JP2007258598A - Substrate processing system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a group control system by which productivity of an IC manufacturing plant is improved. <P>SOLUTION: Several floor layout image data files are previously prepared and stored in a storing folder (step A1). When a floor layout image is registered, a floor layout image data file which matches with the actual layout is selected from the stored group of floor layout image data files and is read into a layout display system 30 (step A2). Several substrate processing apparatuses M1 to Mn are arranged in sequence, on the basis of the actual floor layout drawings in the floor layout image data file which is indicated on an operation screen (step A3). A floor layout details display file is stored (step A4). <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a substrate processing system. For example, in a semiconductor integrated circuit device (hereinafter referred to as IC) manufacturing factory, a metal film or a semiconductor film (hereinafter referred to as a wafer) on which an integrated circuit including a semiconductor element is manufactured. The present invention relates to an effective one used for managing a substrate processing apparatus group for forming insulating films and semiconductor films.

In a highly advanced IC manufacturing factory, 100 or more substrate processing apparatuses are installed on a floor in the factory, and each of these substrate processing apparatuses is configured to be controlled by a computer.
Since the operation of these substrate processing apparatuses needs to be managed organically and efficiently, the substrate processing system in which the controllers of these substrate processing apparatuses are respectively connected to a group management apparatus constructed by a computer via a network. Thus, the group management of the substrate processing apparatus group is generally performed.

However, the group management apparatus in the conventional substrate processing system is merely configured to display the status information of a plurality of substrate processing apparatuses on a list screen, and each substrate processing apparatus is arranged at any position on the work floor. It does not have a function to display whether or not
For this reason, when a failure occurs in the substrate processing apparatus, even if the state of the substrate processing apparatus can be recognized, the position of the substrate processing apparatus is recognized on the work floor. Difficult to do.
As a result, in the case of an unfamiliar worker, even if referring to the layout drawing (floor layout drawing) of the substrate processing apparatus, the inside of the floor is sequentially checked to check the substrate processing apparatus in which the failure has occurred. Since useless work time is generated, the work efficiency is lowered, and the apparatus operation rate is lowered.
Specifically, even if the floor processing drawing is referred to, the substrate processing apparatus itself is equipped with a signal tower or the like that clearly indicates the state, but if the floor is partitioned by a wall such as a partition, the signal is Since the tower cannot be seen, it was not easy to find the substrate processing apparatus in which the failure occurred.

  The object of the present invention is to confirm the position with the group management device in advance when a failure or the like occurs in the device, so that the operator can move to the target device without spending time searching for the device on the floor. An object of the present invention is to provide a substrate processing system that can be facilitated and, as a result, can improve work efficiency.

Representative inventions disclosed in the present application are as follows.
(1) In a substrate processing system configured by a substrate processing apparatus that performs processing on a substrate and a group management device connected to at least one substrate processing apparatus,
The group management apparatus selects and displays a predetermined file from a plurality of floor layout screen files registered in advance, and assigns a plurality of substrate processing apparatuses to be installed in the selected floor layout screen. A substrate processing system capable of displaying a layout of the substrate processing apparatus.
(2) The substrate processing system according to (1), wherein the substrate processing apparatus in which a failure has occurred is clearly indicated on the floor layout screen.
(3) The substrate processing system according to (2), wherein the substrate processing apparatus in which a failure has occurred is displayed in a different color on the floor layout screen.
(4) In (3), when a part of the substrate processing apparatus whose color is changed on the floor layout screen is selected, details of the selected part are displayed.

According to the above (1), for example, since the substrate processing apparatus in which the failure has occurred can be clearly shown on the floor layout screen, it is wasteful to check the substrate processing apparatus in which the failure has occurred by sequentially checking the floor. Generation of a long working time can be prevented.
As a result, since it can be easily moved to the target device, it is possible to reduce the time required for a work (for example, a maintenance work) for recovering from the failure and to improve the device operating rate.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

In the present embodiment, the substrate processing system according to the present invention is configured to perform group management of a large number of substrate processing apparatuses in an IC manufacturing factory that implements a so-called front end of an IC manufacturing method.
As shown in FIG. 1, a substrate processing system (hereinafter referred to as a group management system) 10 according to the present embodiment includes a large number of substrate processing apparatuses M1, M2, M3. A group management device 20 connected to each of the processing devices M1 to Mn via a network 11 is provided.

