JP2004055549A - 液体金属マイクロスイッチにおける液体分離装置 - Google Patents

液体金属マイクロスイッチにおける液体分離装置 Download PDF

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Publication number
JP2004055549A
JP2004055549A JP2003190322A JP2003190322A JP2004055549A JP 2004055549 A JP2004055549 A JP 2004055549A JP 2003190322 A JP2003190322 A JP 2003190322A JP 2003190322 A JP2003190322 A JP 2003190322A JP 2004055549 A JP2004055549 A JP 2004055549A
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Japan
Prior art keywords
passage
auxiliary passage
cavity
liquid metal
cross
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Pending
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JP2003190322A
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English (en)
Japanese (ja)
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JP2004055549A5 (enExample
Inventor
Sasko Zarev
サスコ・ザレヴ
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Agilent Technologies Inc
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Agilent Technologies Inc
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Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JP2004055549A publication Critical patent/JP2004055549A/ja
Publication of JP2004055549A5 publication Critical patent/JP2004055549A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H29/28—Switches having at least one liquid contact with level of surface of contact liquid displaced by fluid pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
JP2003190322A 2002-07-10 2003-07-02 液体金属マイクロスイッチにおける液体分離装置 Pending JP2004055549A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/192,408 US6559420B1 (en) 2002-07-10 2002-07-10 Micro-switch heater with varying gas sub-channel cross-section

Publications (2)

Publication Number Publication Date
JP2004055549A true JP2004055549A (ja) 2004-02-19
JP2004055549A5 JP2004055549A5 (enExample) 2006-07-20

Family

ID=22709517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003190322A Pending JP2004055549A (ja) 2002-07-10 2003-07-02 液体金属マイクロスイッチにおける液体分離装置

Country Status (2)

Country Link
US (1) US6559420B1 (enExample)
JP (1) JP2004055549A (enExample)

Families Citing this family (84)

