JP2004009254A - Polishing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a polishing device capable of preventing damage of sensors. <P>SOLUTION: This device is provided with a polishing table 6, a servo motor 70 for rotating and driving the polishing table 6, pressing units 10 and 30 for pressing an optical fiber connector to the polishing table 6, a stepping motor 22 for driving the pressing units 10, 30, and a non-contact sensor 35 for detecting moving amount of the pressing units 10 and 30. The pressing is performed by driving the pressing units 10 and 30 based on the moving amount detected by the sensor 35. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a polishing apparatus, for example, to a technique suitable for polishing a polished surface of an optical fiber connector.
[0002]
[Prior art]
Since a polishing apparatus, such as an optical fiber connector, for polishing an object to be polished with a rotary polishing table has been put into practical use, it will be briefly described with reference to the drawings. FIG. 11 is a right side view showing a schematic configuration of the polishing apparatus. The polishing apparatus shown in this figure uses a detachable jig 240 to facilitate setting of the optical fiber connector 1. A pressing unit is provided to easily and detachably provide the jig 240. The pressing unit is provided with a first pressing member 230 rotatably provided between a pressing position shown in the drawing and a retracted position (illustrated by a broken line) for replacing the optical fiber connector 1.
[0003]
A second pressing member 210 is provided between the first pressing member 230 and the jig 240 so as to be vertically movable between a pressing position and a retracted position for exchanging the optical fiber connector 1. A roller 231 provided at the lower end of the first pressing member 230 is brought into contact with a contact member 234 having one end rotatably supported at the upper end of the second pressing member 210. The pressing force generated when the pressing member 220 is lowered is transmitted.
[0004]
On the other hand, in order to satisfactorily polish the optical fiber connector 1, it is necessary to measure the pressing force on the optical fiber connector 1 and control the pressing force by the pressing unit. Therefore, typically, a pressure sensor 235 is provided below the contact member 234, and the pressing force is detected by the pressure sensor 235, so that the pressing force required when performing polishing is controlled. .
[0005]
[Problems to be solved by the invention]
However, pressure sensors are vulnerable to impact forces and are easily broken. Therefore, if the second pressing member 210 operated by the operator is operated so as to be rapidly raised to the evacuation position for jig replacement, the pressure sensor will be damaged.
[0006]
Accordingly, the present invention has been made in view of the above problems, and has as its object to provide a polishing apparatus that can prevent damage to sensors and the like.
[0007]
[Means for Solving the Problems]
According to one embodiment of the present invention, there is provided a polishing apparatus comprising: a polishing table; a first driving unit configured to rotationally drive the polishing table; and an object to be polished is pressed against the polishing table. A pressing unit, a second driving unit that drives the pressing unit, and a detecting unit that detects the position of the pressing unit in a non-contact manner, wherein the second driving unit detects the movement detected by the detecting unit. It is characterized in that the pressing unit is driven based on the amount.
[0008]
Further, a jig for supporting the object to be polished is provided, and the pressing unit presses the object to be polished to the polishing table via the jig.
[0009]
Further, the pressing unit includes a first pressing member rotatably provided between a pressing position and a retracted position for exchanging the object to be polished, and a first pressing member between the first pressing member and the jig. A second pressing member provided movably in a pressing direction between a pressing position and a retracted position for exchanging the object to be polished, wherein the second pressing member is An end portion of the first pressing member abuts, a pressing force from the first pressing member is urged, and a contact member having a contact surface for guiding rotation of the first pressing member, It is characterized in that the contact surface is inclined.
[0010]
A polishing table, first driving means for rotating and driving the polishing table, a jig for supporting the object to be polished, and a pressing unit for pressing the object to be polished against the polishing table via the jig. A pressure sensor that detects an amount of pressing by the pressing unit, and a second driving unit that drives the pressing unit based on the amount of pressing detected by the pressure sensor. A first pressing member rotatably provided between a retreat position for exchanging the object to be polished and a first pressing member provided between the first pressing member and the jig; A second pressing member movably provided in a pressing direction between a retracted position for exchanging an object, and a second pressing member, wherein an end of the first pressing member abuts, The pressing force from the first pressing member is applied. And a contact member having a contact surface for guiding rotation of the first pressing member, wherein the pressure sensor is arranged to be pressed by the contact member, A polishing apparatus characterized in that the surface is inclined.
