JPH11312196A - Computer production management system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the operation rate of a manufacturing device from being reduced by intermittently operating the manufacturing device, even when a cell computer breaks down in a computer production management system. SOLUTION: When an event required to be reported to a computer integrated manufacturing(CIM) system 1 is generated in a certain manufacturing device 10 (S1), the device 10 communicates with an equipment interface program(EIP) 22 driven in a device computer 60 (S2). The EIP 22 reports the contents of communication executed with the device 10 to an equipment control system(ECS) 21 driven in a cell computer 20 (S3). The ECS 21 and a lot management system(LMS) 32 in a host computer 30 execute control, based on the contents reported.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing apparatus used in various processes for manufacturing a product, a cell computer for managing the manufacturing apparatus group for each specific range, and a control of each of these cell computers. The present invention relates to a computer production management system such as a so-called computer integrated production system, which includes a host computer that controls a manufacturing process.

[0002]

2. Description of the Related Art When a liquid crystal display panel is manufactured, processing of each manufacturing process is automatically performed while being managed by a computer under a computer production management system.
In particular, recently, each manufacturing apparatus in various processes is managed and controlled by a cell computer which performs manufacturing management of a manufacturing apparatus group for each specific range, and the manufacturing process is managed by controlling these cell computers by a host computer. Systems have been adopted.
As described above, a computer integrated production (CI) system that organically integrates computer use that has been advanced in individual fields and realizes flexible multi-product small-quantity production.
M: Computer integrated manufacturing) system.

FIG. 11 shows a computer integrated production system for manufacturing a conventional liquid crystal display panel. Photolithographic apparatus (manufacturing apparatus A) 110A..., Sputtering apparatus (manufacturing apparatus B) 1 corresponding to each manufacturing process
10B ... and peeling and cleaning apparatus (manufacturing apparatus C) 110C ...
Are controlled by cell computers 120, such as cell computers A, B, and C, which manage operations for various manufacturing processes. On the other hand, these cell computers 120 are managed by the host computer 130. Then, the host computer 130
, The database 140 connected to the host computer 130, and the cell computer 120 constitute the CIM system 100.

Further, each cell computer 120 has:
ECS (equipment control system: manufacturing equipment management process) 121 and EIP (equipment interface program)
m: communication management process for manufacturing apparatus) 122. The ECS 121 is used for each cell computer 120.
Is a process for managing all the manufacturing apparatuses 110. The EIP 122 is a process for managing communication between the ECS 121 and the manufacturing apparatus 110, and is provided for each manufacturing apparatus 110.

As described above, in a conventional computer integrated production system, a plurality of manufacturing apparatuses 110 are connected to one cell computer 120 to construct an online system. Then, the host computer 130
Are connected to the respective manufacturing apparatuses 11 via the cell computers 120.
0 and communicates necessary information such as a processing procedure to each of the manufacturing apparatuses 110.

FIG. 1 shows a method for managing the production of a liquid crystal display panel by a conventional computer integrated production system.
This will be described based on the block diagram shown in FIG. 2 and the flowchart shown in FIG.

When an event that needs to be reported to the CIM system 100 occurs in the manufacturing apparatus 110 (S5)
1) The manufacturing apparatus 110 communicates with the EIP 122 running on the cell computer 120 (S5).
2). The EIP 122 is the same cell computer 120
Production equipment 110 for the ECS 121 running on
The contents of the communication performed between them are reported (S53). EC
In S121 and the host computer 130, control is performed based on the reported contents (S54).

The above processing is executed every time an event that needs to be reported to the CIM system 100 in the manufacturing apparatus 110 occurs.

[0009]

However, in the above-described conventional computer production management system, one cell computer 120 manages communication with a plurality of manufacturing apparatuses 110. When the machine goes down, it becomes impossible to transmit necessary information to all the manufacturing apparatuses 110 connected to the cell computer 120 that goes down. As a result, all the manufacturing apparatuses 110 connected to the cell computer 120 that has gone down cannot continue the manufacturing process.

That is, as shown in FIG. 14, each manufacturing apparatus 110 has an EIP of a corresponding cell computer 120.
The manufacturing process is performed while communicating with the device 122 as necessary (P51). Here, the cell computer 120
When the machine goes down due to a failure (P52), the EIP 122 that manages communication with the manufacturing apparatus 110 stops functioning, and the communication is interrupted (P53). As a result, the manufacturing apparatus 110 cannot perform any communication with the cell computer 120, and thus cannot continue the manufacturing process.

As described above, in the above-mentioned conventional computer production management system, when the cell computer 120 goes down, the necessary information cannot be transmitted to the manufacturing apparatuses 110... So that all the manufacturing apparatuses 110. However, there is a problem that the manufacturing process cannot be continued, and the operation rate of the manufacturing apparatuses 110 decreases.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to make it possible to continuously operate a manufacturing apparatus even when a cell computer goes down, and to reduce the operating rate of the manufacturing apparatus. It is an object of the present invention to provide a computer production management system capable of preventing the computer from being reduced.

[0013]

According to a first aspect of the present invention, there is provided a computer production management system comprising: a plurality of manufacturing apparatuses used in various processes for manufacturing a product;
In a computer production management system including a cell computer that performs manufacturing management of a manufacturing apparatus group for each specific range, and a host computer that controls a manufacturing process by controlling each of the cell computers, An apparatus computer is provided independently of the cell computer and manages communication between the manufacturing apparatus and the cell computer.

According to the above configuration, an apparatus computer storing a process of performing communication management is provided between the cell computer and the manufacturing apparatus for each manufacturing apparatus and independently of the cell computer.

Thus, transmission of necessary information to each manufacturing apparatus can be performed by the corresponding apparatus computer independently of the cell computer. Therefore, even if the cell computer goes down, the communication between the manufacturing apparatus and the apparatus computer is possible, so that necessary information can be transmitted to the manufacturing apparatus.

