JP2004055651A5 - - Google Patents
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- JP2004055651A5 JP2004055651A5 JP2002208208A JP2002208208A JP2004055651A5 JP 2004055651 A5 JP2004055651 A5 JP 2004055651A5 JP 2002208208 A JP2002208208 A JP 2002208208A JP 2002208208 A JP2002208208 A JP 2002208208A JP 2004055651 A5 JP2004055651 A5 JP 2004055651A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002208208A JP4035011B2 (ja) | 2002-07-17 | 2002-07-17 | 触媒ｃｖｄ用触媒線 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002208208A JP4035011B2 (ja) | 2002-07-17 | 2002-07-17 | 触媒ｃｖｄ用触媒線 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004055651A JP2004055651A (ja) | 2004-02-19 |
| JP2004055651A5 true JP2004055651A5 (ja) | 2005-10-20 |
| JP4035011B2 JP4035011B2 (ja) | 2008-01-16 |
Family
ID=31932419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002208208A Expired - Fee Related JP4035011B2 (ja) | 2002-07-17 | 2002-07-17 | 触媒ｃｖｄ用触媒線 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4035011B2 (ja) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4583061B2 (ja) * | 2004-03-30 | 2010-11-17 | 京セラ株式会社 | 発熱体ｃｖｄ装置 |
| KR100688836B1 (ko) | 2005-05-11 | 2007-03-02 | 삼성에스디아이 주식회사 | 촉매 화학기상증착장치 |
| KR100688838B1 (ko) * | 2005-05-13 | 2007-03-02 | 삼성에스디아이 주식회사 | 촉매 화학기상증착장치 및 촉매 화학기상증착방법 |
| JP2007067157A (ja) * | 2005-08-31 | 2007-03-15 | Tokyo Ohka Kogyo Co Ltd | 気相反応処理装置 |
| JP5135710B2 (ja) * | 2006-05-16 | 2013-02-06 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
| KR101333530B1 (ko) * | 2006-06-30 | 2013-11-28 | 삼성디스플레이 주식회사 | 촉매재 화학기상증착 장치 |
| JP5268059B2 (ja) * | 2008-09-03 | 2013-08-21 | 株式会社石川製作所 | 触媒化学気相成長装置の触媒体支持構造 |
| EP2420591B1 (en) * | 2010-08-20 | 2013-10-30 | Echerkon Technologies Ltd. | Apparatus for hot wire chemical vapour deposition |
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2002
- 2002-07-17 JP JP2002208208A patent/JP4035011B2/ja not_active Expired - Fee Related