JP2004014881A - 露光装置の照明系 - Google Patents

露光装置の照明系 Download PDF

Info

Publication number
JP2004014881A
JP2004014881A JP2002167736A JP2002167736A JP2004014881A JP 2004014881 A JP2004014881 A JP 2004014881A JP 2002167736 A JP2002167736 A JP 2002167736A JP 2002167736 A JP2002167736 A JP 2002167736A JP 2004014881 A JP2004014881 A JP 2004014881A
Authority
JP
Japan
Prior art keywords
lens
fly
illumination
eye
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002167736A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004014881A5 (enExample
Inventor
Yukio Taniguchi
谷口　幸夫
Hirotaka Yamaguchi
山口　弘高
Susumu Tsujikawa
辻川　晋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced LCD Technologies Development Center Co Ltd
Original Assignee
Advanced LCD Technologies Development Center Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced LCD Technologies Development Center Co Ltd filed Critical Advanced LCD Technologies Development Center Co Ltd
Priority to JP2002167736A priority Critical patent/JP2004014881A/ja
Publication of JP2004014881A publication Critical patent/JP2004014881A/ja
Publication of JP2004014881A5 publication Critical patent/JP2004014881A5/ja
Pending legal-status Critical Current

Links

Images

Landscapes

  • Microscoopes, Condenser (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2002167736A 2002-06-07 2002-06-07 露光装置の照明系 Pending JP2004014881A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002167736A JP2004014881A (ja) 2002-06-07 2002-06-07 露光装置の照明系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002167736A JP2004014881A (ja) 2002-06-07 2002-06-07 露光装置の照明系

Publications (2)

Publication Number Publication Date
JP2004014881A true JP2004014881A (ja) 2004-01-15
JP2004014881A5 JP2004014881A5 (enExample) 2005-09-29

Family

ID=30434896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002167736A Pending JP2004014881A (ja) 2002-06-07 2002-06-07 露光装置の照明系

Country Status (1)

Country Link
JP (1) JP2004014881A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018520386A (ja) * 2015-07-15 2018-07-26 シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド 露光装置および方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018520386A (ja) * 2015-07-15 2018-07-26 シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド 露光装置および方法
EP3324238A4 (en) * 2015-07-15 2019-05-01 Shanghai Micro Electronics Equipment (Group) Co., Ltd. EXPOSURE DEVICE AND METHOD

Similar Documents

Publication Publication Date Title
US4497015A (en) Light illumination device
JPS597359A (ja) 照明装置
JP5806261B2 (ja) 高集光効率を有するｌｅｄ型フォトリソグラフィー照明器
USRE34634E (en) Light illumination device
JPH032284B2 (enExample)
JP2006065118A (ja) 照明光学装置
JPH0545605A (ja) 照明光学装置
CN101006556A (zh) 照明光学装置、曝光装置和曝光方法
US7863588B2 (en) Lighting optical apparatus and sample inspection apparatus
JPH05159999A (ja) 投影露光装置
JP2006133635A (ja) 照明光学装置及び光学装置
JP4328320B2 (ja) 露光用光源
JP2004014881A (ja) 露光装置の照明系
TW200935193A (en) Lighting device, exposure device, exposure method and element production method
KR0165701B1 (ko) 조명장치 및 동장치를 사용하는 노광장치
JPH11354424A (ja) 照明装置及びそれを用いた投影露光装置
TW201433826A (zh) 照明光學系統、曝光裝置、以及裝置之製造方法
JPH11260705A (ja) 露光装置
WO2007029561A1 (ja) 露光装置
JP3879142B2 (ja) 露光装置
JP2006208682A (ja) 照明光学装置及び光学装置
CN107726060A (zh) 一种用于曝光机的阵列光源照明装置
JPH01913A (ja) 照明装置
JP2006064380A (ja) 照明光学装置
TWI905419B (zh) 照明光學系統及曝光裝置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050511

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050511

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070122

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080304

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20080701