Therefore, in the above-mentioned computer production management system, even if the cell computer goes down, it is possible to continue to operate the manufacturing apparatus assigned to each apparatus computer, thereby preventing the operating rate of the manufacturing apparatus from being reduced. can do.

According to a second aspect of the present invention, in order to solve the above-mentioned problems, in addition to the configuration of the first aspect, the above product is a liquid crystal display panel.

According to the above configuration, in addition to the operation of the first aspect, the computer production management system further comprises:
In particular, it is applied to the manufacture of a liquid crystal display panel.

Therefore, during manufacture of the liquid crystal display panel,
Even if the cell computer goes down, the manufacturing apparatus assigned to each apparatus computer can continue to operate, and the operating rate of the manufacturing apparatus can be prevented from lowering.

[0020]

FIG. 1 shows an embodiment of the present invention.
The following is a description based on FIGS. 10 and 15.

The computer production management system according to the present embodiment is applied, for example, to the manufacture of a liquid crystal display panel. In particular, the present embodiment employs a computer integrated manufacturing (CIM) system. That is, by a cell computer that performs manufacturing management of a manufacturing apparatus group for each specific range,
Each manufacturing apparatus in various processes is managed and controlled. The host computer controls these cell computers to manage the entire manufacturing process.

More specifically, as shown in FIG. 1, for example, a photolithography apparatus (manufacturing apparatus A) 10A, a sputtering apparatus (manufacturing apparatus B) 10B, and peeling cleaning required in each manufacturing process of the liquid crystal display panel. Each manufacturing apparatus 10 such as an apparatus (manufacturing apparatus C) 10C is controlled by a cell computer 20 such as a cell computer A, B, or C that manages operations for various manufacturing processes. Here, each manufacturing apparatus 10 is connected to a cell computer 20 via an apparatus computer 60 provided correspondingly.
Is communicably connected to Device computer 60
Manages communication between the cell computer 20 and each manufacturing apparatus 10. The device computer 60 is separated from the cell computer 20 and can operate independently.

On the other hand, these cell computers 20 are managed by a host computer 30. Therefore, in the computer production management system according to the present embodiment, three cell computers 20 are connected to one host computer 30, and a plurality of manufacturing apparatuses 10 are connected to each cell computer 20. It is connected via a computer 60.

Further, as shown in FIG. 2, in the computer production management system of the present embodiment, the host computer 30 includes an LMS (lot management system) 32 and a communication program 31. The LMS 32 is a process for managing lots to be manufactured. The communication program 31 is a CIM
This is a program for managing communication with other processes of the system 1. Further, the host computer 30 is connected to a database 40 for storing board names of boards which are necessary components of each manufacturing apparatus 10.

The cell computer 20 has an AGV (automatic guided vehicle) 5 as a transfer device for transferring the substrate required by each manufacturing apparatus 10 to the manufacturing apparatus 10.
0 is connected. The AGV 50 automatically guides a processing cassette containing a predetermined number of substrates, that is, 20 substrates, and transports the processing cassette to each manufacturing apparatus 10. In some cases, these substrates are subjected to manufacturing processing while being placed in the processing cassette, while in other cases, the substrates are taken out one by one by a robot and subjected to manufacturing processing.

The host computer 30, the database 40 connected to the host computer 30, the cell computer 20 and the device computer 60
An IM system 1 is configured. The CIM system 1 is a system in which the host computer 30 controls each cell computer 20 to manage the manufacturing process.

Further, as shown in FIG.
Are provided with a manufacturing processing section 11 for performing a manufacturing process, and a plurality of ports 12 for loading and unloading the processing cassette transported by the AGV 50. A request for a processing cassette is made for each port 12.

Here, communication from each manufacturing apparatus 10 to the cell computer 20 is managed by an EIP (equipment interface program: manufacturing apparatus communication management process) 22 provided in the apparatus computer 60. Therefore, it is the EIP 22 that the manufacturing apparatus 10 directly communicates with.

When communication between each manufacturing apparatus 10 and the EIP 22 is normally performed, the communication contents are reported by the EIP 22 to the cell computer 20 provided for each manufacturing process.

On the other hand, the cell computer 20 has an ECS
21 (equipment control system: manufacturing apparatus management process) and a communication program 27 are provided. The ECS 21 is a process for managing all the manufacturing apparatuses 10 connected to the cell computer 20. The communication program 27 manages communication between the device computer 60 and the host computer 30. Therefore, all the communication of the ECS 21 is performed through the communication program 27.

As described above, in the computer integrated production system of the present embodiment, one cell computer 2
, A plurality of manufacturing apparatuses 10 are connected via corresponding apparatus computers 60 to form an online system. And the host computer 3
0 communicates with each manufacturing apparatus 10 using the ECS 21 of the cell computer 20 and the EIP 22 of each apparatus computer 60, and instructs each manufacturing apparatus 10 to transmit necessary information such as processing cassette conveyance and processing procedure. It has become.

All communications within the CIM system 1 are performed by internal communications, which are inter-process communications. On the other hand, communication between the CIM system 1 and the manufacturing apparatuses 10 is performed by RS232-C, TCP / IP, or the like.

Next, communication management in the computer production management system according to the present embodiment will be described with reference to the block diagram shown in FIG. 2 and the flowchart shown in FIG.

When an event that needs to be reported to the CIM system 1 occurs in the manufacturing apparatus 10 (S 1), the manufacturing apparatus 10 executes the E running on the apparatus computer 60.
Communication is performed with the IP 22 (S2). EIP22,
The contents of the communication performed with the manufacturing apparatus 10 are reported to the ECS 21 running on the cell computer 20 (S3). The ECS 21 and the host computer 30 perform control based on the reported contents (S4).