Specific examples of the substrate processing apparatuses M1 to Mn include an oxide film forming apparatus, a resist coating apparatus, a reduction projection exposure apparatus, a developing apparatus, a dry etching apparatus, an ashing apparatus, a CVD apparatus, an impurity introduction apparatus, a diffusion apparatus, an annealing apparatus, and sputtering. Devices, etc.
Even in a general IC manufacturing factory, 100 or more of these substrate processing apparatuses M1 to Mn are provided, and 100 or more of the substrate processing apparatuses are placed on a floor called a clean room in the building of the IC manufacturing factory. It is laid out organically and reasonably.
Each of the substrate processing apparatuses M1 to Mn includes a controller constructed from a personal computer or the like in order to automatically execute a recipe given to each of the substrate processing apparatuses M1 to Mn, and these controllers are connected to the group management apparatus 20 via the network 11. (See FIG. 1).

The group management apparatus 20 is constructed from a personal computer, a main frame, a supercomputer, and the like.
The group management device 20 is connected to an input device 21 configured with a keyboard, a mouse, and the like, a display device 22 configured with a television monitor, a storage device 23 configured with a storage medium driving device, and the like.
The group management apparatus 20 may be installed in the clean room, but is generally installed outside the clean room.

The group management apparatus 20 includes a GUI (graphical user interface) system.
The GUI system 24 selects an icon (graphic symbol representing a function) on the operation screen displayed on the display device 22 by clicking with a mouse pointer and clicking or selecting with a cursor. Software that can switch between processes, input processes, instructions, judgments, and data (information).
The group management apparatus 20 incorporates a layout display system 30 which is application software as a feature of the present invention.
The layout display system 30 selects and displays a predetermined file from a plurality of floor layout screen files registered in advance, and allocates a plurality of substrate processing apparatuses to be actually installed in the selected floor layout screen. Thus, a layout display of the substrate processing apparatus is performed.
That is, the layout display system 30 is configured to execute a program flow to be described later.

  Hereinafter, the layout display system 30 will be described.

The layout display for the layout display system 30 is registered in advance by the layout display registration flow shown in FIG.
By the way, since the floor layout is different for each IC manufacturing factory, it is necessary to set the background of the floor layout screen for each IC manufacturing factory.
However, if the background of the floor layout screen is set for each IC manufacturing factory, a great deal of time is wasted each time a layout display is registered.

Therefore, in this embodiment, instead of creating a floor layout background screen each time a layout display is registered in accordance with the layout of each IC manufacturing factory, a plurality of floor layout image data files are prepared in advance, The data is stored in a dedicated storage folder of the layout display system 30 or a storage folder of the storage device 23 of the group management device 20 (step A1).
At the time of registering the floor layout image for each IC manufacturing factory, the actual floor layout of the IC manufacturing factory to be registered for layout display from the plurality of floor layout image data files stored in the storage folder in advance. A floor layout image data file matching the background is selected and read into the layout display system 30 (step A2).

Specifically, step A1 and step A2 are as follows.
A plurality of types of floor layout image data file F (see FIG. 3) are created based on the floor layout drawing of the IC manufacturing factory, and stored in the floor layout image data file storage folder shown in FIG.
The floor layout image data file storage folder is set in the layout display system 30 or the storage device 23 of the group management device 20.

When the layout display system 30 is activated at the time of actual floor layout display registration, first, as shown in FIG. 4, an operation screen (hereinafter referred to as an operation screen) of the display device 22 of the group management device 20. ) Displays the floor layout registration window.
When the floor selection button is pressed, a pop-up window is displayed as shown in FIG. 5, and the operator can select a floor layout image data file (for example, F1) that matches the background of the floor layout of the actual IC manufacturing factory. Select.

Subsequently, the selected floor layout image data file F1 is read from the floor layout image data file storage folder shown in FIG. 3 and displayed on the operation screen as shown in FIG.
If the displayed floor layout image data file F1 is the background of the desired floor layout, the operator presses the registration button.

Next, the operator sequentially arranges and displays a plurality of substrate processing apparatuses M1 to Mn on the screen of the floor layout image data file F1 displayed on the operation screen based on the actual floor layout drawing of the IC manufacturing factory. (Step A3).
The substrate processing apparatuses M1 to Mn displayed on the screen of the floor layout image data file F1 can be freely arranged.

Here, since the arrangement coordinates of each substrate processing apparatus M1 to Mn are necessary for grasping the position of each substrate processing apparatus at the time of detailed layout display described later, it is stored in a floor layout display storage folder described later as registration information. To do.
Further, in order to easily recognize each of the substrate processing apparatuses M1 to Mn arranged on the screen of the floor layout image data file F1, the names of the substrate processing apparatuses M1 to Mn are displayed, and each of the substrate processing apparatuses M1 is displayed. The arrangement coordinates of .about.Mn and the names of the substrate processing apparatuses M1 to Mn are linked.
Furthermore, in order to make the floor layout easier to understand, it is possible to freely display character information not only on each of the substrate processing apparatuses M1 to Mn but also on a portion serving as a mark such as a floor passage or an entrance / exit.