[0011]
Further, the contact surface is inclined so that the first pressing member rotates from the pressing position to the retreat position when the second pressing member is moved to the retreat position. I have.
[0012]
The pressing direction of the pressing unit is a vertical direction, and the contact surface is inclined downward from a horizontal plane in a direction from the pressing position to the retreat position in the rotation direction of the first pressing member. It is characterized by doing.
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.
[0014]
<First embodiment>
FIG. 1 is a schematic configuration diagram of a main part of a polishing apparatus according to a first embodiment of the present invention, which is cut away and viewed from a side.
[0015]
In this figure, the polishing apparatus 5 has a main base 3 placed on a work desk, for example, as a base for mounting each component. On the main base 3, a polishing table 6, which is rotationally driven at a predetermined rotational speed by a servo motor 70 as a first driving means, is provided with its polishing surface 6a facing upward. In addition, an operation panel 71 provided with a display unit and operation buttons is provided on the front side of the main base unit 3. An operator operates the operation buttons while checking the display unit of the operation panel 71 to perform polishing. To perform operations such as initial setting and start and stop.
[0016]
The polishing table 6 is rotationally driven by a revolving rotation mechanism (not shown) that performs revolving and rotation, thereby preventing the same polishing surface 6a of the polishing table 6 from being repeatedly polished. The polishing surface can be polished uniformly.
[0017]
Further, the jig 40 is for detachably holding the plurality of optical fiber connectors 1 such that the surfaces to be polished face downward. The jig 40 is provided so as to be easily detachable from the polishing apparatus 5, and is configured to perform polishing while being pressed against a polishing surface 6 a of the polishing table 6 with a predetermined pressing force. The polishing apparatus 5 includes a pressing unit for performing pressing in this manner, and the pressing unit includes a lock member 30 as a first pressing member and a pressing shaft 10 as a second pressing member.
[0018]
The pressing unit includes a sub base 7 fixed on the main base 3 near the polishing table 6 as shown in the figure, and a supporting base 9 fixed from the sub base 7 to overhang the polishing table 6. Is the mounting base. A linear bush 11 is built in the support base 9, and the linear bush 11 allows the linear bush 11 to move in a direction indicated by a double-headed arrow (a pressing direction and a vertical direction) perpendicular to the polishing surface of the polishing table 6. The pressure shaft 10 is guided so as to be able to move up and down. With such a configuration, the pressing shaft 10 can be moved from the pressed position in FIG. 1 to a retracted position above the illustrated pressed position for replacing the optical fiber connector 1.
[0019]
A conical portion 10a is provided at the lower end of the pressurizing shaft 10. By setting the conical portion 10a so as to enter a pivot bearing 44 provided at the center of the jig 40, The jig 40 can uniformly press the polishing surface 6 a of the polishing table 6. When the jig is replaced, the jig 40 can be inclined with respect to the polishing surface 6a of the polishing table 6 so as to be easily taken out, as shown by a broken line.
[0020]
On the other hand, two shafts 12 for preventing the jig 40 from rotating are fixed to the bottom surface of the support base 9. The distal ends of these shafts 12 are set so as to enter the groove members 42 fixed to the jig 40, thereby preventing the jig 40 from rotating. Further, a grip portion 45 is fixed to the jig 40. After the operator moves the pressure shaft 10 to the upper evacuation position, the operator grips the grip portion 45 and moves to the back side. The shaft body 12 is easily inserted into the groove member 42 by being set while being set.
