JP2004079916A5 - - Google Patents

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Publication number
JP2004079916A5
JP2004079916A5 JP2002241140A JP2002241140A JP2004079916A5 JP 2004079916 A5 JP2004079916 A5 JP 2004079916A5 JP 2002241140 A JP2002241140 A JP 2002241140A JP 2002241140 A JP2002241140 A JP 2002241140A JP 2004079916 A5 JP2004079916 A5 JP 2004079916A5
Authority
JP
Japan
Prior art keywords
mass
monomer
acid ester
methacrylic acid
multilayer structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002241140A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004079916A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002241140A priority Critical patent/JP2004079916A/ja
Priority claimed from JP2002241140A external-priority patent/JP2004079916A/ja
Publication of JP2004079916A publication Critical patent/JP2004079916A/ja
Publication of JP2004079916A5 publication Critical patent/JP2004079916A5/ja
Pending legal-status Critical Current

Links

JP2002241140A 2002-08-21 2002-08-21 半導体ウエハダイシング用粘着シート Pending JP2004079916A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002241140A JP2004079916A (ja) 2002-08-21 2002-08-21 半導体ウエハダイシング用粘着シート

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002241140A JP2004079916A (ja) 2002-08-21 2002-08-21 半導体ウエハダイシング用粘着シート

Publications (2)

Publication Number Publication Date
JP2004079916A JP2004079916A (ja) 2004-03-11
JP2004079916A5 true JP2004079916A5 (cg-RX-API-DMAC10.html) 2005-04-28

Family

ID=32023727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002241140A Pending JP2004079916A (ja) 2002-08-21 2002-08-21 半導体ウエハダイシング用粘着シート

Country Status (1)

Country Link
JP (1) JP2004079916A (cg-RX-API-DMAC10.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4643134B2 (ja) * 2003-09-10 2011-03-02 グンゼ株式会社 ダイシングシート用基体フイルム
JP4524497B2 (ja) * 2005-05-24 2010-08-18 グンゼ株式会社 ダイシング用基体フイルム
JP2008004679A (ja) * 2006-06-21 2008-01-10 Gunze Ltd ダイシング用基体フイルム
JP4993446B2 (ja) * 2006-09-08 2012-08-08 日東電工株式会社 ウエハ保持用粘着シート
JP2012094834A (ja) * 2010-09-13 2012-05-17 Sumitomo Bakelite Co Ltd ダイシングフィルム

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