A specific example of the procedure of step A3 is as follows.
As shown in FIG. 7, when the device button in the tool box on the operation screen is pressed, a device list window is displayed, and the operator selects a desired device name (for example, M1). When selected, the apparatus rectangular data is displayed on the operation screen.

  Subsequently, as shown in FIG. 8, the apparatus rectangular data is dragged to a desired position in the floor layout image data file F1.

By this dragging, as shown in FIG. 9, the floor layout image data file F1, the name of each substrate processing apparatus, and the floor layout display file window in which the arrangement coordinates are displayed in association with each other are displayed. Press the registration button.
When the registration button is pressed, the floor layout display file shown in FIG. 9 is stored in the floor layout display file storage folder set in the layout display system 30 or the group management apparatus 20.

  By repeating the above procedure, all of the plurality of substrate processing apparatuses M1 to Mn on the actual floor layout drawing of the IC manufacturing factory are arranged on the screen of the floor layout image data file F1.

In order to make it easier to understand the virtual floor layout on the screen, if necessary, characters on the screen of the floor layout image data file F1 are used as marks for passages and entrances on the actual floor layout drawing of the IC manufacturing factory. Information is displayed and registered.
The display of the character information can be performed, for example, according to the procedure shown in FIG.
As shown in FIG. 10, a range selection button in the toolbox on the operation screen is pressed to designate a character display area in the floor layout image data file F1.
Subsequently, the character button is pressed, and characters (for example, an entrance and an exit) are written in the character display area.

  Further, in order to facilitate the recognition of each of the substrate processing apparatuses M1 to Mn disposed on the screen of the floor layout image data file F1, a floor layout detailed display (hereinafter referred to as “detailed display”) file is stored in the layout display system. 30 or the detailed display file storage folder set in the group management apparatus 20 (step A4).

A specific example of the procedure of step A4 is as follows.
As shown in FIG. 11, the range selection button in the toolbox on the operation screen is pressed to designate an area to be displayed in detail in the floor layout image data file F1.
This detailed display screen is also displayed as image data. However, after copying the image data of the designated area of the floor layout image data file F1 to a size that can be accommodated within the display range of the operation screen, the image data for detailed display is displayed. Save as.
As shown in FIG. 12, the enlargement ratio at the time of image data enlargement and the upper left coordinate of the specified range are necessary for acquiring the coordinates and display size for display of each substrate processing apparatus at the time of detailed display. So save it as internal data. Compared with the layout display file of FIG. 9, not only the floor layout image data file F1 and the position information and name of each substrate processing apparatus, but also, in addition to these, the enlargement ratio and the position information of the detailed layout are associated with the image file. It is displayed.
As the coordinates of each substrate processing apparatus, the coordinates of the substrate processing apparatus to be displayed on the detailed layout screen are set based on the obtained enlargement ratio, with the upper left of the detailed layout background image data as the origin.

  When the storage of the detail display file desired by the operator is completed, the layout display registration flow is ended as shown in FIG.

  Next, a process flow when the floor layout display flow registered as described above is operated in an IC manufacturing factory will be described with reference to FIG. 13 when a failure occurs in an arbitrary substrate processing apparatus.

  When the group management system 10 is power-on reset, a power-on reset signal is input to the group management apparatus 20 (not shown). Thereby, the program of the group management apparatus 20 starts a process flow from the program address 0 (step B1).

  When the layout display system 30 is activated by a predetermined operation, the floor layout display file shown in FIG. 9 is read from the floor layout display file storage folder, and the floor layout is displayed on the operation screen (step B2).

Thereafter, the process flow of the sequence of the group management apparatus 20 is sequentially performed.
At this time, the operator can grasp the status of the substrate processing apparatus group on the entire floor of the IC manufacturing factory by monitoring the floor layout display on the operation screen.

  If a failure occurs in the substrate processing apparatus during the execution of the sequence process flow of the group management apparatus 20, a failure occurrence report signal is automatically sent from the substrate processing apparatus where the failure has occurred to the group management apparatus 20 via the network 11. It is transmitted (step B3).

Based on this failure occurrence report signal, as shown in FIG. 14, the layout display system 30 displays the display status of the substrate processing apparatus in which the failure has been reported in the floor layout display of the operation screen (in FIG. 14, it is shaded). ) Is switched (step B4).
Thereby, the substrate processing apparatus in which the failure has occurred is clarified, and the operator can recognize where the substrate processing apparatus in which the failure has occurred is installed on the floor.