[0021]
The pressure shaft 10 is provided with a drop prevention mechanism for preventing the weight from falling. The fall prevention mechanism is fixed to a rack 14 having a gear portion 14a fixed to the side surface of the pressure shaft 10 as shown in the drawing, and is fixed to the upper surface of the support base 9 using a bracket. And a torque limiter 13 in which a gear portion 13a meshing with 14a is fixed to a rotating shaft. In this manner, by engaging the gear portion 13a of the torque limiter 13 with the gear portion 14a of the rack 14, the rotational load of the torque limiter 13 can be transmitted to the rack 14, so that the pressing shaft 10 The pressure shaft 10 is prevented from dropping and can be stopped at an arbitrary position.
[0022]
A contact member 15a is provided at an upper end of the pressure shaft 10, and a first lever member 15 serving as one grip portion is fixed to the contact member 15a. A second lever member 17 is provided on the first lever 15 so as to be rotatable around a rotation shaft 16, and one end forms the other grip portion. At the other end of the second lever member 17, a locking portion 17b and a shape portion 17a are formed as shown in the figure. To position.
[0023]
Next, a linear guide 8 that guides the base 18 of the urging shaft 27 so as to be able to move up and down in the direction of the arrow is fixed to the side surface of the sub base 7. An overhang portion 20 is fixed to the base 18. A rack 19 is fixed to a base 18 which can be moved up and down by a linear guide 8 fixed to the sub base 7. A gear 21 integrally provided with a worm wheel and a pinion meshes with the rack 19. By driving this gear 21 by a stepping motor 22 having a worm 22a fixed to its output shaft, a second drive means for vertically driving the urging shaft 27 between the upper sensor 23 and the lower sensor 24 is provided. Make up. By this worm gear drive, a large reduction ratio can be obtained, so that a small motor can be used, and a braking force is generated due to a meshing state peculiar to the worm gear, so that the worm gear can be prevented from moving downward by its own weight. I have to.
[0024]
Next, referring to FIG. 2A which is a partially enlarged view of FIG. 1, the end of the overhang portion 20 is moved up and down so as to coincide with the center axis CL1 of the pressure shaft 10. While being guided, a locking shaft 33 of the locking portion 17b is provided, and a block 25 to which the urging shaft 27 is fixed is provided with a compression coil spring 28 interposed therebetween. It is provided in. The block 25 is provided with a lock member 30 rotatably provided around a rotation shaft 29.
[0025]
A roller 31 is rotatably provided at a lower end of the lock member 30, and this roller 31 is in contact with the upper surface of the contact member 15a. Thus, the pressing force from the urging shaft 27 is transmitted to the jig 40 via the lock member 30 and the pressing shaft 10.
[0026]
The lock member 30 is rotatable between a pressing position shown in the drawing and a retracted position rotated rightward in the figure around the rotation shaft 29, and when the optical fiber connector 1 is replaced, the pressing shaft 10 is retracted upward. When it moves to the position, it will rotate to the retracted position.
[0027]
On the other hand, the roller 31 is biased by the torsion spring 32 toward the shape portion 17a, and the rotation center of the rotation shaft 29 of the lock member 30 and the rotation of the roller 31 as shown in FIG. The central axis CL2 connecting the rotation center of the dynamic shaft 31a is configured to be able to contact and stop the abutting member 15a in a state in which the central axis CL2 is further inclined by an angle θ1 from the central axis CL1 toward the shape portion 17a.
[0028]
With the above configuration, when the overhang portion 20 is driven downward in the direction of the arrow in accordance with the energization of the stepping motor 22, the pressing force on the pressing shaft 10 due to the displacement of the center axis causes the compression of the compression spring 28 to be reduced. The force is transmitted via the force, and a predetermined pressing force can be applied to the jig 40.
[0029]
Here, the overhang portion 20 is provided with a sensor 35 as a detecting means. The sensor 35 is a photo sensor, and detects the position of the lock member 30 in a non-contact manner by detecting the passage of the shielding plate 34 fixed to the block 25 (see FIG. 2B). That is, in the present embodiment, instead of directly measuring the pressing force on the optical fiber connector 1 by the pressure sensor, the amount of movement is calculated by detecting the position of the lock member 30 and the pressing force on the optical fiber connector 1 is measured. Things.
