for rotating the substrate, a mechanism for discharging the processing liquid onto the substrate, a mechanism for heating the substrate, etc.), A unit controller 115 is provided. The unit controller 115 includes the processing unit 11
0 is individually controlled, and specifically, operation control and operation monitoring of the substrate processing unit 116 of the processing unit 110 in which the unit control unit 115 is incorporated are performed. That is,
The system control unit 100 described above is responsible for overall control of the entire substrate processing apparatus 1, and the unit control unit 115 is responsible for performing control according to the processing content of the substrate processing unit 116. The unit control unit 115 is configured to include a microcomputer similarly to the system control unit 100, and specifically, the CPU 1 that is the main unit thereof.
11, a ROM 112 that is a read-only memory that stores basic programs, a RAM 113 that is a readable / writable memory that serves as a work area for computation, and a battery-backed SRAM that stores various data.
And a storage unit 114 including the above.

The storage unit 104 of the system control unit 100 stores a software module which is a system control program relating to the entire apparatus. The CPU 101 of the system control unit 100 executes arithmetic processing according to this software module, whereby the overall operation control and data processing of the substrate processing apparatus 1 are realized. In addition, the storage unit 1 of the unit control unit 115
14 is a substrate processing unit 116 of the processing unit 110.
A software module that is a unit control program corresponding to the processing content of is stored. The CPU 111 of the unit controller 115 executes arithmetic processing according to this software module, so that the substrate processing unit 1
16 operation controls and data processing will be realized.

That is, the control program implemented in the substrate processing apparatus 1 is divided into some software modules and stored in the storage unit 104 of the system control unit 100 or the storage unit 114 of the unit control unit 115. A software module is a division of such control software for the substrate processing apparatus 1.

Note that these software modules are read from the recording medium 91 via the reading device 150, or from a predetermined server storage device or the like to the network 6.
It is possible to obtain and update by downloading via.

<3. Information Storage Server and Support Computer> Next, the information storage server 2 arranged in the substrate processing factory 4 and the support computer 3 arranged in the support center 5 will be described. The information storage server 2 and the support computer 3 have the same hardware configuration as a general computer. Therefore, since the basic configurations of the information storage server 2 and the support computer 3 are the same, description will be given with reference to the same schematic drawing of FIG. As shown in FIG. 4, each of the information storage server 2 and the support computer 3 has a CPU (CPU in the information storage server 2 that performs various arithmetic processes.
21, CPU 31 in the support computer 3, the same below), ROM (22, 32) for storing basic programs
Also, the RAM (23, 33) for storing various information is connected to the bus line. In addition, a fixed disk (24, 3) that stores various information is provided on the bus line.
4), a display (25, 3) for displaying various information
5), a keyboard that accepts input from the operator (26
a, 36a) and mouse (26b, 36b), optical disk, magnetic disk, magneto-optical disk or other recording medium 91.
Reading device (27,3) that reads various data from
7) and communication units (28, 38) that communicate with external devices via the network 6 are appropriately connected via an interface (I / F) or the like.

The information storage server 2 and the support computer 3 can read the program from the recording medium 91 via the reading device (27, 37) and store it in the fixed disk (24, 34). It can also be downloaded from another server or the like via the network 6 and stored in the fixed disk (24, 34). And CP
Various operations are performed by U (21, 31) executing arithmetic processing according to a program stored in the fixed disks (24, 34). That is, as a result of executing the arithmetic processing according to this program, the information storage server 2 operates as the information storage server 2, and the support computer 3 becomes the support computer 3.
Will be performed.

<4. Functions and Processing Contents of System> The substrate processing system 10 and the substrate processing apparatus 1, the information storage server 2, and the support computer 3 which constitute the substrate processing system 10
Having described the hardware configuration of the above, the function and processing contents of the substrate processing system 10 will be described next.
FIG. 5 is a functional block diagram showing a functional configuration of the substrate processing system 10. Further, FIG. 6 shows the substrate processing system 10.
3 is a flowchart showing a processing procedure in FIG. In addition,
In FIG. 5, the version information sending unit 125 is a processing unit realized by the CPU 101 of the system control unit 100 executing a processing program (software module), and includes a version information registration unit 231, a mail sending unit 232, and a consistency check. Section 235 and information disclosure section 23
Reference numeral 6 denotes a processing unit realized by the CPU 21 of the information storage server 2 executing the processing program. The mail receiving unit 311 and the WEB browser 312 are realized by the CPU 21 of the information storage server 2 executing the processing program. The processing unit is

First, in step S1 of FIG. 6, the software module 128 is installed in the substrate processing apparatus 1. As described above, the software module 128 is a division of the control software of the substrate processing apparatus 1, and is installed in the system control unit 100 and / or the unit control unit 115 of the substrate processing apparatus 1.
More specifically, the software module 128 is installed via the reading device 150 of the substrate processing apparatus 1, and the software module 128 installed in the system control unit 100 is stored in the storage unit 104.
The software module 128 installed in the unit control unit 115 is stored in the storage unit 114.

