JP2004001198A - 超小型電子マシンデバイス用のフレクシュアおよび超小型電子マシンデバイス - Google Patents

超小型電子マシンデバイス用のフレクシュアおよび超小型電子マシンデバイス Download PDF

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Publication number
JP2004001198A
JP2004001198A JP2003100063A JP2003100063A JP2004001198A JP 2004001198 A JP2004001198 A JP 2004001198A JP 2003100063 A JP2003100063 A JP 2003100063A JP 2003100063 A JP2003100063 A JP 2003100063A JP 2004001198 A JP2004001198 A JP 2004001198A
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JP
Japan
Prior art keywords
flexure
actuator
longitudinal beam
rotor
force
Prior art date
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Pending
Application number
JP2003100063A
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English (en)
Japanese (ja)
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JP2004001198A5 (https=
Inventor
Thomas Wayne Ives
トーマス　ウェイン　アイブズ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of JP2004001198A publication Critical patent/JP2004001198A/ja
Publication of JP2004001198A5 publication Critical patent/JP2004001198A5/ja
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
    • B81B7/0012—Protection against reverse engineering, unauthorised use, use in unintended manner, wrong insertion or pin assignment

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Micromachines (AREA)
JP2003100063A 2002-04-18 2003-04-03 超小型電子マシンデバイス用のフレクシュアおよび超小型電子マシンデバイス Pending JP2004001198A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/124,888 US6798113B2 (en) 2002-04-18 2002-04-18 Flexure with integral electrostatic actuator

Publications (2)

Publication Number Publication Date
JP2004001198A true JP2004001198A (ja) 2004-01-08
JP2004001198A5 JP2004001198A5 (https=) 2006-05-18

Family

ID=28674701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003100063A Pending JP2004001198A (ja) 2002-04-18 2003-04-03 超小型電子マシンデバイス用のフレクシュアおよび超小型電子マシンデバイス

Country Status (4)

Country Link
US (1) US6798113B2 (https=)
EP (1) EP1354849B1 (https=)
JP (1) JP2004001198A (https=)
DE (1) DE60306243T2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7177068B2 (en) * 2002-12-20 2007-02-13 Robert Bosch Gmbh Apparatus, method and system for providing enhanced mechanical protection for thin beams
US7268463B2 (en) * 2005-07-28 2007-09-11 Freescale Semiconductor, Inc. Stress release mechanism in MEMS device and method of making same
JP4724505B2 (ja) * 2005-09-09 2011-07-13 株式会社日立製作所 超音波探触子およびその製造方法
JP4525656B2 (ja) * 2006-09-29 2010-08-18 セイコーエプソン株式会社 印刷装置
DE102016001414A1 (de) * 2016-01-29 2017-08-03 Sagross Designoffice Gmbh Anordnung und Verfahren zur veränderbaren Verformung von Handhabungsgeräten, Werkzeugen und anderen mechanischen Konstruktionen
US10291151B2 (en) * 2016-04-19 2019-05-14 Mems Start, Llc Flexure shear and strain actuator
US10958885B2 (en) 2016-08-26 2021-03-23 Mems Start, Llc Filtering imaging system including a light source to output an optical signal modulated with a code
US10368021B2 (en) 2016-08-26 2019-07-30 Mems Start, Llc Systems and methods for derivative sensing using filtering pixels

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4374402A (en) * 1980-06-27 1983-02-15 Burroughs Corporation Piezoelectric transducer mounting structure and associated techniques
JP3052469B2 (ja) * 1991-09-12 2000-06-12 富士電機株式会社 静電アクチュエータ
US5355712A (en) * 1991-09-13 1994-10-18 Lucas Novasensor Method and apparatus for thermally actuated self testing of silicon structures
US5179499A (en) * 1992-04-14 1993-01-12 Cornell Research Foundation, Inc. Multi-dimensional precision micro-actuator
US5563446A (en) 1994-01-25 1996-10-08 Lsi Logic Corporation Surface mount peripheral leaded and ball grid array package
US5920978A (en) * 1995-03-01 1999-07-13 Fujitsu Limited Method of making a thin film magnetic slider
JPH10109284A (ja) * 1996-10-03 1998-04-28 Denso Corp マイクロマニピュレータとその駆動方法
US6246552B1 (en) * 1996-10-31 2001-06-12 Tdk Corporation Read/write head including displacement generating means that elongates and contracts by inverse piezoelectric effect of electrostrictive effect
US5959516A (en) * 1998-01-08 1999-09-28 Rockwell Science Center, Llc Tunable-trimmable micro electro mechanical system (MEMS) capacitor
US6307298B1 (en) * 2000-03-20 2001-10-23 Motorola, Inc. Actuator and method of manufacture

Also Published As

Publication number Publication date
EP1354849A2 (en) 2003-10-22
EP1354849A3 (en) 2005-04-13
DE60306243T2 (de) 2007-03-08
EP1354849B1 (en) 2006-06-21
US20030197445A1 (en) 2003-10-23
DE60306243D1 (de) 2006-08-03
US6798113B2 (en) 2004-09-28

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