[0030]
More specifically, in the case of the present embodiment, when the lock member 30 is at the position where the pressing force is 0 (the position where the compression coil spring 28 has the natural length), the sensor 35 is turned on (or off; the same applies hereinafter). The sensor 35 and the shielding plate 34 are arranged. Then, starting from the detection of this position by the sensor 35, the amount of movement of the lock member 30, in other words, the pressing force on the optical fiber connector 1 is calculated based on the rotation angle of the stepping motor 22. This is based on the fact that the amount of movement of the lock member 30 and the pressing force on the optical fiber connector 1 are substantially proportional.
[0031]
By adopting such a non-contact position detection configuration, a pressure sensor becomes unnecessary in the first place, and the damage which has conventionally been a problem can be prevented. The sensor 35 does not necessarily need to be a photo sensor, and may be any sensor that can detect the moving position of the pressing unit such as the lock member 30 and the pressing shaft 10 in a non-contact manner.
[0032]
Again, in FIG. 1, two points are formed on the main base 3 so as to cover the pressing mechanism and expose only the gripping portions of the first lever member 15 and the second lever member 17 to the outside. A cover 60 indicated by a chain line is fixed. Further, a hook portion 38 for holding the cable portion of the optical fiber connector in a bundled state is fixed to the upper surface of the cover 60 so as not to disturb the operation.
[0033]
In the above configuration, the pressing force can be applied to the jig 40 in a state where the roller 31 is positioned so that the rotation center of the roller 31 and the center axis of the pressure shaft 10 coincide with each other.
[0034]
Next, a configuration of the jig 40 will be described with reference to a cross-sectional view of a main part of the jig 40 shown in FIG. In the figure, the same reference numerals are given to the components already described and the description thereof is omitted. The jig 40 is formed of a hexagonal jig base 41, and six jigs are provided on each of the six side surfaces. The optical fiber connector 1 is configured to be detachably held.
[0035]
The pivot bearing 44 is fixed to the center of the jig base 41. On the other hand, the groove member 42 inserted into the shaft body 12 for rotation prevention as described above is formed of two parts, and is fixed on the jig base 41 so that the groove is located in the radial direction. I have.
[0036]
According to the jig 40 configured as described above, the polishing ability is six times that of the case where only one jig is held. Here, if the jig base 41 is formed as more polygons, the capability is further improved. Therefore, it is preferable to further increase the diameter of the polishing table according to the polygons.
[0037]
A reference member 43 for preventing excessive polishing is fixed to a surface of the jig base 41 opposite to the polishing table 6 on the back side. A polishing surface 43a is formed on the reference member 43 as shown in the figure. When the polishing surface 43a is polished by the polishing table 6, a sound is generated to prevent further polishing. I have to.
[0038]
Further, referring to the external perspective view of the jig in FIG. 4, a holder member 47 is fixed to the side surface of the jig base 41 with screws 50, 50. The holder member 47 has left and right flange portions 47f, 47f and a guide portion 47c integrally formed as shown in the figure, and further incorporates a moving block 48 movably in the arrow direction.
[0039]
The moving block 48 is moved by rotation of a screw 49 screwed into a screw hole 47a of the holder member 47. The moving block 48 suppresses the flange portion 83b of the male connector 83 of the optical fiber connector 1 by using a contact portion having a chamfered portion 48a as shown in the figure. After the optical fiber connector 1 is set in the groove portion 41a, the ferrule is turned off. The end portion 83a, which is the surface to be polished, which is made up of an optical fiber and an optical fiber, can be held immovably.
