JP2004159403A5 - - Google Patents
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- Publication number
- JP2004159403A5 JP2004159403A5 JP2002321253A JP2002321253A JP2004159403A5 JP 2004159403 A5 JP2004159403 A5 JP 2004159403A5 JP 2002321253 A JP2002321253 A JP 2002321253A JP 2002321253 A JP2002321253 A JP 2002321253A JP 2004159403 A5 JP2004159403 A5 JP 2004159403A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002321253A JP2004159403A (en) | 2002-11-05 | 2002-11-05 | Piezoelectric actuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002321253A JP2004159403A (en) | 2002-11-05 | 2002-11-05 | Piezoelectric actuator |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004159403A JP2004159403A (en) | 2004-06-03 |
JP2004159403A5 true JP2004159403A5 (en) | 2006-01-05 |
Family
ID=32801869
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002321253A Pending JP2004159403A (en) | 2002-11-05 | 2002-11-05 | Piezoelectric actuator |
Country Status (1)
Country | Link |
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JP (1) | JP2004159403A (en) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007032269A1 (en) * | 2005-09-15 | 2007-03-22 | Sharp Kabushiki Kaisha | Levitation movement device, ultrasonic vibrator used for the device, and method of regulating vibration characteristics of the vibrator |
JP4640194B2 (en) * | 2006-01-30 | 2011-03-02 | セイコーエプソン株式会社 | Liquid ejecting apparatus and recording apparatus |
JP4795162B2 (en) * | 2006-08-09 | 2011-10-19 | オリンパス株式会社 | Ultrasonic motor and vibration detection method of ultrasonic motor |
WO2009007047A2 (en) * | 2007-07-06 | 2009-01-15 | Eth Zurich | Piezoelectric device for detecting or generating forces and torques in multiple directions |
JP2009254198A (en) * | 2008-04-10 | 2009-10-29 | Sharp Corp | Ultrasonic motor and ultrasonic oscillator |
EP2202501A1 (en) * | 2008-12-23 | 2010-06-30 | ETH Zürich | Hollow piezoelectric device for distingishing forces and torques |
JP5776270B2 (en) | 2011-03-29 | 2015-09-09 | セイコーエプソン株式会社 | Piezoelectric actuators, motors, robot hands and robots |
JP5929138B2 (en) | 2011-12-06 | 2016-06-01 | セイコーエプソン株式会社 | Piezoelectric motors and robots |
WO2014172833A1 (en) * | 2013-04-22 | 2014-10-30 | 北京大学 | Piezoelectric driver and piezoelectric motor |
JP2016025708A (en) * | 2014-07-18 | 2016-02-08 | Fdk株式会社 | Piezoelectric actuator |
JP7103019B2 (en) * | 2018-07-25 | 2022-07-20 | セイコーエプソン株式会社 | Piezoelectric drives, robots and printers |
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2002
- 2002-11-05 JP JP2002321253A patent/JP2004159403A/en active Pending