Here, the installation of the software module 128 in this embodiment includes not only the case of newly introducing the software module 128 but also the case of updating the already installed software module 128 (upgrading). Be done. Further, the software module 128 may be installed to all the system control units 100 and unit control units 115 included in one substrate processing apparatus 1 all at once, or one of them ( It may be performed for one or more).

When the software module 128 is installed in at least either the system control unit 100 or the unit control unit 115, the version information transmission unit 125 collects version information and collects the version information.
(Step S2). That is, when the software module 128 is installed in the system control unit 100, the version information sending unit 125 directly recognizes the installation. Further, when the software module 128 is installed in the unit control unit 115, the version information sending unit 125 which has received a self-report from the unit control unit 115 recognizes the installation. And
In a certain substrate processing apparatus 1, the version information sending unit 125 that recognizes that the software module 128 is installed in at least either the system control unit 100 or the unit control unit 115 is included in the substrate processing apparatus 1 at that time. By collecting the version information of the software modules installed in the system control unit 100 and all unit control units 115,
It is sent to the version information registration unit 231 of the information storage server 2.

The version information registration unit 231 that has received the transmission
Is a system control unit 1 included in the substrate processing apparatus 1 described above.
00 and version information of software modules installed in all unit control units 115 are registered in the fixed disk 24 (step S3). In the fixed disk 24, version information about each substrate processing apparatus 1 is stored as a version management table 241.

FIG. 7 is a diagram showing an example of the version management table 241. In the figure, “apparatus” indicates the identification number given to each substrate processing apparatus 1, “system version” indicates the version of the entire system mounted by the substrate processing apparatus 1, and “installation date / time” is at least the system control unit. The date and time when the software module 128 is installed in either 100 or the unit controller 115 is shown. Further, "category" indicates the type of the installed software module 128, "version classification" indicates whether the installed software module 128 is of the standard specification or the custom-made specification, and "version" Is the installed software module 128
Shows the version information of.

As shown in FIG. 7, in the version management table 241, version information is registered for each substrate processing apparatus 1 arranged in the substrate processing factory 4. For example,
Regarding the substrate processing apparatus 1 having the apparatus number “8101”, the system version “1.00” is set on April 1, 2001.
It is recorded that the software module 128 was installed on the 2nd. And the device number "8"
The software module 128 installed in the system control unit 100 of the 101 ″ substrate processing apparatus 1.
As the version information of (category "system control"), the version of the software module 128 is "
It is also registered that the version classification of the software module 128 is "standard".

Further, the version information of the software module 128 (category "spin control", "chemical solution control", etc.) installed in the unit controller 115 of the substrate processing apparatus 1 having the apparatus number "8101" is stored as the version information of the software module 128. Each version ”
It is registered that they are 1.1.0.1 "and" 1.0.0.3 ".
It is also registered that the 8 version categories are "standard" and "custom-order E".

Similarly, regarding the substrate processing apparatus 1 having the apparatus number “8100”, the software version 1 is set on April 12, 2001 as the system version “1.00”.
It is recorded that 28 installations have been performed, and then the system version "1.10" is set to 20.
It is recorded that the software module 128 was installed on April 20, 2001. That is, the version management table 241 records not only version information for each substrate processing apparatus 1 at that time but also past version history. In other words, the fixed disk 24 of this embodiment functions as version information storage means for storing version information of the software module 128 installed in the system control unit 100 and the unit control unit 115.

Version management table 2 as shown in FIG.
41 is a software module 12 in the substrate processing apparatus 1.
8 is installed as a result of accumulating the version information of the software modules 128 installed in the system control unit 100 and all unit control units 115 at that time. For example, regarding the substrate processing apparatus 1 having the apparatus number “8101”, on April 12, 2001, a new software module (version “1.0.0.
3 ”) is installed in the unit controller 115, the software installed in the system controller 100 and all the unit controllers 115 included in the substrate processing apparatus 1 having the apparatus number“ 8101 ”as of April 12. The version information of the module 128 is accumulated in the fixed disk 24, and the version management table 241 as shown in FIG. 7 is constructed.

