JP2004071718A - Carrier system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a carrier system in which installation space can be narrowed, reinforcement of building at the time of installation can be reduced, various works such as carry-in/out can be made efficient, and whose cost can be made inexpensive. <P>SOLUTION: The system is provided with a slide rail 11 obtained by dividing a part of a suspension-type rail 1, a slide rail 12 which is arranged in parallel to the slide rail 11 and is in the same length as the slide rail 11, and a moving mechanism 13 moving the slide rails 11 and 12 to a direction close to or detached from a stocker 3a. When the moving mechanism 13 moves the slide rails 11 and 12 in an arrangement direction and one slide rail 11 (12) is connected to the rail 1, a truck 2a is made advance into the slide rail 11 (12). <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a transfer system, and more particularly, to a transfer system capable of achieving high efficiency and low cost of transfer between processes of a semiconductor manufacturing line that handles semiconductor substrates such as silicon wafers and GaAs wafers.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, in the process of manufacturing semiconductor devices such as ICs, LSIs, and VLSIs, a large number of manufacturing devices have been used. As a result, a semiconductor device having predetermined specifications is manufactured. In this manufacturing process, a wafer cassette for accommodating a plurality of semiconductor substrates is used to prevent external contamination when the semiconductor substrates are moved between manufacturing apparatuses. These wafer cassettes are transferred to the respective manufacturing apparatuses by a transfer system provided for transfer between the respective steps.
[0003]
FIG. 3 is a schematic configuration diagram illustrating an example of a transport system in a conventional semiconductor device manufacturing process. In the figure, reference numeral 1 denotes a loop-shaped single rail (rail) suspended from a ceiling, 2a to 2f. Is a trolley (transporting means) that accommodates a transported object such as a wafer cassette and travels on the rail 1; 3a to 3e are sputtering apparatuses, molecular beam epitaxy (MBE) apparatuses, etc. disposed outside (or inside) the rail 1 A stocker (apparatus) provided in a semiconductor manufacturing apparatus, such as a film forming apparatus, a dry etching apparatus, and an ashing apparatus, which performs a manufacturing process of a semiconductor device.
The running and stopping of the carts 2a to 2f are remotely controlled by a controller and a host computer (not shown).
[0004]
In this transport system, a plurality of carts 2a to 2f are always running on the rail 1. Therefore, for example, when a transported object such as a wafer cassette is transported from the stocker 3a to the stocker 3b, it stands by near the stocker 3a. The carriage, for example, the carriage 2a is stopped at the stop position of the stocker 3a to carry in the conveyed goods, and thereafter, the carriage 2a is driven to stop at the stop position of the stocker 3b, and the conveyed goods are carried out.
By carrying out the above-described operation for each of the carts 2a to 2f, it is possible to smoothly carry in and carry out the goods in each of the stockers 3a to 3e.
[0005]
[Problems to be solved by the invention]
By the way, in the conventional transport system described above, since a plurality of trucks 2a to 2f run on one rail 1 suspended from the ceiling, for example, one truck 2a is transported by the stocker 3a. In the case of carrying in / out, there is a problem that the succeeding bogie 2b has to wait in front of the stocker 3a until the work of the bogie 2a is completed and the vehicle is started, so that the transport efficiency is reduced. .
In particular, when transport is concentrated on a specific destination or source stocker, or when unloading a large amount of goods for maintenance and inspection of a specific stocker, or when products are piled up on a stocker related to a specific manufacturing process In such a case, there is a problem in that a vicious cycle occurs, a long time is required for the transfer, and the transfer efficiency is reduced.
[0006]
In order to solve such a problem, as shown in FIG. 4, a transfer system in which bypass rails 5a and 5b are provided at respective stop positions of the stockers 3a and 3b of the loop-shaped rail 1 has been proposed. However, also in this transport system, building reinforcement work is required to suspend the rail 1 and the detour rails 5a and 5b from the ceiling, resulting in an increase in cost.
In addition, there is a problem that the construction period is lengthened due to the building reinforcement work, the installation work of the detour rails 5a and 5b, and the production plan of the semiconductor device may be delayed.
Further, there is a problem that a large space 6 for providing the detour rails 5a and 5b is required. This space 6 becomes an ineffective space in a limited semiconductor factory, and becomes a hindrance factor when the clean room is effectively used.
[0007]
The present invention has been made in view of the above circumstances, and can reduce the installation space, reduce the reinforcement of a building or the like at the time of installation, and improve the efficiency of various operations such as loading and unloading. It is an object of the present invention to provide a transport system capable of reducing the cost of the system itself.
[0008]
[Means for Solving the Problems]
In order to solve the above problems, the present invention has provided the following transport system.