The above processing is executed every time an event that needs to be reported to the CIM system 1 occurs in the manufacturing apparatus 10.

Next, a brief description will be given of a method of managing a manufacturing process in the computer production management system. Since the details of the production management by the cell computer 20 and the device computer 60 will be described later,
Here, it is omitted.

First, a request for a processing cassette is made from the manufacturing apparatus 10 to the apparatus computer 60. The apparatus computer 60 transmits a processing cassette request of each manufacturing apparatus 10 to the cell computer 20. The cell computer 20 sends a processing cassette request to the host computer 30 with the manufacturing device name added. The host computer 30 retrieves a required substrate name from the database 40 according to each manufacturing apparatus name, and allocates a processing cassette for this substrate to the manufacturing apparatus 10.

At this time, the host computer 30 simultaneously transmits processing procedure information on the substrates of the processing cassette to the cell computer 20. Note that “simultaneous” here is not always absolutely simultaneous, but “immediately”
It is a concept including

The cell computer 20 having received the processing procedure information issues a processing cassette transfer instruction to the AGV 50 so as to transfer the allocated processing cassette to the manufacturing apparatus 10. Then, the AGV 50 receiving the processing cassette transfer instruction transfers the specified processing cassette to the specified manufacturing apparatus 10.

The cell computer 20 having received the processing procedure information transmits the processing procedure information to each apparatus computer 60. And the device computer 6
0 stores this processing procedure information.

At the manufacturing apparatus 10 where the processing cassette has arrived, ID plate information including the processing cassette number and the process number is read from the ID plate attached to the processing cassette, and a report of the arrival of the processing cassette is sent together with the ID plate information. This is performed for the computer 60. The ID plate is made of a readable and writable information storage plate, and is mounted on each processing cassette.

Next, upon receiving the report of the arrival of the processing cassette from the manufacturing apparatus 10, the apparatus computer 60 receives and accumulates the information from the cell computer 20 in advance based on the manufacturing apparatus name, the processing cassette number, and the process number. The processing procedure information for the substrate that was
Send to 0.

Since the data storage capacity of the apparatus computer 60 is generally small, the apparatus computer 60 transmits the processing procedure information to the manufacturing apparatus 10 after transmitting the information.
This processing procedure information data is deleted.

Thus, the manufacturing apparatus 10 performs the manufacturing process on the substrates stored in the processing cassette based on the processing procedure information.

When this manufacturing processing step is completed, a request for a processing cassette for performing the next processing step is made.

Next, the production management by the cell computer 20 and the device computer 60 will be described in detail.

As shown in FIG.
The EIP 22 stored in the communication interface (IFP) 23 and the communication handler (CH)
24.

The interface program 23 performs internal communication with the communication handler 24 and the communication program 27 which is an upper process. A conversation in communication is composed of several messages called stream functions.
Checks the order and contents of this message on a conversation-by-conversation basis.

The communication handler 24 is an RS-232C
(Recommended standard 232C) and TCP / IP (tran
It is a handling part that actually performs communication such as smission control protocol / internet protocol).

Here, the flow of conversation between the manufacturing apparatus 10 and the EIP 22 of the corresponding apparatus computer 60 will be described with reference to FIG. The manufacturing apparatus 10 and the communication handler 24
Is communication by RS232-C, TCP / IP, or the like, and the communication handler 24 and the EIP22 (IFP23)
Is performed by internal communication.

The contents of symbols a1 to a12 in the figure are as follows. a1: Message transmission of conversation type report a2: Message reception & protocol check a3: Message content check a4: Message content check result transmission request a5: Message content check result transmission a6: Message content check result reception a7 : Request for transmission of device status request a8: Transmission of device status request a9: Reception of device status request a10: Transmission of device status report a11: Message reception & protocol check a12: Content check of device status report

First, the manufacturing apparatus 10 is connected to the communication handler 2 of the EIP 22 stored in the corresponding apparatus computer 60.
4 (hereinafter simply referred to as “communication handler 24”)
The message of the conversation type report is transmitted to (a1).

Note that the conversation transmitted from the manufacturing apparatus 10 is as follows. MIR (MOVE IN REQUEST) Processing cassette loading request report MIC (MOVE IN COMPLETE) Processing cassette loading completion report IPS (INFO PROCESS START) Processing start report IPE (INFO PROCESS END) Processing completion report MOR (MOVE OUT REQUEST) Processing cassette loading request Report MOC (MOVE OUT COMPLETE) Processing cassette unloading completion report

Subsequently, the communication handler 24 that has received the message from the manufacturing apparatus 10 checks the protocol of the message and sends it to the interface program 23 (a
2).

The interface program 23 that has received the message from the communication handler 24 checks the content of the message (a3).

The interface program 23 requests the communication handler 24 to transmit the result of checking the message content to the manufacturing apparatus 10 (a4).

The communication handler 24 that has received the request transmits the result of checking the message content to the manufacturing apparatus 10 (a
5).

The manufacturing apparatus 10 receives the result of checking the message content by the interface program 23 (a
6).

The interface program 23 requests the communication handler 24 to transmit a request for reporting the state of the manufacturing apparatus 10 following transmission of the result of checking the message content (a7).

The communication handler 24 that has received the request transmits a request for reporting the state of the manufacturing apparatus 10 to the manufacturing apparatus 10 (a8).

The manufacturing apparatus 10 receives a request for reporting the state of the manufacturing apparatus 10 (a9).

The manufacturing apparatus 10 transmits a message reporting the state of the manufacturing apparatus 10 to the communication handler 24 (a10).

The communication handler 24 having received the message from the manufacturing apparatus 10 checks the protocol of the message and sends it to the interface program 23 (a11).

