JP2004101642A5 - - Google Patents

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Publication number
JP2004101642A5
JP2004101642A5 JP2002260191A JP2002260191A JP2004101642A5 JP 2004101642 A5 JP2004101642 A5 JP 2004101642A5 JP 2002260191 A JP2002260191 A JP 2002260191A JP 2002260191 A JP2002260191 A JP 2002260191A JP 2004101642 A5 JP2004101642 A5 JP 2004101642A5
Authority
JP
Japan
Prior art keywords
group
resist composition
resin
general formula
hydrocarbon group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002260191A
Other languages
English (en)
Japanese (ja)
Other versions
JP4031327B2 (ja
JP2004101642A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002260191A priority Critical patent/JP4031327B2/ja
Priority claimed from JP2002260191A external-priority patent/JP4031327B2/ja
Priority to KR1020030059746A priority patent/KR100958126B1/ko
Publication of JP2004101642A publication Critical patent/JP2004101642A/ja
Publication of JP2004101642A5 publication Critical patent/JP2004101642A5/ja
Application granted granted Critical
Publication of JP4031327B2 publication Critical patent/JP4031327B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2002260191A 2002-09-05 2002-09-05 レジスト組成物 Expired - Lifetime JP4031327B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2002260191A JP4031327B2 (ja) 2002-09-05 2002-09-05 レジスト組成物
KR1020030059746A KR100958126B1 (ko) 2002-09-05 2003-08-28 레지스트 조성물

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002260191A JP4031327B2 (ja) 2002-09-05 2002-09-05 レジスト組成物

Publications (3)

Publication Number Publication Date
JP2004101642A JP2004101642A (ja) 2004-04-02
JP2004101642A5 true JP2004101642A5 (zh) 2005-09-22
JP4031327B2 JP4031327B2 (ja) 2008-01-09

Family

ID=32260979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002260191A Expired - Lifetime JP4031327B2 (ja) 2002-09-05 2002-09-05 レジスト組成物

Country Status (2)

Country Link
JP (1) JP4031327B2 (zh)
KR (1) KR100958126B1 (zh)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4260772B2 (ja) * 2003-01-31 2009-04-30 東京応化工業株式会社 レジスト組成物の評価方法
JP2005031233A (ja) 2003-07-09 2005-02-03 Tokyo Ohka Kogyo Co Ltd レジスト組成物、積層体、及びレジストパターン形成方法
JP2005164633A (ja) * 2003-11-28 2005-06-23 Tokyo Ohka Kogyo Co Ltd ポジ型レジスト組成物及びレジストパターン形成方法
JP2005300998A (ja) 2004-04-13 2005-10-27 Tokyo Ohka Kogyo Co Ltd ポジ型レジスト組成物及びレジストパターン形成方法
JP2006003781A (ja) * 2004-06-21 2006-01-05 Tokyo Ohka Kogyo Co Ltd ポジ型レジスト組成物及びレジストパターン形成方法
JP4663456B2 (ja) * 2005-09-05 2011-04-06 東京応化工業株式会社 ポジ型レジスト組成物およびレジストパターン形成方法
TW200916965A (en) 2007-10-01 2009-04-16 Jsr Corp Radiation-sensitive composition
US8697804B1 (en) 2008-01-24 2014-04-15 E I Du Pont De Nemours And Company Nucleated poly(trimethylene terephthalate)
TWI533082B (zh) 2008-09-10 2016-05-11 Jsr股份有限公司 敏輻射性樹脂組成物
CN102150083B (zh) * 2008-09-12 2013-09-04 Jsr株式会社 放射线敏感性树脂组合物及抗蚀剂图案形成方法
KR20130114110A (ko) 2010-09-29 2013-10-16 제이에스알 가부시끼가이샤 감방사선성 수지 조성물 및 패턴 형성 방법
JP6004869B2 (ja) * 2012-09-28 2016-10-12 東京応化工業株式会社 レジスト組成物、レジストパターン形成方法
KR101982559B1 (ko) * 2015-05-29 2019-05-27 후지필름 가부시키가이샤 패턴 형성 방법, 레지스트 패턴, 전자 디바이스의 제조 방법, 및 상층막 형성용 조성물

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3810957B2 (ja) * 1998-08-06 2006-08-16 株式会社東芝 レジスト用樹脂、レジスト組成物およびそれを用いたパターン形成方法
JP4046452B2 (ja) * 1999-12-06 2008-02-13 ダイセル化学工業株式会社 フォトレジスト用重合性不飽和化合物、及びフォトレジスト用樹脂組成物
JP2002040661A (ja) * 2000-07-24 2002-02-06 Toray Ind Inc ポジ型感放射線性組成物

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