In other words, the transport system according to claim 1 of the present invention is a transport means capable of traveling along the rail and stopping at a predetermined position on the rail, on equipment or an apparatus provided along at least one rail. In the transfer system for carrying in and out of a conveyed article, a first movable rail divided from a part of the rail and a second movable rail arranged in parallel with the first movable rail. And a moving mechanism for moving the first and second movable rails in the arrangement direction, wherein the first and second movable rails are movable in the arrangement direction and can be fixed at a predetermined position. When the first and second movable rails are moved in the arrangement direction and one of the movable rails is connected to the above-mentioned rail, the moving means enters the movable rail. Features.
[0009]
According to a second aspect of the present invention, in the transport system according to the first aspect, the rail is a suspension type or straddle type rail.
[0010]
According to a third aspect of the present invention, there is provided the transport system according to the first or second aspect, further comprising a detecting unit that detects the transport unit at a position close to the first and second movable rails, wherein the detecting unit is provided. When the transport means is detected, the first and second movable rails are moved in the arrangement direction by the moving mechanism, and one of the movable rails is connected to the rail.
[0011]
According to a fourth aspect of the present invention, in the transfer system of the first, second, or third aspect, the transferred object is a wafer cassette that stores a plurality of semiconductor substrates.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
An embodiment of a transport system according to the present invention will be described with reference to the drawings.
FIG. 1 is a plan view showing a suspension type transport system according to an embodiment of the present invention. In FIG. 1, the same components as those in FIG. 3 and FIG. .
[0013]
In FIG. 1, reference numeral 11 denotes a slide rail (first movable rail) obtained by dividing a portion of a rail corresponding to a stop position of a stocker (device) 3a among loop-shaped rails (rails) 1 suspended from a ceiling or the like. ), 12 are slide rails (second movable rails) of the same length as the slide rails 11 arranged in parallel with the slide rails 11, and 13 is a slide rail in which the slide rails 11 and 12 are arranged in the arrangement direction (close to the stocker 3a). Or, a moving mechanism for moving in the direction of separation: the direction of the arrow in the figure), a sensor (detecting means) 14 for detecting that the carriage (transporting means) 2a running on the rail 1 approaches the stocker (device) 3a, and 15 for This is a control device that controls the moving mechanism 13 based on the output from the sensor 14.
[0014]
The slide rails 11 and 12 are movable in the arrangement direction (the direction of the arrow in the drawing) by a moving mechanism 13 and can be fixed at least at a position where the slide rails 11 or 12 are connected to the rail 1. When the slide rails 11 and 12 are moved in the arrangement direction by the moving mechanism 13 to connect one of the slide rails 11 (12) to the rail 1, the slide rails 11 (12) The trolley 2a enters.
[0015]
The sensor 14 detects the carriage 2a and outputs a detection signal to the controller 15 when the carriage 2a approaches the stocker 3a. For example, the sensor 14 includes a laser diode (LD: light emitting element) and a photodiode (PD: (Light receiving element) or an infrared sensor or the like.
When a detection signal is output from the sensor 14, the control device 15 operates the moving mechanism 13 to move the slide rails 11 and 12 in the arrangement direction, and connects the slide rail 11 (12) to the rail 1. It has become.
[0016]
Next, the operation of the transport system will be described with reference to FIGS. Here, a case in which a wafer cassette is carried in / out of the stocker 3a will be described as an example.
When loading the wafer cassette into the stocker 3a, the loading wafer cassette is stored in a predetermined position of the carriage 2a in advance. In this case, the positions of the slide rails 11 and 12 are not particularly limited. However, in consideration of work efficiency, as shown in FIG. 1, the slide rails 11 and 12 are moved in a direction away from the stocker 3a to move the slide rails 11 and 12. Is connected to the rail 1 efficiently.
[0017]
First, the controller 2 and the host computer (not shown) instruct the truck 2a running on the rail 1 to move to the stocker 3a.
The cart 2a moves on the rail 1 toward the stocker 3a. When the cart 2a approaches the stocker 3a, the sensor 14 detects the cart 2a and outputs a detection signal to the control device 15.
If the slide rail 11 is not connected to the rail 1, the control device 15 drives the moving mechanism 13 to move the slide rails 11 and 12 away from the stocker 3a. 1 must be connected.
[0018]
When the carriage 2a enters the slide rail 11 and stops at a predetermined position, as shown in FIG. 2, the slide rails 11, 12 are moved together with the carriage 2a in the direction approaching the stocker 3a by the moving mechanism 13, and the carriage 2a is moved. The slide rail 12 is connected to the rail 1 at the same time that the slide rail 12 is brought close to the stocker 3a. Thereby, the succeeding truck 2b can pass the preceding truck 2a.
[0019]
While the trolley 2a carries the wafer cassette in and out of the stocker 3a, the subsequent trolley 2b runs on the slide rail 12 to overtake the trolley 2a and proceed to the next operation.