The interface program 23 having received the message from the communication handler 24 checks the content of the message reporting the state of the manufacturing apparatus 10 (a12).

As a result, if the check up to a12 is normal, a conversation is established. And the device computer 6
0 of the EIP 22 of the corresponding cell computer 20
Report to CS21 as a conversation.

On the other hand, the ECS 21 stored in the cell computer 20 is a process for managing the whole of the connected manufacturing apparatuses 10. The ECS 21 communicates via the communication program 27 with the EIP 22 and a communication program 31 of the host computer 30 which is an upper process.

In the communication with the EIP 22, the ECS 21
Receives communication contents reported from the EIP 22 of each manufacturing apparatus 10 via the communication program 27 and transmits processing information such as manufacturing processing conditions to the EIP 22.

In the communication with the communication program 31, E
The CS 21 communicates with the manufacturing apparatus 10 via the communication program 27.
Of the processing cassette request reported for each of the ports 12 and receives processing cassette information assigned by the upper process.

Since the host computer 30 refers to the processing cassette information managed in the database 40, if the processing cassette information is reported for each manufacturing apparatus 10 and for each port 12, the load increases and the processing speed increases. Become slow. Therefore, the ECS 21 performs control so that one processing cassette is assigned to one manufacturing apparatus 10 (FIG. 3).

Here, referring to FIG. 6, manufacturing apparatus 10 and E
The flow of the conversation between the EIP 22 and the host computer 30 (LMS 32) after the conversation with the IP 22 has been established (FIG. 5) will be described. The figure shows each port 12 of the manufacturing apparatus 10.
Is a case where a processing cassette carry-in request report (MIR) is transmitted. Note that communication between the manufacturing apparatus 10 and the communication handler 24 is performed by RS232-C or TCP / IP, and the communication handler 24 and the EIP22, and the EIP22 and the EC
S21, the communication between the ECS 21 and the LMS 32 is performed by internal communication.

The contents of symbols b1 to b18 in FIG. 6 are as follows. The manufacturing apparatus 10 has a port 12
.. Are provided, and are assumed to be port A, port B, and port C, respectively. b1: Processing cassette request to ECS after establishment of MIR conversation of port A b2: Processing cassette request reception, processing cassette allocation request b3: Processing cassette allocation processing start b4: Processing cassette request to ECS after establishment of MIR conversation of port B b5: After the MIR conversation of port C is established, a processing cassette request is sent to the ECS. B6: Processing cassette allocation processing ends (processing cassette A
B7: Receives processing cassette A information, issues processing cassette A transport instruction to AGV b8: Receives processing cassette A information b9: Requests processing cassette allocation processing b10: Starts processing cassette allocation processing b11: Ends processing cassette allocation processing (processing cassette B
B12: Receive processing cassette B information, issue processing cassette B transport instruction to AGV b13: Receive processing cassette B information b14: Request processing cassette allocation b15: Start processing cassette allocation processing b16: End processing cassette allocation processing (processing cassette C
B17: Receive processing cassette C information, issue processing cassette C transport instruction to AGV b18: Receive processing cassette C information

First, after the MIR (processing cassette carry-in request report) conversation of the port A is established, the EIP 22
21 is transmitted to the processing cassette request for port A (b)
1).

E receiving the processing cassette request of port A
The CS 21 requests the host computer 30 to allocate the processing cassette to the port A (b2).

The host computer 30 that has received the request for assigning the processing cassette to the port A starts the processing for assigning the processing cassette to the port A (b3).

After the port B MIR conversation is established, the EIP 22 transmits a port B processing cassette request to the ECS 21 (b4).

Further, after the MIR conversation of the port C is established, the EIP 22 transmits a processing cassette request of the port C to the ECS 21 (b5).

The host computer 30 that has completed the process of assigning the processing cassette (processing cassette A) to the port A
Shows the processing procedure information of the substrate in the processing cassette A in the ECS21.
(B6).

The ECS 21 having received the processing procedure information of the processing cassette A sends the port A of the processing cassette A to the AGV 50.
Is issued (b7).

The EIP 22 that has received the processing procedure information of the processing cassette A accumulates the information and transmits it to the manufacturing apparatus 10 when receiving the report of the arrival of the processing cassette A at the port A from the manufacturing apparatus 10 (b8).

The ECS 21 that has received the processing cassette request for the port B sends the request to the host computer 30 for the port B.
(B9).

The host computer 30 that has received the processing cassette allocation request for port B starts processing for processing cassette allocation to port B (b10).

The host computer 30 that has completed the process of assigning the processing cassette (processing cassette B) to the port B
Shows the processing procedure information of the substrate of the processing cassette B in the ECS21.
(B11).

The ECS 21 which has received the processing procedure information of the processing cassette B sends the port B of the processing cassette B to the AGV 50.
Is issued (b12).

The EIP 22 that has received the processing procedure information of the processing cassette B accumulates the information and transmits it to the manufacturing apparatus 10 when a report of the arrival of the processing cassette B at the port B is received from the manufacturing apparatus 10 (b13).

The ECS 21 that has received the processing cassette request of the port C sends the port C to the host computer 30.
Requesting a processing cassette to be assigned (b14).

The host computer 30 that has received the request for assigning a processing cassette to the port C starts processing for assigning a processing cassette to the port C (b15).

The host computer 30 that has completed the process of assigning the processing cassette (processing cassette C) to the port C
Shows the processing procedure information of the substrate of the processing cassette C in the ECS21.
(B16).

The ECS 21 that has received the processing procedure information of the processing cassette C sends the port C of the processing cassette C to the AGV 50.
Is issued (b17).

The EIP 22, which has received the processing procedure information of the processing cassette C, accumulates the information and transmits it to the manufacturing apparatus 10 when receiving the report of the arrival of the port C of the processing cassette C from the manufacturing apparatus 10 (b18).