On the other hand, the version information registration section 231 registers the version information of the software module 128 in the fixed disk 24, and also notifies the mail transmission section 232 of the registration. Software module 1
Receiving that the 28 version information is registered in the fixed disk 24, the mail transmitting section 232 transmits an electronic mail stating that the new version is registered to the support computer 3 of the support center 5 via the network 6. (Step S4 of FIG. 6). When the mail receiving unit 311 of the support computer 3 receives the e-mail about the new version registration, the person in charge at the support center 5 can know from the support computer 3 that the software module 128 is installed in the substrate processing apparatus 1. it can.

Next, in step S5 of FIG. 6, the consistency check unit 235 of the information storage server 2 checks the consistency of the newly installed software module 128. More precisely, when the software module 128 is installed in the system control unit 100 or the unit control unit 115, the system control unit 100 and the unit control unit 115 stored in the fixed disk 24.
Software module 12 installed in
8 and refers to the version information of 8 to check the mutual consistency of the software modules 128 installed in the system control unit 100 and the unit control unit 115 at that time (immediately after the installation).
5 confirms. Software module 128
When a part of the software is updated, the installed software module 128 and the system control unit 10 are
0 and the unit control unit 115 and the software module 128 already installed, the consistency checking unit 235 checks the mutual compatibility. This confirmation method will be described more specifically.

A system controller 10 of a substrate processing apparatus 1.
0 or when the software module 128 is installed in the unit control unit 115, the consistency check is performed on the version information of the software module 128 installed in the system control unit 100 and the unit control unit 115 at that time (immediately after the installation). It can be recognized by the unit 235 referring to the version management table 241. For example, the unit controller 11 of the substrate processing apparatus 1 having the apparatus number “8101”
Assuming that a new software module (version “1.0.0.3”) for the category “Chemical solution control” is installed in item 5, the consistency check unit 235 refers to the version management table 241 in FIG. , The software module 128 (category “installed” in the system control unit 100 at that time)
The system control ") version information is version" 1.
The unit controller 11 recognizes that it is 0.0.1 ".
Software module 1 installed on 5
28 (category “spin control”, “chemical solution control”, etc.) version information is version “1.1.0.
1 ", version" 1.0.0.3 ", etc. can be recognized.

The fixed disk 2 of the information storage server 2
In FIG. 4, a confirmation table 242 is stored. Figure 8
FIG. 8 is a diagram showing an example of a confirmation table 242. In the figure, "system version", "category",
The meanings of “version classification” and “version” are the same as explained in FIG. 7. The "release information" is a comment statement about each system version. The confirmation table 242 is prepared for each system version. In FIG. 8, the system version "1.0" is set.
The confirmation table 242 for "0" is shown.

The confirmation table 242 is a consistency confirmation table in which version information of software modules 128 having mutual compatibility is registered, and the fixed disk 24
Also functions as table holding means for holding such a consistency confirmation table. Confirmation table 24 of FIG.
According to 2, in the system version "1.00", the software module 128 of the category "system control" (version "1.0.0.1") is the software module 128 of the category "spin control" (version "1"). 1.0.1 "," 1.1.
0.2 ") and software module 128 (version" 1.0.0.3 ") of category" Chemical control "
Etc. are confirmed to be consistent with each other. At the same time, they are software modules 128 (version “1.0.0.2”) of the category “system control”
Are also compatible with each other. That is, if all the version information of the software module 128 installed in the system control unit 100 and the unit control unit 115 of a certain substrate processing apparatus 1 is registered in the confirmation table 242, they have mutual consistency. It becomes.

Note that such a confirmation table 242 is created and distributed by the manufacturer of the substrate processing apparatus 1, and in this embodiment, the support computer 3 of the support center 5 and the substrate processing factory 4 via the network 6 are used. Is distributed to the information storage server 2.

The consistency confirmation section 235 is a system control section 100 or a unit control section 115 of a certain substrate processing apparatus 1.
When the software module 128 is installed in the software, all the version information of the software module 128 installed in the system control unit 100 and the unit control unit 115 recognized by referring to the version management table 241 is confirmed as shown in FIG. It is confirmed whether or not it is registered in the table 242.
As a result, if all the version information of the software modules 128 installed in the system control unit 100 and the unit control unit 115 are registered in the confirmation table 242, it is determined that there is consistency, and even one confirmation table is used. If it is not registered in 242, it is determined that there is no consistency (step S6 in FIG. 6).

