JP2004017477A5 - - Google Patents

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Publication number
JP2004017477A5
JP2004017477A5 JP2002175577A JP2002175577A JP2004017477A5 JP 2004017477 A5 JP2004017477 A5 JP 2004017477A5 JP 2002175577 A JP2002175577 A JP 2002175577A JP 2002175577 A JP2002175577 A JP 2002175577A JP 2004017477 A5 JP2004017477 A5 JP 2004017477A5
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JP
Japan
Prior art keywords
mold
manufacturing
optical
optical component
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002175577A
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English (en)
Japanese (ja)
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JP2004017477A (ja
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Publication date
Application filed filed Critical
Priority to JP2002175577A priority Critical patent/JP2004017477A/ja
Priority claimed from JP2002175577A external-priority patent/JP2004017477A/ja
Publication of JP2004017477A publication Critical patent/JP2004017477A/ja
Publication of JP2004017477A5 publication Critical patent/JP2004017477A5/ja
Pending legal-status Critical Current

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JP2002175577A 2002-06-17 2002-06-17 光学部品の製造方法、および光学部品用型の製造方法 Pending JP2004017477A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002175577A JP2004017477A (ja) 2002-06-17 2002-06-17 光学部品の製造方法、および光学部品用型の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002175577A JP2004017477A (ja) 2002-06-17 2002-06-17 光学部品の製造方法、および光学部品用型の製造方法

Publications (2)

Publication Number Publication Date
JP2004017477A JP2004017477A (ja) 2004-01-22
JP2004017477A5 true JP2004017477A5 (enExample) 2005-10-06

Family

ID=31174184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002175577A Pending JP2004017477A (ja) 2002-06-17 2002-06-17 光学部品の製造方法、および光学部品用型の製造方法

Country Status (1)

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JP (1) JP2004017477A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6940654B1 (en) * 2004-03-09 2005-09-06 Yin S. Tang Lens array and method of making same
JP4506264B2 (ja) * 2004-05-11 2010-07-21 株式会社ニコン フォトレジストレンズの製造方法、レンズの製造方法、型の製造方法、光学装置、及び投影露光装置
JP5081666B2 (ja) * 2008-02-28 2012-11-28 株式会社リコー 微細パターン成形用金型及びその製造方法
JP2014109044A (ja) * 2012-11-30 2014-06-12 National Institute For Materials Science 高温用導電性パンチ及びその製造方法

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