Here, in the computer production management system of the present embodiment, there is a case where a failure occurs in the cell computer 20 and the cell computer 20 goes down.

As shown in FIG. 7, each manufacturing apparatus 10 performs a manufacturing process while communicating with the EIP 22 of the corresponding apparatus computer 60 as necessary (P1).
At this time, if a failure occurs in the cell computer 20 and the machine goes down (P2), the communication between the cell computer 20 and the device computer 60, that is, the ECS 21 and the EIP2
2 and the communication between the cell computer 20 and the AGV 50 is disconnected (P3). However, since the EIP 22 communicating with each manufacturing apparatus 10 is provided independently of the cell computer 20, even if the cell computer 20 goes down, the manufacturing apparatus 10 communicates with the apparatus computer 60 and the AGV 50. Can be performed (P4). Therefore, the manufacturing apparatus 1
0, the communication of the processing cassette request and the processing procedure information is performed as usual, and the manufacturing process can be continued (P
5). Thereby, even if the cell computer 20 goes down, the operation rate of the manufacturing apparatus 10 can be prevented from lowering.

Next, in the computer production management system of the present embodiment, the operation when the cell computer 20 goes down while the processing cassette is being conveyed to the manufacturing apparatus 10 by the AGV 50 will be described from the processing cassette loading request report to the processing cassette. The flow up to the unloading completion report will be described at the conversation level.

First, referring to FIG. 8, in the case of normal operation,
That is, a case where the cell computer 20 does not go down will be described. The communication between the manufacturing apparatus 10 and the communication handler 24 is communication by RS232-C, TCP / IP, or the like.
Internal communication is performed between the IP 22 and the ECS 21 and between the ECS 21 and the LMS 32. Also, symbols b1 to b1 in FIG.
The contents of b3, b6 to b8 are as described above with reference to FIG.

Then, the symbols s1 to s4, t1 to
The contents of t3, u1 to u3, v1 to v3, w1 to w3 are as follows. s1: Transmit processing information to the device s2: Report to the ECS that the loading has been completed by the device s3: Report to the upper level that the loading has been completed by the device s4: Change the status of the processing cassette A to the loading completed status t1 : E that processing of processing cassette A was started by the device
Report to CS t2: Report that processing of processing cassette A has been started by the device to the higher order t3: Change processing cassette A state to processing start state u1: E that processing of processing cassette A has been completed by device
Report to CS u2: Report to the upper level that the processing of processing cassette A has been completed by the apparatus. U3: Change the state of processing cassette A to the processing end state. V1: E to request that unloading of processing cassette A has been requested by the apparatus.
Report to CS v2: Report to the host that the removal of processing cassette A has been requested by the device to the upper level. V3: Advance the status of processing cassette A to the next process, and check the status of unloading request. Yes w1: E to indicate that the unloading of processing cassette A has been completed
Report to CS w2: Report to the host that the unloading of processing cassette A has been completed by the device w3: Change the status of processing cassette A to unloading completed state

First, after the MIR (processing cassette carry-in request report) conversation of the port A is established, the EIP 22
21 is transmitted to the processing cassette 21 at port A (b)
1).

E which has received the processing cassette request of port A
The CS 21 requests the host computer 30 to allocate the processing cassette to the port A (b2).

The host computer 30 which has received the processing cassette allocation request to the port A starts the processing cassette allocation processing to the port A (b3).

The host computer 30 that has completed the process of assigning the processing cassette (processing cassette A) to the port A
Shows the processing procedure information of the substrate in the processing cassette A in the ECS21.
(B6).

The ECS 21 that has received the processing procedure information of the processing cassette A sends the port A of the processing cassette A to the AGV 50.
Is issued (b7).

The EIP 22 that has received the processing procedure information of the processing cassette A accumulates the information (b8).

Processing cassette A is connected to port A of manufacturing apparatus 10.
Arrives, a MIC (processing cassette loading completion report) conversation of the port A is performed between the manufacturing apparatus 10 and the EIP 22. When the MIC conversation of port A is established, EIP2
2 transmits the processing procedure information of the processing cassette A to the manufacturing apparatus 10 (s1). Further, the EIP 22 reports to the ECS 21 that the loading of the processing cassette A into the manufacturing apparatus 10 has been completed (s2).

The ECS 21 that has received the report of the completion of the loading of the processing cassette A into the manufacturing apparatus 10 reports this to the host computer 30 (s3).

The host computer 30, which has received the report of the completion of the loading of the processing cassette A into the manufacturing apparatus 10, sets the state of the processing cassette A to the loading completed state (s4).

In the manufacturing apparatus 10, when the manufacturing process of the substrate carried in by the processing cassette A is started, the IPS (processing start report) conversation of the port A is performed by the manufacturing apparatus 10 and the EIP.
22. When the IPS conversation of the port A is established, the EIP 22 reports to the ECS 21 that the manufacturing process of the processing cassette A has been started in the manufacturing apparatus 10 (t
1).

The ECS 21 having received the report of the start of the manufacturing process of the processing cassette A in the manufacturing apparatus 10 reports the fact to the host computer 30 (t2).

The host computer 30 that has received the report of the start of the manufacturing process of the processing cassette A in the manufacturing apparatus 10 sets the state of the processing cassette A to the processing start state (t3).

In the manufacturing apparatus 10, when the manufacturing process of the substrate loaded in the processing cassette A is completed, the port A
The PE (processing end report) conversation is made between the manufacturing apparatus 10 and the EIP2.
2 is performed. When the IPE conversation of the port A is established, the EIP 22 reports to the ECS 21 that the manufacturing process of the processing cassette A has been completed in the manufacturing apparatus 10 (u1).