For example, in the unit control section 115 of the substrate processing apparatus 1 having the above-mentioned apparatus number "8101", the category "
In an example in which a new software module (version “1.0.0.3”) for “chemical control” is installed, the software module 128 (category “128” installed in the system control unit 100 of the substrate processing apparatus 1). The version information of the system control “) is the version“ 1.0.0.1 ”, and the unit control unit 115
Software module 12 installed in
8 (category "spin control", "chemical solution control", etc.) version information is version "1.1.0."
1 ”, version“ 1.0.0.3 ”, etc. (FIG. 7). Since all of this version information is registered in the confirmation table 242 (system version“ 1.00 ”) of FIG. The sex confirmation unit 235 is a newly installed software module 128 (category "
It is determined that the chemical liquid control “, version“ 1.0.0.3 ”) matches the software module 128 already installed in the system control unit 100 or the unit control unit 115.

If it is determined that there is consistency, as in the above example, the series of processes associated with the installation of the new software module 128 ends. On the other hand, the consistency check unit 235 may determine that there is no consistency.

For example, a new software module (version classification “custom-made F”, version “1.0.0.4”) for the category “chemical solution control” is added to the unit controller 115 of the substrate processing apparatus 1 having the apparatus number “8101”. )) Is installed. At this time, the version information of the software modules 128 installed in the system control unit 100 and all unit control units 115 included in the substrate processing apparatus 1 having the apparatus number “8101” at the time of installation is fixed disk 24 as in the above case. Are stored in a version management table 241 as shown in FIG.

In this case, the consistency check unit 235 refers to the version management table 241 in FIG.
The version information of the software module 128 (category “system control”) installed in the system control unit 100 is version “1.0.0.
1 ", and the version information of the software module 128 (category" spin control "," chemical solution control ", etc.) installed in the unit controller 115 is version" 1.1.0.1 ", It recognizes that the version is “1.0.0.4”, etc. Then, the consistency check unit 235 determines that the software module 128 (category “chemical solution control”) installed in the unit control unit 115 among these version information. Since the version "1.0.0.4" of ") is not registered in the confirmation table 242 (system version" 1.00 ") of FIG. 8, the newly installed software module 128 is the system control unit 100 or The software module 12 already installed in the unit controller 115 It determines not to align with.

As described above, when the consistency check unit 235 determines that there is no consistency, the consistency check unit 235 notifies the mail transmission unit 232 of the fact and sends an e-mail describing the inconsistency notice to the support computer 3 of the support center 5. Network 6
(Step S7 in FIG. 6). When the mail receiving unit 311 of the support computer 3 receives the e-mail describing the inconsistency notification, the person in charge at the support center 5 recognizes that the software module 128 installed in the substrate processing apparatus 1 is not compatible. To do.

In this case, the person in charge of the support center 5 confirms the version information using the WEB browser 312 (step S8 in FIG. 6). That is, the version management table 241 stored in the fixed disk 24 of the information storage server 2 is published by the information disclosure unit 236 so that it can be browsed via the network 6. The person in charge of the support center 5 uses the WEB browser 312 to browse the version management table 241 stored in the fixed disk 24 and confirm the version information of the software module 128 installed in the substrate processing apparatus 1. . And support center 5
Person in charge of software module 12 is inconsistent
8 is found and the operator of the substrate processing factory 4 or a person in charge of field support is notified by e-mail or the like so that the inconsistency can be resolved.

With the above arrangement, a certain substrate processing apparatus 1
When the software module 128 is installed in the system control unit 100 or the unit control unit 115, the mutual consistency of the software modules installed in the system control unit 100 and the unit control unit 115 at that time is confirmed. Therefore, it is possible to prevent a failure (such as malfunction or stop of the substrate processing apparatus 1) due to a mismatch between software modules. When some of the software modules 128 are updated, the consistency between the newly installed software module 128 and the software modules 128 already installed in the system control unit 100 and the unit control unit 115 can be confirmed. Therefore, it is possible to prevent a failure due to a mismatch between software modules.

All the software modules 1 installed in the system control unit 100 and the unit control unit 115 included in a certain substrate processing apparatus 1 regardless of the consistency of the software modules 128.
The version information of 28 is stored in the version management table 241.
Since it is stored as and is publicly viewable via the network 6, the version information of the software module 128 installed in the substrate processing apparatus 1 can be quickly and accurately grasped from the support center 5 side. The cause analysis can be performed efficiently even when a failure occurs.

