JP2004050493A5 - - Google Patents

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Publication number
JP2004050493A5
JP2004050493A5 JP2002208326A JP2002208326A JP2004050493A5 JP 2004050493 A5 JP2004050493 A5 JP 2004050493A5 JP 2002208326 A JP2002208326 A JP 2002208326A JP 2002208326 A JP2002208326 A JP 2002208326A JP 2004050493 A5 JP2004050493 A5 JP 2004050493A5
Authority
JP
Japan
Prior art keywords
manufacturing
microstructure
mold
support
molding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002208326A
Other languages
English (en)
Japanese (ja)
Other versions
JP3986386B2 (ja
JP2004050493A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2002208326A external-priority patent/JP3986386B2/ja
Priority to JP2002208326A priority Critical patent/JP3986386B2/ja
Priority to AT03739230T priority patent/ATE390260T1/de
Priority to US10/518,959 priority patent/US20050212182A1/en
Priority to AU2003245601A priority patent/AU2003245601A1/en
Priority to CA002491415A priority patent/CA2491415A1/en
Priority to CN03816857XA priority patent/CN1668435B/zh
Priority to DE60319988T priority patent/DE60319988T2/de
Priority to KR1020057000763A priority patent/KR100951278B1/ko
Priority to EP03739230A priority patent/EP1525079B9/en
Priority to PCT/US2003/019495 priority patent/WO2004010452A2/en
Priority to TW092117984A priority patent/TWI275465B/zh
Publication of JP2004050493A publication Critical patent/JP2004050493A/ja
Publication of JP2004050493A5 publication Critical patent/JP2004050493A5/ja
Publication of JP3986386B2 publication Critical patent/JP3986386B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2002208326A 2002-07-17 2002-07-17 微細構造体の製造方法 Expired - Fee Related JP3986386B2 (ja)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP2002208326A JP3986386B2 (ja) 2002-07-17 2002-07-17 微細構造体の製造方法
DE60319988T DE60319988T2 (de) 2002-07-17 2003-06-20 Verfahren zur Herstellung einer Mikrostruktur
EP03739230A EP1525079B9 (en) 2002-07-17 2003-06-20 Manufacturing method of a microstructure
AU2003245601A AU2003245601A1 (en) 2002-07-17 2003-06-20 Flexible mold and method of manufacturing microstructure using same
CA002491415A CA2491415A1 (en) 2002-07-17 2003-06-20 Flexible mold and method of manufacturing microstructure using same
CN03816857XA CN1668435B (zh) 2002-07-17 2003-06-20 铸塑软模具以及利用其制造微型结构的方法
AT03739230T ATE390260T1 (de) 2002-07-17 2003-06-20 Verfahren zur herstellung einer mikrostruktur
KR1020057000763A KR100951278B1 (ko) 2002-07-17 2003-06-20 가요성 주형 및 이를 이용한 미세 구조체의 제조 방법
US10/518,959 US20050212182A1 (en) 2002-07-17 2003-06-20 Flexible mold and method of manufacturing microstructure using same
PCT/US2003/019495 WO2004010452A2 (en) 2002-07-17 2003-06-20 Flexible mold and method of manufacturing microstructure using same
TW092117984A TWI275465B (en) 2002-07-17 2003-07-01 Flexible mold and method of manufacturing microstructure using same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002208326A JP3986386B2 (ja) 2002-07-17 2002-07-17 微細構造体の製造方法

Publications (3)

Publication Number Publication Date
JP2004050493A JP2004050493A (ja) 2004-02-19
JP2004050493A5 true JP2004050493A5 (enExample) 2005-10-27
JP3986386B2 JP3986386B2 (ja) 2007-10-03

Family

ID=30767670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002208326A Expired - Fee Related JP3986386B2 (ja) 2002-07-17 2002-07-17 微細構造体の製造方法

Country Status (11)