[0040]
Further, a concave portion 46a is formed in the spring plate 46 so as not to mechanically interfere with the cable 2. Further, a U-shaped groove portion 47b is formed in the holder member 47. When one screw 50 is fixed and the other screw 50 is loosened, the holder member 47 is turned as shown in the figure to make the setting of the optical fiber connector 1 easier. To be able to.
[0041]
Next, FIG. 5A is a block diagram of the polishing apparatus 5, and FIG. 5B is a table showing the contents stored in the storage unit connected to the control unit in the block diagram of FIG. 5A. is there.
[0042]
First, in FIG. 5A, a one-chip microprocessor is used for the control unit 77 as a control unit, and operates by receiving a predetermined voltage supplied from a power supply unit 80. The control unit 77 is connected to the operation panel 71 and performs polishing according to an operation described later. The storage unit 76 is further connected to the control unit 77. The storage unit 76 stores a large number of time tables shown in FIG. 5B, and can automatically switch to an optimal time table in accordance with initial conditions set using the operation panel 71. Is configured.
[0043]
On the other hand, a motor driver 72 connected to the control unit 77 is connected to the stepping motor 22, and an instruction from the control unit 77 is supplied to the stepping motor 22 via the motor driver 72 so as to be forward and reverse. Is driven for a predetermined step.
[0044]
Further, the sensor 35 has a built-in amplifier for amplifying the output obtained by passing through the shielding plate 34, and converts the output into a digital output value before sending it to the control unit 77. A motor driver 75 connected to the control unit 77 is connected to the servomotor 70. The servo table 70 is supplied with an instruction from the control unit 77 via the motor driver 75 to control the polishing table 6 in a predetermined manner. It is designed to rotate at a rotational speed of. A tachometer 79 is fixed to the output shaft of the servomotor 70, and closed loop control of the servomotor 70 is performed by sending an output from the tachometer 79 to the control unit 77.
[0045]
If a stepping motor is used as the servo motor 70, the tachometer 79 becomes unnecessary, and it goes without saying that open loop control based on an instruction from the control unit 77 becomes possible.
[0046]
5B, the horizontal axis represents the time axis, and the vertical axis represents the rotation speed of the polishing table 6 driven by the servomotor 70 and the pressing force applied by energizing the stepping motor 22. The rotation speed curve A is shown by a broken line, and the pressing force curve B is shown by a solid line.
[0047]
Further, the inclination angle of the rotation speed curve A is shown as acceleration, and the inclination angle of the pressing force curve B is shown as acceleration, and is set to increase or decrease as time passes as shown in the figure.
[0048]
More specifically, in the first polishing stage, each of the curves A and B is increased almost linearly from zero, and when the first polishing is completed, each of the curves A and B becomes flat as shown in the drawing, and when the end is approached, each of the curves A and B is increased. A and B are gradually lowered as shown in the figure to prepare for finish polishing, and the curves A and B are lowered as shown until the end time in the finish polishing is reached. Becomes zero.
[0049]
By performing the polishing based on the time table described above, unattended automatic operation becomes possible. Further, when the maximum of six optical fiber connectors 1 are simultaneously polished as described above, it is possible to prevent the damage caused by the variation in the polishing amount.
[0050]
The reason for setting the curves A and B in this manner will be described below.
[0051]
FIGS. 6A and 6B are views showing a state in which the jig 40 holding the optical fiber connector 1 is placed on the polishing table 6, wherein FIG. 6A shows a state before polishing and FIG. Is shown.
[0052]
As shown in FIG. 6 (a), before polishing, the end 83a which is the surface to be polished of the ferrule and the optical fiber is not constant. That is, while one optical fiber connector 1 is in contact with the polishing surface 6a of the polishing table 6 as shown in the drawing, the end 83a of the other optical fiber connector 1 is separated from the polishing surface 6a of the polishing table 6 by the gap G. May be. Further, the shape of the end portion 83a is various, such as being inclined or circular.
