JP2004026680A5 - - Google Patents
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- Publication number
- JP2004026680A5 JP2004026680A5 JP2002182395A JP2002182395A JP2004026680A5 JP 2004026680 A5 JP2004026680 A5 JP 2004026680A5 JP 2002182395 A JP2002182395 A JP 2002182395A JP 2002182395 A JP2002182395 A JP 2002182395A JP 2004026680 A5 JP2004026680 A5 JP 2004026680A5
- Authority
- JP
- Japan
- Prior art keywords
- sodium
- dimethoxyethane
- dissolve
- synthesized
- suspended
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012043 crude product Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002182395A JP2004026680A (ja) | 2002-06-24 | 2002-06-24 | ルテニウム化合物及びその製造方法並びに該化合物により得られたルテニウム含有薄膜 |
| PCT/JP2003/000074 WO2003057706A1 (fr) | 2002-01-08 | 2003-01-08 | Composes a base de ruthenium, leur procede de preparation, et films minces contenant du ruthenium fabriques a partir de tels composes |
| KR10-2004-7010539A KR20040072701A (ko) | 2002-01-08 | 2003-01-08 | 루테늄 화합물 및 그 제조 방법 그리고 그 화합물에 의해얻어진 루테늄 함유 박막 |
| US10/499,822 US7045645B2 (en) | 2002-01-08 | 2003-01-08 | Ruthenium compounds, process for their preparation, and ruthenium-containing thin films made by using the compounds |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002182395A JP2004026680A (ja) | 2002-06-24 | 2002-06-24 | ルテニウム化合物及びその製造方法並びに該化合物により得られたルテニウム含有薄膜 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004026680A JP2004026680A (ja) | 2004-01-29 |
| JP2004026680A5 true JP2004026680A5 (https=) | 2005-04-07 |
Family
ID=31178911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002182395A Pending JP2004026680A (ja) | 2002-01-08 | 2002-06-24 | ルテニウム化合物及びその製造方法並びに該化合物により得られたルテニウム含有薄膜 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004026680A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20200165270A1 (en) * | 2018-11-28 | 2020-05-28 | Versum Materials Us, Llc | Low Halide Lanthanum Precursors For Vapor Deposition |
-
2002
- 2002-06-24 JP JP2002182395A patent/JP2004026680A/ja active Pending
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