JP2004084054A5 - - Google Patents
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- Publication number
- JP2004084054A5 JP2004084054A5 JP2003011661A JP2003011661A JP2004084054A5 JP 2004084054 A5 JP2004084054 A5 JP 2004084054A5 JP 2003011661 A JP2003011661 A JP 2003011661A JP 2003011661 A JP2003011661 A JP 2003011661A JP 2004084054 A5 JP2004084054 A5 JP 2004084054A5
- Authority
- JP
- Japan
- Prior art keywords
- processing
- electrode
- workpiece
- power supply
- electrolytic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 description 10
- 238000003672 processing method Methods 0.000 description 7
- 238000003754 machining Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003011661A JP2004084054A (ja) | 2002-07-02 | 2003-01-20 | 電解加工方法及び装置 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002193776 | 2002-07-02 | ||
| JP2003011661A JP2004084054A (ja) | 2002-07-02 | 2003-01-20 | 電解加工方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004084054A JP2004084054A (ja) | 2004-03-18 |
| JP2004084054A5 true JP2004084054A5 (https=) | 2006-03-09 |
Family
ID=32071932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003011661A Pending JP2004084054A (ja) | 2002-07-02 | 2003-01-20 | 電解加工方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004084054A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004322292A (ja) * | 2003-04-28 | 2004-11-18 | Yuzo Mori | 電解加工装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62158822U (https=) * | 1986-03-28 | 1987-10-08 | ||
| JPH01290226A (ja) * | 1988-05-17 | 1989-11-22 | Nec Corp | 半導体シリコン基板のエッチング方法 |
| JP2001064799A (ja) * | 1999-08-27 | 2001-03-13 | Yuzo Mori | 電解加工方法及び装置 |
| JP2002093761A (ja) * | 2000-09-19 | 2002-03-29 | Sony Corp | 研磨方法、研磨装置、メッキ方法およびメッキ装置 |
-
2003
- 2003-01-20 JP JP2003011661A patent/JP2004084054A/ja active Pending
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