[0053]
Therefore, from this initial state, even if the pressing force and the rotation speed are small, if the polishing is suddenly performed, the optical fiber connector 1 is in a state of being in contact with the polishing surface 6a of the polishing table 6. Intensive polishing is performed only on the edges. Therefore, in the worst case, it will be damaged. For this reason, conventionally, from the experience of the operator, the pressing force and the rotation speed are gradually increased by manual operation to perform the polishing, and finally, as shown in FIG. Polishing was performed so that 83a could be aligned. Therefore, it has been considered that the worker cannot leave the polishing apparatus from the initial stage to the end stage of the polishing apparatus and cannot perform other operations.
[0054]
However, according to the polishing apparatus of the present embodiment, since the automatic operation can be performed from the initial stage to the end stage, the operation will be described based on the flowchart of the operation description in FIGS.
[0055]
FIG. 7 is a flowchart for explaining the operation up to the preparation for polishing. First, when the preparation is started and the worker finishes the connection to the power supply or the like, at step S1, at least four or at most six optical fiber connectors 1 are held at positions facing the jig 40. Subsequently, after the pair of lever members are gripped and the pressing unit is moved upward, the jig 40 is set on the polishing table 6 in step S3, and then the second pressing of the pressing unit is performed in step S4. By lowering the member 10, it becomes as shown in FIG.
[0056]
Next, by setting the pressing force and the rotation speed from the operation panel 71, the time table is automatically selected. Subsequently, when a predetermined switch on the operation panel 71 is pressed, the process proceeds to step S7, and the power is supplied to the stepping motor 22, so that the block 25 is lowered, and the shield plate 34 fixed to the block 25 is used. The detection by the sensor 35 is performed in step S8. Then, in step S9, it is determined whether or not the sensor 35 is turned on. If it is determined that the sensor 35 is turned on, the process proceeds to step S10, in which the power supply to the stepping motor 22 is temporarily stopped. Thus, preparation for pressing is completed.
[0057]
Next, in the flowchart for explaining the operation for the pressure polishing shown in FIG. 8, in step S11, the servo motor 70 for driving the polishing table is started, and the rotation by the curve A shown in FIG. 5B is started. You. Subsequently, in step S12, the application of the pressing force according to the curve B shown in FIG. 5B is started by energizing the stepping motor 22, and the energization in the predetermined step is performed in step S13 to determine each time a predetermined time elapses. Done. As a result, in step S14, the pressing force is applied to the jig as the compression coil spring 28 is compressed. When the finish polishing is performed, the power supply to the stepping motor 22 is stopped in step S15, and the polishing is completed.
[0058]
Thereafter, the stepping motor 22 is energized, and the overhang portion 20 is raised, so that the jig 40 can be taken out and automatically stopped, and an alarm is given to the operator to finish polishing. To inform. Subsequently, the operator takes out the jig 40 and ends the work by removing the polished optical fiber connector.
[0059]
As described above, after detecting the initial position with the shielding plate 34 passing through the sensor 35, by controlling the stepping motor 22 in accordance with the time table, it is possible to obtain a suitable pressing force by the non-contact sensor without directly measuring the pressing force. Polishing can be realized, and a pressure sensor can be eliminated. That is, since the pressure sensor is easily damaged due to the impact force, the pressure sensor is operated even if the pressing unit operated by the operator is suddenly moved from the polishing position to the retracted position for jig replacement. Will not be damaged. For this reason, durability at the time of jig replacement work can be significantly improved.
[0060]
<Second embodiment>
Next, a polishing apparatus according to a second embodiment of the present invention will be described. In the present embodiment, the pressing force on the optical fiber connector 1 is measured using a pressure sensor, but a mechanism for preventing the damage is provided.
[0061]
FIG. 9 is a schematic configuration diagram of a part of the polishing apparatus according to the second embodiment cut away and viewed from the side. In this figure, the same reference numerals are given to the components already described, and the description is omitted. The first lever member 15 is provided with one end of the contact member 234 so as to be rotatable. A pressure sensor 235 is provided on the bottom surface of the contact member 234. The pressure sensor 235 is fixed on a member 239 extending from the second pressing member 10.