* Cited by examiner, † Cited by third party
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US7049175B2 (en) * 2001-11-07 2006-05-23 Board Of Trustees Of The University Of Arkansas Method of packaging RF MEMS
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US6787719B2 (en) * 2002-12-12 2004-09-07 Agilent Technologies, Inc. Switch and method for producing the same
US20040112727A1 (en) * 2002-12-12 2004-06-17 Wong Marvin Glenn Laser cut channel plate for a switch
US6855898B2 (en) * 2002-12-12 2005-02-15 Agilent Technologies, Inc. Ceramic channel plate for a switch
US7022926B2 (en) * 2002-12-12 2006-04-04 Agilent Technologies, Inc. Ultrasonically milled channel plate for a switch
US7019235B2 (en) * 2003-01-13 2006-03-28 Agilent Technologies, Inc. Photoimaged channel plate for a switch
US6809277B2 (en) * 2003-01-22 2004-10-26 Agilent Technologies, Inc. Method for registering a deposited material with channel plate channels, and switch produced using same
US6747222B1 (en) * 2003-02-04 2004-06-08 Agilent Technologies, Inc. Feature formation in a nonphotoimagable material and switch incorporating same
DE60305867T2 (de) * 2003-03-20 2007-06-06 Agilent Technologies Inc., A Delaware Corp., Palo Alto Optoelektronisches Modul und Temperaturschalter dafür
US6825429B2 (en) * 2003-03-31 2004-11-30 Agilent Technologies, Inc. Hermetic seal and controlled impedance RF connections for a liquid metal micro switch
US6903287B2 (en) * 2003-04-14 2005-06-07 Agilent Technologies, Inc. Liquid metal optical relay
US6762378B1 (en) 2003-04-14 2004-07-13 Agilent Technologies, Inc. Liquid metal, latching relay with face contact
US6894237B2 (en) * 2003-04-14 2005-05-17 Agilent Technologies, Inc. Formation of signal paths to increase maximum signal-carrying frequency of a fluid-based switch
US7048519B2 (en) * 2003-04-14 2006-05-23 Agilent Technologies, Inc. Closed-loop piezoelectric pump
US6879088B2 (en) * 2003-04-14 2005-04-12 Agilent Technologies, Inc. Insertion-type liquid metal latching relay array
US7071432B2 (en) * 2003-04-14 2006-07-04 Agilent Technologies, Inc. Reduction of oxides in a fluid-based switch
US6803842B1 (en) 2003-04-14 2004-10-12 Agilent Technologies, Inc. Longitudinal mode solid slug optical latching relay
US6885133B2 (en) * 2003-04-14 2005-04-26 Agilent Technologies, Inc. High frequency bending-mode latching relay
US6768068B1 (en) 2003-04-14 2004-07-27 Agilent Technologies, Inc. Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch
US6798937B1 (en) 2003-04-14 2004-09-28 Agilent Technologies, Inc. Pressure actuated solid slug optical latching relay
US7012354B2 (en) * 2003-04-14 2006-03-14 Agilent Technologies, Inc. Method and structure for a pusher-mode piezoelectrically actuated liquid metal switch
US6920259B2 (en) * 2003-04-14 2005-07-19 Agilent Technologies, Inc. Longitudinal electromagnetic latching optical relay
US6730866B1 (en) 2003-04-14 2004-05-04 Agilent Technologies, Inc. High-frequency, liquid metal, latching relay array
US6903493B2 (en) * 2003-04-14 2005-06-07 Agilent Technologies, Inc. Inserting-finger liquid metal relay
US6765161B1 (en) * 2003-04-14 2004-07-20 Agilent Technologies, Inc. Method and structure for a slug caterpillar piezoelectric latching reflective optical relay
US6876131B2 (en) * 2003-04-14 2005-04-05 Agilent Technologies, Inc. High-frequency, liquid metal, latching relay with face contact
US6925223B2 (en) * 2003-04-14 2005-08-02 Agilent Technologies, Inc. Pressure actuated optical latching relay
US6903492B2 (en) * 2003-04-14 2005-06-07 Agilent Technologies, Inc. Wetting finger latching piezoelectric relay
US6946776B2 (en) * 2003-04-14 2005-09-20 Agilent Technologies, Inc. Method and apparatus for maintaining a liquid metal switch in a ready-to-switch condition
US6816641B2 (en) * 2003-04-14 2004-11-09 Agilent Technologies, Inc. Method and structure for a solid slug caterpillar piezoelectric optical relay
US6900578B2 (en) * 2003-04-14 2005-05-31 Agilent Technologies, Inc. High frequency latching relay with bending switch bar
US6946775B2 (en) * 2003-04-14 2005-09-20 Agilent Technologies, Inc. Method and structure for a slug assisted longitudinal piezoelectrically actuated liquid metal optical switch
US6891116B2 (en) * 2003-04-14 2005-05-10 Agilent Technologies, Inc. Substrate with liquid electrode
US6870111B2 (en) * 2003-04-14 2005-03-22 Agilent Technologies, Inc. Bending mode liquid metal switch
US6774325B1 (en) 2003-04-14 2004-08-10 Agilent Technologies, Inc. Reducing oxides on a switching fluid in a fluid-based switch
US6903490B2 (en) * 2003-04-14 2005-06-07 Agilent Technologies, Inc. Longitudinal mode optical latching relay
