JP2004190090A - High purity aluminum alloy material - Google Patents
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【０００１】
【発明の属する技術分野】
本発明は、高純度アルミニウム合金材に関する。
【０００２】
【従来の技術】
高純度アルミニウム合金材は、プラズマ反応装置などを構成する材料として有用であり、表面に陽極酸化皮膜が形成された陽極酸化高純度アルミニウム合金材としても用いられる。かかる高純度アルミニウム合金材としては強度の高いものが求められており、特許文献１（特開平１０−８８２７１号公報第３頁）には、０．３５〜２．５質量％のマグネシウムおよび０．２〜１質量％のシリコンを含み、マグネシウム含有量（ＣMg、単位は重量％））がシリコン含有量（ＣSi、単位は質量％）の１．７３倍を超え、不純物の含有量が０．１質量％以下である高純度アルミニウム合金材が開示されている。
【０００３】
しかし、かかる従来の高純度アルミニウム合金材では、必ずしも十分な強度ではないという問題があった。
【０００４】
【発明が解決しようとする課題】
そこで本発明者は、プラズマ反応装置を構成する材料として使用でき、十分な強度を有する高純度アルミニウム合金材を開発するべく鋭意検討した結果、マグネシウムの含有量を０．４〜２．１質量％とし、シリコンの含有量を０．４〜１．２質量％とし、マグネシウム含有量が式（１）
１．７０×ＣSi−１質量％ ≦ ＣMg ≦ １．７０×ＣSi （１）
〔式中、ＣMgはマグネシウムの含有量（単位は質量％）を、ＣSiはシリコンの含有量（単位は質量％）をそれぞれ示す。〕
を満足することで、プラズマ反応装置に使用でき、十分な強度を有する高純度アルミニウム合金材となし得ることを見出し、本発明に至った。
【０００５】
【課題を解決するための手段】
すなわち本発明は、０．４質量％以上２．１質量％以下のマグネシウムおよび０．４質量％以上１．２質量％以下のシリコンを含み、マグネシウム含有量（ＣMg）が前記式（１）を満足し、不純物の含有量が０．１質量％以下であることを特徴とする高純度アルミニウム合金材を提供するものである。
【０００６】
【発明の実施の形態】
本発明の高純度アルミニウム合金材は、０．４質量％以上２．１質量％以下のマグネシウムおよび０．４質量％以上１．２質量％以下、好ましくは０．８質量％以上のシリコンを含む。マグネシウムの含有量（ＣMg）が２．１質量％を超えたり、シリコンの含有量（ＣSi）が１．２質量％を超えると、高純度アルミニウム合金材の表面に形成される陽極酸化皮膜にマグネシウムやシリコンが混入し易くなる傾向にある。また、マグネシウムの含有量（ＣMg）が０．４質量％未満であったり、シリコンの含有量（ＣSi）が０．４質量％未満であると、強度が十分とはならない傾向にある。
【０００７】
本発明の高純度アルミニウム合金材は、マグネシウムの含有量（ＣMg）が式（１）を満足し、好ましくは式（２）
１．７０×ＣSi−１質量％ ≦ ＣMg ≦ １．７０×ＣSi−０．５質量％ （２）〔式中、ＣMgおよびＣSiはそれぞれ前記と同じ意味を示す。〕
を満足する。マグネシウムの含有量（ＣMg）が式（１）で規定する範囲を超えたり、この範囲未満であると、強度が不十分となる傾向にある。
【０００８】
本発明の高純度アルミニウム合金材は、不純物の含有量が０．１質量％以下である。不純物としては、例えば鉄、マンガン、銅、クロム、亜鉛、チタン、ニッケル、バナジウムなどの遷移金属、リチウム、ナトリウムなどのアルカリ金属、カルシウム、ストロンチウムなどのアルカリ土類金属などの金属不純物、ホウ素などの非金属不純物が挙げられる。
【０００９】
本発明の高純度アルミニウム合金材は、例えば鋳型内で溶湯を冷却し、固化して得られる鋳塊材であってもよいし、高純度アルミニウム合金鋳塊材を塑性加工して得られる塑性加工材であってもよい。
【００１０】
高純度アルミニウム合金鋳塊材は、例えば高純度アルミニウムにマグネシウムおよびシリコンを添加し鋳造する方法によって製造することができる。具体的には、高純度アルミニウムを加熱して溶融し、これにマグネシウムおよびシリコンを添加して溶湯を得、この溶湯を鋳型内で冷却し固化すればよい。高純度アルミニウムとしては、純度９９．９質量％以上のものを用いればよい。かかる純度の高純度アルミニウムを用いることで、得られる高純度アルミニウム合金材の不純物含有量を容易に０．１質量％以下とすることができる。高純度アルミニウムを溶融するには、例えば黒鉛製の坩堝、アルミナ製の坩堝を用い、かかる坩堝の中で加熱すればよい。
【００１１】