When the carriage 2a completes loading / unloading of the wafer cassette, the moving mechanism 13 moves the slide rails 11 and 12 in a direction away from the stocker 3a, and connects the slide rail 11 to the rail 1.
[0020]
When the connection of the rails 1 and 11 is completed, the carriage 2a moves from the slide rail 11 to the rail 1 and proceeds to the next operation.
As described above, the succeeding bogie 2b can pass the preceding bogie 2a and proceed to the next work without being stopped on the rail 1 while the preceding bogie 2a is carrying in / out work. Work efficiency can be improved.
[0021]
As described above in detail, according to the transport system of the present embodiment, the slide rail 11, the slide rail 12 arranged in parallel with the slide rail 11, and having the same length as the slide rail 11, the slide rail 11, Since the moving mechanism 13 for moving the moving members 12 in the arrangement direction and the control device 15 are provided, the structure of the entire transport system can be simplified and downsized. Therefore, there is no need to provide a detour rail or the like as in the related art, and thus there is no need to reinforce the building or attach the detour rail, thereby shortening the construction period and reducing costs. Accordingly, there is no possibility that a delay occurs in the production plan of the semiconductor device, and the production efficiency can be improved.
[0022]
Further, since it is only necessary to move the slide rails 11 and 12 in parallel, space can be saved, and a large space for providing a bypass rail as in the related art is not required. Therefore, the ineffective space in the semiconductor factory can be reduced as much as possible, and the clean room can be effectively used.
[0023]
In the transport system of the present embodiment, the suspension type rail 1 has been described as an example, but a straddle type rail may be used instead of the suspension type rail 1. In the case of a straddle-type rail, the design of the moving mechanism 13 and the like may be changed as necessary.
Further, although the suspension type rail 1 is formed in a loop shape, the same effect can be obtained even if the rail 1 is not a loop shape but a straight shape.
[0024]
【The invention's effect】
As described above, according to the transport system of the present invention, the first movable rail formed by dividing a part of the rail and the second movable rail arranged in parallel to the first movable rail. A rail, and a moving mechanism for moving the first and second movable rails in the arrangement direction thereof, wherein the first and second movable rails are movable in the arrangement direction and fixed at a predetermined position. When the first and second movable rails are moved in the arrangement direction and one of the movable rails is connected to the rail, the transport means enters the movable rail. Therefore, the configuration of the entire transfer system can be simplified and downsized. Therefore, there is no need to provide a detour rail or the like as in the related art, and thus there is no need to reinforce the building or attach the detour rail, thereby shortening the construction period and reducing costs.
[0025]
Further, since only the first and second movable rails need to be moved in parallel, space can be saved, and a large space for providing a bypass rail as in the related art is not required. Therefore, the ineffective space in the semiconductor factory can be reduced as much as possible, and the clean room can be effectively used.
[0026]
As described above, the installation space can be reduced, the reinforcement of the building at the time of installation can be reduced, the efficiency of various operations such as loading and unloading can be improved, and the cost of the system itself can be reduced. A transport system capable of performing the above-described operations can be provided.
[Brief description of the drawings]
FIG. 1 is a plan view illustrating a main part of a transport system according to an embodiment of the present invention.
FIG. 2 is a plan view illustrating an operation state of the transport system according to the embodiment of the present invention.
FIG. 3 is a schematic configuration diagram illustrating an example of a conventional transport system.
FIG. 4 is a schematic configuration diagram illustrating an example of a conventional transport system provided with a bypass rail.
[Explanation of symbols]
1 loop rail (rail)
2a to 2f trolley (transportation means)
3a-3e Stocker (device)
11 Slide rail (first movable rail)
12 Slide rail (second movable rail)
13 Moving mechanism 14 Sensor (detection means)
15 Control device

Claims (4)

In a transport system for carrying in and out of the transported article by a transporting means capable of traveling along the rail and stopping at a predetermined position on the rail, to equipment or an apparatus provided along at least one rail,
A first movable rail, which is obtained by dividing a part of the rail, a second movable rail arranged in parallel with the first movable rail, and a first and a second movable rail. A moving mechanism for moving in the arrangement direction,
The first and second movable rails are movable in the arrangement direction and can be fixed at a predetermined position, and the first and second movable rails are moved in the arrangement direction to move one of the first and second movable rails. When the movable rail is connected to the rail, the transport means enters the movable rail. The transport system according to claim 1, wherein the rail is a suspension-type or straddle-type rail. Detecting means for detecting the transport means is provided at a position close to the first and second movable rails,
When the detecting means detects the transport means, the moving mechanism moves the first and second movable rails in the arrangement direction to connect one of the movable rails to the rail. 3. The transport system according to claim 1, wherein the transport system comprises: 4. The transport system according to claim 1, wherein the transported object is a wafer cassette that stores a plurality of semiconductor substrates.

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