<5. Modifications> Although the embodiments of the present invention have been described above, the present invention is not limited to the above examples. For example, in the above-described embodiment, the information storage server 2 is arranged in the substrate processing factory 4, but the present invention is not limited to this. The information storage server 2 is connected to the network 6 to support the substrate processing apparatus 1 and the support. It may be located anywhere as long as it can communicate with the computer 3.

In the above embodiment, the confirmation table 242 is distributed from the support computer 3 and stored in the fixed disk 24 of the information storage server 2, but the confirmation table 242 is stored in the support computer 3.
It may be stored in the fixed disk 34. FIG. 10 is a functional block diagram showing a functional configuration of the substrate processing system 10 when the confirmation table 242 is stored in the fixed disk 34 of the support computer 3. In this case, the manufacturer of the substrate processing apparatus 1 does not distribute the created confirmation table 242 but stores it in the fixed disk 34 of the support computer 3 and makes it publicly viewable via the network 6. The consistency check unit 235 of the information storage server 2 refers to the check table 242 via the network 6 and checks the consistency of the software module 128 described above. The other points are the same as those in the above-described embodiment. Even in this case, the same effect as that of the above embodiment can be obtained.

Further, the substrate processing apparatus 1 may be provided with the processing function of the information storage server 2. FIG. 11 is a functional block diagram showing a functional configuration of the substrate processing system 10 when the substrate processing apparatus 1 is provided with the processing function of the information storage server 2. In the figure, components having the same functions as those in FIG. 5 are designated by the same reference numerals. Also, FIG.
1, the version information transmission unit 125, the version information registration unit 131, the mail transmission unit 132, the consistency confirmation unit 135, and the information disclosure unit 136 are the system control unit 100.
CPU 101 is a processing unit realized by executing a processing program (software module).

In the case shown in FIG. 11, the software module 12 is stored in the storage unit 104 of the system control unit 100.
8 and the version management table 241 and the confirmation table 242 are stored. Then, the version information registration unit 131, the mail transmission unit 132, the consistency confirmation unit 135, and the information disclosure unit 13 of the system control unit 100.
6 has the same functions as the version information registration unit 231, the mail transmission unit 232, the consistency check unit 235, and the information disclosure unit 236 of the information storage server 2 of the above embodiment, and performs the same processing. Even in this case, the same effect as that of the above embodiment can be obtained.

That is, when the technical contents according to the present invention are summarized, the software module 12 is added to the system control unit 100 or the unit control unit 115 of a certain substrate processing apparatus 1.
8 is installed, the version information of the software modules 128 installed in each of the system control unit 100 and the unit control unit 115 at that time (immediately after the installation) is accumulated to build the version management table 241. , The system control unit 100 from the version management table 241 while referring to the confirmation table 242 in which the version information of the software modules 128 having mutual consistency is registered.
And the unit controller 115, if the compatibility between the software modules 128 installed in the respective units is confirmed, each process is performed by the substrate processing apparatus 1, the information storage server 2, or the support computer 3. You can go. Further, the work of confirming the consistency itself may be performed by a person in charge of the support center 5 who has received the notification of the new version registration by e-mail.

Further, the substrate processing apparatus 1 of the above embodiment.
Was to apply the resist to the substrate and to perform the developing process, but the present invention is not limited to this. For example, a lamp annealing device that heats the substrate by light irradiation or a particle removal while rotating the substrate. Any substrate processing device that performs a predetermined process on the substrate, such as a cleaning process device that performs a cleaning process or a dipping process device that performs a surface treatment by immersing the substrate in a processing solution such as hydrofluoric acid Even if there is, the technology according to the present invention can be applied.

[0077]

As described above, according to the invention of claim 1, when the software module is installed in the system control unit or the unit control unit, each of the system control unit and the unit control unit is at that time. Since there is a consistency confirmation means for confirming the consistency of the software modules installed in the board processing device, it is possible to prevent failures caused by inconsistencies between the software modules when the software modules are installed in the substrate processing apparatus. You can

According to the second aspect of the invention, when the software module is installed in the system control unit or the unit control unit, the software module installed in each of the system control unit and the unit control unit at that time. Since the consistency is confirmed based on the version information of, the consistency between the software modules can be easily confirmed.