マグネシウムおよびシリコンは通常、金属状態で添加される。マグネシウムおよびシリコンとしては、それぞれ純度が９９．９％以上のものを用いることが好ましい。マグネシウムおよびシリコンが添加された溶湯は、０．４質量％以上２．１質量％以下のマグネシウムおよび０．４質量％以上、好ましくは０．８質量％以上で、１．２質量％以下のシリコンを含み、マグネシウム含有量が前記式（１）を満足し、不純物の含有量が０．１質量％以下のアルミニウム溶湯である。かかる溶湯の温度は通常７００℃以上８００℃以下である。
【００１２】
かかるアルミニウム溶湯を鋳型内に流し込み、鋳型内で冷却することで、鋳塊材として、本発明の高純度アルミニウム合金材を得ることができる。冷却速度は通常４℃／秒以上３０℃／秒以下程度である。
【００１３】
高純度アルミニウム合金塑性加工材は、例えば鋳型内で冷却固化して得た高純度アルミニウム合金鋳塊材を塑性加工することで得ることができる。塑性加工としては、例えば圧延、鍛造などが挙げられる。鋳塊材を塑性加工するには、例えば鋳塊材を板状に切り出し、圧延、鍛造などの方法により塑性加工すればよい。塑性加工温度は通常２００℃以上５００℃以下程度である。
【００１４】
かくして得られた本発明の高純度アルミニウム合金材は通常、加熱処理されて加熱処理材として用いられる。加熱処理は、例えば高純度アルミニウム合金材を加熱して５２０℃以上５８０℃以下程度の温度に通常１時間以上２５時間以下程度保持した後、冷却速度１０℃／分以上、好ましくは３００℃／分以下程度で５０℃以下程度の温度に冷却し、次いで５０℃以下、好ましくは−５０℃以上、更に好ましくは１０℃以上程度の温度に通常０．５時間以上７２時間以下程度保持したのち、加熱して１５０℃以上２００℃以下程度の温度で通常２時間以上５０時間以下程度保持して行なわれる。かかる加熱処理を施された高純度アルミニウム合金材は、強度がより向上している。
【００１５】
本発明の高純度アルミニウム合金材において、マグネシウムおよびシリコンはＭｇ2Ｓｉで示される組成の珪素化マグネシウム粒状物相を形成して合金在中に分散して存在する。合金材の断面を顕微鏡観察して計測される粒状物相のうち、粒子径１μｍ以上２０μｍ以下の粒状物相の個数は、１ｍｍ2あたり概ね２０００個以下である。
【００１６】
かかる本発明の高純度アルミニウム合金材は、例えば表面に陽極酸化皮膜を形成して陽極酸化高純度アルミニウム合金材として用いることができる。陽極酸化皮膜は、通常の陽極酸化処理によって形成することができる。具体的には、例えば希硫酸に高純度アルミニウム合金材を浸漬しながら、合金材を陽極として直流電流を流せばよい。形成される陽極酸化皮膜の厚みは、直流電流の電荷量によって定まる。高純度アルミニウム合金材の表面には自然酸化により形成された自然酸化皮膜が形成されているが、かかる自然酸化皮膜を除去するために、高純度アルミニウム合金材を予めアルカリ水溶液、酸などで洗浄しておくことが好ましい。
【００１７】
【発明の効果】
本発明の高純度アルミニウム合金材は、十分な強度を有しており、例えばプラズマ反応装置を構成する材料として有用である。
【００１８】
【実施例】
以下、実施例によって本発明をより詳細に説明するが、本発明は、かかる実施例によって限定されるものではない。
なお、以下の各実施例で得た高純度アルミニウム合金材の引張り強さおよび耐力は、合金材を直径１０ｍｍ、長さ４０ｍｍの丸棒（鋳塊材）または厚み２．４ｍｍ、長さ５０ｍｍの平板状（圧延材）に切出し試験片として引張り試験を行い、長さが０．２％伸びたときの単位断面積あたりの引張力を耐力とし、破断するまでの最大の引張力を引張り強さとして、それぞれ求めた。
【００１９】
実施例１
〔鋳塊材の製造〕
黒鉛製坩堝内で、高純度アルミニウム（純度９９．９９％）９８質量部を７５０℃に加熱して溶融させ、同温度で金属シリコン（純度９９．９９９％）１．０質量部および金属マグネシウム（純度９９．９％）１．０質量部を加えてアルミニウム溶湯を得た。予め１２０℃に加熱した鉄製鋳型〔内寸縦２０ｍｍ×横１００ｍｍ×高さ１５０ｍｍ〕に上記で得たアルミニウム溶湯（７２０℃）を流し込み、冷却速度１０℃／秒で冷却して、高純度アルミニウム合金鋳塊材を得た。得られた鋳塊材を縦１００ｍｍ×横１２０ｍｍ×厚み２０ｍｍの板状に切出した。
【００２０】
得られた鋳塊材の表面を鏡面研磨し、光学顕微鏡により観察倍率４００倍で目視観察したところ、表面に粒状物相が観察された。この粒状物相の大きさは概ね２５μｍであり、１ｍｍ2あたりの個数は８００個であった。
【００２１】
〔５３０℃での加熱処理〕