The ECS 21 having received the report of the end of the manufacturing process of the processing cassette A in the manufacturing apparatus 10 reports the fact to the host computer 30 (u2).

The host computer 30, which has received the report of the end of the manufacturing process of the processing cassette A by the manufacturing apparatus 10, sets the state of the processing cassette A to the processing end state (u3).

When the manufacturing apparatus 10 is ready to carry out the substrate subjected to the manufacturing process from the port A with the processing cassette A, the MOR (processing cassette unloading request report) conversation of the port A is made between the manufacturing apparatus 10 and the EIP 22. Done between. When the MOR conversation of the port A is established, the manufacturing apparatus 10
A request to unload processing cassette A from port A of
22 reports to the ECS 21 (v1).

The ECS 21 that has received the processing cassette unloading request from the port A of the manufacturing apparatus 10 reports this to the host computer 30 and issues an instruction to transport the processing cassette A to the next process to the AGV 50 (v2).

The host computer 30 that has received the processing cassette unloading request of the port A of the manufacturing apparatus 10 sets the state of the processing cassette A to the unloading request state, and proceeds to the next step (v3).

When the processing cassette A is unloaded from the port A of the manufacturing apparatus 10, a MOC (processing cassette unloading completion report) conversation of the port A is performed between the manufacturing apparatus 10 and the EIP22. When the MOC conversation of the port A is established, the fact that the unloading of the processing cassette A from the manufacturing apparatus 10 is completed,
The EIP 22 reports to the ECS 21 (w1).

The ECS 21 that has received the report of the completion of unloading the processing cassette A from the manufacturing apparatus 10 reports this to the host computer 30 (w2).

The host computer 30, which has received the report of the completion of unloading of the processing cassette A from the manufacturing apparatus 10, sets the state of the processing cassette A to the unloading completed state (w3).

Next, a case where the cell computer 20 goes down during the transfer of the processing cassette will be described with reference to FIG. The manufacturing apparatus 10 and the communication handler 2
4 is communication using RS232-C, TCP / IP, or the like.
And ECS21, and between ECS21 and LMS32 by internal communication. Also, symbols b1 to b3, b
The contents of 6 to b8 are as described above with reference to FIG.

The symbols s1 ', s2', t in FIG.
The contents of 1 ', u1', v1 'are as follows. s1 ': Send processing information to the device s2': Report to the ECS that the loading has been completed by the device, but communication is not possible due to machine down t1 ': ECS that the process of processing cassette A has been started by the device U1 ': Report to the ECS that processing of processing cassette A has been completed by the device, but cannot communicate due to machine down v1': Unload processing cassette A by device To ECS, but communication is not possible due to machine down

First, after the MIR (processing cassette carry-in request report) conversation of the port A is established, the EIP 22
21 is transmitted to the processing cassette 21 at port A (b)
1).

E which has received the processing cassette request of port A
The CS 21 requests the host computer 30 to allocate the processing cassette to the port A (b2).

The host computer 30 which has received the processing cassette allocation request to the port A starts the processing cassette allocation processing to the port A (b3).

The host computer 30 that has completed the process of assigning the processing cassette (processing cassette A) to the port A
Shows the processing procedure information of the substrate in the processing cassette A in the ECS21.
(B6).

The ECS 21 that has received the processing procedure information of the processing cassette A sends the port A of the processing cassette A to the AGV 50.
Is issued (b7).

The EIP 22 that has received the processing procedure information of the processing cassette A accumulates the information (b8).

Here, if a failure occurs in the cell computer 20 and the machine goes down, the cell computer 2
0 and the device computer 60, and between the cell computer 20 and the AGV 50 become impossible (P).

The processing cassette A is connected to the port A of the manufacturing apparatus 10.
Arrives, a MIC (processing cassette loading completion report) conversation of the port A is performed between the manufacturing apparatus 10 and the EIP 22. When the MIC conversation of port A is established, EIP2
2 transmits the processing procedure information of the processing cassette A to the manufacturing apparatus 10 (s1 '). Further, the EIP 22 reports to the ECS 21 that the loading of the processing cassette A into the manufacturing apparatus 10 has been completed, but communication is impossible because the cell computer 20 is down (s2 ').

In the manufacturing apparatus 10, when the manufacturing process of the substrate carried in by the processing cassette A is started, the IPS (processing start report) conversation of the port A is performed by the manufacturing apparatus 10 and the EIP.
22. When the IPS conversation of the port A is established, the EIP 22 reports to the ECS 21 that the manufacturing process of the processing cassette A has been started in the manufacturing apparatus 10, but communication is impossible because the cell computer 20 is down. (T1 ').

In the manufacturing apparatus 10, when the manufacturing process of the substrate loaded in the processing cassette A is completed, the I
The PE (processing end report) conversation is made between the manufacturing apparatus 10 and the EIP2.
2 is performed. When the IPE conversation of the port A is established, the EIP 22 reports to the ECS 21 that the manufacturing process of the processing cassette A has been completed in the manufacturing apparatus 10, but communication is impossible because the cell computer 20 is down. u1 ').

When the manufacturing apparatus 10 is ready to carry out the substrate subjected to the manufacturing process from the port A by the processing cassette A, the MOR (processing cassette unloading request report) conversation of the port A is made between the manufacturing apparatus 10 and the EIP 22. Done between. When the MOR conversation of the port A is established, the manufacturing apparatus 10
A request to unload processing cassette A from port A of
22 reports to the ECS 21, but the cell computer 20
Communication is not possible because the machine is down (v
1 ').

The cell computer 20 cannot issue a processing cassette unloading instruction from the port A of the manufacturing apparatus 10 to the AGV 50 because the machine is down. Therefore, since the processing cassette A is not unloaded from the port A, the MOC (processing cassette unloading completion report) conversation of the port A is not performed.

