JP2004072204A5 - - Google Patents

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Publication number
JP2004072204A5
JP2004072204A5 JP2002225488A JP2002225488A JP2004072204A5 JP 2004072204 A5 JP2004072204 A5 JP 2004072204A5 JP 2002225488 A JP2002225488 A JP 2002225488A JP 2002225488 A JP2002225488 A JP 2002225488A JP 2004072204 A5 JP2004072204 A5 JP 2004072204A5
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JP
Japan
Prior art keywords
piezoelectric film
acoustic wave
electrode fingers
frequency acoustic
wave device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002225488A
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English (en)
Japanese (ja)
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JP2004072204A (ja
JP4134627B2 (ja
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Publication date
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Priority to JP2002225488A priority Critical patent/JP4134627B2/ja
Priority claimed from JP2002225488A external-priority patent/JP4134627B2/ja
Publication of JP2004072204A publication Critical patent/JP2004072204A/ja
Publication of JP2004072204A5 publication Critical patent/JP2004072204A5/ja
Application granted granted Critical
Publication of JP4134627B2 publication Critical patent/JP4134627B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002225488A 2002-08-02 2002-08-02 窒化アルミニウム圧電薄膜を用いた高周波弾性波素子 Expired - Fee Related JP4134627B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002225488A JP4134627B2 (ja) 2002-08-02 2002-08-02 窒化アルミニウム圧電薄膜を用いた高周波弾性波素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002225488A JP4134627B2 (ja) 2002-08-02 2002-08-02 窒化アルミニウム圧電薄膜を用いた高周波弾性波素子

Publications (3)

Publication Number Publication Date
JP2004072204A JP2004072204A (ja) 2004-03-04
JP2004072204A5 true JP2004072204A5 (cg-RX-API-DMAC10.html) 2005-10-20
JP4134627B2 JP4134627B2 (ja) 2008-08-20

Family

ID=32013098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002225488A Expired - Fee Related JP4134627B2 (ja) 2002-08-02 2002-08-02 窒化アルミニウム圧電薄膜を用いた高周波弾性波素子

Country Status (1)

Country Link
JP (1) JP4134627B2 (cg-RX-API-DMAC10.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007202087A (ja) 2005-05-11 2007-08-09 Seiko Epson Corp ラム波型高周波デバイス
KR100904368B1 (ko) 2005-10-19 2009-06-23 가부시키가이샤 무라타 세이사쿠쇼 램파 디바이스
JP4315174B2 (ja) 2006-02-16 2009-08-19 セイコーエプソン株式会社 ラム波型高周波デバイスの製造方法
CN108470823B (zh) * 2018-04-12 2021-09-07 中国电子科技集团公司第四十九研究所 一种用于高分子薄膜的高压电极化系统
WO2021060522A1 (ja) * 2019-09-27 2021-04-01 株式会社村田製作所 弾性波装置
US12308825B2 (en) * 2021-02-12 2025-05-20 Murata Manufacturing Co., Ltd Transversely-excited film bulk acoustic resonators with narrow gaps between busbars and ends of interdigital transducer fingers
CN117083800A (zh) * 2021-03-31 2023-11-17 株式会社村田制作所 弹性波装置

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