上記と同様にして得た板状の鋳塊材〔縦１００ｍｍ×横１２０ｍｍ×厚み２０ｍｍ〕を５３０℃に加熱し同温度を５時間保持した後、水中に浸漬して１０℃／分を超える冷却速度で冷却し、次いで室温（約２０℃〜２５℃）で２時間保持したのち、１８０℃に加熱して同温度を８時間保持して加熱処理をした。加熱処理後の鋳塊材の表面を鏡面研磨し、上記と同様にして光学顕微鏡により目視観察したところ、粒状物相の大きさは概ね１０μｍであり、１ｍｍ2あたりの個数は７００個であった。この鋳塊材の引張り強さは３１０ＭＰａであり、耐力は２６０ＭＰａであった。
【００２２】
〔５５０℃での加熱処理〕
上記と同様にして得た板状の鋳塊材〔縦１００ｍｍ×横１２０ｍｍ×厚み２０ｍｍ〕を５５０℃に加熱し同温度を５時間保持した後、水中に浸漬して冷却して、次いで室温で２時間保持したのち、１８０℃に加熱して同温度を８時間保持して加熱処理をした。加熱処理後の鋳塊材の表面を鏡面研磨し、上記と同様にして光学顕微鏡により目視観察したところ、粒状物相の大きさは概ね５μｍであり、１ｍｍ2あたりの個数は７００個であった。この鋳塊材の引張り強さは３２０ＭＰａであり、耐力は２７０ＭＰａであった。
【００２３】
〔５７５℃での加熱処理〕
上記と同様にして得た板状の鋳塊材〔縦１００ｍｍ×横１２０ｍｍ×厚み２０ｍｍ〕を５７５℃に加熱し同温度を５時間保持した後、水中に浸漬して冷却して、次いで室温で２時間保持したのち、１８０℃に加熱して同温度を８時間保持して加熱処理をした。加熱処理後の鋳塊材の表面を鏡面研磨し、上記と同様にして光学顕微鏡により目視観察したところ、粒状物相の大きさは概ね５μｍであり、１ｍｍ2あたりの個数は３００個であった。この鋳塊材の引張り強さは３５０ＭＰａであり、耐力は３１０ＭＰａであった。
【００２４】
結果を表１に示す。
【００２５】
〔陽極酸化処理〕
上記で５３０℃、５５０℃および５７５℃で加熱処理した後の鋳塊材を１０％水酸化ナトリウム水溶液〔水酸化ナトリウム濃度が質量分率で１０％の水溶液〕に５０℃で３分間浸漬し、その後水洗し、さらに１０％硝酸水溶液〔硝酸濃度が質量分率で１０％の水溶液〕に１分間浸漬し、水洗して、表面に自然酸化により形成された酸化皮膜を除去した。次いで０℃±２℃の温度を維持しながら１５％硫酸水溶液〔硫酸濃度が質量分率で１５％の水溶液〕に浸漬し、鋳塊材を陽極として０．０３Ａ／ｃｍ2の電流密度で５０分間直流電流を流して、陽極酸化した。
陽極酸化後の鋳塊材を水洗し、乾燥して、陽極酸化高純度アルミニウム合金材を得た。この陽極酸化高純度アルミニウム合金材は、表面に均一にムラのない陽極酸化皮膜が形成されていた。
【００２６】
【表１】
比較例１
金属シリコン（純度９９．９９９％）の添加量を０．５質量部とし、金属マグネシウム（純度９９．９％）の添加量を１．５質量部とした以外は実施例１と同様に操作して、板状の高純度アルミニウム合金鋳塊材を得、加熱処理した。結果を表２に示す。
【００２８】
【表２】
比較例２
高純度アルミニウム（純度９９．９９％）の使用量を９６質量部とし、金属シリコン（純度９９．９９９％）の添加量を１．０質量部とし、金属マグネシウム（純度９９．９％）の添加量を３．０質量部とした以外は実施例１と同様に操作して、板状の高純度アルミニウム合金鋳塊材を得、実施例１と同様に加熱処理した。結果を表３に示す。
【００３０】
【表３】
実施例２
〔高純度アルミニウム合金塑性加工材の製造〕
実施例１と同様に操作して高純度アルミニウム合金鋳塊材を得、得られた鋳塊材を縦３０ｍｍ×横１００ｍｍ×厚み２０ｍｍに切出して板状とした。得られた板状の鋳塊材を５００℃〜２５０℃の温度で厚みが８ｍｍになるまで１２回均等に圧延したのち、厚みが３ｍｍになるまで１０回均等に圧延し、さらに厚みが２．４ｍｍになるように１回で圧延して、縦３５ｍｍ×横７００ｍｍ×厚み２．４ｍｍの板状の高純度アルミニウム合金塑性加工材（圧延材）を得た。
【００３２】
〔５３０℃での加熱処理〕
上記で得た板状の圧延材を５３０℃に加熱し同温度を５時間保持した後、水中に浸漬して冷却して、次いで室温で２時間保持したのち、１８０℃に加熱して同温度を８時間保持して加熱処理をした。加熱処理後の鋳塊材の表面を鏡面研磨し、上記と同様にして光学顕微鏡により目視観察したところ、粒状物相の大きさは概ね６μｍであり、１ｍｍ2あたりの個数は１６００個であった。この鋳塊材の引張り強さは３００ＭＰａであり、耐力は２５０ＭＰａであった。
【００３３】
上記と同様にして得た圧延材を５３０℃に加熱し、同温度を１０時間保持した。
その後上記と同様に操作したところ、粒状物相の大きさは概ね４μｍであり、１ｍｍ2あたりの個数は１３００個であった。この鋳塊材の引張り強さは３００ＭＰａであり、耐力は２５０ＭＰａであった。
【００３４】
〔５５０℃での加熱処理〕