As described above, when the cell computer 20 goes down while the AGV 50 is transporting the processing cassette to the manufacturing apparatus 10, the cell computer 20 and the apparatus computer 60 and the cell computer 20 and the AGV 5
Communication during 0 becomes impossible.

Therefore, after the cell computer 20 goes down, the processing cassette request from the manufacturing apparatus 10 is accepted by the EIP 22 of the apparatus computer 60. However, since communication with the cell computer 20 cannot be performed, a new processing cassette is loaded. Is not done. Also,
The same applies to the processing cassette unloading request, and the unloading of the processing cassette is not performed.

However, even if the cell computer 20 goes down, the communication between the manufacturing apparatus 10 and the AGV 50 and between the manufacturing apparatus 10 and the apparatus computer 60 are not affected at all. Therefore, the manufacturing apparatus 10
The processing cassette can be unloaded and loaded at the port, and necessary information such as a processing cassette request and a processing procedure can be communicated with the apparatus computer 60.

Therefore, as a result, even if the cell computer 20 goes down, the manufacturing process of one processing cassette is continuously performed in the manufacturing apparatus 10. In addition,
In the production management system without the device computer 60, the processing procedure information is not transmitted to the manufacturing device 10,
No processing is performed on the processing cassette.

As described above, in the computer production management system of the present embodiment, EI which is a process for performing communication management between the cell computer 20 and the manufacturing apparatus 10 is performed.
An apparatus computer 60 storing P22 is provided for each manufacturing apparatus 10 and independently of the cell computer 20.

Thus, transmission of necessary information to each manufacturing apparatus 10 is performed by the EIP 22 of the corresponding apparatus computer 60.
This can be performed independently of the cell computer 60. Therefore, even when the cell computer 20 goes down, the communication between the manufacturing apparatus 10 and the apparatus computer 60 is possible, so that necessary information can be transmitted to the manufacturing apparatus 10.

Therefore, in the computer production management system according to the present embodiment, even if the cell computer 20 goes down, the manufacturing apparatus 10 assigned to each apparatus computer 60 can be continuously operated.
It is possible to prevent the operation rate of the manufacturing apparatus 10 from decreasing.

Further, the computer production management system of the present embodiment is particularly applied to the production of a liquid crystal display panel.

Therefore, in the computer production management system of the present embodiment, even if the cell computer 20 goes down during the production of the liquid crystal display panel, the production apparatus 10 assigned to each apparatus computer 60 can be continuously operated. Is possible, and it is possible to prevent the operating rate of the manufacturing apparatus 10 from being reduced.

The present embodiment does not limit the scope of the present invention, and various changes can be made within the scope of the present invention. For example, as described below, a manufacturing apparatus communication management process (EIP) for managing communication from the manufacturing apparatus to the cell computer may be stored in the manufacturing apparatus instead of being stored in the apparatus computer 60.

As shown in FIG. 10, each manufacturing apparatus 70 required in each manufacturing process of the liquid crystal display panel includes a cell computer 20 which manages operations for each manufacturing process.
Is controlled by Each manufacturing apparatus 70 is directly connected to the cell computer 20 so as to be able to communicate. Manufacturing equipment 7
0 is a manufacturing processing unit 71 that performs a manufacturing process according to a manufacturing process.
And a control unit 72 for controlling the manufacturing processing unit 71. The control unit 72 is provided with an EIP 72a that manages communication between the cell computer 20 and the manufacturing apparatus 70. In addition, the host computer 30, the database 40 connected to the host computer 30,
The cell computer 20 constitutes a CIM system 1 '.

Thus, the manufacturing apparatus 70 is separated from the cell computer 20 and includes the control unit 72 including the EIP 72a.
And can operate independently.

Therefore, even if the cell computer 20 goes down and the communication between the EIP 72a and the ECS 21 is interrupted, necessary information such as a processing cassette request and a processing procedure can be processed by the EIP 72a. Part 7
1 can be controlled. Further, the manufacturing apparatus 70 and the AG
The communication between the V50s is not affected at all, and the processing cassette can be unloaded and loaded at the port of the manufacturing apparatus 70.

Therefore, even if the cell computer 20 goes down due to a failure, the manufacturing apparatus 70 can be continuously operated, and the operating rate of the manufacturing apparatus 70 can be prevented from lowering.

As shown in FIG. 2, in the computer production management system of the present embodiment, the AGV 50 is controlled by the cell computer 20. Thus, even if the host computer 30 is down due to a failure, the CIM system 1 can grasp the transport status of the processing cassette by the AGV 50.

That is, as shown in FIG. 15, in the computer production management system of this embodiment, the AGV system AGV5
0 is provided. The management of the AGV 50 in the CIM system 1 is performed by the TM that performs communication with the AGV 50.
The ECS 21 performs the processing via an S (transport management system) 28.

For example, first, the ECS 21 converts the TMS 28
An instruction to transport the processing cassette to the manufacturing apparatus 10 is transmitted to the apparatus (M1). In response to this, the TMS 28 transmits a processing cassette transport instruction to the AGV 50 (M2). The AGV 50 that has received the processing cassette transport instruction checks whether the content of the transport instruction is feasible, and reports the check result to the TMS 28 (M3). Then, the TMS 2 receiving the report of the check result of the transportability of the processing cassette is received.
8 reports this to the ECS 21 (M4). On the other hand, if the processing cassette can be transported, the AGV 50 starts transporting the processing cassette to the manufacturing apparatus 10. And AG
When the transfer of the processing cassette ends, the V50 transmits a transfer end report to the TMS 28 (M5). In response,
The TMS 28 transmits a transport end report of the processing cassette to the ECS 21 (M6).