Country Link
US (1) US20050212182A1 (enExample)
EP (1) EP1525079B9 (enExample)
JP (1) JP3986386B2 (enExample)
KR (1) KR100951278B1 (enExample)
CN (1) CN1668435B (enExample)
AT (1) ATE390260T1 (enExample)
AU (1) AU2003245601A1 (enExample)
CA (1) CA2491415A1 (enExample)
DE (1) DE60319988T2 (enExample)
TW (1) TWI275465B (enExample)
WO (1) WO2004010452A2 (enExample)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005066836A (ja) * 2003-08-22 2005-03-17 Three M Innovative Properties Co 可とう性成形型及びその製造方法ならびに微細構造体の製造方法
US7361409B2 (en) 2003-08-22 2008-04-22 3M Innovative Properties Company Microstructured article comprising a polymerized composition having low glass transition temperature
US7288013B2 (en) 2003-10-31 2007-10-30 3M Innovative Properties Company Method of forming microstructures on a substrate and a microstructured assembly used for same
JP2005288933A (ja) * 2004-04-01 2005-10-20 Three M Innovative Properties Co 可とう性成形型及びその製造方法
KR20070056116A (ko) 2004-08-26 2007-05-31 쓰리엠 이노베이티브 프로퍼티즈 컴파니 형판을 이용하여 미세구조를 형성하는 방법
KR100697197B1 (ko) * 2004-12-29 2007-03-21 엘지전자 주식회사 플라즈마 디스플레이 패널
JP4773729B2 (ja) * 2005-02-28 2011-09-14 キヤノン株式会社 転写装置およびデバイス製造方法
US7478791B2 (en) 2005-04-15 2009-01-20 3M Innovative Properties Company Flexible mold comprising cured polymerizable resin composition
KR100744573B1 (ko) * 2005-04-21 2007-08-01 미래나노텍(주) 플라즈마 디스플레이 패널
JP4455488B2 (ja) * 2005-12-19 2010-04-21 三菱電機株式会社 半導体装置
KR100822043B1 (ko) * 2006-06-29 2008-04-15 주식회사 싸이노스 플렉시블 플라즈마 디스플레이 패널의 제조 방법
US20080036114A1 (en) * 2006-08-14 2008-02-14 3M Innovative Properties Company Mold having surface modified non-molding regions
US20080093776A1 (en) * 2006-10-05 2008-04-24 3M Innovative Properties Company Method of molding ultraviolet cured microstructures and molds
WO2008073719A1 (en) * 2006-12-07 2008-06-19 3M Innovative Properties Company Method of molding barrier ribs with hygroscopic polymeric molds
KR20100031522A (ko) * 2007-06-04 2010-03-22 에스씨아이브이에이엑스 가부시키가이샤 형, 미세 가공품 및 그 제조 방법
JP2010218597A (ja) * 2009-03-13 2010-09-30 Toshiba Corp パターン転写用樹脂スタンパ、及びこれを用いた磁気記録媒体の製造方法
JP5559574B2 (ja) * 2010-03-08 2014-07-23 東芝機械株式会社 転写方法
JP5351096B2 (ja) 2010-06-02 2013-11-27 日東電工株式会社 光導波路の製法
JP5351102B2 (ja) 2010-07-05 2013-11-27 日東電工株式会社 光導波路の製法
JP5351101B2 (ja) * 2010-07-05 2013-11-27 日東電工株式会社 光導波路の製法
JP4774125B2 (ja) * 2010-10-04 2011-09-14 キヤノン株式会社 転写装置、型、および、デバイス製造方法
JP5379774B2 (ja) 2010-10-27 2013-12-25 日東電工株式会社 光導波路の製法
US8875356B2 (en) 2011-10-06 2014-11-04 Intercontinental Great Brands Llc Mechanical and adhesive based reclosable fasteners
JP6483018B2 (ja) 2012-09-06 2019-03-13 エーファウ・グループ・エー・タルナー・ゲーエムベーハー 型押し加工のための構造体スタンプ、装置および方法
US9480931B1 (en) * 2012-11-16 2016-11-01 Mattel, Inc. Building components
DE102013107909B4 (de) * 2013-07-24 2015-04-09 Schott Ag Verfahren und Anlage zum Einprägen einer Struktur auf einem mit einem Lack beschichteten Substrat
US11422291B2 (en) * 2017-05-09 2022-08-23 Heptagon Micro Optics Pte. Ltd. Method for conditioning a replication tool and related method for manufacturing a multitude of devices
CN108908820B (zh) * 2018-06-19 2020-12-25 深圳摩方新材科技有限公司 一种树脂类光学镜片的制造方法
CN119002173A (zh) * 2023-05-19 2024-11-22 香港理工大学 板对辊压印设备及在光学玻璃板上加工微纳结构的方法

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US4340709A (en) * 1980-07-16 1982-07-20 General Electric Company Addition curing silicone compositions
US4912948A (en) * 1985-03-22 1990-04-03 Union Carbide Chemicals And Plastics Company Inc. Vacuum guide used in flexible sheet material treatment
US4929403A (en) * 1989-07-25 1990-05-29 Audsley Edwin F Process for forming multi-layer flexible molds
US5462702A (en) * 1992-02-04 1995-10-31 Slaughter, Jr.; Gibbs M. Method for resurfacing fiberglass boat hulls
JP3128312B2 (ja) * 1992-02-28 2001-01-29 株式会社ダイセン工業 合成樹脂の発泡成形用金型装置および発泡成形法
US5840465A (en) * 1995-07-17 1998-11-24 Taiyo Ink Manufacturing Co., Ltd. Compositions and method for formation of barrier ribs of plasma display panel
JP3591910B2 (ja) * 1995-03-30 2004-11-24 大日本印刷株式会社 プラズマディスプレイパネルのセル障壁製造方法
US6251208B1 (en) * 1996-10-29 2001-06-26 Toshiba Machine Co., Ltd. Method for manufacturing a structure with fine ribs
US6247986B1 (en) * 1998-12-23 2001-06-19 3M Innovative Properties Company Method for precise molding and alignment of structures on a substrate using a stretchable mold
US6843952B1 (en) * 1999-03-25 2005-01-18 3M Innovative Properties Company Method of producing substrate for plasma display panel and mold used in the method
US6306948B1 (en) * 1999-10-26 2001-10-23 3M Innovative Properties Company Molding composition containing a debinding catalyst for making ceramic microstructures
JP4082545B2 (ja) * 2000-01-11 2008-04-30 スリーエム イノベイティブ プロパティズ カンパニー プラズマディスプレイパネル用基板を製造するための装置、成形型及び方法
US7033534B2 (en) * 2001-10-09 2006-04-25 3M Innovative Properties Company Method for forming microstructures on a substrate using a mold
US7176492B2 (en) * 2001-10-09 2007-02-13 3M Innovative Properties Company Method for forming ceramic microstructures on a substrate using a mold and articles formed by the method
JP4326190B2 (ja) * 2002-07-10 2009-09-02 スリーエム イノベイティブ プロパティズ カンパニー 可とう性成形型及びその製造方法

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