上記と同様に操作して得た圧延材〔縦３５ｍｍ×横７００ｍｍ×厚み２．４ｍｍ〕を５５０℃に加熱し、同温度を５時間保持した後、水中に浸漬して冷却して、次いで室温で２時間保持したのち、１８０℃に加熱して同温度を８時間保持して加熱処理をした。加熱処理後の鋳塊材の表面を鏡面研磨し、上記と同様にして光学顕微鏡により目視観察したところ、粒状物相の大きさは概ね５μｍであり、１ｍｍ2あたりの個数は１１００個であった。この鋳塊材の引張り強さは３３０ＭＰａであり、耐力は２８０ＭＰａであった。
【００３５】
上記と同様にして得た圧延材を５５０℃に加熱し、同温度を１０時間保持した。その後上記と同様に操作したところ、粒状物相の大きさは概ね６μｍであり、１ｍｍ2あたりの個数は１１００個であった。この鋳塊材の引張り強さは３３０ＭＰａであり、耐力は２８０ＭＰａであった。
【００３６】
〔５７５℃での加熱処理〕
上記と同様に操作して得た圧延材〔縦３５ｍｍ×横７００ｍｍ×厚み２．４ｍｍ〕を５７５℃に加熱し、同温度を５時間保持した後、水中に浸漬して冷却して、次いで室温で２時間保持したのち、１８０℃に加熱して同温度を８時間保持して加熱処理をした。加熱処理後の鋳塊材の表面を鏡面研磨し、上記と同様にして光学顕微鏡により目視観察したところ、粒状物相の大きさは概ね４μｍであり、１ｍｍ2あたりの個数は７００個であった。この鋳塊材の引張り強さは３５０ＭＰａであり、耐力は３００ＭＰａであった。
【００３７】
上記と同様にして得た圧延材を５７５℃に加熱し、同温度を１０時間保持した。その後上記と同様に操作したところ、粒状物相の大きさは概ね４μｍであり、１ｍｍ2あたりの個数は５００個であった。この鋳塊材の引張り強さは３５０ＭＰａであり、耐力は３００ＭＰａであった。
【００３８】
結果を表４および表５に示す。
【００３９】
〔陽極酸化皮膜の形成〕
実施例１で得た鋳塊材に代えて、上記で５３０℃、５５０℃および５７５℃で加熱処理した後の圧延材を用いる以外は実施例１と同様に操作して、陽極酸化した。陽極酸化後の圧延材を水洗し、乾燥して、陽極酸化高純度アルミニウム合金材を得た。この陽極酸化高純度アルミニウム合金材は、表面に均一にムラのない陽極酸化皮膜が形成されていた。
【００４０】
【表４】
【表５】
比較例３
比較例１と同様に操作して高純度アルミニウム合金鋳塊材を得、得られた鋳塊材を縦３０ｍｍ×横１００ｍｍ×厚み２０ｍｍに切出して板状とした。得られた板状の鋳塊材を用いて、実施例２と同様に操作して、高純度アルミニウム合金塑性加工材（圧延材）を得た。得られた圧延材を実施例２と同様に加熱処理した。結果を表６および表７に示す。
【００４３】
【表６】
【表７】
比較例４
比較例２と同様に操作して高純度アルミニウム合金鋳塊材を得、得られた鋳塊材を縦３０ｍｍ×横１００ｍｍ×厚み２０ｍｍに切出して板状とした。得られた板状の鋳塊材を用いて、実施例２と同様に操作して、高純度アルミニウム合金塑性加工材（圧延材）を得た。得られた圧延材を実施例２と同様に加熱処理した。結果を表８および表９に示す。
【００４６】
【表８】
【表９】
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a high-purity aluminum alloy material.
[0002]
[Prior art]
The high-purity aluminum alloy material is useful as a material constituting a plasma reactor or the like, and is also used as an anodized high-purity aluminum alloy material having an anodic oxide film formed on the surface. As such a high-purity aluminum alloy material, a material having high strength is required, and Patent Document 1 (Japanese Unexamined Patent Application Publication No. 10-88271, page 3) discloses that 0.35 to 2.5% by mass of magnesium and 0. 2 to 1% by mass of silicon, the magnesium content (C Mg , unit is% by mass)) exceeds 1.73 times the silicon content (C Si , unit is% by mass), and the impurity content is 0%. A high-purity aluminum alloy material having a content of 0.1 mass% or less is disclosed.
