JP2004087763A5 - - Google Patents

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JP2004087763A5
JP2004087763A5 JP2002246368A JP2002246368A JP2004087763A5 JP 2004087763 A5 JP2004087763 A5 JP 2004087763A5 JP 2002246368 A JP2002246368 A JP 2002246368A JP 2002246368 A JP2002246368 A JP 2002246368A JP 2004087763 A5 JP2004087763 A5 JP 2004087763A5
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layer
nitride
semiconductor light
emitting device
barrier
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JP2004087763A (en
JP4284946B2 (en
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Inを含む窒化物系化合物半導体層からなる量子井戸構造の活性層を有する窒化物系半導体発光素子において、
前記量子井戸構造を構成する障壁層のバンドギャップエネルギーより大きなバンドギャップエネルギーを有する歪補償層が、前記量子井戸構造を構成する井戸層のうち少なくとも1層の井戸層と該少なくとも一層の井戸層を挟む両障壁層との間にそれぞれ介在していることを特徴とする窒化物系半導体発光素子。
In a nitride semiconductor light emitting device having an active layer having a quantum well structure made of a nitride compound semiconductor layer containing In,
Distortion compensation layer having a larger band gap energy than the band gap energy of the barrier layer constituting the quantum well structure, the well layer and the at least one layer of the well layer at least one layer of the well layers constituting the quantum well structure A nitride-based semiconductor light-emitting device that is interposed between both sandwiched barrier layers.
前記井戸層と前記井戸層を挟む両障壁層との間にそれぞれ介在する2層の前記歪補償層の組成が相互に異なることを特徴とする請求項1に記載の窒化物系半導体発光素子。The nitride semiconductor light emitting device according to claim 1 in which the composition of the strain-compensating layer of 2-layer interposed respectively being different from each other between the two barrier layers sandwiching the well layer and the well layer. 前記井戸層及び前記障壁層がInGaN層で構成されているとき、前記歪補償層がAlGaN層であることを特徴とする請求項1に記載の窒化物系半導体発光素子。2. The nitride-based semiconductor light-emitting device according to claim 1, wherein when the well layer and the barrier layer are composed of InGaN layers, the strain compensation layer is an AlGaN layer. 前記歪補償層の膜厚が、前記井戸層の膜厚及び前記障壁層の膜厚の双方より薄いことを特徴とする請求項1に記載の窒化物系半導体発光素子。2. The nitride-based semiconductor light-emitting element according to claim 1, wherein a thickness of the strain compensation layer is smaller than both a thickness of the well layer and a thickness of the barrier layer. Inを含む窒化物系化合物半導体層からなる量子井戸構造の活性層を有する窒化物系半導体発光素子において、In a nitride semiconductor light emitting device having an active layer having a quantum well structure made of a nitride compound semiconductor layer containing In,
前記量子井戸構造を構成する障壁層のバンドギャップエネルギーより大きなバンドギャップエネルギーを有する歪補償層が、前記障壁層内又は井戸層内に介在していることを特徴とする窒化物系半導体発光素子。A nitride-based semiconductor light-emitting device, wherein a strain compensation layer having a band gap energy larger than that of the barrier layer constituting the quantum well structure is interposed in the barrier layer or the well layer.
各障壁層内又は各井戸層内にそれぞれ介在している障壁層のうち少なくとも2層の障壁層の組成が相互に異なることを特徴とする請求項5に記載の窒化物系半導体発光素子。6. The nitride-based semiconductor light-emitting device according to claim 5, wherein the composition of at least two of the barrier layers interposed in each barrier layer or each well layer is different from each other. 前記井戸層及び前記障壁層がInGaN層で構成されているとき、前記歪補償層がAlGaN層であることを特徴とする請求項5に記載の窒化物系半導体発光素子。6. The nitride semiconductor light emitting device according to claim 5, wherein when the well layer and the barrier layer are composed of InGaN layers, the strain compensation layer is an AlGaN layer. 前記歪補償層の膜厚が、前記井戸層の膜厚及び前記障壁層の膜厚の双方より薄いことを特徴とする請求項5に記載の窒化物系半導体発光素子。6. The nitride-based semiconductor light-emitting element according to claim 5, wherein the thickness of the strain compensation layer is smaller than both the thickness of the well layer and the thickness of the barrier layer. Inを含む窒化物系化合物半導体層からなる量子井戸構造の活性層を有する窒化物系半導体発光素子において、In a nitride semiconductor light emitting device having an active layer having a quantum well structure made of a nitride compound semiconductor layer containing In,
光ガイド層及び量子井戸構造を構成する障壁層の双方のバンドギャップエネルギーより大きなバンドギャップエネルギーを有する歪補償層が、前記活性層の上下に設けられている前記光ガイド層の少なくとも一方の光ガイド層内に介在していることを特徴とする窒化物系半導体発光素子。A strain compensation layer having a band gap energy larger than that of both the light guide layer and the barrier layer constituting the quantum well structure is provided on at least one of the light guide layers above and below the active layer. A nitride-based semiconductor light-emitting device, which is interposed in a layer.
複数層の前記歪補償層が前記光ガイド層内に周期的に介在することを特徴とする請求項9に記載の窒化物系半導体発光素子。The nitride-based semiconductor light-emitting element according to claim 9, wherein the plurality of strain compensation layers are periodically interposed in the light guide layer. 前記光ガイド層がInGaN層で構成されているとき、前記歪補償層がAlGaN層であることを特徴とする請求項9に記載の窒化物系半導体発光素子。The nitride-based semiconductor light-emitting element according to claim 9, wherein when the light guide layer is an InGaN layer, the strain compensation layer is an AlGaN layer. 前記歪補償層の膜厚が、前記井戸層の膜厚及び前記障壁層の膜厚の双方より薄いことを特徴とする請求項9に記載の窒化物系半導体発光素子。10. The nitride-based semiconductor light-emitting element according to claim 9, wherein a thickness of the strain compensation layer is smaller than both a thickness of the well layer and a thickness of the barrier layer.
JP2002246368A 2002-08-27 2002-08-27 Nitride semiconductor light emitting device Expired - Lifetime JP4284946B2 (en)

