DE60306243D1 - Biegungselement mit integralem Aktor - Google Patents
Biegungselement mit integralem AktorInfo
- Publication number
- DE60306243D1 DE60306243D1 DE60306243T DE60306243T DE60306243D1 DE 60306243 D1 DE60306243 D1 DE 60306243D1 DE 60306243 T DE60306243 T DE 60306243T DE 60306243 T DE60306243 T DE 60306243T DE 60306243 D1 DE60306243 D1 DE 60306243D1
- Authority
- DE
- Germany
- Prior art keywords
- bending element
- integral actuator
- actuator
- integral
- bending
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
- B81B7/0012—Protection against reverse engineering, unauthorised use, use in unintended manner, wrong insertion or pin assignment
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Mechanical Engineering (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/124,888 US6798113B2 (en) | 2002-04-18 | 2002-04-18 | Flexure with integral electrostatic actuator |
US124888 | 2002-04-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60306243D1 true DE60306243D1 (de) | 2006-08-03 |
DE60306243T2 DE60306243T2 (de) | 2007-03-08 |
Family
ID=28674701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60306243T Expired - Lifetime DE60306243T2 (de) | 2002-04-18 | 2003-04-09 | Biegungselement mit integralem Aktor |
Country Status (4)
Country | Link |
---|---|
US (1) | US6798113B2 (de) |
EP (1) | EP1354849B1 (de) |
JP (1) | JP2004001198A (de) |
DE (1) | DE60306243T2 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7177068B2 (en) * | 2002-12-20 | 2007-02-13 | Robert Bosch Gmbh | Apparatus, method and system for providing enhanced mechanical protection for thin beams |
US7268463B2 (en) * | 2005-07-28 | 2007-09-11 | Freescale Semiconductor, Inc. | Stress release mechanism in MEMS device and method of making same |
JP4724505B2 (ja) * | 2005-09-09 | 2011-07-13 | 株式会社日立製作所 | 超音波探触子およびその製造方法 |
JP4525656B2 (ja) * | 2006-09-29 | 2010-08-18 | セイコーエプソン株式会社 | 印刷装置 |
DE102016001414A1 (de) * | 2016-01-29 | 2017-08-03 | Sagross Designoffice Gmbh | Anordnung und Verfahren zur veränderbaren Verformung von Handhabungsgeräten, Werkzeugen und anderen mechanischen Konstruktionen |
US10291151B2 (en) | 2016-04-19 | 2019-05-14 | Mems Start, Llc | Flexure shear and strain actuator |
US10368021B2 (en) | 2016-08-26 | 2019-07-30 | Mems Start, Llc | Systems and methods for derivative sensing using filtering pixels |
US10958885B2 (en) | 2016-08-26 | 2021-03-23 | Mems Start, Llc | Filtering imaging system including a light source to output an optical signal modulated with a code |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4374402A (en) * | 1980-06-27 | 1983-02-15 | Burroughs Corporation | Piezoelectric transducer mounting structure and associated techniques |
JP3052469B2 (ja) * | 1991-09-12 | 2000-06-12 | 富士電機株式会社 | 静電アクチュエータ |
US5355712A (en) * | 1991-09-13 | 1994-10-18 | Lucas Novasensor | Method and apparatus for thermally actuated self testing of silicon structures |
US5179499A (en) * | 1992-04-14 | 1993-01-12 | Cornell Research Foundation, Inc. | Multi-dimensional precision micro-actuator |
US5563446A (en) * | 1994-01-25 | 1996-10-08 | Lsi Logic Corporation | Surface mount peripheral leaded and ball grid array package |
US5920978A (en) * | 1995-03-01 | 1999-07-13 | Fujitsu Limited | Method of making a thin film magnetic slider |
JPH10109284A (ja) * | 1996-10-03 | 1998-04-28 | Denso Corp | マイクロマニピュレータとその駆動方法 |
WO1998019304A1 (fr) * | 1996-10-31 | 1998-05-07 | Tdk Corporation | Tete d'enregistrement/reproduction, mecanisme de positionnement de tete d'enregistrement/reproduction et dispositif d'enregistrement/reproduction |
US5959516A (en) * | 1998-01-08 | 1999-09-28 | Rockwell Science Center, Llc | Tunable-trimmable micro electro mechanical system (MEMS) capacitor |
US6307298B1 (en) * | 2000-03-20 | 2001-10-23 | Motorola, Inc. | Actuator and method of manufacture |
-
2002
- 2002-04-18 US US10/124,888 patent/US6798113B2/en not_active Expired - Fee Related
-
2003
- 2003-04-03 JP JP2003100063A patent/JP2004001198A/ja active Pending
- 2003-04-09 DE DE60306243T patent/DE60306243T2/de not_active Expired - Lifetime
- 2003-04-09 EP EP03252254A patent/EP1354849B1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE60306243T2 (de) | 2007-03-08 |
EP1354849A3 (de) | 2005-04-13 |
EP1354849B1 (de) | 2006-06-21 |
EP1354849A2 (de) | 2003-10-22 |
US20030197445A1 (en) | 2003-10-23 |
JP2004001198A (ja) | 2004-01-08 |
US6798113B2 (en) | 2004-09-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE |
|
8364 | No opposition during term of opposition |