[0003]
However, the conventional high-purity aluminum alloy material has a problem that the strength is not always sufficient.
[0004]
[Problems to be solved by the invention]
Accordingly, the present inventors have conducted intensive studies to develop a high-purity aluminum alloy material that can be used as a material constituting a plasma reactor and has sufficient strength. As a result, the magnesium content was reduced to 0.4 to 2.1% by mass. And the content of silicon is set to 0.4 to 1.2% by mass, and the magnesium content is calculated by the formula (1)
1.70 × C Si -1 mass% ≦ C Mg ≦ 1.70 × C Si (1)
[In the formula, C Mg indicates the content of magnesium (unit is% by mass), and C Si indicates the content of silicon (unit is% by mass). ]
By satisfying the above, it was found that a high-purity aluminum alloy material that can be used in a plasma reactor and has sufficient strength can be obtained, and the present invention has been accomplished.
[0005]
[Means for Solving the Problems]
That is, the present invention includes 0.4% by mass or more and 2.1% by mass or less of magnesium and 0.4% by mass or more and 1.2% by mass or less of silicon, and the magnesium content (C Mg ) is represented by the formula (1). And a high-purity aluminum alloy material characterized by having an impurity content of 0.1% by mass or less.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
The high-purity aluminum alloy material of the present invention contains 0.4% by mass to 2.1% by mass of magnesium and 0.4% by mass to 1.2% by mass, preferably 0.8% by mass or more of silicon. . When the magnesium content (C Mg ) exceeds 2.1% by mass or the silicon content (C Si ) exceeds 1.2% by mass, the anodic oxide film formed on the surface of the high-purity aluminum alloy material Tends to be easily mixed with magnesium and silicon. If the magnesium content (C Mg ) is less than 0.4% by mass or the silicon content (C Si ) is less than 0.4% by mass, the strength tends to be insufficient.
[0007]
In the high-purity aluminum alloy material of the present invention, the magnesium content (C Mg ) satisfies the formula (1), preferably the formula (2)
1.70 × C Si -1 mass% ≦ C Mg ≦ 1.70 × C Si −0.5 mass% (2) [In the formula, C Mg and C Si each have the same meaning as described above. ]
To be satisfied. If the magnesium content (C Mg ) exceeds or falls below the range defined by the formula (1), the strength tends to be insufficient.
[0008]
The high-purity aluminum alloy material of the present invention has an impurity content of 0.1% by mass or less. Examples of the impurities include transition metals such as iron, manganese, copper, chromium, zinc, titanium, nickel, and vanadium; alkali metals such as lithium and sodium; calcium and alkaline earth metals such as strontium; and metal impurities such as boron. Non-metallic impurities.
[0009]
The high-purity aluminum alloy material of the present invention may be, for example, an ingot obtained by cooling and solidifying a molten metal in a mold, or a plastic working obtained by plastically processing a high-purity aluminum alloy ingot. It may be a material.
[0010]
The high-purity aluminum alloy ingot material can be produced, for example, by a method of adding magnesium and silicon to high-purity aluminum and casting. Specifically, high-purity aluminum is heated and melted, magnesium and silicon are added thereto to obtain a molten metal, and the molten metal may be cooled and solidified in a mold. As high-purity aluminum, aluminum having a purity of 99.9% by mass or more may be used. By using high-purity aluminum having such a purity, the impurity content of the obtained high-purity aluminum alloy material can be easily reduced to 0.1% by mass or less. In order to melt high-purity aluminum, for example, a graphite crucible or an alumina crucible may be used and heated in such a crucible.
[0011]
Magnesium and silicon are usually added in a metallic state. It is preferable to use magnesium and silicon each having a purity of 99.9% or more. The molten metal to which magnesium and silicon are added is 0.4 mass% or more and 2.1 mass% or less of magnesium and 0.4 mass% or more, preferably 0.8 mass% or more and 1.2 mass% or less of silicon. And the magnesium content satisfies the formula (1) and the content of impurities is 0.1% by mass or less. The temperature of the molten metal is usually 700 ° C. or more and 800 ° C. or less.
[0012]
The high-purity aluminum alloy material of the present invention can be obtained as an ingot material by pouring such molten aluminum into a mold and cooling it in the mold. The cooling rate is usually about 4 ° C./sec to 30 ° C./sec.
[0013]
The high-purity aluminum alloy plastically processed material can be obtained, for example, by plastically processing a high-purity aluminum alloy ingot obtained by cooling and solidifying in a mold. Examples of the plastic working include rolling and forging. In order to plastically process the ingot material, for example, the ingot material may be cut out into a plate shape and plastically processed by a method such as rolling or forging. The plastic working temperature is usually about 200 ° C. or more and 500 ° C. or less.