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JP2004087763A5 true JP2004087763A5 (en) 2005-10-20
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KR100657963B1 (en) 2005-06-28 2006-12-14 삼성전자주식회사 High power vertical external cavity surface emitting laser
KR100753518B1 (en) * 2006-05-23 2007-08-31 엘지전자 주식회사 Nitride based light emitting diode
JP4655103B2 (en) 2008-04-14 2011-03-23 ソニー株式会社 GaN-based semiconductor light-emitting device, light-emitting device assembly, light-emitting device, driving method for GaN-based semiconductor light-emitting device, and image display device
JP2009259953A (en) * 2008-04-15 2009-11-05 Sharp Corp Nitride semiconductor laser element
JP2010003913A (en) * 2008-06-20 2010-01-07 Sharp Corp Nitride semiconductor light-emitting diode element and method of manufacturing the same
JP5196160B2 (en) 2008-10-17 2013-05-15 日亜化学工業株式会社 Semiconductor light emitting device
WO2011021264A1 (en) * 2009-08-17 2011-02-24 株式会社 東芝 Nitride semiconductor light emitting element
KR20120138080A (en) * 2011-06-14 2012-12-24 엘지이노텍 주식회사 Light emitting device
JP5868650B2 (en) * 2011-10-11 2016-02-24 株式会社東芝 Semiconductor light emitting device
KR101865405B1 (en) * 2011-10-13 2018-06-07 엘지이노텍 주식회사 Light emitting device
KR101983777B1 (en) * 2012-12-20 2019-05-29 엘지이노텍 주식회사 Light emitting device
JP2015053531A (en) * 2014-12-17 2015-03-19 株式会社東芝 Semiconductor light-emitting device
JP6225945B2 (en) 2015-05-26 2017-11-08 日亜化学工業株式会社 Semiconductor laser element
CN114640024A (en) * 2015-06-05 2022-06-17 奥斯坦多科技公司 Light emitting structure with selective carrier injection into multiple active layers
JP6218791B2 (en) * 2015-10-28 2017-10-25 シャープ株式会社 Nitride semiconductor laser device
CN113451460B (en) * 2020-11-20 2022-07-22 重庆康佳光电技术研究院有限公司 Light emitting device and method of manufacturing the same

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JP2966982B2 (en) * 1991-08-30 1999-10-25 株式会社東芝 Semiconductor laser
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