JP2004104011A5 - - Google Patents
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- Publication number
- JP2004104011A5 JP2004104011A5 JP2002266998A JP2002266998A JP2004104011A5 JP 2004104011 A5 JP2004104011 A5 JP 2004104011A5 JP 2002266998 A JP2002266998 A JP 2002266998A JP 2002266998 A JP2002266998 A JP 2002266998A JP 2004104011 A5 JP2004104011 A5 JP 2004104011A5
- Authority
- JP
- Japan
- Prior art keywords
- motor
- load torque
- transport mechanism
- processing apparatus
- control system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Claims (1)
- 搬送機構及び該搬送機構の駆動制御システムを具備する基板処理装置に於いて、前記駆動制御システムは、前記搬送機構のモータの負荷トルクを検出する負荷トルク検出部を有し、前記モータの負荷トルクが、正常運転時の前記モータの負荷トルクに基づき得られるトルク制限値を越えた場合に前記モータを非常停止させる様構成したことを特徴とする基板処理装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002266998A JP2004104011A (ja) | 2002-09-12 | 2002-09-12 | 基板処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002266998A JP2004104011A (ja) | 2002-09-12 | 2002-09-12 | 基板処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004104011A JP2004104011A (ja) | 2004-04-02 |
| JP2004104011A5 true JP2004104011A5 (ja) | 2005-10-13 |
Family
ID=32265653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002266998A Pending JP2004104011A (ja) | 2002-09-12 | 2002-09-12 | 基板処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004104011A (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007251088A (ja) | 2006-03-20 | 2007-09-27 | Tokyo Electron Ltd | 縦型熱処理装置及び縦型熱処理装置における移載機構の制御方法 |
| JP5711930B2 (ja) * | 2010-01-12 | 2015-05-07 | 株式会社日立国際電気 | 基板処理装置及び半導体装置の製造方法 |
| US8876453B2 (en) | 2010-01-12 | 2014-11-04 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and method of manufacturing semiconductor device |
| CN107155370B (zh) * | 2014-12-26 | 2020-07-31 | 川崎重工业株式会社 | 搬送装置的控制装置 |
| WO2018180099A1 (ja) | 2017-03-29 | 2018-10-04 | 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ | 基板移載ユニット及び基板処理装置及び半導体装置の製造方法 |
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2002
- 2002-09-12 JP JP2002266998A patent/JP2004104011A/ja active Pending
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