[0014]
The high-purity aluminum alloy material of the present invention thus obtained is usually heat-treated and used as a heat-treated material. The heat treatment is performed, for example, by heating a high-purity aluminum alloy material and keeping it at a temperature of about 520 ° C. to 580 ° C. for about 1 hour to 25 hours, and then a cooling rate of 10 ° C./min or more, preferably 300 ° C./min. After cooling to a temperature of about 50 ° C. or less at a temperature of about 50 ° C. or less, and preferably at a temperature of about 50 ° C. or less, preferably about −50 ° C. or more, more preferably about 10 ° C. or more, for about 0.5 to 72 hours, Then, it is carried out at a temperature of about 150 ° C. or more and 200 ° C. or less, usually for about 2 hours or more and 50 hours or less. The high-purity aluminum alloy material subjected to such a heat treatment has further improved strength.
[0015]
In the high-purity aluminum alloy material of the present invention, magnesium and silicon form a magnesium silicide particulate phase having a composition represented by Mg 2 Si and are dispersed in the alloy. Among the particulate phases measured by observing the cross section of the alloy material with a microscope, the number of the particulate phases having a particle diameter of 1 μm or more and 20 μm or less is approximately 2000 or less per 1 mm 2 .
[0016]
Such a high-purity aluminum alloy material of the present invention can be used as an anodized high-purity aluminum alloy material, for example, by forming an anodic oxide film on the surface. The anodic oxide film can be formed by ordinary anodic oxidation treatment. Specifically, for example, a high-purity aluminum alloy material may be immersed in dilute sulfuric acid, and a direct current may be applied using the alloy material as an anode. The thickness of the formed anodic oxide film is determined by the amount of charge of the direct current. A natural oxide film formed by natural oxidation is formed on the surface of the high-purity aluminum alloy material.In order to remove such a natural oxide film, the high-purity aluminum alloy material is washed in advance with an alkaline aqueous solution, an acid, or the like. It is preferable to keep it.
[0017]
【The invention's effect】
The high-purity aluminum alloy material of the present invention has a sufficient strength and is useful, for example, as a material constituting a plasma reactor.
[0018]
【Example】
Hereinafter, the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples.
In addition, the tensile strength and proof stress of the high-purity aluminum alloy material obtained in each of the following examples are as follows: a 10 mm diameter, 40 mm long round bar (ingot material) or a 2.4 mm thick, 50 mm long A tensile test is performed as a cut-out test piece on a flat plate (rolled material). The tensile force per unit cross-sectional area when the length is extended by 0.2% is defined as the proof stress, and the maximum tensile force before breaking is defined as the tensile strength. As each sought.
[0019]
Example 1
[Manufacture of ingot material]
In a graphite crucible, 98 parts by mass of high-purity aluminum (purity 99.99%) is heated and melted at 750 ° C., and at the same temperature, 1.0 part by mass of metallic silicon (purity 99.999%) and metallic magnesium ( (Purity: 99.9%) 1.0 part by mass was added to obtain a molten aluminum. The molten aluminum (720 ° C.) obtained above is poured into an iron mold (inner dimension 20 mm × width 100 mm × height 150 mm) previously heated to 120 ° C., and cooled at a cooling rate of 10 ° C./sec. An ingot material was obtained. The obtained ingot was cut into a plate having a length of 100 mm, a width of 120 mm and a thickness of 20 mm.
[0020]
The surface of the obtained ingot material was mirror-polished and visually observed with an optical microscope at an observation magnification of 400 times. As a result, a granular phase was observed on the surface. The size of the particulate phase was approximately 25 μm, and the number per 1 mm 2 was 800.
[0021]
[Heat treatment at 530 ° C]
A plate-like ingot obtained in the same manner as described above (length 100 mm × width 120 mm × thickness 20 mm) is heated to 530 ° C., kept at the same temperature for 5 hours, immersed in water and cooled at a rate exceeding 10 ° C./min. After cooling at a speed, and then keeping at room temperature (about 20 ° C. to 25 ° C.) for 2 hours, the mixture was heated to 180 ° C. and kept at the same temperature for 8 hours to carry out heat treatment. The surface of the ingot material after the heat treatment was mirror-polished and visually observed with an optical microscope in the same manner as described above. As a result, the size of the granular phase was approximately 10 μm, and the number per 1 mm 2 was 700. . The tensile strength of this ingot material was 310 MPa, and the yield strength was 260 MPa.
[0022]
[Heat treatment at 550 ° C]
A plate-shaped ingot obtained in the same manner as described above (length 100 mm × width 120 mm × thickness 20 mm) is heated to 550 ° C., kept at the same temperature for 5 hours, immersed in water, cooled, and then at room temperature. After holding for 2 hours, the mixture was heated to 180 ° C. and kept at the same temperature for 8 hours to perform a heat treatment. The surface of the ingot material after the heat treatment was mirror-polished and visually observed with an optical microscope in the same manner as described above. As a result, the size of the granular phase was approximately 5 μm, and the number per 1 mm 2 was 700. . The tensile strength of this ingot material was 320 MPa, and the proof stress was 270 MPa.
