JP2004193430A5 - - Google Patents

Download PDF

Info

Publication number
JP2004193430A5
JP2004193430A5 JP2002361357A JP2002361357A JP2004193430A5 JP 2004193430 A5 JP2004193430 A5 JP 2004193430A5 JP 2002361357 A JP2002361357 A JP 2002361357A JP 2002361357 A JP2002361357 A JP 2002361357A JP 2004193430 A5 JP2004193430 A5 JP 2004193430A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002361357A
Other versions
JP2004193430A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002361357A priority Critical patent/JP2004193430A/ja
Priority claimed from JP2002361357A external-priority patent/JP2004193430A/ja
Publication of JP2004193430A publication Critical patent/JP2004193430A/ja
Publication of JP2004193430A5 publication Critical patent/JP2004193430A5/ja
Pending legal-status Critical Current

Links

JP2002361357A 2002-12-12 2002-12-12 半導体装置及びその製造方法 Pending JP2004193430A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002361357A JP2004193430A (ja) 2002-12-12 2002-12-12 半導体装置及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002361357A JP2004193430A (ja) 2002-12-12 2002-12-12 半導体装置及びその製造方法

Publications (2)

Publication Number Publication Date
JP2004193430A JP2004193430A (ja) 2004-07-08
JP2004193430A5 true JP2004193430A5 (ja) 2006-02-02

Family

ID=32760146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002361357A Pending JP2004193430A (ja) 2002-12-12 2002-12-12 半導体装置及びその製造方法

Country Status (1)

Country Link
JP (1) JP2004193430A (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4593204B2 (ja) * 2004-08-24 2010-12-08 Ｏｋｉセミコンダクタ株式会社 強誘電体メモリの製造方法
JP4562482B2 (ja) * 2004-10-04 2010-10-13 Ｏｋｉセミコンダクタ株式会社 強誘電体キャパシタ構造およびその作製方法
JP2006190809A (ja) 2005-01-06 2006-07-20 Fujitsu Ltd 半導体装置の製造方法
JP4785030B2 (ja) 2005-01-18 2011-10-05 富士通セミコンダクター株式会社 半導体装置とその製造方法
JP2007036126A (ja) * 2005-07-29 2007-02-08 Fujitsu Ltd 半導体装置とその製造方法
CN101238573B (zh) 2005-08-15 2012-05-30 富士通半导体股份有限公司 半导体器件及其制造方法
WO2007063573A1 (ja) 2005-11-29 2007-06-07 Fujitsu Limited 半導体装置とその製造方法

Similar Documents

Publication Publication Date Title
BE2019C547I2 (ja)
BE2019C510I2 (ja)
BE2018C021I2 (ja)
BE2017C049I2 (ja)
BE2017C005I2 (ja)
BE2016C069I2 (ja)
BE2016C013I2 (ja)
BE2018C018I2 (ja)
BE2016C002I2 (ja)
BE2015C078I2 (ja)
BE2015C017I2 (ja)
BE2014C053I2 (ja)
BE2014C051I2 (ja)
BE2014C041I2 (ja)
BE2014C030I2 (ja)
BE2014C016I2 (ja)
BE2014C015I2 (ja)
BE2013C063I2 (ja)
BE2013C039I2 (ja)
BE2015C067I2 (ja)
BE2011C038I2 (ja)
JP2003188624A5 (ja)
BRPI0215435A2 (ja)
BE2013C046I2 (ja)
JP2003179149A5 (ja)