Further, according to the invention of claim 3, when the software module is installed in the system control unit or the unit control unit, the software module installed in each of the system control unit and the unit control unit at that time. Since the version information storage means for storing the version information is included, it is possible to easily confirm the consistency between the software modules based on the version information.

According to the invention of claim 4, all the version information of the software modules installed in each of the system control unit and the unit control unit stored in the version information storage means are stored in the consistency confirmation table. If registered, it means that there is consistency, and in other cases, there is no consistency, so that the consistency between software modules can be easily confirmed.

Further, according to the invention of claim 5, since the consistency check means is provided with the notification means for notifying the computer via the network when there is no consistency, the occurrence of the mismatch is confirmed. It is possible to quickly grasp and prevent a failure due to the inconsistency between the software modules.

According to the invention of claim 6, version information storage means for storing version information of the software modules installed in the system control unit and the unit control unit, and the version stored in the version information storage means. Since the information storage server is provided with the version information disclosure means for making the information viewable from the computer via the network, the version information of the software module installed in the substrate processing apparatus can be grasped quickly and accurately from the computer. Therefore, the cause analysis can be efficiently performed even when a failure occurs.

According to the invention of claim 7, when the software module is installed in the system control unit or the unit control unit, the version of the software module installed in the system control unit and the unit control unit at that time Since the information is sent to the information storage server and the sent version information is stored in the version information storage means, the version information can be easily browsed.

According to the invention of claim 8, when the software module is installed in the system control unit or the unit control unit, it is installed in the system control unit and the unit control unit stored in the version information storage means. In order to confirm the consistency of the software modules installed in each of the system control unit and unit control unit by referring to the version information of the software modules installed, each software module when the software module is installed in the substrate processing apparatus It is possible to prevent a failure due to the inconsistency between them.

According to the invention of claim 9, all the version information of the software modules installed in each of the system control unit and the unit control unit stored in the version information storage means are stored in the consistency confirmation table. If registered, it means that there is consistency, and in other cases, there is no consistency, so that the consistency between software modules can be easily confirmed.

Further, according to the invention of claim 10, it is installed in each of the system control unit and the unit control unit accumulated in the version information accumulating means while referring to the consistency confirmation table via the network. If all the version information of the software module is registered in the consistency check table, it is assumed that there is consistency, and in all other cases, there is no consistency, so it is easy to confirm the consistency between software modules. You can

According to the eleventh aspect of the invention, since the inconsistency is notified to the computer via the network when the inconsistency confirmation means determines that there is no inconsistency, it is possible to promptly grasp the occurrence of the inconsistency. Therefore, it is possible to prevent a failure due to a mismatch between the software modules.

According to the twelfth aspect of the invention, when the software module is installed in the system control unit or the unit control unit, the software module installed in each of the system control unit and the unit control unit at that time. Therefore, it is possible to prevent the failure caused by the inconsistency between the software modules when the software modules are installed in the substrate processing apparatus.

According to the thirteenth aspect of the present invention, the consistency is confirmed based on the version information of the software modules installed in each of the system control unit and the unit control unit. You can check the consistency between them.

According to the fourteenth aspect of the present invention, when the software module is installed in the system control unit or the unit control unit, the software module installed in each of the system control unit and the unit control unit at that time. Since the consistency confirmation means for confirming the consistency between the software modules is installed in the substrate processing apparatus, it is possible to prevent a failure caused by a mismatch between the software modules.

According to the fifteenth aspect of the invention, when the software module is installed in the system control unit or the unit control unit, the software module installed in each of the system control unit and the unit control unit at that time. Since the consistency is confirmed based on the version information of, the consistency between the software modules can be easily confirmed.

According to the sixteenth aspect of the present invention, when the software module is installed in the system control unit or the unit control unit, the software module installed in each of the system control unit and the unit control unit at that time. Since the version information storage means for storing the version information is further provided, it is possible to easily confirm the consistency between the software modules based on the version information.

According to the seventeenth aspect of the invention, all the version information of the software modules installed in each of the system control unit and the unit control unit stored in the version information storage means are stored in the consistency confirmation table. If registered, it means that there is consistency, and in other cases, there is no consistency, so that the consistency between software modules can be easily confirmed.

According to the eighteenth aspect of the invention, when the software module is installed in the system control unit or the unit control unit, the version of the software module installed in the system control unit and the unit control unit at that time Since the information is sent, the version information of the software module installed in the substrate processing apparatus can be grasped quickly and accurately from the computer.