[0023]
[Heat treatment at 575 ° C]
A plate-shaped ingot obtained in the same manner as above (100 mm long × 120 mm wide × 20 mm thick) was heated to 575 ° C., kept at the same temperature for 5 hours, immersed in water, cooled, and then cooled to room temperature. After holding for 2 hours, the mixture was heated to 180 ° C. and kept at the same temperature for 8 hours to perform a heat treatment. The surface of the ingot material after the heat treatment was mirror-polished and visually observed with an optical microscope in the same manner as described above. As a result, the size of the granular phase was approximately 5 μm, and the number per 1 mm 2 was 300. . The tensile strength of this ingot material was 350 MPa, and the proof stress was 310 MPa.
[0024]
Table 1 shows the results.
[0025]
(Anodic oxidation treatment)
The ingot material after the heat treatment at 530 ° C., 550 ° C. and 575 ° C. is immersed in a 10% aqueous sodium hydroxide solution [aqueous solution having a sodium hydroxide concentration of 10% by mass] at 50 ° C. for 3 minutes, Thereafter, the substrate was washed with water, further immersed in a 10% aqueous nitric acid solution (an aqueous solution having a nitric acid concentration of 10% by mass) for 1 minute, and washed with water to remove an oxide film formed on the surface by natural oxidation. Then, while maintaining the temperature of 0 ° C. ± 2 ° C., it is immersed in a 15% aqueous sulfuric acid solution (an aqueous solution having a sulfuric acid concentration of 15% by mass), and the ingot is used as an anode at a current density of 0.03 A / cm 2 at a current density of 50%. Anodizing was performed by applying a direct current for minutes.
The anodized ingot material was washed with water and dried to obtain an anodized high-purity aluminum alloy material. This anodized high-purity aluminum alloy material had an evenly uniform anodic oxide film formed on the surface.
[0026]
[Table 1]
Comparative Example 1
The same operation as in Example 1 was performed except that the addition amount of metallic silicon (purity 99.999%) was 0.5 parts by mass and the addition amount of metallic magnesium (purity 99.9%) was 1.5 parts by mass. Thus, a plate-like high-purity aluminum alloy ingot material was obtained and heat-treated. Table 2 shows the results.
[0028]
[Table 2]
Comparative Example 2
96 parts by mass of high-purity aluminum (99.99% purity), 1.0 parts by mass of metallic silicon (99.999% purity), and addition of metallic magnesium (99.9% purity) A plate-like high-purity aluminum alloy ingot was obtained in the same manner as in Example 1 except that the amount was changed to 3.0 parts by mass, and heat-treated as in Example 1. Table 3 shows the results.
[0030]
[Table 3]
Example 2
[Manufacture of high-purity aluminum alloy plastic processed materials]
A high-purity aluminum alloy ingot was obtained in the same manner as in Example 1, and the obtained ingot was cut into a plate having a length of 30 mm, a width of 100 mm and a thickness of 20 mm. The plate-like ingot obtained is uniformly rolled 12 times at a temperature of 500 ° C. to 250 ° C. until the thickness becomes 8 mm, and then uniformly rolled 10 times until the thickness becomes 3 mm. It was rolled once to 4 mm to obtain a plate-shaped high-purity aluminum alloy plastically processed material (rolled material) having a length of 35 mm, a width of 700 mm and a thickness of 2.4 mm.
[0032]
[Heat treatment at 530 ° C]
The plate-shaped rolled material obtained above is heated to 530 ° C. and kept at the same temperature for 5 hours, immersed in water and cooled, then kept at room temperature for 2 hours, and then heated to 180 ° C. and heated to the same temperature. Was maintained for 8 hours to perform a heat treatment. The surface of the ingot material after the heat treatment was mirror-polished and visually observed with an optical microscope in the same manner as described above. As a result, the size of the granular phase was approximately 6 μm, and the number per 1 mm 2 was 1600. . The tensile strength of this ingot material was 300 MPa, and the proof stress was 250 MPa.
[0033]
The rolled material obtained in the same manner as above was heated to 530 ° C. and kept at the same temperature for 10 hours.
After that, the same operation as described above revealed that the size of the particulate phase was approximately 4 μm, and the number per 1 mm 2 was 1,300. The tensile strength of this ingot material was 300 MPa, and the proof stress was 250 MPa.
[0034]
[Heat treatment at 550 ° C]
A rolled material (35 mm long × 700 mm wide × 2.4 mm thick) obtained by the same operation as above was heated to 550 ° C., kept at the same temperature for 5 hours, immersed in water, cooled, and then cooled to room temperature. , And then heated to 180 ° C. and maintained at the same temperature for 8 hours to perform a heat treatment. The surface of the ingot material after the heat treatment was mirror-polished and visually observed with an optical microscope in the same manner as described above. As a result, the size of the granular phase was approximately 5 μm, and the number per 1 mm 2 was 1100. . The tensile strength of this ingot material was 330 MPa, and the proof stress was 280 MPa.