[0062]
The contact surface 234a of the contact member 234 has a horizontal surface so that the pressing direction of the pressing unit is vertical while the lock member 30 as the first pressing member is easily rotated from the pressing position to the retracted position. The angle θ2 is tilted so as to descend further.
[0063]
FIGS. 10A and 10B are operation explanatory views showing a state in which the pressing unit is moved to replace the jig 40. FIG. 10A shows an initial stage, and FIG. 10B shows a state moved to a standby position. In the drawing, the same reference numerals are given to the components already described and the description is omitted. First, in FIG. 10A, predetermined polishing is completed in the state shown in FIG. When the switch on the operation panel 71 is pressed to replace the tool 40, the overhang portion 20 is moved upward by the energization of the stepping motor 22 and stopped.
[0064]
Following this, first, by gripping the second lever member 17 and the first lever member 15 as illustrated, the shape portion 17a of the second lever member 17 is rotated in the direction of the arrow, As a result, the central axis CL2 of the lock member 30 is displaced outside the central axis CL1 of the pressing shaft 10 as a result of the roller 31 having been in contact as described above being moved in the direction of the arrow.
[0065]
Subsequently, as shown in FIG. 10B, the user moves upward while maintaining the gripping state. Then, the roller 31 rotatably provided at the end of the lock member 30 is moved while rotating on the first lever member 15 against the urging force of the torsion spring 32. At this time, the contact member 234 Since the contact surface 234a is inclined, the lock member 30 can be moved without difficulty, so that no impact force acts on the pressure sensor 235. Further, even when the gripping state is released halfway during the upward movement, the torque limiter 13 can prevent the self-weight drop. When moved upward as described above, the locking shaft 33 of the block 25 is brought into a position where the locking portion 17b of the second lever member 17 can be locked with the locking shaft 33 as shown in the figure.
[0066]
Thereafter, when the grip of the second lever member 17 is released to replace the jig, the locking portion 17b is locked to the locking shaft 33. As described above, the pressing shaft 10 is held at the standby position, so that the jig 40 can be replaced.
[0067]
After the jig 40 is replaced, the jig 40 is gripped as shown in FIG. 10B, moved downward as it is, and the tip of the pressing shaft 10 is inserted into the pivot bearing of the jig 40. The state shown in FIG. 1A is changed to the state shown in FIG. In this manner, the jig replacement operation can be easily performed by anyone, not only a skilled person.
[0068]
In addition, the present embodiment has an advantage of not only preventing the pressure sensor 235 from being damaged but also improving the operability when replacing the optical fiber connector 1. Therefore, in the configuration of the first embodiment described above, a configuration in which the contact surface (upper surface) of the contact member 15a is inclined like the contact surface 234a of the contact member 234 of the second embodiment is also adopted. Can be. In addition, although an example in which an optical fiber connector is used as an object to be polished has been described above, it is needless to say that the polishing can be appropriately performed by exchanging the jig 40 for polishing an optical element, a semiconductor wafer, or the like.
[0069]
【The invention's effect】
As described above, according to the present invention, it is possible to provide a polishing apparatus that can prevent damage to sensors and the like.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram in which main parts of a polishing apparatus according to a first embodiment are cut away.
2A is a partially enlarged view of the polishing apparatus of FIG. 1, and FIG. 2B is an external perspective view of a sensor and an actuator.
FIG. 3 is a diagram showing a state of jig replacement.
FIG. 4 is an external perspective view showing a part of the jig 40.
FIG. 5A is a block diagram of the polishing apparatus, and FIG. 5B is a diagram showing the stored contents of a time table in a storage unit connected to the control unit in the block diagram of FIG.
FIGS. 6A and 6B are views showing a state in which a jig 40 holding the optical fiber connector 1 is placed on a polishing table 6, wherein FIG. 6A shows a state before polishing and FIG. Is shown.
FIG. 7 is a flowchart illustrating an operation up to preparation for polishing.
