JP2004006752A5 - - Google Patents

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JP2004006752A5
JP2004006752A5 JP2003085249A JP2003085249A JP2004006752A5 JP 2004006752 A5 JP2004006752 A5 JP 2004006752A5 JP 2003085249 A JP2003085249 A JP 2003085249A JP 2003085249 A JP2003085249 A JP 2003085249A JP 2004006752 A5 JP2004006752 A5 JP 2004006752A5
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magnetic sensor
magnetoresistive
layer
disposed
magnetoresistive effect
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JP2003085249A
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JP2004006752A (en
JP4085859B2 (en
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Claims (8)

異なる感度方向をもつ同一の３個以上の磁気抵抗効果素子と、前記磁気抵抗効果素子が配設される単一基板と、前記磁気抵抗効果素子を構成する磁気抵抗効果膜の磁化の向きが、互いに三次元方向に交差するように形成されたことを特徴とする磁気センサ。 The same three or more magnetoresistive effect elements having different sensitivity directions, a single substrate on which the magnetoresistive effect element is disposed, and the magnetization direction of the magnetoresistive effect film constituting the magnetoresistive effect element are: A magnetic sensor formed so as to cross each other in a three-dimensional direction. 前記単一基板は少なくとも１つの斜面を有し、前記斜面上に少なくとも１個の磁気抵抗効果素子が配置されていることを特徴とする請求項１に記載の磁気センサ。The magnetic sensor according to claim 1, wherein the single substrate has at least one inclined surface, and at least one magnetoresistive element is disposed on the inclined surface. 前記磁気抵抗効果素子はピンド層とフリー層を含んでなる磁気抵抗効果素子であって、前記ピンド層の磁化の向きが互いに三次元方向に交差するように形成されたことを特徴とする請求項１に記載の磁気センサ。The magnetoresistive effect element is a magnetoresistive effect element including a pinned layer and a free layer, and is formed such that the magnetization directions of the pinned layer intersect each other in a three-dimensional direction. The magnetic sensor according to 1. 請求項１記載の磁気センサにおいて、
前記単一の基板は少なくとも１の斜面を有する溝を備え、当該溝の内部に、前記３個以上の磁気抵抗効果素子のうち、少なくとも１個が配置されていることを特徴とする磁気センサ。The magnetic sensor according to claim 1,
The single sensor includes a groove having at least one inclined surface, and at least one of the three or more magnetoresistive elements is disposed in the groove. 複数の帯状部と該複数の帯状部のうち隣接する２つを接続するバイアス磁石とからなる３個以上の磁気抵抗効果素子と、該磁気抵抗効果素子が配設される単一基板とを備えた磁気センサであって、
前記３個以上の磁気抵抗効果素子のうち少なくとも１個は、前記複数の帯状部が前記単一基板に互いに隣り合って平行に形成された複数の楔型溝の斜面上に配置されたものであることを特徴とする磁気センサ。3 or more magnetoresistive elements each including a plurality of strips and a bias magnet connecting two adjacent ones of the strips, and a single substrate on which the magnetoresistive elements are disposed. Magnetic sensor,
At least one of the three or more magnetoresistive elements is arranged on the slopes of a plurality of wedge-shaped grooves in which the plurality of strips are formed adjacent to and parallel to the single substrate. There is a magnetic sensor. 請求項４記載の磁気センサにおいて、
前記複数の帯状部のうち隣接する２つの帯状部は、前記楔型溝の対向する２つの斜面上にそれぞれ配置されたことを特徴とする磁気抵抗効果素子。The magnetic sensor according to claim 4 , wherein
Two adjacent strip-shaped portions among the plurality of strip-shaped portions are respectively disposed on two opposing inclined surfaces of the wedge-shaped groove. 請求項１ないし６のいずれかに記載の磁気センサにおいて、
前記磁気抵抗効果素子の抵抗値の出力結果を加減演算することにより、三次元方向の出力結果を得ることを特徴とする磁気センサ。The magnetic sensor according to any one of claims 1 to 6 ,
A magnetic sensor characterized in that an output result in a three-dimensional direction is obtained by adding or subtracting the output result of the resistance value of the magnetoresistive element. 基板上に複数の楔型溝を形成する工程と、該複数の楔型溝の斜面上に、磁気抵抗効果素子のうち少なくとも１個の素子のピンド層となる磁性層を含む層を所定の形状に形成する工程と、該ピンド層となる磁性層を含む層を磁化して、該ピンド層の磁化の向きを固定する工程とを含むことを特徴とする磁気センサの製造方法。  A step of forming a plurality of wedge-shaped grooves on the substrate; and a layer including a magnetic layer serving as a pinned layer of at least one of the magnetoresistive elements on a slope of the plurality of wedge-shaped grooves. And a step of magnetizing a layer including the magnetic layer to be the pinned layer to fix the magnetization direction of the pinned layer.
JP2003085249A 2002-03-27 2003-03-26 Magnetic sensor and manufacturing method thereof Expired - Fee Related JP4085859B2 (en)

Priority Applications (1)

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JP2003085249A JP4085859B2 (en) 2002-03-27 2003-03-26 Magnetic sensor and manufacturing method thereof

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JP2002089328 2002-03-27
JP2003085249A JP4085859B2 (en) 2002-03-27 2003-03-26 Magnetic sensor and manufacturing method thereof

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JP2007113218A Division JP4896800B2 (en) 2002-03-27 2007-04-23 Magnetic sensor and manufacturing method thereof

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JP2004006752A JP2004006752A (en) 2004-01-08
JP2004006752A5 true JP2004006752A5 (en) 2005-06-23
JP4085859B2 JP4085859B2 (en) 2008-05-14

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