[0035]
The rolled material obtained in the same manner as above was heated to 550 ° C. and kept at the same temperature for 10 hours. Thereafter, when the same operation as above was performed, the size of the particulate phase was approximately 6 μm, and the number per 1 mm 2 was 1,100. The tensile strength of this ingot material was 330 MPa, and the proof stress was 280 MPa.
[0036]
[Heat treatment at 575 ° C]
A rolled material (35 mm long × 700 mm wide × 2.4 mm thick) obtained by the same operation as above was heated to 575 ° C., kept at the same temperature for 5 hours, immersed in water, cooled, and then cooled to room temperature. , And then heated to 180 ° C. and maintained at the same temperature for 8 hours to perform a heat treatment. The surface of the ingot material after the heat treatment was mirror-polished and visually observed with an optical microscope in the same manner as described above. As a result, the size of the granular phase was approximately 4 μm, and the number per 1 mm 2 was 700. . The tensile strength of this ingot material was 350 MPa, and the proof stress was 300 MPa.
[0037]
The rolled material obtained in the same manner as above was heated to 575 ° C. and kept at the same temperature for 10 hours. Thereafter, when the same operation was performed as described above, the size of the particulate phase was approximately 4 μm, and the number per 1 mm 2 was 500. The tensile strength of this ingot material was 350 MPa, and the proof stress was 300 MPa.
[0038]
The results are shown in Tables 4 and 5.
[0039]
(Formation of anodized film)
Anodizing was performed in the same manner as in Example 1 except that the ingot obtained in Example 1 was replaced with the rolled material after the heat treatment at 530 ° C., 550 ° C., and 575 ° C. The rolled material after the anodization was washed with water and dried to obtain an anodized high-purity aluminum alloy material. This anodized high-purity aluminum alloy material had a uniform anodic oxide film formed on the surface.
[0040]
[Table 4]
[Table 5]
Comparative Example 3
A high-purity aluminum alloy ingot was obtained in the same manner as in Comparative Example 1, and the obtained ingot was cut into a plate having a length of 30 mm, a width of 100 mm and a thickness of 20 mm. Using the obtained plate-like ingot material, the same operation as in Example 2 was performed to obtain a high-purity aluminum alloy plastically processed material (rolled material). The obtained rolled material was heat-treated in the same manner as in Example 2. The results are shown in Tables 6 and 7.
[0043]
[Table 6]
[Table 7]
Comparative Example 4
By operating in the same manner as in Comparative Example 2, a high-purity aluminum alloy ingot was obtained, and the obtained ingot was cut into a plate having a length of 30 mm, a width of 100 mm, and a thickness of 20 mm. Using the obtained plate-like ingot material, the same operation as in Example 2 was performed to obtain a high-purity aluminum alloy plastically processed material (rolled material). The obtained rolled material was heat-treated in the same manner as in Example 2. The results are shown in Tables 8 and 9.
[0046]
[Table 8]
[Table 9]
Claims (6)
１．７０×ＣSi−１質量％ ≦ ＣMg ≦ １．７０×ＣSi （１）
〔式中、ＣMgはマグネシウムの含有量（単位は質量％）を、ＣSiはシリコンの含有量（単位は質量％）をそれぞれ示す。〕
を満足し、不純物の含有量が０．１質量％以下であることを特徴とする高純度アルミニウム合金材。It contains 0.4% by mass or more and 2.1% by mass or less of magnesium and 0.4% by mass or more and 1.2% by mass or less of silicon.
1.70 × C Si -1 mass% ≦ C Mg ≦ 1.70 × C Si (1)
[In the formula, C Mg indicates the content of magnesium (unit is% by mass), and C Si indicates the content of silicon (unit is% by mass). ]
Characterized by having a content of impurities of 0.1% by mass or less.
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| JP2002359108A JP2004190090A (en) | 2002-12-11 | 2002-12-11 | High purity aluminum alloy material |
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| JP2002359108A JP2004190090A (en) | 2002-12-11 | 2002-12-11 | High purity aluminum alloy material |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104630537A (en) * | 2015-02-11 | 2015-05-20 | 山东大学 | Method for preparing germanium porous material |
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| CN105238961A (en) * | 2015-10-12 | 2016-01-13 | 苏州中色研达金属技术有限公司 | 6XXX aluminum alloy and machining method thereof |
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2002
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104630537A (en) * | 2015-02-11 | 2015-05-20 | 山东大学 | Method for preparing germanium porous material |
| CN105238962A (en) * | 2015-10-12 | 2016-01-13 | 苏州中色研达金属技术有限公司 | High-performance 6XXX aluminum alloy for outer part of electronic product and machining method thereof |
| CN105238961A (en) * | 2015-10-12 | 2016-01-13 | 苏州中色研达金属技术有限公司 | 6XXX aluminum alloy and machining method thereof |
| CN105238963A (en) * | 2015-10-26 | 2016-01-13 | 东莞华程金属科技有限公司 | Aluminum alloy mobile phone shell and manufacturing method thereof |
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