By controlling the AGV 50 by the ECS 21 of the cell computer 20, communication for control is performed between the AGV 50 and the cell computer 20. Therefore, even if the host computer 30 goes down due to a failure, the communication with the AGV 50 can be completely performed, so that the CIM system 1 can grasp the transport status of the processing cassette.

On the other hand, as shown in FIG. 16, in the computer production management system in which the host computer 30 controls the AGV 50, the communication for control is A
This is performed between the GV 50 and the host computer 30.
Here, the ECS 21 of the cell computer 20 is an AGV
It is not directly involved in the control of 50.

[0149] For example, first, the LMS 32
To the manufacturing apparatus 10 (M1 '). In response to this, TMS28 sets AGV50
The instruction for transporting the processing cassette is transmitted to (M2). The AGV 50 that has received the processing cassette transport instruction checks whether the content of the transport instruction is feasible, and reports the check result to the TMS 28 (M3). Then, the TMS receiving the report of the check result of the transportability of the processing cassette is received.
28 reports this to the LMS 32 (M4 '). On the other hand, if the processing cassette can be transported, the AGV 50 starts transporting the processing cassette to the manufacturing apparatus 10. Then, when the AGV 50 finishes transporting the processing cassette,
A transport completion report is transmitted to TMS 28 (M5). In response to this, the TMS 28 transmits a processing cassette transport end report to the LMS 32 (M6 ').

As described above, when the AGV 50 is controlled by the LMS 32 of the host computer 30, communication for control is performed between the AGV 50 and the host computer 30. Therefore, when the host computer 30 goes down due to a failure, the cell computer 2
0 and the host computer 30 cannot communicate with each other, so that the CIM system 1 cannot grasp the transport status of the processing cassette.

[0151]

As described above, the computer production management system according to the first aspect of the present invention manages the manufacturing apparatuses used in various processes for manufacturing products and the manufacturing management of the manufacturing apparatus group for each specific range. In a computer production management system including a cell computer to be performed and a host computer that controls a manufacturing process by controlling each of the cell computers, a computer is provided for each of the manufacturing apparatuses and independently of the cell computer. The configuration includes an apparatus computer that manages communication between the manufacturing apparatus and the cell computer.

Therefore, transmission of necessary information to each manufacturing apparatus can be performed by the corresponding apparatus computer independently of the cell computer. Therefore, even if the cell computer goes down, the communication between the manufacturing apparatus and the apparatus computer is possible, so that necessary information can be transmitted to the manufacturing apparatus.

Therefore, in the above-mentioned computer production management system, even when the cell computer goes down, the production equipment assigned to each equipment computer can be continuously operated, and the operation rate of the production equipment is prevented from lowering. It has the effect that it can be done.

As described above, the computer production management system according to the second aspect of the invention has a configuration in which the above product is a liquid crystal display panel in addition to the configuration of the first aspect.

Therefore, in addition to the effect of the configuration of claim 1, even if the cell computer goes down during the manufacture of the liquid crystal display panel, it is possible to continue the operation of the manufacturing device assigned to each device computer. Thus, it is possible to prevent the operation rate of the manufacturing apparatus from being reduced.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing connection relationships among manufacturing apparatuses, apparatus computers, cell computers, host computers, and databases in a computer production management system according to an embodiment of the present invention.

FIG. 2 is a block diagram schematically showing a configuration of the computer production management system shown in FIG.

FIG. 3 is an explanatory view schematically showing a configuration of a manufacturing apparatus of the computer production management system shown in FIG.

FIG. 4 is a flowchart schematically showing a control operation of the computer production management system shown in FIG.

FIG. 5 is an explanatory diagram showing a conversation between the manufacturing apparatus and the apparatus computer of the computer production management system shown in FIG. 1;

6 is an explanatory diagram showing a flow of a message between the manufacturing apparatus of the computer production management system shown in FIG. 1 and a host computer.

FIG. 7 is an explanatory diagram showing a state where the cell computer goes down in the computer production management system shown in FIG. 1;

FIG. 8 is an explanatory diagram showing a flow of messages between the manufacturing apparatus and the host computer until the cell computer goes down in the computer production management system shown in FIG. 1;

FIG. 9 is an explanatory diagram showing a flow of a message between the manufacturing apparatus and the host computer after the cell computer goes down in the computer production management system shown in FIG. 1;

FIG. 10 is a block diagram schematically showing a configuration of a computer production management system according to another embodiment of the present invention.

FIG. 11 is an explanatory diagram showing a connection relationship among manufacturing apparatuses, a cell computer, a host computer, and a database in a conventional computer production management system.

FIG. 12 is a block diagram schematically showing the configuration of the conventional computer production management system shown in FIG.

FIG. 13 is a flowchart schematically showing a control operation of the conventional computer production management system shown in FIG.

14 is an explanatory diagram showing a state where the cell computer goes down in the conventional computer production management system shown in FIG.

FIG. 15 is an explanatory diagram showing an outline of a communication operation between the AGV system and the CIM system in the computer production management system shown in FIGS. 1 and 10;

FIG. 16 is an explanatory diagram showing an outline of a communication operation between an AGV system and a CIM system in a conventional computer production management system.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Manufacturing apparatus 20 Cell computer 30 Host computer 60 Device computer 70 Manufacturing apparatus

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification code FI H01L 21/02 G05B 19/417 Q

Claims (2)

[Claims] 1. A manufacturing apparatus used in various processes for manufacturing a product, a cell computer for managing manufacturing of a group of manufacturing devices for each specific range, and a manufacturing process by controlling each of the cell computers. A computer production management system comprising: a host computer for managing the manufacturing computer; and an apparatus computer provided for each of the manufacturing apparatuses and independently of the cell computer, for managing communication between the manufacturing apparatus and the cell computer. A computer production management system, comprising: 2. The computer production management system according to claim 1, wherein said product is a liquid crystal display panel.