According to the nineteenth aspect of the present invention, the substrate processing apparatus can be executed by simply causing a computer provided in the substrate processing apparatus to execute the program.
It can be operated as the substrate processing apparatus described in any one of 1.

According to the twentieth aspect of the invention, the substrate processing apparatus is provided with any one of the fourteenth to eighteenth aspects by only causing the computer provided in the substrate processing apparatus to read the recording medium and execute the program. It can be operated as the described substrate processing apparatus.

[Brief description of drawings]

FIG. 1 is a diagram showing a schematic configuration of a substrate processing system according to the present invention.

FIG. 2 is a schematic plan view of a substrate processing apparatus which constitutes the substrate processing system of FIG.

3 is a block diagram showing a configuration of a control system of the substrate processing apparatus of FIG.

FIG. 4 is a diagram showing a basic configuration of an information storage server and a support computer.

5 is a functional block diagram showing an example of a functional configuration of the substrate processing system of FIG.

6 is a flowchart showing a processing procedure in the substrate processing system of FIG.

FIG. 7 is a diagram showing an example of a version management table.

FIG. 8 is a diagram showing an example of a confirmation table.

FIG. 9 is a diagram showing another example of a version management table.

FIG. 10 is a functional block diagram showing another example of the functional configuration of the substrate processing system.

FIG. 11 is a functional block diagram showing another example of the functional configuration of the substrate processing system.

[Explanation of symbols]

1 Substrate processing equipment 2 Information storage server 3 Support computer 4 Substrate processing factory 5 Support Center 6 network 10 Substrate processing system 24, 34 fixed disk 91 recording medium 100 system control unit 104, 114 storage unit 115 Unit control unit 128 software modules 131,231 Version information registration section 131,232 E-mail sending unit 135, 235 Consistency check unit 136,236 Information Disclosure Department 241 version control table 242 Confirmation table 311 Mail receiver 312 WEB browser

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Kenji Kamei             4-chome Tenjin, which runs up to Teranouchi, Horikawa-dori, Kamigyo-ku, Kyoto             1 Kitamachi No. 1 Dai Nippon Screen Manufacturing Co., Ltd.             Inside the company (72) Inventor Hidekazu Inoue             4-chome Tenjin, which runs up to Teranouchi, Horikawa-dori, Kamigyo-ku, Kyoto             1 Kitamachi No. 1 Dai Nippon Screen Manufacturing Co., Ltd.             Inside the company (72) Inventor Tetsuya Hamada             4-chome Tenjin, which runs up to Teranouchi, Horikawa-dori, Kamigyo-ku, Kyoto             1 Kitamachi No. 1 Dai Nippon Screen Manufacturing Co., Ltd.             Inside the company F term (reference) 5B076 AA02 AC01 AC03 AC07                 5F046 AA28

Claims (20)

