JP2004159403A5 - - Google Patents

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Publication number
JP2004159403A5
JP2004159403A5 JP2002321253A JP2002321253A JP2004159403A5 JP 2004159403 A5 JP2004159403 A5 JP 2004159403A5 JP 2002321253 A JP2002321253 A JP 2002321253A JP 2002321253 A JP2002321253 A JP 2002321253A JP 2004159403 A5 JP2004159403 A5 JP 2004159403A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002321253A
Other languages
Japanese (ja)
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JP2004159403A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2002321253A priority Critical patent/JP2004159403A/en
Priority claimed from JP2002321253A external-priority patent/JP2004159403A/en
Publication of JP2004159403A publication Critical patent/JP2004159403A/en
Publication of JP2004159403A5 publication Critical patent/JP2004159403A5/ja
Pending legal-status Critical Current

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JP2002321253A 2002-11-05 2002-11-05 Piezoelectric actuator Pending JP2004159403A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002321253A JP2004159403A (en) 2002-11-05 2002-11-05 Piezoelectric actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002321253A JP2004159403A (en) 2002-11-05 2002-11-05 Piezoelectric actuator

Publications (2)

Publication Number Publication Date
JP2004159403A JP2004159403A (en) 2004-06-03
JP2004159403A5 true JP2004159403A5 (en) 2006-01-05

Family

ID=32801869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002321253A Pending JP2004159403A (en) 2002-11-05 2002-11-05 Piezoelectric actuator

Country Status (1)

Country Link
JP (1) JP2004159403A (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007032269A1 (en) * 2005-09-15 2007-03-22 Sharp Kabushiki Kaisha Levitation movement device, ultrasonic vibrator used for the device, and method of regulating vibration characteristics of the vibrator
JP4640194B2 (en) * 2006-01-30 2011-03-02 セイコーエプソン株式会社 Liquid ejecting apparatus and recording apparatus
JP4795162B2 (en) * 2006-08-09 2011-10-19 オリンパス株式会社 Ultrasonic motor and vibration detection method of ultrasonic motor
WO2009007047A2 (en) * 2007-07-06 2009-01-15 Eth Zurich Piezoelectric device for detecting or generating forces and torques in multiple directions
JP2009254198A (en) * 2008-04-10 2009-10-29 Sharp Corp Ultrasonic motor and ultrasonic oscillator
EP2202501A1 (en) * 2008-12-23 2010-06-30 ETH Zürich Hollow piezoelectric device for distingishing forces and torques
JP5776270B2 (en) 2011-03-29 2015-09-09 セイコーエプソン株式会社 Piezoelectric actuators, motors, robot hands and robots
JP5929138B2 (en) 2011-12-06 2016-06-01 セイコーエプソン株式会社 Piezoelectric motors and robots
WO2014172833A1 (en) * 2013-04-22 2014-10-30 北京大学 Piezoelectric driver and piezoelectric motor
JP2016025708A (en) * 2014-07-18 2016-02-08 Fdk株式会社 Piezoelectric actuator
JP7103019B2 (en) * 2018-07-25 2022-07-20 セイコーエプソン株式会社 Piezoelectric drives, robots and printers

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