  When the operator wants to know the details of the substrate processing apparatus in which the failure has occurred, the display is switched to the detailed display as shown in FIG. 15 by clicking the vicinity of the substrate processing apparatus whose display has been switched (see FIG. 15). Step B5).

The detailed display is possible by having the coordinate time information of the upper left and lower right of the specified range acquired at the time of registering the detailed layout.
The corresponding detailed display file is searched from the coordinate information when the mouse is clicked, and when the corresponding detailed display file is registered, the screen is switched and displayed.
In addition, in order to make the status of the substrate processing apparatus clearer on the detailed display screen, a substrate processing apparatus status display area is provided in the area of the displayed substrate processing apparatus, for example, for a status report from the substrate processing apparatus. The display color is changed.

  Depending on the substrate processing apparatus, a plurality of states may occur at the same time, so that the plurality of substrate processing apparatus state display areas can be distinguished.

  According to the embodiment, the following effects can be obtained.

1) In the group management system, by displaying the floor layout of the substrate processing equipment, the location of the substrate processing equipment placed on the floor becomes clear, so it is easy to identify the location of the substrate processing equipment where the fault has occurred. Thus, it is possible to quickly deal with the failure.

2) By capturing the floor layout screen background as image data, a more realistic floor layout can be easily set and displayed.

3) By linking the floor layout display and the detailed display, it is easy to switch between the layout display of the entire floor and the local detailed display.

4) On the floor layout details display screen, the operational status of the substrate processing equipment can be easily grasped by switching the signal tower display according to the status report from the substrate processing equipment.

  Needless to say, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention.

For example, the group management apparatus does not need to be installed on the same floor as the substrate processing apparatus group, and can be installed outside the clean room (office or the like).
In addition, a group management device is installed on the same floor as the substrate processing apparatus, and the floor layout of the substrate processing apparatus is displayed on an operation terminal (such as a personal computer) installed outside the clean room (such as an office). May be.

  Substrate processing equipment includes oxide film forming equipment, resist coating equipment, reduction projection exposure equipment, development equipment, dry etching equipment, ashing equipment, CVD equipment, impurity introduction equipment, diffusion equipment, annealing equipment used in the pre-process of an IC manufacturing factory. The substrate processing apparatus is not limited to a sputtering apparatus or the like, and may include a substrate processing apparatus such as a wafer dicing apparatus, a die bonding apparatus, a wire bonding apparatus, a resin sealing body forming apparatus, and a lead forming apparatus used in a subsequent process of an IC manufacturing factory.

  Further, the case of processing a wafer has been described, but the present invention can be applied to all substrates such as a liquid crystal panel, a magnetic disk, and an optical disk.

It is a block diagram which shows the group management system which is one embodiment of this invention. It is a flowchart which shows a layout display registration flow. It is a schematic diagram which shows a floor layout image data file storage folder. It is a screen figure which shows a floor layout registration window. It is a pop-up screen figure for selecting a floor layout image data file. It is the screen figure which selected the floor layout image data file. It is a screen figure which shows an apparatus list window. It is a screen figure which shows dragging to the desired position of the floor layout image data file of the apparatus rectangular data. It is a screen figure which shows a floor layout display file window. It is a screen figure which shows writing of the character to a character display area. It is a screen figure which shows designation | designated of a detailed display area. It is a schematic diagram which shows the relationship between a detailed display magnification and the coordinate of the designated range. It is a flowchart which shows the process flow at the time of operation | use of a floor layout display flow. It is a screen figure which shows switching of the display state of a failure generation substrate processing apparatus. It is a screen figure which shows switching of a detailed display.

Explanation of symbols

  M1 to Mn ... substrate processing apparatus, 10 ... group management system (substrate processing system), 11 ... network, 20 ... group management apparatus, 21 ... input device, 22 ... display device, 23 ... storage device, 24 ... GUI system, 30 ... layout display system.

Claims (1)

In a substrate processing system configured by a substrate processing apparatus that performs processing on a substrate and a group management apparatus connected to at least one substrate processing apparatus,
The group management apparatus selects and displays a predetermined file from a plurality of floor layout screen files registered in advance, and assigns a plurality of substrate processing apparatuses to be installed in the selected floor layout screen. The substrate processing system is capable of displaying the layout of the substrate processing apparatus by storing the floor layout screen and the position information and the name of each substrate processing apparatus in association with each other.

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