[Claims] 1. A network of a substrate processing apparatus and a computer comprising a processing unit for performing a predetermined processing on a substrate, a system control unit for controlling the entire apparatus, and a unit control unit for individually controlling the processing unit. A substrate processing system coupled via a via, wherein when a software module is installed in the system control unit or the unit control unit, it is installed in each of the system control unit and the unit control unit at that time. A substrate processing system comprising: a consistency confirmation unit for confirming the consistency of software modules. 2. The substrate processing system according to claim 1, wherein the compatibility confirmation unit is configured to install the software module in the system control unit or the unit control unit at the time when the system control unit and the unit control unit are installed. A substrate processing system, wherein the consistency is confirmed based on version information of software modules installed in each of the unit controllers. 3. The substrate processing system according to claim 2, wherein when a software module is installed in the system control unit or the unit control unit, the software module is installed in each of the system control unit and the unit control unit at that time. Substrate processing system, further comprising version information storage means for storing version information of the software modules being stored. 4. The substrate processing system according to claim 3, further comprising a table holding unit that holds a consistency confirmation table in which version information of software modules having mutual compatibility is registered, and the consistency confirmation unit includes: If all the version information of the software modules installed in each of the system control unit and the unit control unit stored in the version information storage unit is registered in the consistency check table, there is consistency. age,
In other cases, the substrate processing system is characterized by no matching. 5. The substrate processing system according to claim 4, further comprising notifying means for notifying the computer of the inconsistency via the network when the inconsistency confirming means determines that there is no inconsistency. Substrate processing system. 6. A network of a substrate processing apparatus and a computer comprising a processing unit for performing a predetermined processing on a substrate, a system control unit for controlling the entire apparatus, and a unit control unit for individually controlling the processing unit. A substrate processing system coupled via a device, wherein version information storage means for storing version information of software modules installed in the system control unit and the unit control unit, and the version information storage unit for storing version information Version information,
A substrate processing system, comprising: an information storage server having version information disclosure means that allows the computer to browse through the network. 7. The substrate processing system according to claim 6, wherein when the system control unit or the unit control unit has a software module installed, the system control unit and the unit at that time. A substrate processing system, wherein version information of a software module installed in a control unit is sent to the information storage server, and the information storage server stores the sent version information in the version information storage means. . 8. The substrate processing system according to claim 7, wherein the information storage server stores the version information storage means when a software module is installed in the system control unit or the unit control unit. Consistency confirmation for confirming the consistency of the software modules installed in the system control unit and the unit control unit by referring to the version information of the software modules installed in the system control unit and the unit control unit A substrate processing system further comprising means. 9. The substrate processing system according to claim 8, wherein the information storage server further includes a table holding unit that holds a consistency confirmation table in which version information of software modules having mutual compatibility is registered. The consistency confirmation means registers all the version information of the software modules installed in each of the system control unit and the unit control unit stored in the version information storage unit in the consistency confirmation table. If there is consistency,
In other cases, the substrate processing system is characterized by no matching. 10. The substrate processing system according to claim 8, wherein the computer further includes a table holding unit that holds a consistency confirmation table in which version information of software modules having mutual compatibility is registered, and the consistency is provided. The confirming unit refers to the consistency confirming table via the network and confirms the version information of the software modules installed in each of the system control unit and the unit control unit stored in the version information storage unit. A substrate processing system characterized in that if all are registered in the consistency confirmation table, there is consistency, and in all other cases, there is no consistency. 11. The substrate processing system according to claim 9 or 10, wherein the information storage server notifies the computer of an inconsistency via the network when the inconsistency confirmation unit determines that there is no inconsistency. A substrate processing system, further comprising a notification means for performing. 12. A substrate processing apparatus for managing a substrate processing apparatus, comprising a processing unit for performing a predetermined processing on a substrate, a system control section for controlling the entire apparatus, and a unit control section for individually controlling the processing unit. A device management method, wherein when a software module is installed in the system control unit or the unit control unit, consistency of the software modules installed in the system control unit and the unit control unit at that time A substrate processing apparatus management method comprising the step of confirming 13. The substrate processing apparatus management method according to claim 12, wherein the consistency check is performed based on version information of software modules installed in each of the system control unit and the unit control unit. A substrate processing apparatus management method characterized by the above. 14. A substrate processing apparatus comprising: a processing unit that performs a predetermined processing on a substrate; a system control unit that controls the entire apparatus; and a unit control unit that individually controls the processing unit, wherein: When a software module is installed in the system control unit or the unit control unit, a consistency confirmation means for confirming the consistency of the software modules installed in each of the system control unit and the unit control unit at that time is provided. A substrate processing apparatus comprising: 15. The substrate processing apparatus according to claim 14, wherein the consistency confirmation unit is configured to install the software module in the system control unit or the unit control unit at the time when the system control unit and the unit control unit are installed. A substrate processing apparatus, wherein the consistency is confirmed based on version information of software modules installed in each unit control section. 16. The substrate processing apparatus according to claim 15, wherein when a software module is installed in the system control unit or the unit control unit, it is installed in each of the system control unit and the unit control unit at that time. The substrate processing apparatus further comprising version information storage means for storing version information of the stored software module. 17. The substrate processing apparatus according to claim 16, further comprising a table holding unit that holds a consistency confirmation table in which version information of software modules having mutual compatibility is registered, and the consistency confirmation unit includes: If all the version information of the software modules installed in each of the system control unit and the unit control unit stored in the version information storage unit is registered in the consistency check table, there is consistency. age,
In other cases, the substrate processing apparatus is characterized by no matching. 18. A substrate processing apparatus comprising: a processing unit that performs a predetermined processing on a substrate; a system control unit that controls the entire apparatus; and a unit control unit that individually controls the processing unit, wherein: When a software module is installed in the system control unit or the unit control unit, the system control unit sends out version information of the software modules installed in the system control unit and the unit control unit at that time. And a substrate processing apparatus. 19. A program, characterized in that the substrate processing apparatus operates as the substrate processing apparatus according to claim 14, when being executed by a computer provided in the substrate processing apparatus. 20. A computer-readable recording medium on which the program according to claim 19 is recorded.