FIG. 8 is a flowchart illustrating a polishing operation of the polishing apparatus.
FIG. 9 is a schematic configuration diagram illustrating a part of a polishing apparatus according to a second embodiment.
FIGS. 10A and 10B are operation explanatory views showing a state in which the pressing unit is moved upward for replacement of the jig 40, wherein FIG. 10A shows an initial stage, and FIG. It is a figure showing a situation.
FIG. 11 is a schematic configuration diagram of a conventional polishing apparatus.
[Explanation of symbols]
1 Optical fiber connector
3 base
5 Polishing device
6 polishing table
7 Sub-base
8 Linear guide
9 Support base
10 Pressing shaft (second pressing member)
11 Linear bush
12 anti-rotation shaft
13 Torque limiter
14 racks
15 First lever member
16 Rotation axis
17 Second lever member
18 Base
19 racks
20 Overhang
21 gear
22 Stepping motor (second driving means)
23 Upper sensor
24 Lower sensor
25 blocks
26 shaft
27 biasing axis
28 Compression coil spring
29 Rotation axis
30 Lock member (first pressing member)
31 rollers
32 torsion spring
33 Locking shaft
34 Shield plate
35 Sensor
38 Hook
40 jig
41 Jig base
42 groove member
43 Reference member
44 Pivot bearing
45 gripper
46 spring plate
47 Holder member
48 Moving Block
49, 50 screws
60 cover
70 Servo motor (first drive means)
71 Operation panel
83a end (polished surface)
234 contact member
234a contact surface

Claims (6)

A polishing table,
First driving means for rotating and driving the polishing table;
A pressing unit for pressing the object to be polished to the polishing table,
Second driving means for driving the pressing unit;
Detecting means for detecting the position of the pressing unit in a non-contact manner,
The polishing apparatus according to claim 2, wherein the second driving unit drives the pressing unit based on a movement amount detected by the detection unit. Furthermore,
A jig for supporting the object to be polished,
The polishing apparatus according to claim 1, wherein the pressing unit presses the object to be polished to the polishing table via the jig. The pressing unit,
A first pressing member rotatably provided between a pressing position and a retracted position for exchanging the object to be polished,
A second pressing member provided between the first pressing member and the jig, and movably provided in a pressing direction between a pressing position and a retracted position for exchanging the object to be polished; Including
The second pressing member,
An end of the first pressing member abuts, a pressing force from the first pressing member is urged, and a contact member having a contact surface for guiding rotation of the first pressing member is provided. ,
The polishing apparatus according to claim 2, wherein the contact surface is inclined. A polishing table,
First driving means for rotating and driving the polishing table;
A jig for supporting the object to be polished,
Via the jig, a pressing unit for pressing the object to be polished to the polishing table,
A pressure sensor for detecting a pressing amount by the pressing unit,
A second driving unit that drives the pressing unit based on the pressing amount detected by the pressure sensor,
The pressing unit,
A first pressing member rotatably provided between a pressing position and a retracted position for exchanging the object to be polished,
A second pressing member provided between the first pressing member and the jig, and movably provided in a pressing direction between a pressing position and a retracted position for exchanging the object to be polished; Including
The second pressing member,
An end of the first pressing member abuts, a pressing force from the first pressing member is urged, and a contact member having a contact surface for guiding rotation of the first pressing member is provided. ,
The pressure sensor is arranged to be pressed by the contact member,
The polishing apparatus according to claim 1, wherein the contact surface is inclined. The contact surface is
The polishing apparatus according to claim 4, wherein when the second pressing member is moved to the retracted position, the first pressing member is inclined so as to rotate from the pressed position to the retracted position. apparatus. The pressing direction of the pressing unit is a vertical direction,
The contact surface is
5. The polishing apparatus according to claim 4, wherein in the rotation direction of the first pressing member, the polishing apparatus is inclined downward from a horizontal plane in a direction from the pressing position to the retreat position. 6.

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