US6876132B2 (en) * 2003-04-14 2005-04-05 Agilent Technologies, Inc. Method and structure for a solid slug caterpillar piezoelectric relay
US6794591B1 (en) 2003-04-14 2004-09-21 Agilent Technologies, Inc. Fluid-based switches
US6838959B2 (en) * 2003-04-14 2005-01-04 Agilent Technologies, Inc. Longitudinal electromagnetic latching relay
US6961487B2 (en) * 2003-04-14 2005-11-01 Agilent Technologies, Inc. Method and structure for a pusher-mode piezoelectrically actuated liquid metal optical switch
US6891315B2 (en) * 2003-04-14 2005-05-10 Agilent Technologies, Inc. Shear mode liquid metal switch
US6924443B2 (en) * 2003-04-14 2005-08-02 Agilent Technologies, Inc. Reducing oxides on a switching fluid in a fluid-based switch
US6831532B2 (en) * 2003-04-14 2004-12-14 Agilent Technologies, Inc. Push-mode latching relay
US6841746B2 (en) * 2003-04-14 2005-01-11 Agilent Technologies, Inc. Bent switching fluid cavity
US6818844B2 (en) * 2003-04-14 2004-11-16 Agilent Technologies, Inc. Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch
US6879089B2 (en) * 2003-04-14 2005-04-12 Agilent Technologies, Inc. Damped longitudinal mode optical latching relay
US7070908B2 (en) * 2003-04-14 2006-07-04 Agilent Technologies, Inc. Feature formation in thick-film inks
US20040201447A1 (en) * 2003-04-14 2004-10-14 Wong Marvin Glenn Thin-film resistor device
US6740829B1 (en) 2003-04-14 2004-05-25 Agilent Technologies, Inc. Insertion-type liquid metal latching relay
US6876130B2 (en) * 2003-04-14 2005-04-05 Agilent Technologies, Inc. Damped longitudinal mode latching relay
US6882088B2 (en) * 2003-04-14 2005-04-19 Agilent Technologies, Inc. Bending-mode latching relay
US6956990B2 (en) * 2003-04-14 2005-10-18 Agilent Technologies, Inc. Reflecting wedge optical wavelength multiplexer/demultiplexer
US6906271B2 (en) * 2003-04-14 2005-06-14 Agilent Technologies, Inc. Fluid-based switch
US6894424B2 (en) * 2003-04-14 2005-05-17 Agilent Technologies, Inc. High frequency push-mode latching relay
US6876133B2 (en) * 2003-04-14 2005-04-05 Agilent Technologies, Inc. Latching relay with switch bar
US6770827B1 (en) 2003-04-14 2004-08-03 Agilent Technologies, Inc. Electrical isolation of fluid-based switches
US6888977B2 (en) * 2003-04-14 2005-05-03 Agilent Technologies, Inc. Polymeric liquid metal optical switch
US6750413B1 (en) 2003-04-25 2004-06-15 Agilent Technologies, Inc. Liquid metal micro switches using patterned thick film dielectric as channels and a thin ceramic or glass cover plate
US6777630B1 (en) 2003-04-30 2004-08-17 Agilent Technologies, Inc. Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates
US6759610B1 (en) 2003-06-05 2004-07-06 Agilent Technologies, Inc. Multi-layer assembly of stacked LIMMS devices with liquid metal vias
US6833520B1 (en) * 2003-06-16 2004-12-21 Agilent Technologies, Inc. Suspended thin-film resistor
US6759611B1 (en) 2003-06-16 2004-07-06 Agilent Technologies, Inc. Fluid-based switches and methods for producing the same
US6781074B1 (en) 2003-07-30 2004-08-24 Agilent Technologies, Inc. Preventing corrosion degradation in a fluid-based switch
US6787720B1 (en) 2003-07-31 2004-09-07 Agilent Technologies, Inc. Gettering agent and method to prevent corrosion in a fluid switch
US20050030347A1 (en) * 2003-08-08 2005-02-10 Sasko Zarev Concentric curvilinear heater resistor
US6822176B1 (en) * 2004-04-16 2004-11-23 Agilent Technologies, Inc. Liquid metal switch and method of manufacture therefor
US7132614B2 (en) * 2004-11-24 2006-11-07 Agilent Technologies, Inc. Liquid metal switch employing electrowetting for actuation and architectures for implementing same
US7030328B1 (en) 2004-12-22 2006-04-18 Agilent Technologies, Inc. Liquid metal switch employing micro-electromechanical system (MEMS) structures for actuation
US7164090B2 (en) * 2005-02-28 2007-01-16 Agilent Technologies, Inc. Liquid metal switch employing a single volume of liquid metal
US7158363B2 (en) * 2005-04-11 2007-01-02 Agilent Technologies, Inc. Liquid metal varactor and method
US7358452B2 (en) * 2005-06-30 2008-04-15 Agilent Technlolgies, Inc. Architecture and method of fabrication for a liquid metal microswitch (LIMMS)
US8362376B2 (en) * 2007-01-19 2013-01-29 The Regents Of The University Of California Electrostatically driven high speed micro droplet switch
JP2009117078A (ja) * 2007-11-02 2009-05-28 Yokogawa Electric Corp リレー
US10760985B2 (en) * 2018-06-26 2020-09-01 Tdk Corporation Smart surface sensor for collecting data
US11204206B2 (en) * 2020-05-18 2021-12-21 Envertic Thermal Systems, Llc Thermal switch

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Publication number Publication date
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